EP1090231B2 - Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump - Google Patents

Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump Download PDF

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Publication number
EP1090231B2
EP1090231B2 EP99917896.5A EP99917896A EP1090231B2 EP 1090231 B2 EP1090231 B2 EP 1090231B2 EP 99917896 A EP99917896 A EP 99917896A EP 1090231 B2 EP1090231 B2 EP 1090231B2
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EP
European Patent Office
Prior art keywords
housing
pump
pump according
stator
tie
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99917896.5A
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German (de)
French (fr)
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EP1090231A1 (en
EP1090231B1 (en
Inventor
Ralf Adamietz
Christian Beyer
Günter Schütz
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Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Priority claimed from DE19901340.3A external-priority patent/DE19901340B4/en
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to EP03029746.9A priority Critical patent/EP1422423B2/en
Publication of EP1090231A1 publication Critical patent/EP1090231A1/en
Application granted granted Critical
Publication of EP1090231B1 publication Critical patent/EP1090231B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities

Definitions

  • the invention relates to a turbomolecular vacuum pump having the features of the preamble of patent claim 1, as well as a corresponding device having the features of the preamble of claim 19.
  • connection flange on the front side, with which the friction vacuum pumps are connected to devices with chambers to be evacuated. Since there are different types of flanges and flange sizes, it is necessary for the manufacturer of friction vacuum pumps to manufacture and maintain a variety of friction vacuum pump types to meet all the customer's application needs.
  • a turbomolecular vacuum pump having the features of the preamble of claim 1 is known from DE-A-34 02 549 known.
  • the first internal component is a tie rod system, which only has the task of holding stator components together.
  • the present invention has for its object to simplify the adaptation of turbomolecular vacuum pumps to the variety of applications specified by the customer.
  • this object is achieved by the characterizing features of the claims.
  • the inner component ensures the assignment of the individual components of the vacuum pump to each other. This results in a turbomolecular vacuum pump in the form of a plug which has already undergone many functional tests, e.g. that of balancing, can be subjected.
  • the outer housing has the task of adapting the functioning even without an outer housing molecular vacuum pump to the application of the customer. It is no longer necessary to produce or maintain a variety of pump types, but only one or a few universal, compact and functional pumping units (bays, cartridges) and the outer housing adapted to the respective customer applications.
  • FIG. 1 a friction vacuum pump 1 with stator 3, rotor 4 and chassis 5 is shown.
  • the chassis 5 is the motor drive 6, 7, the armature 7 is supported on the bearings 8 in the chassis 5.
  • shaft 9 With the armature 7 which led out of the chassis 5 shaft 9 is connected, which carries the rotor 4.
  • the axis of rotation of the rotor system is denoted by 11.
  • the friction vacuum pump 1 has after FIG. 1 three pumping stages 12, 13, 14, two of which (12, 13) are designed as turbomolecular vacuum pumping stages and one (14) as molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.
  • the pump 1 is equipped with two housings 18, 19.
  • the inner housing 18 is substantially cylindrical and surrounds the stator 3. On its high vacuum side end, it is equipped with an inwardly directed edge 20 which rests on the stator 3 and in this case simultaneously forms the upper stator ring.
  • the housing 18 is fixed to the chassis 5, with the aid of the flange 21.
  • Flange 21 and chassis 5 are connected to each other vacuum-tight. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 'is arranged.
  • the outer housing 19 has an inner bore 22 with an inwardly directed gradation 23, whose height corresponds to the width of the rim 20 on the first housing 18.
  • a seal 24 which is expediently embedded in the end face of the housing 18.
  • a radial seal is possible.
  • the housing 19 has a device, For example, the flange 25 with which it is attached to the chassis 5 or on the housing 18. After releasing this attachment, the unit formed by the inner housing 18 and the components therein can be removed as a whole from the bore 22. It forms an independent from the second housing 19 slot 27th
  • the first, high vacuum side pump stage 12 consists of four pairs of rotor blade rows and Statorschaufelschschn. Its inlet, the effective gas passage area, is designated 26. The edge 20 surrounds the gas passage surface 26 and forms a passage opening 28 for entering the pump 1 gases.
  • the first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row and one rotor blade row. Your inlet is designated 29.
  • the second pumping stage 13 is spaced from the first pumping stage 12.
  • the selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 29.
  • the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.
  • the adjoining Holweck pump comprises a rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing each other.
  • Another, formed by the inner housing 18 opening is arranged laterally and designated 35. It serves for the passage of gases, which are fed directly to the inlet 29 of the second pumping stage 13.
  • the outer housing 19 has the task of connecting the pump 1 or two pump stages (12, 13) of this pump with the device of the customer.
  • the housing 19 is according to the embodiment FIG. 1 formed such that the planes of all the connection openings 36, 37 are located laterally.
  • the distance of the opening 37 to the associated gas inlet 29 is very small, so that the suction capacity of the pumping stage 13 impairing conductance losses are negligible.
  • the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 29 and connection opening 37.
  • the lateral connection openings can each be equipped with a flange. According to the embodiment FIG. 1 a common flange 39 is provided.
  • the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
  • a high pumping speed is to be generated (eg 200 l / s).
  • the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
  • this goal can be achieved by appropriate design of the blades of the first pumping stage 12.
  • Another possibility is to arrange a diaphragm 38 in front of the inlet 26 of the first pumping stage, the inner diameter of which determines the desired pumping speed.
  • FIG. 2 shows a single-flow friction vacuum pump 1, the pump-active surfaces are formed solely by stator blades 41 and rotor blades 42 (turbomolecular vacuum pump).
  • the second, outer housing 19 carries the front side of the flange 43, which surrounds the front side arranged connection opening 44. To equip a pump 1 of this type with a different flange and / or flange size, it is only necessary to disassemble the outer housing 19 and replaced by a housing 19 with the desired flange.
  • FIG. 3 shows a device 51 according to the invention with evacuated chambers 52, 53, 54 and a push-in unit 27, as to FIG. 1 has been described.
  • the housing of the device - for example, a corpuscular beam device - is substantially integrally formed and designated 55.
  • the housing In the immediate vicinity of the chambers to be evacuated 53, 54, the housing is equipped with the bore 22 in which the insert 27 is located.
  • the chambers 53, 54 communicate with the respective inlets 26, 29 via the passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37.
  • the integration of the insert 27 in the housing of the device 51 accounts for separate connection means.
  • the distances between the chambers to be evacuated 53,54 and the inlets 26, 29 are optimally small.
  • the essence of the present idea is that a largely functional unit (insert, cartridge) of a friction vacuum pump in a housing adapted to the application is releasably supported.
  • the inner housing 18 described so far has the task of summarizing the functional elements of the friction vacuum pump to the desired unit.
  • other components - such as tie rods, brackets or the like - be present, which fulfill this task.
  • two components 18 and 19,55 are provided for the fulfillment of the functions of the usual housing in the subject matter of the invention.
  • the two components are formed by two concentric housings, of which the inner of the centering, assignment and support of chassis 5, stator 3 and rotor 4 is used, which thereby form the already operable, independent of the outer housing slot.
  • the outer housing 19, 55 seals the vacuum pump to the outside and serves for connection to the chambers to be evacuated, either via connecting flanges or in that it is already part of the device with the chambers to be evacuated.
  • FIGS. 4 and 5 show embodiments ( FIG. 4 : Longitudinal section through a slot 27; FIG. 5 : Cross section through a slot 27 at the level of the opening 35) for an inner slot 27 with a Glasankersystem 61.
  • This comprises three to six (or more) tie rods 62 and holes and threads in the components (chassis 5, stator 3), the Tie rod system 61 are to be joined together to form a structural unit.
  • FIGS. 4 and 5 can be seen that the opening 35 extends over the entire circumference of the insert 27 and is interrupted only by the tie rods 62.
  • the access of the gas molecules to the inlet 29 of the pumping stage 13 is thereby free almost unhindered.
  • the attachment of the outer housing - be it the second housing 18, which fulfills further functions of a pump housing, or a housing 55 which is part of a device with chambers to be evacuated - takes place on the flange 21 of the chassis 5.
  • FIG. 4 allows the construction of particularly advantageous designed tie rod 62 recognize. They are designed in two parts.
  • the vorvakuum solutionen Anlagenankerabête 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator 33 of the pumping stage 14. Their threaded ends are screwed into the flange 21 of the chassis 5.
  • the length of the heads 64 determines the axial extent of the opening 35.
  • the heads 64 are each provided with an internal thread, in each of which high-vacuum-side tie rod sections 65 can be screwed.
  • Their heads 66 are the top stator of the pumping stage 13. In addition, they enforce the stator of the pumping stage 12 and thereby cause in the screwed state not only a compound of the high vacuum stage 12 with the remaining stages 13 and 14 but also a centering of the stator rings.

Description

Die Erfindung bezieht sich auf eine Turbomolekularvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1, sowie eine entsprechende Einrichtung mit den Merkmalen des Oberbegriffs des Patentanspruchs 19.The invention relates to a turbomolecular vacuum pump having the features of the preamble of patent claim 1, as well as a corresponding device having the features of the preamble of claim 19.

Aus der DE-A-43 14 419 sind verschiedene Reibungsvakuumpumpen (Turbomolekularpumpen, Pumpen mit Turbomolekularpumpenstufen und anderen Reibungspumpenstufen) mit einer Bauart bekannt, wie sie z. Zt. üblich ist und auf dem Markt angeboten wird. Sie besitzen ein Chassis, das mit dem Antriebsmotor ausgerüstet ist und auf dem sich der Rotor abstützt. Außerdem stützt sich das Gehäuse der Pumpe auf dem Chassis ab. Es umgibt den Rotor und den Stator und auch mehr oder weniger das Chassis. Das Gehäuse sichert die Zuordnung der genannten Bauteile zueinander. Weiterhin hat es die Aufgabe, den aus Statorhalbring-Scheiben und Distanzringen bestehenden Stator exakt zu zentrieren, damit die bei Reibungsvakuumpumpen notwendigen kleinen Spalte eingehalten werden können. Das Gehäuse dichtet die Vakuumpumpe nach außen hin ab. Schließlich ist es mit dem stirnseitig angeordneten Anschlussflansch ausgerüstet, mit dem die Reibungsvakuumpumpen an Einrichtungen mit zu evakuierenden Kammern angeschlossen werden. Da es unterschiedliche Flanscharten und Flanschgrößen gibt, ist es für den Hersteller von Reibungsvakuumpumpen notwendig, eine Vielzahl von Reibungsvakuumpumpen-Typen herzustellen und bereitzuhalten, um sämtliche Applikationswünsche der Kunden erfüllen zu können.From the DE-A-43 14 419 various friction vacuum pumps (turbomolecular pumps, pumps with turbomolecular pump stages and other friction pump stages) are known with a type as z. Is currently common and offered on the market. They have a chassis, which is equipped with the drive motor and on which the rotor is supported. In addition, the housing of the pump is supported on the chassis. It surrounds the rotor and the stator and also more or less the chassis. The housing ensures the assignment of said components to each other. Furthermore, it has the task of exactly centering the Statorhalbring disks and spacers existing stator so that the necessary in friction vacuum pumps small gap can be met. The housing seals the vacuum pump to the outside. Finally, it is equipped with the connection flange on the front side, with which the friction vacuum pumps are connected to devices with chambers to be evacuated. Since there are different types of flanges and flange sizes, it is necessary for the manufacturer of friction vacuum pumps to manufacture and maintain a variety of friction vacuum pump types to meet all the customer's application needs.

Eine Turbomolekularvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 ist aus der DE-A-34 02 549 bekannt. Das erste innere Bauteil ist ein Zugankersystem, das nur die Aufgabe hat, Statorbauteile zusammen zu halten.A turbomolecular vacuum pump having the features of the preamble of claim 1 is known from DE-A-34 02 549 known. The first internal component is a tie rod system, which only has the task of holding stator components together.

Zum Stand der Technik gehört schließlich noch der Inhalt der US-Patentschriften 19 42 139 und 19 75 568 aus dem Jahre 1934. Sie offenbaren keine Turbomolekularvakuumpumpe der hier betroffenen Art.Finally, the content of the art belongs to the state of the art US Pat. No. 19 42 139 and 19 75 568 from 1934. They do not disclose a turbomolecular vacuum pump of the kind concerned here.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Anpassung von Turbomolekularvakuumpumpen an die Vielfalt der durch die Kunden vorgegebenen Applikationen zu vereinfachen.The present invention has for its object to simplify the adaptation of turbomolecular vacuum pumps to the variety of applications specified by the customer.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst. Durch die Anwendung dieser Merkmale wird es möglich, die eingangs beschriebenen Funktionen des bisher üblichen, einteiligen Gehäuses auf zwei Bauteile zu verteilen. Das innere Bauteil sichert die Zuordnung der einzelnen Bauteile der Vakuumpumpe zueinander. Dadurch entsteht eine Turbomolekularvakuumpumpe in Form eines Einschubs, die bereits vielen Funktionsprüfungen, z.B. der des Auswuchtens, unterworfen werden kann. Das äußere Gehäuse hat die Aufgabe, die auch ohne äußeres Gehäuse funktionstüchtige Molekularvakuumpumpe an die Applikation des Kunden anzupassen. Es ist nicht mehr erforderlich, eine Vielfalt von Pumpentypen herzustellen oder bereitzuhalten, sondern lediglich eine oder wenige universelle, kompakte und funktionsfähige Pumpeinheiten (Einschübe, Kartuschen) sowie die den jeweiligen Kundenapplikationen angepassten äußeren Gehäuse.According to the invention this object is achieved by the characterizing features of the claims. By using these features, it is possible to distribute the functions described above of the previously customary, one-piece housing on two components. The inner component ensures the assignment of the individual components of the vacuum pump to each other. This results in a turbomolecular vacuum pump in the form of a plug which has already undergone many functional tests, e.g. that of balancing, can be subjected. The outer housing has the task of adapting the functioning even without an outer housing molecular vacuum pump to the application of the customer. It is no longer necessary to produce or maintain a variety of pump types, but only one or a few universal, compact and functional pumping units (bays, cartridges) and the outer housing adapted to the respective customer applications.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von den Figuren 1 bis 5 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

  • Figur 1 eine mit drei Pumpstufen ausgerüstete Reibungsvakuumpumpe nach der Erfindung,
  • Figur 2 eine Turbomolekularvakuumpumpe nach der Erfindung,
  • Figur 3 eine mit einer Reibungsvakuumpumpe nach der Erfindung ausgerüstete Einrichtung und
  • Figuren 4 und 5 Schnitte durch eine Ausführung des Einschubs mit Zugankern.
Further advantages and details of the invention are to be understood from the FIGS. 1 to 5 illustrated embodiments will be explained. Show it
  • FIG. 1 a three-pumped friction vacuum pump according to the invention,
  • FIG. 2 a turbomolecular vacuum pump according to the invention,
  • FIG. 3 a device equipped with a friction vacuum pump according to the invention and
  • FIGS. 4 and 5 Cuts through a version of the insert with tie rods.

In Figur 1 ist eine Reibungsvakuumpumpe 1 mit Stator 3, Rotor 4 und Chassis 5 dargestellt. Im Chassis 5 befindet sich der Motorantrieb 6, 7, dessen Anker 7 sich über die Lager 8 im Chassis 5 abstützt. Mit dem Anker 7 ist die aus dem Chassis 5 herausgeführte Welle 9 verbunden, die den Rotor 4 trägt. Die Drehachse des Rotorsystems ist mit 11 bezeichnet.In FIG. 1 a friction vacuum pump 1 with stator 3, rotor 4 and chassis 5 is shown. In the chassis 5 is the motor drive 6, 7, the armature 7 is supported on the bearings 8 in the chassis 5. With the armature 7 which led out of the chassis 5 shaft 9 is connected, which carries the rotor 4. The axis of rotation of the rotor system is denoted by 11.

Insgesamt besitzt die Reibungsvakuumpumpe 1 nach Figur 1 drei Pumpstufen 12, 13, 14, von denen zwei (12, 13) als Turbomolekularvakuumpumpstufen und eine (14) als Molekular(Holweck)-Pumpstufe ausgebildet sind. An die Molekularpumpstufe 14 schließt sich der Auslass der Pumpe 17 an.Overall, the friction vacuum pump 1 has after FIG. 1 three pumping stages 12, 13, 14, two of which (12, 13) are designed as turbomolecular vacuum pumping stages and one (14) as molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.

Erfindungsgemäß ist die Pumpe 1 mit zwei Gehäusen 18, 19 ausgerüstet. Das innere Gehäuse 18 ist im wesentlichen zylindrisch und umgibt den Stator 3. Auf seiner hochvakuumseitigen Stirnseite ist es mit einem nach innen gerichteten Rand 20 ausgerüstet, der dem Stator 3 aufliegt und in diesem Falle gleichzeitig den oberen Statorring bildet. Vorvakuumseitig ist das Gehäuse 18 am Chassis 5 befestigt, und zwar mit Hilfe des Flansches 21. Flansch 21 und Chassis 5 sind vakuumdicht miteinander verbunden. Dazu ist zwischen dem Flansch 21 und dem Chassis 5 der Dichtring 21' angeordnet.According to the invention, the pump 1 is equipped with two housings 18, 19. The inner housing 18 is substantially cylindrical and surrounds the stator 3. On its high vacuum side end, it is equipped with an inwardly directed edge 20 which rests on the stator 3 and in this case simultaneously forms the upper stator ring. Fore-vacuum side, the housing 18 is fixed to the chassis 5, with the aid of the flange 21. Flange 21 and chassis 5 are connected to each other vacuum-tight. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 'is arranged.

Das äußere Gehäuse 19 besitzt eine innere Bohrung 22 mit einer einwärts gerichteten Stufung 23, deren Höhe der Breite des Randes 20 am ersten Gehäuse 18 entspricht. Zwecks Abdichtung des Spaltes zwischen den beiden Gehäusen 18, 19 zur Hochvakuumseite der Pumpe 1 hin befindet sich zwischen deren Rand 20 und der Stufung 23 eine Dichtung 24, die zweckmäßig in die Stirnseite des Gehäuses 18 eingelassen ist. Auch eine radiale Abdichtung ist möglich. Vorvakuumseitig besitzt auch das Gehäuse 19 eine Vorrichtung, z.B. den Flansch 25, mit dem es am Chassis 5 oder auch am Gehäuse 18 befestigt ist. Nach dem Lösen dieser Befestigung kann die vom inneren Gehäuse 18 und den darin befindlichen Bauteilen gebildete Einheit als Ganzes aus der Bohrung 22 herausgenommen werden. Sie bildet einen vom zweiten Gehäuse 19 unabhängigen Einschub 27.The outer housing 19 has an inner bore 22 with an inwardly directed gradation 23, whose height corresponds to the width of the rim 20 on the first housing 18. For the purpose of sealing the gap between the two housings 18, 19 to the high-vacuum side of the pump 1 is located between the edge 20 and the gradation 23, a seal 24 which is expediently embedded in the end face of the housing 18. A radial seal is possible. On the vacuum side, the housing 19 has a device, For example, the flange 25 with which it is attached to the chassis 5 or on the housing 18. After releasing this attachment, the unit formed by the inner housing 18 and the components therein can be removed as a whole from the bore 22. It forms an independent from the second housing 19 slot 27th

Die erste, hochvakuumseitig gelegene Pumpstufe 12 besteht aus vier Paaren von Rotorschaufelreihen und Statorschaufelreihen. Ihr Einlass, die wirksame Gasdurchtrittsfläche, ist mit 26 bezeichnet. Der Rand 20 umgibt die Gasdurchtrittsfläche 26 und bildet eine Durchtrittsöffnung 28 für in die Pumpe 1 eintretenden Gase. An die erste Pumpstufe 12 schließt sich die zweite Pumpstufe 13 an, die aus drei Paaren von je einer Statorschaufelreihe und einer Rotorschaufelreihe besteht. Ihr Einlass ist mit 29 bezeichnet.The first, high vacuum side pump stage 12 consists of four pairs of rotor blade rows and Statorschaufelreihen. Its inlet, the effective gas passage area, is designated 26. The edge 20 surrounds the gas passage surface 26 and forms a passage opening 28 for entering the pump 1 gases. The first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row and one rotor blade row. Your inlet is designated 29.

Die zweite Pumpstufe 13 ist von der ersten Pumpstufe 12 beabstandet. Der gewählte Abstand (Höhe) a sichert die freie Zugänglichkeit der zu fördernden Gasmoleküle zum Gaseinlass 29. Zweckmäßig ist der Abstand a größer als ein Viertel, vorzugsweise größer als ein Drittel des Durchmessers des Rotorsystems 4.The second pumping stage 13 is spaced from the first pumping stage 12. The selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 29. Expediently, the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.

Die sich daran anschließende Holweck-Pumpe umfasst einen rotierenden Zylinderabschnitt 30, dem außen und innen in bekannter Weise mit jeweils einer Gewindenut 31, 32 ausgerüstete Statorelemente 33, 34 gegenüberstehen.The adjoining Holweck pump comprises a rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing each other.

Eine weitere, vom inneren Gehäuse 18 gebildete Öffnung ist seitlich angeordnet und mit 35 bezeichnet. Sie dient dem Durchtritt von Gasen, die unmittelbar dem Einlass 29 der zweiten Pumpstufe 13 zugeführt werden.Another, formed by the inner housing 18 opening is arranged laterally and designated 35. It serves for the passage of gases, which are fed directly to the inlet 29 of the second pumping stage 13.

Das äußere Gehäuse 19 hat die Aufgabe, die Pumpe 1 bzw. zwei Pumpenstufen (12, 13) dieser Pumpe mit der Einrichtung des Kunden zu verbinden. Das Gehäuse 19 ist beim Ausführungsbeispiel nach Figur 1 derart ausgebildet, dass sich die Ebenen sämtlicher Verbindungsöffnungen 36, 37 seitlich befinden. Dadurch ist insbesondere der Abstand der Öffnung 37 zum zugehörigen Gaseinlass 29 sehr klein, so dass das Saugvermögen der Pumpstufe 13 beeinträchtigende Leitwertverluste vernachlässigbar sind. Dieses würde auch für jeden weiteren Zwischenanschluss gelten, der stromabwärts vom Zwischenanschluss 37/29 gelegen wäre. Im übrigen überschreitet der Durchmesser der Anschlussöffnung 37 die Höhe a um etwa das Doppelte. Auch diese Maßnahme dient der Verringerung der Leitwertverluste zwischen Einlass 29 und Anschlussöffnung 37. Die seitlichen Verbindungsöffnungen können mit je einem Flansch ausgerüstet sein. Beim Ausführungsbeispiel nach Figur 1 ist ein gemeinsamer Flansch 39 vorgesehen.The outer housing 19 has the task of connecting the pump 1 or two pump stages (12, 13) of this pump with the device of the customer. The housing 19 is according to the embodiment FIG. 1 formed such that the planes of all the connection openings 36, 37 are located laterally. As a result, in particular, the distance of the opening 37 to the associated gas inlet 29 is very small, so that the suction capacity of the pumping stage 13 impairing conductance losses are negligible. This would also apply to any other intermediate connection that would be located downstream of the intermediate connection 37/29. Moreover, the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 29 and connection opening 37. The lateral connection openings can each be equipped with a flange. According to the embodiment FIG. 1 a common flange 39 is provided.

Die dargestellte Pumpe 1 bzw. ihre pumpwirksamen Elemente (Stator-, Rotorschaufeln, Gewindestufen) sind zweckmäßig derart ausgebildet, dass im Bereich der Anschlussöffnung 36 ein Druck von 10-4 bis 10-7, vorzugsweise 10-5 bis 10-6, und im Bereich der Anschlussöffnung 37 ein Druck von etwa 10-2 bis 10-4 mbar erzeugt wird. Dadurch ergibt sich für die erste Pumpstufe 12 die Notwendigkeit, für ein Kompressionsverhältnis von 102 bis 104, vorzugsweise größer 100, zu sorgen. Mit der zweiten Pumpstufe soll ein hohes Saugvermögen erzeugt werden (z.B. 200 l/s). Die sich anschließende, zweistufige Holweck-Pumpstufe (29, 30; 29, 31) sichert eine hohe Vorvakuumbeständigkeit, so dass üblicherweise das Saugvermögen der zweiten Pumpstufe vom Vorvakuumdruck unabhängig ist.The illustrated pump 1 or its pump-effective elements (stator, rotor blades, screw threads) are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated. This results for the first pumping stage 12, the need to provide for a compression ratio of 10 2 to 10 4 , preferably greater than 100. With the second pumping stage, a high pumping speed is to be generated (eg 200 l / s). The subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.

Für den Fall, dass im Bereich der Anschlussöffnung 36 ein besonders hohes Saugvermögen nicht gefordert wird, kann dieses Ziel durch entsprechende Gestaltung der Schaufeln der ersten Pumpstufe 12 erreicht werden. Eine andere Möglichkeit besteht darin, vor dem Einlass 26 der ersten Pumpstufe eine Blende 38 anzuordnen, deren Innendurchmesser das gewünschte Saugvermögen bestimmt.In the event that a particularly high pumping speed is not required in the region of the connecting opening 36, this goal can be achieved by appropriate design of the blades of the first pumping stage 12. Another possibility is to arrange a diaphragm 38 in front of the inlet 26 of the first pumping stage, the inner diameter of which determines the desired pumping speed.

Figur 2 zeigt eine einflutige Reibungsvakuumpumpe 1, deren pumpaktive Flächen ausschließlich von Statorschaufeln 41 und Rotorschaufeln 42 gebildet werden (Turbomolekularvakuumpumpe). Das zweite, äußere Gehäuse 19 trägt stirnseitig den Flansch 43, der die stirnseitig angeordnete Verbindungsöffnung 44 umgibt. Um eine Pumpe 1 dieser Art mit einer anderen Flanschart und/oder Flanschgröße auszurüsten, ist es lediglich erforderlich, das äußere Gehäuse 19 zu demontieren und durch ein Gehäuse 19 mit dem gewünschten Flansch zu ersetzen. FIG. 2 shows a single-flow friction vacuum pump 1, the pump-active surfaces are formed solely by stator blades 41 and rotor blades 42 (turbomolecular vacuum pump). The second, outer housing 19 carries the front side of the flange 43, which surrounds the front side arranged connection opening 44. To equip a pump 1 of this type with a different flange and / or flange size, it is only necessary to disassemble the outer housing 19 and replaced by a housing 19 with the desired flange.

Figur 3 zeigt eine Einrichtung 51 nach der Erfindung mit zu evakuierenden Kammern 52, 53, 54 und einer einschubförmigen Einheit 27, wie sie zu Figur 1 beschrieben wurde. Das Gehäuse der Einrichtung - z.B. ein Korpuskularstrahlgerät - ist im wesentlichen einstückig ausgebildet und mit 55 bezeichnet. In unmittelbarer Nähe der zu evakuierenden Kammern 53, 54 ist das Gehäuse mit der Bohrung 22 ausgerüstet, in der sich der Einschub 27 befindet. Über die Durchtrittsöffnungen 28, 35 im Gehäuse 18 des Einschubs 27 und die Verbindungsöffnungen 36, 37 stehen die Kammern 53, 54 mit den jeweiligen Einlässen 26, 29 in Verbindung. Durch die Integration des Einschubs 27 im Gehäuse der Einrichtung 51 entfallen gesonderte Anschlussmittel. Die Abstände zwischen den zu evakuierenden Kammern 53,54 und den Einlässen 26, 29 sind optimal klein. FIG. 3 shows a device 51 according to the invention with evacuated chambers 52, 53, 54 and a push-in unit 27, as to FIG. 1 has been described. The housing of the device - for example, a corpuscular beam device - is substantially integrally formed and designated 55. In the immediate vicinity of the chambers to be evacuated 53, 54, the housing is equipped with the bore 22 in which the insert 27 is located. The chambers 53, 54 communicate with the respective inlets 26, 29 via the passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37. The integration of the insert 27 in the housing of the device 51 accounts for separate connection means. The distances between the chambers to be evacuated 53,54 and the inlets 26, 29 are optimally small.

Der Kern der vorliegenden Idee liegt darin, dass eine weitgehend funktionsfähige Einheit (Einschub, Kartusche) einer Reibungsvakuumpumpe in einem der Applikation angepassten Gehäuse lösbar gehaltert ist. Das bisher beschriebene innere Gehäuse 18 hat die Aufgabe, die Funktionselemente der Reibungsvakuumpumpe zu der gewünschten Einheit zusammenzufassen. Anstelle des Gehäuses können auch andere Bauteile - z.B. Zuganker, Klammern oder dgl. - vorhanden sein, die diese Aufgabe erfüllen. Wesentlich ist, dass für die Erfüllung der Funktionen des sonst üblichen Gehäuses beim Gegenstand der Erfindung zwei Bauelemente 18 bzw. 19,55 vorgesehen sind. Bei den Ausführungen nach den Figuren 1 bis 3 werden die beiden Bauelemente von zwei konzentrischen Gehäusen gebildet, von denen das innere der Zentrierung, Zuordnung und Halterung von Chassis 5, Stator 3 und Rotor 4 dient, welche dadurch den bereits betriebsfähigen, vom äußeren Gehäuse unabhängigen Einschub bilden. Das äußere Gehäuse 19, 55 dichtet die Vakuumpumpe nach außen ab und dient der Verbindung mit den zu evakuierenden Kammern, sei es über Anschlussflansche oder dadurch, dass es bereits Bestandteil der Einrichtung mit den zu evakuierenden Kammern ist.The essence of the present idea is that a largely functional unit (insert, cartridge) of a friction vacuum pump in a housing adapted to the application is releasably supported. The inner housing 18 described so far has the task of summarizing the functional elements of the friction vacuum pump to the desired unit. Instead of the housing, other components - such as tie rods, brackets or the like - be present, which fulfill this task. It is essential that two components 18 and 19,55 are provided for the fulfillment of the functions of the usual housing in the subject matter of the invention. In the versions after the FIGS. 1 to 3 The two components are formed by two concentric housings, of which the inner of the centering, assignment and support of chassis 5, stator 3 and rotor 4 is used, which thereby form the already operable, independent of the outer housing slot. The outer housing 19, 55 seals the vacuum pump to the outside and serves for connection to the chambers to be evacuated, either via connecting flanges or in that it is already part of the device with the chambers to be evacuated.

Besonders zweckmäßig ist es, beim inneren Einschub das innere Gehäuse durch ein Zugankersystem zu ersetzen. Dieses ermöglicht eine kompaktere Gestaltung des inneren Einschubs. Außerdem können vom Zugankersystem zusammengehaltene Bauteile einfacher hergestellt werden. Beispielsweise übernehmen die Zuganker die Zentrierung von Statorringen, so dass diese selbst nicht mehr mit Zentriermitteln ausgerüstet sein müssen.It is particularly useful to replace the inner housing by a Zugankersystem the inner slot. This allows a more compact design of the inner drawer. In addition, components held together by the tie rod system can be made simpler. For example, the tie rods take over the centering of stator rings, so that they themselves no longer need to be equipped with centering.

Die Figuren 4 und 5 zeigen Ausführungsbeispiele (Figur 4: Längsschnitt durch einen Einschub 27; Figur 5: Querschnitt durch einen Einschub 27 in Höhe der Öffnung 35) für einen inneren Einschub 27 mit einem Zugankersystem 61. Dieses umfasst drei bis sechs (oder mehr) Zuganker 62 sowie Bohrungen und Gewinde in den Bauteilen (Chassis 5, Stator 3), die vom Zugankersystem 61 zu einer Baueinheit zusammengefügt werden sollen.The FIGS. 4 and 5 show embodiments ( FIG. 4 : Longitudinal section through a slot 27; FIG. 5 : Cross section through a slot 27 at the level of the opening 35) for an inner slot 27 with a Zugankersystem 61. This comprises three to six (or more) tie rods 62 and holes and threads in the components (chassis 5, stator 3), the Tie rod system 61 are to be joined together to form a structural unit.

Die Figuren 4 und 5 lassen erkennen, dass sich die Öffnung 35 über den gesamten Umfang des Einschubs 27 erstreckt und nur durch die Zuganker 62 unterbrochen ist. Der Zugang der Gasmoleküle zum Einlass 29 der Pumpstufe 13 (in Figur 5 in Draufsicht dargestellt) ist dadurch nahezu ungehindert frei. Die Befestigung des äußeren Gehäuses - sei es das zweite Gehäuse 18, das weitere Funktionen eines Pumpgehäuses erfüllt, oder ein Gehäuse 55, das Bestandteil eines Gerätes mit zu evakuierenden Kammern ist - erfolgt am Flansch 21 des Chassis 5.The FIGS. 4 and 5 can be seen that the opening 35 extends over the entire circumference of the insert 27 and is interrupted only by the tie rods 62. The access of the gas molecules to the inlet 29 of the pumping stage 13 (in FIG. 5 shown in plan view) is thereby free almost unhindered. The attachment of the outer housing - be it the second housing 18, which fulfills further functions of a pump housing, or a housing 55 which is part of a device with chambers to be evacuated - takes place on the flange 21 of the chassis 5.

Figur 4 lässt den Aufbau besonders vorteilhaft gestalteter Zuganker 62 erkennen. Sie sind zweiteilig ausgebildet. Die vorvakuumseitigen Zugankerabschnitte 63 mit ihren Köpfen 64 durchsetzen die Statorringe der Pumpstufe 13 und das äußere Statorelement 33 der Pumpstufe 14. Ihre mit einem Gewinde versehenen Enden sind in den Flansch 21 des Chassis 5 eingeschraubt. Die Länge der Köpfe 64 bestimmt die axiale Ausdehnung der Öffnung 35. FIG. 4 allows the construction of particularly advantageous designed tie rod 62 recognize. They are designed in two parts. The vorvakuumseitigen Zugankerabschnitte 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator 33 of the pumping stage 14. Their threaded ends are screwed into the flange 21 of the chassis 5. The length of the heads 64 determines the axial extent of the opening 35.

Im Bereich ihrer hochvakuumseitigen Stirnseite sind die Köpfe 64 jeweils mit einem Innengewinde versehen, in die jeweils hochvakuumseitige Zugankerabschnitte 65 einschraubbar sind. Ihre Köpfe 66 liegen dem obersten Statorring der Pumpstufe 13 auf. In übrigen durchsetzen sie die Statorringe der Pumpstufe 12 und bewirken dadurch im eingeschraubten Zustand nicht nur eine Verbindung der Hochvakuumstufe 12 mit den übrigen Stufen 13 und 14 sondern auch eine Zentrierung der Statorringe.In the region of their high-vacuum-side end face, the heads 64 are each provided with an internal thread, in each of which high-vacuum-side tie rod sections 65 can be screwed. Their heads 66 are the top stator of the pumping stage 13. In addition, they enforce the stator of the pumping stage 12 and thereby cause in the screwed state not only a compound of the high vacuum stage 12 with the remaining stages 13 and 14 but also a centering of the stator rings.

Claims (20)

  1. A turbomolecular vacuum pump (1) having a frame (5), a stator (3) with stator rings, a rotor (4) with rotor blades which is supported in the frame (5) by way of a shaft (9), a first inner part (18, 61) which serves to group together the stator rings, and a second outer housing part (19) which is secured to the frame (5), receives the stator (3) and the rotor (4) and is equipped with a connection (39) to a chamber to be evacuated, characterised in that the first inner part (18, 61) brings together the frame (5), the stator (3) and the rotor (4) to form an insert-shaped, independent structural unit (27) adapted to function without the outer housing part (19), said structural unit being detachably secured in the outer housing part.
  2. A pump according to claim 1, characterised in that the first inner part is an inner cylindrical housing (18).
  3. A pump according to claim 2, characterised in that there is a seal (24) in the region of the high vacuum side of the pump, between the inner housing (18) and the outer housing (19, 55).
  4. A pump according to claim 2 or 3, characterised in that, in the region of the pre-vacuum side of the pump, the inner and outer housings (18; 19, 55) are equipped with flanges which are detachably secured to the frame (5).
  5. A pump according to one of the preceding claims, characterised in that the inner housing (18) is equipped with an inwardly directed rim (20) on the high vacuum side.
  6. A pump according to claim 5, characterised in that the inwardly directed rim (20) forms a first stator ring arranged on the high vacuum side.
  7. A frictional vacuum pump according to one of the preceding claims 2 to 6, characterised in that there is associated with that end face of the inner housing (18) which is on the high vacuum side a stepped narrowing (23) of the bore (22) of the outer housing (19, 55).
  8. A pump according to claims 3 and 7, characterised in that there is an 0-ring (24) between the end face of the inner housing (18) and the step (23), formed by the narrowing in diameter, in the outer housing (19, 55).
  9. A pump according to one of the preceding claims 2 to 8, characterised in that that end of the inner housing (18) which is on the high vacuum side forms an aperture (28) for the gases coming into the pump to pass through.
  10. A pump according to claim 9, characterised in that the inner housing (18) is equipped with at least one further, downstream aperture (35) for incoming gases to pass through.
  11. A pump according to one of claims 1 to 10, characterised in that the connection flange (39) is arranged laterally on the second housing (19).
  12. A pump according to claim 9 or 10, characterised in that one or more connection channels are made in the outer housing (19), and these make the connection between the passage apertures (28, 35) and one or more chambers (52 to 55) to be evacuated.
  13. A pump according to claim 1, characterised in that the first inner part is formed by a tie-rod system (61).
  14. A pump according to claim 13, characterised in that the tie-rod system (61) includes a plurality of tie rods (62) which connect the stator (3) to the frame (5).
  15. A pump according to claim 14, characterised in that the tie rods (62) pass through the stator rings.
  16. A pump according to one of claims 13 to 15, characterised in that the tie rods (62) are made in two parts and each comprise a tie-rod portion (63) an the pre-vacuum side, with head (64), and a tie-rod portion (65) an the high vacuum side, with head (66).
  17. A pump according to claim 16, characterised in that the length of the head (64) of the tie-rod portion (63) on the pre-vacuum side determines the axial extent of a passage aperture (35) between the high vacuum stage (12) and the pre-vacuum stage (13 or 13, 14).
  18. A pump according to either of claims 16 or 17, characterised in that the heads (64) of the tie-rod portions (63) on the pre-vacuum side are each equipped at their end face with a thread into which the tie-rod portions (65) an the high vacuum side may be screwed.
  19. A device (51), having a housing (55) in which there is at least one chamber (52, 53, 54) which may be evacuated, and having a turbomolecular vacuum pump (1) with a housing, according to one of the preceding claims, this turbomolecular vacuum pump (1) being connected to the chamber which is to be evacuated, characterised in that the housing (55) of the device (51) has a bore (22) within which the insert (27) of the turbomolecular vacuum pump (1) is located, and in that the housing (55) forms the second outer housing part of the pump (1).
  20. A device according to claim 19, characterised in that at least two chambers (52, 53, 54) are provided, in that the turbomolecular vacuum pump (1) is constructed to have a plurality of stages, in that at least two chambers (52, 53, 54) are arranged laterally next to the frictional vacuum pump (1), and the chambers are connected, by way of passage apertures in the inner housing (18) and connection apertures (36, 37) in the common housing (55), to the inlet (26, 29) of turbomolecular pump stages (12, 13, 14).
EP99917896.5A 1998-05-26 1999-03-27 Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump Expired - Lifetime EP1090231B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP03029746.9A EP1422423B2 (en) 1998-05-26 1999-03-27 Apparatus with evacuatable chamber

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19823270 1998-05-26
DE19823270 1998-05-26
DE19901340.3A DE19901340B4 (en) 1998-05-26 1999-01-15 Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type
DE19901340 1999-01-15
PCT/EP1999/002122 WO1999061799A1 (en) 1998-05-26 1999-03-27 Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump

Related Child Applications (3)

Application Number Title Priority Date Filing Date
EP03029746.9A Division EP1422423B2 (en) 1998-05-26 1999-03-27 Apparatus with evacuatable chamber
EP03029746.9A Division-Into EP1422423B2 (en) 1998-05-26 1999-03-27 Apparatus with evacuatable chamber
EP03029746.9 Division-Into 2003-12-23

Publications (3)

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EP1090231A1 EP1090231A1 (en) 2001-04-11
EP1090231B1 EP1090231B1 (en) 2005-10-05
EP1090231B2 true EP1090231B2 (en) 2015-07-08

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US (1) US6457954B1 (en)
EP (1) EP1090231B2 (en)
JP (1) JP4520636B2 (en)
DE (2) DE59912626D1 (en)
WO (1) WO1999061799A1 (en)

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JP4520636B2 (en) 2010-08-11
JP2002516959A (en) 2002-06-11
EP1090231A1 (en) 2001-04-11
DE59912629D1 (en) 2006-02-16
WO1999061799A1 (en) 1999-12-02
EP1090231B1 (en) 2005-10-05
US6457954B1 (en) 2002-10-01
DE59912626D1 (en) 2006-02-16

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