EP1078166B1 - Friction vacuum pump with a stator and a rotor - Google Patents

Friction vacuum pump with a stator and a rotor Download PDF

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Publication number
EP1078166B1
EP1078166B1 EP98946450A EP98946450A EP1078166B1 EP 1078166 B1 EP1078166 B1 EP 1078166B1 EP 98946450 A EP98946450 A EP 98946450A EP 98946450 A EP98946450 A EP 98946450A EP 1078166 B1 EP1078166 B1 EP 1078166B1
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EP
European Patent Office
Prior art keywords
rotor
vacuum pump
pump
friction vacuum
stages
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EP98946450A
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German (de)
French (fr)
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EP1078166B2 (en
EP1078166A1 (en
Inventor
Christian Beyer
Ralf Adamietz
Markus Henry
Günter Schütz
Heinrich Engländer
Gerhard Wilhelm Walter
Hans-Rudolf Fischer
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Leybold GmbH
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Leybold Vakuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump with the features of the preamble of the claim 1.
  • DE-A-43 31 589 discloses using only one vacuum pump system the various from the corpuscular blasting machine generate required pressures.
  • the pump system includes two turbomolecular and one molecular (Holweck) pump stage. These pumping stages are axially one behind the other arranged. Each pump stage has a gas inlet (front gas passage surface) on the connection means with the associated chamber of the evacuated Device is connected.
  • connection means serve in the solution according to DE-A-34 31 589 Housing itself and an additional housing arranged on the side. The housing itself is located on the front Connection opening for connecting the gas inlet the first pump stage with the one to be evacuated Facility equipped. There are connecting cables in the additional housing provided the associated inlets the further pump stages with further connection openings connect.
  • connection openings in the additional housing with the connection opening of the first pump stage in one common plane perpendicular to the rotor axis
  • the connecting cables in the additional housing be relatively long. This results in relative large conductance losses in the connecting lines, which is particularly disadvantageous when Area of an intermediate connection has a high pumping speed is desired.
  • the state of the art also includes the content of Documents DE 18 09 102 A1, US 31 89 264 A and US 36 28 894 A. Turbomolecular and molecular pumps are disclosed with only one connection opening on the suction side.
  • the present invention is based on the object a friction vacuum pump of the type mentioned above to shape that the pumping speed of the intermediate stages not due to high conductance losses in connecting lines is impaired.
  • the implementation of the measures according to the invention has this means that the gases to be pumped in the inlet area the first pump stage, i.e. exactly where the Pressure is lowest, must be redirected.
  • the resulting loss of conductance can be kept small because the distance between the gas inlet and the level of the port opening is still relative is small and also in this area of choice larger diameter nothing stands in the way.
  • particularly high pumping speeds in the area of the inlet of the first (high vacuum side) pump stage not required become. Often there is even a need for this Throttling pumping speed at this point.
  • the main purpose of the first pump stage is to ensure a high compression ratio.
  • the for the first pump stage selected blade properties must take this function into account.
  • Essential is a separation of the two working pressure ranges of the two pump stages.
  • a high pumping speed is usually only at the intermediate entrance (s) desired. This goal can also be chosen special blade geometries can be achieved.
  • Accessibility is essential for the pumping speed of a pump stage of the gas molecules to the gas inlet (effective gas passage area) prevail.
  • it is known at an intermediate stage between the previous stage and its gas inlet one provide a larger distance. It is particularly advantageous it if this distance is at least a quarter, preferably one third of the diameter of the rotor.
  • the pump itself is 1, its housing with 2, their stator system with 3 and their rotor system designated with 4.
  • the shaft 5 belongs to the rotor system, which in turn are on the bearings 6, 7 in the bearing housing 8, connected to the pump housing 2, supports.
  • In the bearing housing there is also the drive motor 9, 10.
  • the axis of rotation of the rotor system 4 is 15 designated.
  • a total of three pump stages 12, 13, 14 are provided, two of which (12, 13) as turbomolecular vacuum pump stages and a (14) as a molecular (Holweck) pumping stage are trained.
  • (12, 13) as turbomolecular vacuum pump stages
  • (14) as a molecular (Holweck) pumping stage
  • the first pump stage 12 is located on the high vacuum side from four pairs of rotor blade rows 21 and Stator blade rows 22. Your inlet, the effective gas passage area, is designated 23. To the first Pump stage 12 is followed by second pump stage 13, that of three pairs of one stator blade row 22 each and a rotor blade row 21. Your entry is designated 28.
  • the second pump stage 13 is from the first pump stage 12 spaced.
  • the selected distance (height) a secures the free accessibility of the gas molecules to be conveyed to the gas inlet 28.
  • the distance a is expediently greater than a quarter, preferably greater than a third the diameter of the rotor system 4.
  • the subsequent Holweck pump includes one rotating cylinder section 29, the outside and inside in a known manner, each with a thread groove 30, 31 equipped stator elements 32, 33 face each other.
  • the rotor-side parts of the pump stages 12, 13, 14 form a unit that is ready for use with the Wave 5 is connected.
  • a central bore 25 so that no immediate Connection between the storage room and the intermediate space exists and thus the risk of back diffusion of Lubricant vapors are eliminated.
  • This serves the purpose also the flying bearing of the rotor system 4.
  • the back diffusion of lubricant vapors can also be done by using magnetic bearings avoided, which are arranged in a more convenient place can be.
  • connection means serves the housing 2 itself. It is in the embodiment formed in such a way that the Levels of all connection openings 36, 37 parallel to the rotor axis 15. This is special the distance of the connection 37 to the associated gas inlet 28 very small, so the pumping speed of the pump stage 13 impairing conductance losses negligible are. This would also apply to any other intermediate connection apply to the downstream of the intermediate connection 37/28. Otherwise exceeds the diameter of the connection opening 37 around the height a about double. This measure also serves the reduction the conductance losses between inlet 28 and Connection opening 37.
  • the pump 1 shown and its pump-effective elements are expediently designed such that a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and in the area of the connection opening 36 A pressure of approximately 10 -2 to 10 -4 mbar is generated in the area of the connection opening 37.
  • the second pumping stage is intended to generate a high pumping speed (eg 200 l / s).
  • the subsequent two-stage Holweck pump stage (29, 30; 29, 31) ensures high fore-vacuum resistance, so that the pumping speed of the second pump stage is usually independent of the fore-vacuum pressure.
  • the embodiment of Figure 2 differs from the embodiment of Figure 1 in that the Diameter of those following the first pump stage 12 Pump stages 13 and 14 are larger than the diameter the pump stage 12. This fact is the level of Connection openings 36, 37 adapted. It is like that Axis 15 of the rotor 4 inclined that the distance between the connection openings 36, 37 to the associated gas inlets 23, 28 is as small as possible. The angle of inclination a the Level of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pump stages. This allows optimally favorable spacing ratios can be achieved. In the illustrated embodiment the angle of inclination is about 5 °.

Description

Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a friction vacuum pump with the features of the preamble of the claim 1.

Aus der DE-A-43 31 589 (korrespondierende Dokumente: EP 603 694 A1 und US 57 33 104 A) ist eine Reibungsvakuumpumpe dieser Art bekannt. Sie dient vorzugsweise der Evakuierung von Korpuskular-Strahlgeräten (z.B. Massenspektrometern) mit durch Blenden voneinander.getrennten Kammern, in denen während des Betriebs des Korpuskular-Strahlgerätes unterschiedliche Drücke herrschen sollen. Es ist an sich bekannt, zur Erzeugung dieser Drücke separate Vakuumpumpen zu verwenden.From DE-A-43 31 589 (corresponding documents: EP 603 694 A1 and US 57 33 104 A) is a friction vacuum pump known of this kind. It preferably serves the Evacuation of corpuscular beam devices (e.g. mass spectrometers) with separated from each other by panels Chambers in which the Corpuscular blasting device different pressures prevail should. It is known per se for generation of these pressures to use separate vacuum pumps.

Die DE-A-43 31 589 offenbart, mit Hilfe nur eines Vakuumpumpsystems die verschiedenen vom Korpuskular-Strahlgerät benötigten Drücke zu erzeugen. Das Pumpsystem umfasst zwei Turbomolekular- und eine Molekular(Holweck)-Pumpstufe. Diese Pumpstufen sind axial hintereinander angeordnet. Jede Pumpstufe weist einen Gaseinlass (stirnseitige Gasdurchtrittsfläche) auf, der über Anschlussmittel mit der zugehörigen Kammer der zu evakuierenden Einrichtung verbunden wird. Als Anschlussmittel dienen bei der Lösung nach der DE-A-34 31 589 das Gehäuse selbst und ein seitlich angeordnetes Zusatzgehäuse. Das Gehäuse selbst ist mit einer stirnseitig gelegenen Anschlussöffnung für die Verbindung des Gaseinlasses der ersten Pumpstufe mit der zu evakuierenden Einrichtung ausgerüstet. Im Zusatzgehäuse sind Verbindungsleitungen vorgesehen, die die zugehörigen Einlässe der weiteren Pumpstufen mit weiteren Anschlussöffnungen verbinden. Diese werden ihrerseits jeweils mit den zugehörigen Kammern in der zu evakuierenden Einrichtung verbunden. Da die Anschlussöffnungen im Zusatzgehäuse mit der Anschlussöffnung der ersten Pumpstufe in einer gemeinsamen Ebene (senkrecht zur Rotorachse) liegen, müssen die im Zusatzgehäuse befindlichen Verbindungsleitungen relativ lang sein. Dadurch ergeben sich relativ große Leitwertverluste in den Verbindungsleitungen, was insbesondere dann von Nachteil ist, wenn gerade im Bereich eines Zwischenanschlusses ein hohes Saugvermögen erwünscht ist.DE-A-43 31 589 discloses using only one vacuum pump system the various from the corpuscular blasting machine generate required pressures. The pump system includes two turbomolecular and one molecular (Holweck) pump stage. These pumping stages are axially one behind the other arranged. Each pump stage has a gas inlet (front gas passage surface) on the connection means with the associated chamber of the evacuated Device is connected. As connection means serve in the solution according to DE-A-34 31 589 Housing itself and an additional housing arranged on the side. The housing itself is located on the front Connection opening for connecting the gas inlet the first pump stage with the one to be evacuated Facility equipped. There are connecting cables in the additional housing provided the associated inlets the further pump stages with further connection openings connect. These in turn are associated with the associated Chambers in the facility to be evacuated connected. Because the connection openings in the additional housing with the connection opening of the first pump stage in one common plane (perpendicular to the rotor axis), the connecting cables in the additional housing be relatively long. This results in relative large conductance losses in the connecting lines, which is particularly disadvantageous when Area of an intermediate connection has a high pumping speed is desired.

Zum Stand der Technik gehört außerdem der Inhalt der Dokumente DE 18 09 102 A1, US 31 89 264 A und US 36 28 894 A. Offenbart sind Turbomolekular- bzw. Molekularpumpen mit jeweils nur einer saugseitig gelegenen Anschlussöffnung.The state of the art also includes the content of Documents DE 18 09 102 A1, US 31 89 264 A and US 36 28 894 A. Turbomolecular and molecular pumps are disclosed with only one connection opening on the suction side.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Reibungsvakuumpumpe der eingangs erwähnten Art so zu gestalten, dass das Saugvermögen der Zwischenstufen nicht durch hohe Leitwertverluste in Verbindungsleitungen beeinträchtigt ist.The present invention is based on the object a friction vacuum pump of the type mentioned above to shape that the pumping speed of the intermediate stages not due to high conductance losses in connecting lines is impaired.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale des Patentansprüchs 1 gelöst.According to the invention, this object is achieved by the characterizing Features of claim 1 solved.

Durch diese Merkmale ist sichergestellt, dass auch der Abstand zwischen dem jeweiligen Gaseinlass der Zwischenstufen und den zugehörigen Anschlussöffnungen möglichst klein ist. Leitwertverluste sind niedrig. Das im Bereich des Gaseinlasses aller Pumpstufen wirksame Saugvermögen steht nahezu unverändert auch im Bereich der zugehörigen Anschlussöffnungen zur Verfügung.These features ensure that the Distance between the respective gas inlet of the intermediate stages and the associated connection openings is as small as possible. Conductance losses are low. The effective in the area of the gas inlet of all pump stages Pumping speed is almost unchanged in the area the associated connection openings.

Die Verwirklichung der Maßnahmen nach der Erfindung hat zwar zur Folge, dass die zu fördernden Gase im Einlassbereich der ersten Pumpstufe, also gerade dort, wo der Druck am niedrigsten ist, umgelenkt werden müssen. Der dadurch bewirkte Leitwertverlust kann jedoch klein gehalten werden, da der Abstand zwischen dem Gaseinlass und der Ebene der Anschlussöffnung immer noch relativ klein ist und außerdem in diesem Bereich der Wahl größerer Durchmesser nichts im Wege steht. Außerdem gilt für die Mehrzahl der Applikationen, dass besonders hohe Saugvermögenswerte im Bereich des Einlasses der ersten (hochvakuumseitigen) Pumpstufe nicht gefordert werden. Häufig besteht sogar die Notwendigkeit, das Saugvermögen an dieser Stelle zu drosseln.The implementation of the measures according to the invention has this means that the gases to be pumped in the inlet area the first pump stage, i.e. exactly where the Pressure is lowest, must be redirected. The however, the resulting loss of conductance can be kept small because the distance between the gas inlet and the level of the port opening is still relative is small and also in this area of choice larger diameter nothing stands in the way. Moreover applies to the majority of applications that particularly high pumping speeds in the area of the inlet of the first (high vacuum side) pump stage not required become. Often there is even a need for this Throttling pumping speed at this point.

Der wesentliche Zweck der ersten Pumpstufe liegt darin, für ein hohes Kompressionsverhältnis zu sorgen. Die für die erste Pumpstufe gewählten Schaufeleigenschaften (Anzahl der Turbostufen, Schaufelabstand, Neigungswinkel usw.) müssen dieser Funktion Rechnung tragen. Wesentlich ist eine Trennung der beiden Arbeitsdruckbereiche der beiden Pumpstufen. Ein hohes Saugvermögen wird in aller Regel erst an dem oder den Zwischeneinlässen gewünscht. Auch dieses Ziel kann durch die Wahl besonderer Schaufelgeometrien erreicht werden. Durch die Anwendung der erfindungsgemäßen Maßnahmen ist gerade in diesem Bereich sichergestellt, dass Saugvermögensverluste weitestgehend vermieden sind.The main purpose of the first pump stage is to ensure a high compression ratio. The for the first pump stage selected blade properties (Number of turbo levels, blade spacing, angle of inclination etc.) must take this function into account. Essential is a separation of the two working pressure ranges of the two pump stages. A high pumping speed is usually only at the intermediate entrance (s) desired. This goal can also be chosen special blade geometries can be achieved. By the application of the measures according to the invention is straight in this area ensures that absorbency loss are largely avoided.

Für das Saugvermögen einer Pumpstufe ist die Zugänglichkeit der Gasmoleküle zum Gaseinlass (wirksame Gasdurchtrittsfläche) maßgebend. Um dieses Ziel zu erreichen, ist es bei einer Zwischenstufe bekannt, zwischen der vorhergehenden Stufe und ihrem Gaseinlass einen größeren Abstand vorzusehen. Besonders vorteilhaft ist es, wenn dieser Abstand mindestens ein Viertel, vorzugsweise ein Drittel, des Durchmessers des Rotors beträgt.Accessibility is essential for the pumping speed of a pump stage of the gas molecules to the gas inlet (effective gas passage area) prevail. To reach this goal, it is known at an intermediate stage between the previous stage and its gas inlet one provide a larger distance. It is particularly advantageous it if this distance is at least a quarter, preferably one third of the diameter of the rotor.

Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von in den Figuren 1 und 2 dargestellten Ausführungsbeispielen erläutert werden.Further advantages and details of the invention are intended using the exemplary embodiments shown in FIGS. 1 and 2 are explained.

In beiden Figuren sind die Pumpe selbst mit 1, ihr Gehäuse mit 2, ihr Statorsystem mit 3 und ihr Rotorsystem mit 4 bezeichnet. Zum Rotorsystem gehört die Welle 5, die sich ihrerseits über die Lager 6, 7 im Lagergehäuse 8, verbunden mit dem Pumpengehäuse 2, abstützt. Im Lagergehäuse befindet sich außerdem noch der Antriebsmotor 9, 10. Die Drehachse des Rotorsystems 4 ist mit 15 bezeichnet.In both figures, the pump itself is 1, its housing with 2, their stator system with 3 and their rotor system designated with 4. The shaft 5 belongs to the rotor system, which in turn are on the bearings 6, 7 in the bearing housing 8, connected to the pump housing 2, supports. In the bearing housing there is also the drive motor 9, 10. The axis of rotation of the rotor system 4 is 15 designated.

Insgesamt sind drei Pumpstufen 12, 13, 14 vorgesehen, von denen zwei (12, 13) als Turbomolekularvakuumpumpstufen und eine (14) als Molekular(Holweck)-Pumpstufe ausgebildet sind. An die Molekularpumpstufe 14 schließt sich der Auslass der Pumpe 17 an.A total of three pump stages 12, 13, 14 are provided, two of which (12, 13) as turbomolecular vacuum pump stages and a (14) as a molecular (Holweck) pumping stage are trained. To molecular pump stage 14 the outlet of the pump 17 follows.

Die erste, hochvakuumseitig gelegene Pumpstufe 12 besteht aus vier Paaren von Rotorschaufelreihen 21 und Statorschaufelreihen 22. Ihr Einlass, die wirksame Gasdurchtrittsfläche, ist mit 23 bezeichnet. An die erste Pumpstufe 12 schließt sich die zweite Pumpstufe 13 an, die aus drei Paaren von je einer Statorschaufelreihe 22 und einer Rotorschaufelreihe 21 besteht. Ihr Einlass ist mit 28 bezeichnet.The first pump stage 12 is located on the high vacuum side from four pairs of rotor blade rows 21 and Stator blade rows 22. Your inlet, the effective gas passage area, is designated 23. To the first Pump stage 12 is followed by second pump stage 13, that of three pairs of one stator blade row 22 each and a rotor blade row 21. Your entry is designated 28.

Die zweite Pumpstufe 13 ist von der ersten Pumpstufe 12 beabstandet. Der gewählte Abstand (Höhe) a sichert die freie Zugänglichkeit der zu fördernden Gasmoleküle zum Gaseinlass 28. Zweckmäßig ist der Abstand a größer als ein Viertel, vorzugsweise größer als ein Drittel des Durchmessers des Rotorsystems 4.The second pump stage 13 is from the first pump stage 12 spaced. The selected distance (height) a secures the free accessibility of the gas molecules to be conveyed to the gas inlet 28. The distance a is expediently greater than a quarter, preferably greater than a third the diameter of the rotor system 4.

Die sich daran anschließende Holweck-Pumpe umfasst einen rotierenden Zylinderabschnitt 29, dem außen und innen in bekannter Weise mit jeweils einer Gewindenut 30, 31 ausgerüstete Statorelemente 32, 33 gegenüberstehen.The subsequent Holweck pump includes one rotating cylinder section 29, the outside and inside in a known manner, each with a thread groove 30, 31 equipped stator elements 32, 33 face each other.

Die rotorseiten Teile der Pumpstufen 12, 13, 14, bilden eine Einheit, die im betriebsfertigen Zustand mit der Welle 5 verbunden ist. In Höhe des Zwischenraumes zwischen den Pumpstufen 12 und 13 durchsetzt die Welle 5 eine zentrale Bohrung 25, so dass keine unmittelbare Verbindung zwischen dem Lagerraum und dem Zwischenraum besteht und damit die Gefahr der Rückdiffusion von Schmiermitteldämpfen beseitigt ist. Diesem Zweck dient auch die fliegende Lagerung des Rotorsystems 4. Auf hochvakuumseitig angeordnete Lagerungen mit den Leitwert beeinträchtigenden Bauteilen (Lagerträger) kann verzichtet werden. Durch eine glockenförmige Ausbildung des motornahen Teils des Rotorsystems 4 wird allerdings der Abstand der Lagerung 6, 7 vom Schwerpunkt des Rotors klein gehalten. Die Rückdiffusion von Schmiermitteldämpfen kann auch durch Einsatz von Magnetlagern vermieden werden, die an günstigerer Stelle angeordnet werden können.The rotor-side parts of the pump stages 12, 13, 14 form a unit that is ready for use with the Wave 5 is connected. In the amount of the space between The pump stages 12 and 13 pass through the shaft 5 a central bore 25 so that no immediate Connection between the storage room and the intermediate space exists and thus the risk of back diffusion of Lubricant vapors are eliminated. This serves the purpose also the flying bearing of the rotor system 4. Auf Bearings on the high vacuum side with the conductance impairing components (bearing bracket) to be dispensed with. Through a bell-shaped formation of the part of the rotor system 4 close to the motor, however the distance of the bearing 6, 7 from the center of gravity of the rotor kept small. The back diffusion of lubricant vapors can also be done by using magnetic bearings avoided, which are arranged in a more convenient place can be.

Der Verwirklichung der erfindungsgemäßen Anschlussmittel dient das Gehäuse 2 selbst. Es ist beim Ausführungsbeispiel nach Figur 1 derart ausgebildet, dass die Ebenen sämtlicher Anschlussöffnungen 36, 37 parallel zur Rotorachse 15 liegen. Dadurch ist insbesondere der Abstand des Anschlusses 37 zum zugehörigen Gaseinlass 28 sehr klein, so dass das Saugvermögen der Pumpstufe 13 beeinträchtigende Leitwertverluste vernachlässigbar sind. Dieses würde auch für jeden weiteren Zwischenanschluss gelten, der stromabwärts vom Zwischenanschluss 37/28 gelegen wäre. Im übrigen überschreitet der Durchmesser der Anschlussöffnung 37 die Höhe a um etwa das Doppelte. Auch diese Maßnahme dient der Verringerung der Leitwertverluste zwischen Einlass 28 und Anschlussöffnung 37.Realization of the connection means according to the invention serves the housing 2 itself. It is in the embodiment formed in such a way that the Levels of all connection openings 36, 37 parallel to the rotor axis 15. This is special the distance of the connection 37 to the associated gas inlet 28 very small, so the pumping speed of the pump stage 13 impairing conductance losses negligible are. This would also apply to any other intermediate connection apply to the downstream of the intermediate connection 37/28. Otherwise exceeds the diameter of the connection opening 37 around the height a about double. This measure also serves the reduction the conductance losses between inlet 28 and Connection opening 37.

Die dargestellte Pumpe 1 bzw. ihre pumpwirksamen Elemente (Stator-. Rotorschaufeln, Gewindestufen) sind zweckmäßig derart ausgebildet, dass im Bereich der Anschlussöffnung 36 ein Druck von 10-4 bis 10-7, vorzugsweise 10-5 bis 10-6, und im Bereich der Anschlussöffnung 37 ein Druck von etwa 10-2 bis 10-4 mbar erzeugt wird. Dadurch ergibt sich für die erste Pumpstufe 12 die Notwendigkeit, für ein Kompressionsverhältnis von 102 bis 104, vorzugsweise größer 100, zu sorgen. Mit der zweiten Pumpstufe soll ein hohes Saugvermögen erzeugt werden (z.B. 200 l/s). Die sich anschließende, zweistufige Holweck-Pumpstufe (29, 30; 29, 31) sichert eine hohe Vorvakuumbeständigkeit, so dass üblicherweise das Saugvermögen der zweiten Pumpstufe vom Vorvakuumdruck unabhängig ist.The pump 1 shown and its pump-effective elements (stator. Rotor blades, thread stages) are expediently designed such that a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and in the area of the connection opening 36 A pressure of approximately 10 -2 to 10 -4 mbar is generated in the area of the connection opening 37. This results in the need for the first pump stage 12 to provide a compression ratio of 10 2 to 10 4 , preferably greater than 100. The second pumping stage is intended to generate a high pumping speed (eg 200 l / s). The subsequent two-stage Holweck pump stage (29, 30; 29, 31) ensures high fore-vacuum resistance, so that the pumping speed of the second pump stage is usually independent of the fore-vacuum pressure.

Für den Fall, dass im Bereich der Anschlussöffnung 36 ein besonders hohes Saugvermögen nicht gefordert wird, kann dieses Ziel durch entsprechende Gestaltung der Schaufeln der ersten Pumpstufe 12 erreicht werden. Eine andere Möglichkeit besteht darin, vor dem Einlass 23 der ersten Pumpstufe eine Blende 38 anzuordnen, deren Innendurchmesser das gewünschte Saugvermögen bestimmt.In the event that 36 a particularly high pumping speed is not required, can achieve this goal by designing the Buckets of the first pump stage 12 can be reached. A another possibility is in front of the inlet 23 the first pump stage to arrange an aperture 38, the Inner diameter determines the desired pumping speed.

Das Ausführungsbeispiel nach Figur 2 unterscheidet sich vom Ausführungsbeispiel nach Figur 1 dadurch, dass der Durchmesser der auf die erste Pumpstufe 12 folgenden Pumpstufen 13 und 14 größer sind als der Durchmesser der Pumpstufe 12. Dieser Gegebenheit ist die Ebene der Anschlussöffnungen 36, 37 angepasst. Sie ist derart zur Achse 15 des Rotors 4 geneigt, dass der Abstand der Anschlussöffnungen 36, 37 zu den zugehörigen Gaseinlässen 23, 28 möglichst klein ist. Der Neigungswinkel a der Ebene der Anschlussöffnungen 36, 37 zur Rotorachse 15 entspricht der Zunahme der Durchmesser der Pumpstufen. Optimal günstige Abstandsverhältnisse können dadurch erreicht werden. Im dargestellten Ausführungsbeispiel beträgt der Neigungswinkel etwa 5°.The embodiment of Figure 2 differs from the embodiment of Figure 1 in that the Diameter of those following the first pump stage 12 Pump stages 13 and 14 are larger than the diameter the pump stage 12. This fact is the level of Connection openings 36, 37 adapted. It is like that Axis 15 of the rotor 4 inclined that the distance between the connection openings 36, 37 to the associated gas inlets 23, 28 is as small as possible. The angle of inclination a the Level of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pump stages. This allows optimally favorable spacing ratios can be achieved. In the illustrated embodiment the angle of inclination is about 5 °.

Claims (13)

  1. Single-flow friction vacuum pump (1) having a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) each having a gas inlet (23, 28), as well as having connection means for the pump stages, which are equipped with connection openings (36, 37) for each of the gas inlets (23, 28), wherein the connection openings (36, 37) lie in a common plane and are used to connect the gas inlets (23, 28) of the pump stages to a device, which is to be evacuated, characterized in that all of the connection openings (36, 37) and also the common plane of the connection openings are situated laterally adjacent to the pump stages (12, 13, 14) so that the distance between the connection openings (36, 37) and the rotor axis (15) is selectable as small as possible.
  2. Friction vacuum pump according to claim 1, characterized in that the plane of the connection openings (36, 37) is disposed parallel to the axis (15) of the rotor (4).
  3. Friction vacuum pump according to claim 1, characterized in that the diameter of succeeding pump stages (13, 14) is greater than the diameter of preceding pump stages (12, 13). and that the inclination of the plane of the connection openings (36, 37) in relation to the direction of the axis (15) of the rotor (4) is adapted to the diameter enlargement.
  4. Friction vacuum pump according to one of the preceding claims, characterized in that the connection openings (36, 37) are component parts of the housing (2) of the friction vacuum pump (1).
  5. Friction vacuum pump according to one of the preceding claims, characterized in that the first two pump stages (12, 13) are designed as turbomolecular pump stages and that their pump-active elements (stator blades, rotor blades) are fashioned in such a way that the first pump stage (12) ensures a high compression ratio and that the second pump stage (13) generates a high intake capacity.
  6. Friction vacuum pump according to claim 5, characterized in that the two pump stages (12 and 13) are disposed a distance apart and that their distance (a) is greater than a quarter of the rotor diameter, preferably approximately a third of the rotor diameter.
  7. Friction vacuum pump according to claim 6, characterized in that the diameter of the connection opening (37) connected by the connection means to the gas inlet (28) of the second pump stage is greater than the distance (a), preferably approximately double the distance (a).
  8. Friction vacuum pump according to claim 5, 6 or 7, characterized in that the two pump stages (12, 13) are adjoined by a two-stage Holweck pump stage.
  9. Friction vacuum pump according to one of the preceding claims, characterized in that the rotor (4) is driven at the backing vacuum end and mounted overhung.
  10. Friction vacuum pump according to claim 9, characterized in that a free shaft end penetrates a central bore (25) in the rotor (4) and that the rotor (4) is fastened on said shaft end.
  11. Friction vacuum pump according to claim 9 or 10, characterized in that the part of the rotor (4) that is close to the motor is of a bell-shaped design.
  12. Friction vacuum pump according to one of the preceding claims, characterized in that associated with the inlet (23) of the first pump stage (12) is a restrictor (38) for limiting the intake capacity.
  13. Friction vacuum pump according to one of the preceding claims, characterized in that it is equipped with magnetic bearings.
EP98946450A 1998-05-14 1998-09-11 Friction vacuum pump with a stator and a rotor Expired - Lifetime EP1078166B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19821634A DE19821634A1 (en) 1998-05-14 1998-05-14 Friction vacuum pump with staged rotor and stator
DE19821634 1998-05-14
PCT/EP1998/005802 WO1999060275A1 (en) 1998-05-14 1998-09-11 Friction vacuum pump with a stator and a rotor

Publications (3)

Publication Number Publication Date
EP1078166A1 EP1078166A1 (en) 2001-02-28
EP1078166B1 true EP1078166B1 (en) 2003-06-11
EP1078166B2 EP1078166B2 (en) 2007-09-05

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ID=7867761

Family Applications (1)

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EP98946450A Expired - Lifetime EP1078166B2 (en) 1998-05-14 1998-09-11 Friction vacuum pump with a stator and a rotor

Country Status (10)

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US (1) US6435811B1 (en)
EP (1) EP1078166B2 (en)
JP (1) JP4173637B2 (en)
KR (1) KR20010025024A (en)
CN (1) CN1115488C (en)
AU (1) AU754944B2 (en)
CA (1) CA2332777C (en)
DE (2) DE19821634A1 (en)
TW (1) TW370594B (en)
WO (1) WO1999060275A1 (en)

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Also Published As

Publication number Publication date
CA2332777C (en) 2007-11-06
EP1078166B2 (en) 2007-09-05
JP2002515568A (en) 2002-05-28
CN1292851A (en) 2001-04-25
WO1999060275A1 (en) 1999-11-25
CA2332777A1 (en) 1999-11-25
CN1115488C (en) 2003-07-23
JP4173637B2 (en) 2008-10-29
US6435811B1 (en) 2002-08-20
EP1078166A1 (en) 2001-02-28
DE59808723D1 (en) 2003-07-17
DE19821634A1 (en) 1999-11-18
KR20010025024A (en) 2001-03-26
AU754944B2 (en) 2002-11-28
TW370594B (en) 1999-09-21
AU9348198A (en) 1999-12-06

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