EP3112688B2 - Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé - Google Patents

Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé Download PDF

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Publication number
EP3112688B2
EP3112688B2 EP15174844.9A EP15174844A EP3112688B2 EP 3112688 B2 EP3112688 B2 EP 3112688B2 EP 15174844 A EP15174844 A EP 15174844A EP 3112688 B2 EP3112688 B2 EP 3112688B2
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EP
European Patent Office
Prior art keywords
pump
rotor
vacuum
vacuum pump
turbomolecular
Prior art date
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Application number
EP15174844.9A
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German (de)
English (en)
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EP3112688B1 (fr
EP3112688A1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15174844.9A priority Critical patent/EP3112688B2/fr
Priority to JP2016128671A priority patent/JP6253719B2/ja
Publication of EP3112688A1 publication Critical patent/EP3112688A1/fr
Publication of EP3112688B1 publication Critical patent/EP3112688B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a vacuum pump of the split-flow pump type.
  • split-flow vacuum pumps are used in practice to evacuate several chambers, for example of a mass spectrometer system, at the same time.
  • the split flow vacuum pumps make it possible to dispense with a pump system consisting of several individual pumps and to evacuate several chambers with a single pump.
  • Split flow vacuum pumps have the advantage that they only require a small amount of space for the vacuum system.
  • the split-flow vacuum pumps are not only used in analysis devices, but also, for example, in leak detectors whose analysis principle is also based on mass spectrometry.
  • a turbomolecular pump which has a plurality of suction connections, each of which is connected to one of the vacuum chambers of a device, for example a mass spectrometer.
  • the suction ports supply gas to various axially spaced locations of the rotor.
  • Several so-called rotor-stator packages are arranged along the rotor axis, each of which compresses gas.
  • a high vacuum side stator pack creates a pressure ratio between its inlet and outlet. The inlet is connected to a first vacuum chamber. The outlet is connected to the inlet of the next rotor-stator package. In addition, this area between two rotor-stator packages is connected to a second vacuum chamber.
  • Another variant for evacuating an arrangement with several vacuum pumps is to provide each vacuum pump with its own flange. A vacuum pump suitable for the pressure range is then connected to this. This route is unpopular due to the high cost of the large number of vacuum pumps. There is also a need for compact devices. However, these cannot be realized with a large number of vacuum pumps.
  • vacuum chambers In a large number of applications, several vacuum chambers are arranged in series and connected to one another by bores with a low conductivity. From one end of the series to the other, the gas pressure inside the vacuum chamber decreases.
  • the holes are designed in such a way that a particle beam can pass through them and thus through the row of vacuum chambers.
  • the lowest pressure vacuum chamber often contains an analysis device, such as a mass spectrometer.
  • Split flow vacuum pumps are known from practice which have three or four radial inlets and which have at least four pump stages.
  • Pump stages are usually turbomolecular pump stages. These are often combined with other pump stages, for example Holweck pump stages or Gaede pump stages.
  • the technical problem on which the invention is based is to provide a split flow vacuum pump in which the number of inlets is increased without increasing the number of pump stages provided.
  • the split-flow vacuum pump according to the invention with at least three radial inlets and with at least four pump stages, with at least two pump stages being designed as turbomolecular pump stages, is characterized in that the at least three inlets are designed as main inlets, which are arranged in the axial direction between the turbomolecular pumping stages, with at least one additional radial secondary inlet being provided, which is arranged in the area of at least one turbomolecular pumping stage and that the at least one secondary inlet is located between two Stator disks or between two rotor disks or between a stator disk and a rotor disk is arranged at least one turbomolecular pumping stage.
  • the design of the vacuum pump according to the invention makes it possible to provide at least one secondary inlet in addition to the main inlets.
  • the main inlets are located between the pumping stages as known in the art.
  • at least one additional inlet is provided, which is arranged in the area of at least one turbomolecular pump stage. This means that what is known as a tap, that is to say the inlet, is not arranged between the turbomolecular pumping stages, but that the tapping leads radially into a disk pack of the at least one turbomolecular pumping stage.
  • the invention makes it possible to evacuate as many chambers as possible in a multi-chamber system over a short axial length.
  • the rotor can be designed in one piece or in several pieces.
  • the at least one auxiliary inlet has a central axis and the central axis is arranged between a first and a last disk of the at least one turbomolecular pumping stage.
  • the at least one secondary inlet is arranged between two stator disks or between two rotor disks or between a stator disk and a rotor disk of at least one turbomolecular pump stage. According to a further advantageous embodiment of the invention, it is provided that the secondary inlet is arranged between the disks of a stator core, while a main inlet is arranged between the stator cores.
  • втори ⁇ н ⁇ е ⁇ о ⁇ оловки these can also be arranged radially offset from one another at the same axial height of the rotor.
  • the secondary inlets are arranged in a disk pack between two rotor disks and distributed radially around the circumference. However, they can also lie on one level.
  • the at least one auxiliary inlet is arranged between two adjacent stator disks or between adjacent rotor disks or between a stator disk and an adjacent rotor disk of at least one turbomolecular pumping stage.
  • the secondary inlets are chosen to be relatively small in terms of their diameter and are arranged between the discs.
  • a pumping speed of the at least one secondary inlet is lower than the pumping speed of a main inlet.
  • the secondary inlets serve to increase the number of taps in a multi-chamber system to be evacuated.
  • a disk pack of the turbomolecular pump stage is formed from two disks, a secondary inlet can be provided between these two disks.
  • turbomolecular pumping stages can be designed with and without side inlets.
  • At least one turbomolecular pump stage at least one Holweck pump stage and/or a Siegbahn pump stage and/or a Gaede pump stage and/or a side channel pump stage and/or a screw pump stage is provided.
  • Split flow pumps usually consist of one or more turbomolecular pump stages and at least one other pump stage.
  • the pressure conditions in the chambers to be evacuated can be adjusted accordingly.
  • a main inlet between the pump stages for example between two turbomolecular pump stages, and to additionally arrange a Holweck pump stage, for example.
  • at least one further secondary inlet is additionally arranged in the area of the at least two turbomolecular pump stages.
  • a turbomolecular pumping stage is formed from one or more rotor disks and from one or more stator disks.
  • a pump stage usually consists of at least one stator disk and at least one rotor disk.
  • a plurality of stator disks and a plurality of rotor disks, which mesh alternately, are often provided.
  • n panes it is advantageously provided that with n panes, n ⁇ 1 secondary inlets are provided. For example, if there is a stator disc and a rotor disc forming a turbomolecular pumping stage, the inlet is located between these discs.
  • a further advantageous embodiment of the invention provides that a stator disk and an adjacent rotor disk of a turbomolecular pumping stage define an axial length L, and that a distance between two turbomolecular pumping stages is at least as large as this length L.
  • At least one stator disk and one rotor disk form at least one turbomolecular pumping stage. If the distance between adjacent stator disks and/or adjacent rotor disks is so great that the length L is exceeded, a new turbomolecular pumping stage begins according to the invention. An inlet in this area between the turbomolecular pumping stages is considered the main inlet. An inlet in the area of the turbomolecular pumping stage itself is considered a side inlet.
  • the embodiment according to the invention with regard to the inlets can in principle also be used in a turbomolecular pump.
  • a pump stage advantageously consists of at least one rotor disk and at least one stator disk.
  • the auxiliary inlet is located between the rotor disk and the stator disk.
  • a vacuum system is provided with at least one vacuum pump and at least one recipient, in which a detachable connection is provided between the vacuum pump and the recipient, with at least one elastomer seal for sealing the connection towards the atmosphere side and at least one elastomer seal towards the vacuum side a gap seal is provided, which is characterized in that at least one suction channel and/or at least one suction opening is/are provided between the elastomer seal and the gap seal.
  • This embodiment has the advantage that an elastomer seal is used at the sealing points on the atmosphere side. This is advantageously designed as an O-ring. At least one gap seal is used as the second sealing element between the elastomer seal and the ultra-high vacuum connection, for example. The surfaces of the recipient (chamber) and a surface of the pump housing are pressed against each other.
  • the 1 shows a vacuum pump 1, which is designed as a so-called split-flow vacuum pump.
  • the vacuum pump 1 is connected to a multi-chamber vacuum system 2 .
  • the multi-vacuum system 2 has four chambers 3, 4, 5, 6, which are to be evacuated by the vacuum pump 1.
  • the gas pressure in the chambers 3, 4, 5, 6 increases in this order.
  • the chambers 3, 4, 5, 6 are separated from one another by partitions 7, 8, 9, with bores 9, 10, 11 establishing a connection.
  • These holes 9, 10, 11 are, for example arranged and dimensioned in such a way that a particle beam can pass through all chambers 3, 4, 5, 6.
  • first partition wall 7 separates the first chamber 3 and the second chamber 4 from each other, while the second partition wall 8 separates the second chamber 4 from the third chamber 5 and the third partition wall 9 separates the third chamber 5 from the fourth chamber 6.
  • the dashed arrows in the 1 illustrate the gas flow.
  • the vacuum pump 1 has a shaft 13 which carries rotor disks 14-19.
  • the rotor disks 14 to 19 are in engagement with the stator disks 20.
  • the rotor disks 14, 15, 16 form a first disk pack 21 and the rotor disks 17 to 19 form a second disk pack 22.
  • the disk pack 22 forms with the stators 20 a high-vacuum side rotor-stator pack.
  • the disk pack 21 forms, together with the stator disks 20, a rotor-stator pack on the intermediate vacuum side.
  • the blades in both sets are fastened to support rings on both the stator and rotor side or are formed in one piece with the latter.
  • a first gas inlet 23 is located in front of the rotor-stator core on the high-vacuum side
  • a second gas inlet 24 is located in front of the rotor-stator core on the pre-vacuum side.
  • a first main inlet 23 leads from the multi-chamber vacuum system into the vacuum pump 1.
  • a second main inlet 24 leads into the vacuum pump 1.
  • another main inlet 25 leads into the vacuum pump 1 and from the vacuum chamber 6, another main inlet leads 26 into the vacuum pump 1.
  • the main inlets 23,24,25,26 are located between the turbomolecular pumping stages 21,22.
  • a first secondary inlet 27 is arranged in the area of the turbomolecular pump stage 22 and leads from the vacuum chamber 5 into the vacuum pump 1 .
  • another secondary inlet 28 leads from the vacuum chamber 6 in the area of the turbomolecular pump stage 21 into the vacuum pump 1.
  • the secondary inlets 27, 28 are arranged in the region of the turbomolecular pump stages 21, 22.
  • the rotor shaft 13 has areas with different diameters.
  • a first area 29 is an area with the largest diameter.
  • On both sides of the shaft 13 are two areas 30, 31 with smaller diameters. This in turn is followed by areas 32, 33 with an even smaller diameter of the shaft 13.
  • No rotor disks are arranged in the region 29 of the largest diameter of the shaft 13 .
  • the rotor disk 16 is arranged in the area 30 and is locally clearly defined by a stop 34 formed by the stepped shoulder between the area 29 and the area 30 .
  • a further advantage of the invention lies in the fact that the rotor disks 14 to 19 are placed exactly on the shaft, as a result of which very small gaps can be formed. This increases the pumping capacity of the vacuum pump 1.
  • the use of many identical parts means that the pump is inexpensive to manufacture.
  • two sets of rotor disks, each with the same inner diameter are arranged on both sides of the region 29 of the shaft 13 with the largest diameter.
  • Another advantageous embodiment of the invention is an embodiment in which 29 grooves 39, 40 are arranged in the region of the largest diameter, which reduce the mass of the shaft. Since the split flow vacuum pumps have a very long overall length, the modal behavior of the rotor and in particular the rotor shaft is critical. For this reason, according to the invention, the mass and thus also the weight of the shaft are reduced while the rigidity remains the same.
  • the vacuum pump 1 has a housing 41 .
  • the housing 41 has a constriction 42 in order to reduce thermal transitions between the high-vacuum side and the pre-vacuum side in the housing 41 .
  • This constriction reduces the thermal conductivity. It is possible to additionally provide a reinforcement, not shown, in the area of the constriction 42 .
  • the housing can also be divided in the area of the constriction 42 and a thermal seal can be arranged between the two parts of the housing.
  • the shaft 13 is mounted on one side by means of a magnetic bearing 43 .
  • Counter bearings 43b are arranged in a holder 43a, which is only shown schematically. On the other hand, the bearing is not shown.
  • the bearing on the side that is not shown can be, for example, an oil-lubricated ball bearing.
  • the rotor disk 15 and the stator disk 20 have an axial length L when viewed in the axial direction on.
  • the distance between the turbomolecular pumping stages 21, 22 is greater than the length L.
  • FIG. 2 shows the shaft 13 with rotor disk packs 44, 45, 46, which form turbomolecular pump stages 44, 45, 46 with stator disc packs (not shown).
  • the gas flow is represented by an arrow 47 .
  • Arrows 48 represent the gas flow fed from two main inlets 24,25 to the turbomolecular pumping stages 45,46.
  • the arrows 49 indicate the gas flow which is supplied to the pumping system from two side inlets 27, 28 in the region of the turbomolecular pumping stages 44, 45.
  • the secondary inlets 27, 28 are arranged in the region of the turbomolecular pumping stages 44, 45, while the main inlets 24, 25 have their supply between the turbomolecular pumping stages 44, 45 and 46.
  • turbomolecular pump stages 44, 45, 46, 49 consist of rotor disks and stator disks which are arranged in an intermeshing manner.
  • main inlets 23, 24, 25, 26 are provided, which are arranged in front of the pumping stage 44 or between the pumping stages 44, 45, 46, 49.
  • the shaft 13 is supported by a magnetic bearing 43 and a ball bearing 50 .
  • the ball bearing 50 is an oil-lubricated ball bearing.
  • the shaft 13 is driven by a motor 51.
  • a secondary inlet 27 is provided in the area of the turbomolecular pump stage 44 .
  • a secondary inlet 28 is provided in the area of the turbomolecular pumping stage 45 and a secondary inlet 52 is provided in the area of the turbomolecular pumping stage 46 .
  • This embodiment increases the number of inlets from the four main inlets 23, 24, 25, 26 to a total of seven inlets, namely plus the three secondary inlets 27, 28, 52.
  • the shaft 13 has the 1 shown areas 29 with the largest diameter, the adjoining areas 30, 31 with a smaller diameter and the in turn adjoining areas 32, 33 with a further reduced diameter.
  • the rotor disks 16, 17 are arranged.
  • the rotor disks 15, 18, 19 are arranged.
  • the rotor disks 15, 18, 19 have the same inner diameter.
  • the rotor disks 16, 17 also have the same inner diameter. This makes it possible to construct an inexpensive pump using a large number of identical parts.
  • the difference in diameter between the areas 29, 30 forms the stop 34. Between the areas 29, 31 the stop 36 is provided. The stop 35 is arranged between the areas 30, 32 and the stop 37 is provided between the areas 31, 33.
  • the assembly direction of the discs 15, 16 is indicated by the arrow A.
  • the assembly direction of the rotor disks 17, 18, 19 is indicated by the arrow B.
  • a central axis of the shaft 13 is marked with M.
  • FIG. The shaft 13 and the rotor disks 15, 16, 17, 18, 19 are rotationally symmetrical about the central axis M.
  • figure 5 shows a shaft 13 with two turbomolecular pump stages 21, 22, which are arranged in a housing 41 of a split-flow pump.
  • the housing 41 has an inlet 24 .
  • This prior art embodiment shows that a customer housing 60 has an inlet 61 that is radially offset from the inlet 24 .
  • the axial length of the pump and the customer chamber 60 do not match.
  • the housing 41 has a web 62 in the area of the inlet 24 .
  • the vacuum connection 72 has an elastomer seal 76 and a gap seal 77. Between the elastomer seal 76 and the gap seal 77 there is a suction channel 78 in which intermediate suction devices 79 are arranged. A suction opening 80 is arranged in the vacuum connection 75 . The intermediate suctions 79 lead into a through-bore 81, which leads to the intermediate stage 73. A connecting channel 82 is provided for a sealing arrangement of the vacuum connection 75 , so that the vacuum connection 75 is also evacuated via the suction opening 80 via the through-hole 82 .
  • 8 12 shows a rotor 126, which is shown only schematically, with rotor disks 14, 15, 16, 17. Between the rotor disks 16, 17, two secondary inlets 27, 28 are arranged. The secondary inlets 27, 28 are radially spaced from each other and both lead between the rotor discs 16, 17.
  • FIG. 9 shows a housing 60 of a vacuum pump with the vacuum connections 72, 73.
  • Two secondary inlets 27, 28 are provided, which are arranged in one plane.
  • FIG. 10 shows the rotor shaft 126 on which the rotor disks 14, 15 are arranged. Between the rotor disks 14, 15, a stator disk 20 is arranged schematically. The rotor disks 14, 15 each have a collar 127. The collar 127 replaces the spacer sleeve 38, which is 1 is shown.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (8)

  1. Pompe à vide à flux divisé (1) comprenant au moins trois entrées radiales (24, 25, 26) et au moins quatre étages de pompe (21, 22, 44, 45, 46), au moins deux étages de pompe étant conçus comme étages de pompe turbomoléculaires (44, 45, 46), caractérisée en ce que
    - les au moins trois entrées (24, 25, 26) sont conçues comme des entrées principales qui sont disposées entre les étages de pompe turbomoléculaires (44, 45, 46) dans la direction axiale,
    - de plus au moins une entrée secondaire radiale (27, 28, 52) étant prévue qui est disposée dans la région d'au moins un étage de pompe turbomoléculaire (44, 45, 46),
    - et l'au moins une entrée secondaire (27, 28, 52) est disposée entre deux disques de stator (20) ou
    - entre deux disques de rotor (14 à 19) ou
    - entre un disque de stator (20) et un disque de rotor (14 à 19) d'au moins un étage de pompe turbomoléculaire (1).
  2. Pompe à vide à flux divisé selon la revendication 1, caractérisée en ce que l'au moins une entrée secondaire (27, 28, 52) comporte un axe central et en ce que l'axe central est disposé entre un premier et un dernier disque (14 à 19 ; 20) de l'au moins un étage de pompe turbomoléculaire (21, 22, 44, 45, 46).
  3. Pompe à vide à flux divisé selon la revendication 1 ou 2, caractérisée en ce qu'au moins deux entrées secondaires (124, 125) sont disposées de manière radialement décalée l'une de l'autre.
  4. Pompe à vide à flux divisé selon la revendication 1, caractérisée en ce que l'au moins une entrée secondaire (52) est disposée entre deux disques de stator adjacents (20) et/ou entre deux disques de rotor adjacents (14 à 19) et/ou entre un disque de stator (20) et un disque de rotor adjacent (14 à 19) d'au moins un étage de pompe turbomoléculaire (1).
  5. Pompe à vide à flux divisé selon l'une des revendications précédentes, caractérisée en ce que la vitesse de pompage de l'au moins une entrée secondaire (27, 28, 52) est inférieure à la capacité d'aspiration d'une entrée principale (23, 24, 25, 26).
  6. Pompe à vide à flux divisé selon l'une des revendications précédentes, caractérisée en ce qu'il est prévu n-1 entrées secondaires (27, 28, 52) pour n disques (14 à 19, 20).
  7. Pompe à vide à flux divisé selon l'une des revendications précédentes, caractérisée en ce qu'un disque de stator (20) et un disque de rotor adjacent (14 à 19) d'un étage de pompe turbomoléculaire (21, 22, 44, 45, 46) définissent une longueur axiale (L) et en ce qu'une distance entre deux étages de pompe turbomoléculaires (21, 22, 44, 45, 46) estau moins égale à la longueur (L).
  8. Système de vide comprenant au moins une pompe à vide à flux divisé selon l'une des revendications précédentes et au moins un récipient dans lequel une liaison amovible est prévue entre la pompe à vide et le récipient, au moins une garniture d'étanchéité (76) en élastomère étant prévue pour étanchéifier la liaison avec le côté atmosphère et au moins une boîte à labyrinthe (77) étant prévue en direction du côté vide, caractérisé en ce qu'au moins un canal d'aspiration et/ou au moins une ouverture d'aspiration (80) sont prévues entre la garniture d'étanchéité (76) en élastomère et la boîte à labyrinthe (77).
EP15174844.9A 2015-07-01 2015-07-01 Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé Active EP3112688B2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15174844.9A EP3112688B2 (fr) 2015-07-01 2015-07-01 Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
JP2016128671A JP6253719B2 (ja) 2015-07-01 2016-06-29 スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15174844.9A EP3112688B2 (fr) 2015-07-01 2015-07-01 Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé

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EP3112688A1 EP3112688A1 (fr) 2017-01-04
EP3112688B1 EP3112688B1 (fr) 2019-06-12
EP3112688B2 true EP3112688B2 (fr) 2022-05-11

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CN106678058A (zh) * 2017-02-22 2017-05-17 上海优耐特斯压缩机有限公司 高速电机直驱透平机械的超高速转子结构
EP3441617B1 (fr) * 2017-08-09 2019-12-25 Pfeiffer Vacuum Gmbh Procédé de chauffage d'un rotor d'une pompe à vide
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
EP3767109B1 (fr) 2019-07-15 2021-09-08 Pfeiffer Vacuum Gmbh Système à vide
GB2604382A (en) * 2021-03-04 2022-09-07 Edwards S R O Stator Assembly

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EP3112688B1 (fr) 2019-06-12
JP2017020502A (ja) 2017-01-26
JP6253719B2 (ja) 2017-12-27
EP3112688A1 (fr) 2017-01-04

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