EP3267040B1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

Info

Publication number
EP3267040B1
EP3267040B1 EP16177824.6A EP16177824A EP3267040B1 EP 3267040 B1 EP3267040 B1 EP 3267040B1 EP 16177824 A EP16177824 A EP 16177824A EP 3267040 B1 EP3267040 B1 EP 3267040B1
Authority
EP
European Patent Office
Prior art keywords
pump
stage
turbomolecular
backing
pump stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16177824.6A
Other languages
German (de)
English (en)
Other versions
EP3267040A1 (fr
Inventor
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP16177824.6A priority Critical patent/EP3267040B1/fr
Publication of EP3267040A1 publication Critical patent/EP3267040A1/fr
Application granted granted Critical
Publication of EP3267040B1 publication Critical patent/EP3267040B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention relates to a turbomolecular pump with a pump inlet and a pump outlet, which are formed in a common pump housing, and with at least one turbomolecular pump stage, which has an inlet region associated with the pump inlet and an outlet region.
  • Vacuum pumps play an important role in vacuum technology and are used in a wide variety of technical applications for suction of mostly gaseous media and for the evacuation of cavities.
  • turbomolecular pumps also known as turbopumps, are used.
  • Turbomolecular pumps work in the molecular, i.e. non-viscous, range and are suitable for generating a vacuum with a very high level of purity.
  • a turbomolecular pump typically includes a housing that encloses a pump chamber with a rotor shaft. At least one pump structure of the turbomolecular pump is arranged in the pump room, which conveys a gas present in the pump room or in an area to be evacuated from an inlet to an outlet of the turbomolecular pump and thereby pumps it.
  • a drive for the rotor shaft is usually arranged in a storage room that is separate from the pump room.
  • Turbomolecular pumps are torque transfer pumps in which gas molecules entering the pump of a gas to be pumped receive a torque through an impact on the moving rotor blades of the rotor shaft.
  • the Pump usually contains several pump stages of rotor and stator disks arranged in series or one behind the other. Each pump stage generally consists of at least one rotor and stator disk, which are arranged in pairs. If necessary, a pump stage can also consist of only one rotor disk, and this applies in particular to the pump stage located at the downstream end. In this case, the pump ends with a rotor disk.
  • the gas molecules receive a movement component parallel to the axis of the pump due to the position of the rotor and stator disks relative to one another, the axis usually corresponding to the rotor shaft.
  • multiple pump stages increase the pressure of the gas from the inlet to the outlet of the pump.
  • a turbomolecular pump basically only works effectively in pressure ranges in the molecular flow range and does not evacuate or deliver to atmospheric pressure, but is usually supported by a backing pump, which then ejects against a gas pressure of more than 1 mbar.
  • the working pressure range of the turbomolecular pump can be expanded by coupling a molecular pump stage driven by the same rotor shaft, for example a Holweck pump stage or Siegbahn pump stage, to the outlet of the turbomolecular pump within the pump housing. This makes it possible to use backing pumps with lower performance because the outlet pressure of the gas is increased.
  • Backing pumps for example diaphragm pumps and spiral or scroll pumps, are self-sufficient pumps that are arranged separately from the turbomolecular pump in question, the suction side of which is connected to the outlet of the turbomolecular pump via lines.
  • such an arrangement involves a certain amount of effort in terms of an airtight and electrical connection of both pumps. A risk of functional impairment due to leaks and errors in the electrical connection cannot generally be ruled out.
  • the EP 1 213 482 A1 shows a turbomolecular pump according to a related technology.
  • the object of the present invention is to provide a turbomolecular pump which overcomes the disadvantages described above, i.e. a compact, easy-to-integrate turbomolecular pump, the commissioning of which is as simple as possible and therefore has few sources of error, while at the same time the turbomolecular pump can be produced with as little effort as possible and also a should have a long service life.
  • turbomolecular pump with the features of claim 1.
  • the turbomolecular pump according to the invention comprises at least one pre-pump stage effective between the outlet region of the turbomolecular pump stage and the pump outlet, which is designed to compress gas conveyed by the turbomolecular pump stage and to expel it against a gas pressure of more than 1 mbar, in particular against atmospheric pressure.
  • the turbomolecular pump according to the invention is characterized in particular by the integration of the pre-pumping stage.
  • the turbomolecular pump according to the invention is therefore particularly advantageously a compact unit that can be put into operation immediately without having to connect a separate backing pump as a further component. For the user, this results in significant time savings during installation and space savings. The risk of errors occurring during installation is greatly reduced due to the integral design.
  • the pump according to the invention can be handled like a conventional pump of the respective type, especially with regard to the minimal space requirement and the arbitrary installation position.
  • the pump has its own pre-pump stage, so to speak, "on board”, so that it can also generate a high vacuum pressure on the suction side and, on the discharge side, directly against a relatively high pressure and in particular against atmospheric pressure, while at least largely retaining all the advantages of a conventional pump of the respective type can eject.
  • the invention can be realized in particular by using a special small design of a pump type suitable as a pre-pumping stage.
  • a pump type suitable as a pre-pumping stage.
  • mini pre-pumps Such backing pumps can work in continuous operation without their own backing pumps and can eject against a relatively high pressure, for example of more than 1 mbar, or even against atmospheric pressure. It has Surprisingly, it has been shown that such pumps can be used as backing pumps integrated into turbomolecular pumps and can therefore make the use of conventional backing pumps unnecessary. A lot of energy can be saved by eliminating a separate backing pump.
  • a conventional separate backing pump can be helpful for initially evacuating a recipient.
  • the integrated pre-pump stage according to the invention is sufficient, i.e. the conventional separate pre-pump then only needs to be used for the initial evacuation, for example by temporarily connecting in parallel.
  • the pre-pumping stage is based on a type of pump drive movement that is different from that of the turbomolecular pumping stage.
  • the pre-pumping stage develops its pumping effect through components that orbit relative to one another during operation. In other words, the pre-pumping stage is based on an orbiting relative movement of its pumping components.
  • the pre-pump stage is based on an orbiting relative movement of its pumping components.
  • the pump stage comprises at least one stationary conveying element and at least one conveying element that moves during operation relative to the stationary conveying element, wherein the stationary delivery element of the pre-pumping stage is at least partially formed by the pump housing.
  • the stationary conveying element is, for example, a spiral-shaped stator of a spiral vacuum pump or scroll vacuum pump.
  • the pre-pumping stage can have at least one axis of movement, with respect to which at least two components of the pre-pumping stage move relative to one another during operation, the axis of movement of the pre-pumping stage and a rotation axis of a rotor shaft of the turbomolecular pumping stage not coinciding.
  • the pre-pumping stage can have at least one axis of symmetry that does not coincide with the axis of rotation of the rotor shaft of the turbomolecular pumping stage.
  • the two components are the spiral rotor and the spiral stator of a spiral or scroll vacuum pump.
  • the pre-pump stage is a dependent unit, the operation of which requires one or more functional parts of the turbomolecular pump.
  • a common control and/or a common energy supply can be provided for the turbomolecular pump stage and for the pre-pump stage.
  • the functional parts of the turbomolecular pump can be, for example, an electric motor, an accessory connection, a data interface, a flood inlet, a barrier or coolant connection, a rotor shaft or structural elements forming gas flow paths.
  • the pre-pumping stage is preferably dependent on the energy supply of the turbomolecular pumping stage and possibly further pumping stages and shares a common control with this pumping stage or these pumping stages.
  • the pre-pump stage is of the type of a spiral or scroll vacuum pump.
  • Spiral or scroll vacuum pumps usually have crescent-shaped scoop spaces, which are formed by a rotor with a spiral cross-section in engagement with a similar spiral-shaped stator, the rotor being set into an orbiting movement by an eccentric drive. This type of pump is therefore based on an orbiting pump drive movement.
  • the priming stage is of a type different from a side channel or regeneration vacuum pump.
  • the side channel pump power is transferred from a rotor rotating concentrically in the housing to a medium to be pumped in a side channel arranged next to the rotor.
  • the medium moves back and forth several times between individual areas of the rotor and the side channel.
  • momentum exchange energy is transferred between the medium, which rotates at approximately the rotational speed of the rotor, and the medium, which flows more slowly in the side channel.
  • the delivery performance is based on this exchange of impulses.
  • This type of pump is therefore based on a rotating pump drive movement.
  • the pre-pumping stage is integrated into the turbomolecular pump completely independently of the position of the rotor shaft of the turbomolecular pumping stage.
  • This can in particular simplify retrofitting existing turbomolecular pumps with an integrated pre-pump stage.
  • it may be sufficient to modify only a few components, e.g. the housing, of an existing turbomolecular pump in order to integrate a pre-pump stage.
  • the pre-pump stage comprises a housing which is at least partially formed by the pump housing.
  • At least one, preferably three, in particular five housing side(s) of the housing of the pre-pump stage is/are at least partially formed by the pump housing.
  • the housing of the pre-pump stage can, for example, be placed on the pump housing with one open housing side or inserted or pushed into a corresponding receptacle of the pump housing with several open housing sides.
  • the pre-pump stage can also be at least partially enclosed by a housing within the pump housing, in particular in order to achieve a demarcation from further functional parts of the turbomolecular pump stage.
  • the housing of the pre-pump stage can be connected to the pump housing by fasteners such as screws, rivets or adhesive.
  • the pre-pumping stage or at least one pump-active structure of the pre-pumping stage is arranged in the pump housing or on the pump housing.
  • the pre-pumping stage is arranged in the pump housing or within the pump housing, ie the pre-pumping stage is preferably completely surrounded by the pump housing.
  • the pre-pumping stage is preferably completely surrounded by the pump housing.
  • an optional drive of the fore-pump stage can also be arranged in or on the pump housing.
  • the pre-pumping stage or at least a pump-active structure of the pre-pumping stage is at least partially formed by the pump housing.
  • spiral stator of a spiral or scroll vacuum pump can be designed as an integral part of the pump housing.
  • the pre-pump stage is many times smaller than the pump housing, at least 5 to 10 times, preferably 10 to 15 times.
  • the pre-pumping stage preferably only takes up about a fifth to a tenth, in particular a tenth to a fifteenth, of the total volume of the pump housing.
  • the pre-pump stage is arranged asymmetrically and/or eccentrically with respect to the axis of rotation of the rotor shaft of the turbomolecular pump stage.
  • the arrangement of the pre-pump stage is independent of the position of the rotor shaft of the turbomolecular pump stage.
  • the pre-pumping stage can be arranged within a limited angular range around the axis of rotation of the rotor shaft of the turbomolecular pumping stage, whereby the Angular range is less than 180°, in particular less than 135°, preferably less than 90°.
  • an outlet region of the pre-pumping stage forms the pump outlet.
  • the outlet region of the pre-pump stage may be connected to the pump outlet directly or via a gas flow path that is delimited by one or more housing parts and/or stationary, fixed structural elements located within the pump housing.
  • the gas flow path is, for example, a channel which is formed in particular in a wall of the pump housing.
  • the inlet region of the pre-pump stage is connected directly to the outlet region of the turbomolecular pump stage or to an outlet region of a further pump stage arranged between the turbo-molecular pump stage and the pre-pump stage.
  • the further pump stage is in particular a molecular pump stage, for example a Siegbahn and/or Holweck pump stage.
  • Several further pump stages can be arranged between the turbomolecular pump stage and the pre-pump stage.
  • a gas flow path between the outlet region of the turbomolecular pump or the outlet region of the further pump stage arranged between the turbomolecular pump stage and the pre-pump stage on the one hand and the inlet region of the pre-pump stage on the other hand by one or more housing parts and / or stationary, fixed ones within the pump housing structural elements located is limited.
  • a preferred embodiment of the turbomolecular pump according to the invention has a turbomolecular pump stage, a molecular pump stage, in particular a Holweck pump stage, and a pre-pump stage.
  • the pre-pump stage is a miniaturized spiral or scroll vacuum pump compared to the dimensions of the pump housing of the turbomolecular pump, the spiral-shaped stator of which is formed by a structural element of the pump housing.
  • the spiral or scroll vacuum pump preferably has its own electric motor drive, which draws its energy from the energy supply of the turbomolecular pump stage and/or the molecular pump stage.
  • the spiral or scroll vacuum pump including its drive motor is arranged in the pump housing and the outlet area of the spiral or scroll vacuum pump is connected to the pump outlet via a gas flow path, which is in particular designed as a simple bore.
  • the external dimensions of a turbomolecular pump according to the invention are at least essentially the same as the dimensions of a corresponding conventional turbomolecular pump which does not include an integrated pre-pump stage.
  • the inventive integration of the pre-pump stage into the turbomolecular pump significantly increases the compactness of a high vacuum pump system, which previously usually consisted of at least two separate components - the turbomolecular pump and the fore-vacuum pump. This significantly reduces the space requirement. Installation is particularly simplified for the user because there is no need to wire two separate components.
  • the short gas flow paths within the turbomolecular pump housing created by integrating the pre-pump stage also reduce the risk of leaks.
  • Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms the alignment of the vacuum pump according to Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. Fig. 3 ).
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be ventilated.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection via which flushing gas to protect the electric motor 125 from the gas delivered by the pump into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 accommodated, can be brought (cf. Fig. 3 ).
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection as an outlet for coolant, which can be passed through the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can therefore be operated hanging, so to speak.
  • the vacuum pump 111 can be designed so that it is also in operation can be taken if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 can be arranged not facing downwards, but facing to the side or facing upwards.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening holes 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about a rotation axis 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another and having a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump pump stage. Together, the pairs form rotor disk 155 and stator disk 157, a turbomolecular pump stage 250.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages that are arranged one inside the other in the radial direction and are effectively connected in series.
  • the rotor of the Holweck pump stages includes a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 which are fastened to the rotor hub 161 and supported by it, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested within one another when viewed in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, i.e. by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and forms a second Holweck pump stage with this.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175 and with this forms the third Holweck pump stage.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 communicates with the middle Holweck gap 173 is connected.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas is used to operate the Drive vacuum pump 111 into the Holweck grooves.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of an operating medium storage.
  • the operating medium storage comprises several absorbent disks 187 stacked on top of one another, which are soaked with an operating medium for the rolling bearing 181, for example with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid storage via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the rolling bearing 181, where it e.g. fulfills a lubricating function.
  • the rolling bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack made up of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, with the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 on the radial outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • the rotor-side ring magnets 195 are fixed parallel to the rotation axis 151 by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the rotation axis 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnets 197.
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which rests without contact during normal operation of the vacuum pump 111 and only comes into engagement when there is an excessive radial deflection of the rotor 149 relative to the stator in order to create a radial stop for the rotor 149 form, thereby preventing a collision between the rotor-side structures and the stator-side structures becomes.
  • the backup bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 comes into engagement is large enough so that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures occurs under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other for transmitting the drive torque.
  • the motor stator 217 is fixed in the housing within the engine compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purge gas and which can be, for example, air or nitrogen, can reach the engine compartment 137 via the sealing gas connection 135.
  • the barrier gas can be used to protect the electric motor 125 from process gas, for example from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing vacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the engine compartment 217 compared to the Holweck pump stages located radially outside.
  • Fig. 6 shows schematically a possible basic structure of a turbomolecular pump 110 according to the invention, which has a turbomolecular pump stage 250 arranged in a housing 119, a molecular pump stage 270 connected downstream of it and a pre-pump stage 300 connected downstream of the molecular pump stage 270.
  • the pre-pumping stage 300 has a housing 302, which is partially formed by the housing 119. As can be seen from the representation of the Fig. 6 As becomes clear, the housing 302 of the pre-pumping stage 300 is much smaller than the pump housing 119. The pre-pumping stage 300 is thus integrated into the turbomolecular pump 110.
  • a gas flow path 312 is indicated by arrows.
  • a gas to be pumped enters the turbomolecular pump stage 250 from a recipient (not shown) via an inlet region 116. After passing through an outlet region 118 of the turbomolecular pumping stage 250, the gas enters the molecular pumping stage 270 and passes from its outlet region 272 into an inlet region 316 of the pre-pumping stage 300.
  • the pre-pumping stage 300 pushes the gas against a comparatively high pressure of more than compared to a vacuum 1 mbar and in particular against atmospheric pressure, namely via an outlet region 310 of the pre-pumping stage 300. It can therefore be the pre-pumping stage 300 that forms the outlet 117 of the pump 110.
  • Fig. 7 shows a schematic cross section through the turbomolecular pump 110 Fig. 6 , which is shown here as a square for simplicity. Alternatively, the cross section can be circular. It can be seen that the pre-pumping stage 300 is arranged within an angular range of less than 90° about an axis of rotation 151 of a rotor shaft 153.
  • the rotor shaft 153 is both the turbomolecular pump stage 250 and the molecular pump stage 270 are assigned.
  • the arrangement of the pre-pumping stage 300 in the housing 119 is in principle independent of the position of the rotor shaft 153, since the pre-pumping stage 300 is not part of the rotor shaft 153 and is not driven by the rotor shaft 153.
  • the Fig. 6 and 7 It can be seen that the pre-pumping stage 300 is arranged in a bottom edge region of the pump housing 119.
  • the Fig. 8 to 10 each show a turbomolecular pump 110 according to the invention, which differs from the pump according to Fig. 1 to 5 each essentially differ by the integrated pre-pump stage 300, the arrangement of the pump outlet 117 and the arrangement of the sealing gas connection 135. Corresponding components are only partially provided with identical reference numbers for reasons of clarity. Matches between the pumps 110 are sometimes only made in connection with one of the Fig. 8 to 10 explained.
  • the turbomolecular pump 110 includes a molecular pump stage 270 in the form of three Holweck pump stages, which are connected downstream of the turbomolecular pump stage 250.
  • the outlet region 272 of the molecular pump stage 270 is connected to the inlet region of the pre-pump stage 300 via a gas flow path 312, which is designed as a bore in a structural element of the housing 119.
  • the outlet region 310 of the pre-pumping stage 300 forms the pump outlet 117, through which the gas to be pumped can be expelled against atmospheric pressure.
  • the pre-pumping stage 300 is, for example, an in Fig. 8 Spiral or scroll vacuum pump, not shown, which is surrounded by a housing 302. Parts of the housing 302 are formed by the housing 119. Conversely, the housing 302 of the pre-pumping stage 300 forms part of the actual Pump housing 119.
  • the pre-pump stage 300 can also include another type of pump in a small design.
  • the pre-pumping stage 300 further comprises its own drive motor, which is arranged within the housing 302 and is connected to the electronics housing 123 and in particular to the power supply connection 131 via a schematically indicated power supply line 124.
  • Pre-pumping stage 300, molecular pumping stage 270 and turbomolecular pumping stage 250 thus share an energy source, i.e. pre-pumping stage 300 is not an independent unit.
  • the pre-pumping stage 300 is therefore not only spatially but also functionally integrated into the turbomolecular pump 110.
  • Fig. 9 shows a further embodiment of a turbomolecular pump 110 according to the invention, in which the pre-pumping stage 300 is located completely within the pump housing 119.
  • the outlet region 310 of the pre-pumping stage 300 is connected to the pump outlet 117 via a gas flow path 312.
  • Fig. 10 shows a further embodiment of the turbomolecular pump 110 according to the invention, in which a stationary delivery element 306 of the pre-pump stage 300 is formed by the pump housing 119.
  • the stationary conveying element 306 is a spiral-shaped stator of a spiral or scroll vacuum pump forming the pre-pumping stage 300.
  • the spiral stator can either be milled into the housing 119 or formed on a separate insert that can be inserted into the housing 119 and fixed.
  • the pre-pumping stage 300 further comprises a moving conveying element 308 in the form of a spiral-shaped rotor, which is driven by an electric motor 318.
  • the rotor 308 and the motor 318 can be inserted into a receiving space of the pump housing 119 to assemble the rotor 308 and stator 306.
  • the rotor 308 and the stator 306 can be formed on one insert be that closes the pump housing 119. Alternatively, a separate closure element can be provided.
  • the motor 318 is in turn connected to the electronics housing 123 via a line 124.
  • the outlet region 310 of the pre-pumping stage 300 is connected to the pump outlet 117 via a gas flow path 312 in the form of a bore formed in the housing 119.
  • Fig. 11 shows a further embodiment of a turbomolecular pump 110 according to the invention, in which the pre-pumping stage 300 is located completely within the pump housing 119.
  • the pre-pump stage 300 is a spiral or scroll vacuum pump, which comprises a spiral-shaped stator as a stationary conveying element 306 and a spiral-shaped orbiter as a moving conveying element 308.
  • This conveying element 308 is driven by an electric motor 318 connected to the electronics housing 123 via a line 124.
  • the outlet area of the pre-pump stage 300 is connected to the pump outlet 117 in a manner not shown in detail here.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (13)

  1. Pompe turbomoléculaire (110) comprenant
    une entrée de pompe (115) et une sortie de pompe (117), qui sont réalisées dans un carter de pompe commun (119),
    au moins un étage de pompage turbomoléculaire (250), qui présente une zone d'entrée (116) associée à l'entrée de pompe (115) et une zone de sortie (118), et
    au moins un étage de pré-pompage (300) agissant entre la zone de sortie (118) de l'étage de pompage turbomoléculaire (250) et la sortie de pompe (117), qui est conçu pour comprimer le gaz refoulé par l'étage de pompage turbomoléculaire (250) et pour l'expulser à l'encontre d'une pression de gaz supérieure à 1 mbar, en particulier à l'encontre de la pression atmosphérique,
    dans laquelle
    l'étage de pré-pompage (300) est intégré dans la pompe turbomoléculaire (110), et
    l'étage de pré-pompage (300) est basé sur un mouvement relatif orbital de ses composants actifs en pompage, qui est différent du mouvement d'entraînement de l'étage de pompage turbomoléculaire (250), caractérisée en ce que
    l'étage de pré-pompage (300) comprend au moins un élément de refoulement stationnaire (306) et au moins un élément de refoulement (308) se déplaçant en fonctionnement par rapport à l'élément de refoulement stationnaire (306), l'élément de refoulement stationnaire (306) de l'étage de pré-pompage (300) étant formé au moins partiellement par le carter de pompe (119).
  2. Pompe turbomoléculaire (110) selon la revendication 1,
    caractérisée en ce que
    l'étage de pré-pompage (300) présente au moins un axe de mouvement par rapport auquel au moins deux composants de l'étage de pré-pompage (300) se déplacent l'un par rapport à l'autre en fonctionnement, l'axe de mouvement de l'étage de pré-pompage (300) et un axe de rotation (151) d'un arbre de rotor (153) de l'étage de pompage turbomoléculaire (250) ne coïncidant pas, et/ou
    en ce que l'étage de pré-pompage (300) présente au moins un axe de symétrie qui ne coïncide pas avec un axe de rotation (151) d'un arbre de rotor (153) de l'étage de pompage turbomoléculaire (250).
  3. Pompe turbomoléculaire selon la revendication 1 ou 2,
    caractérisée en ce que
    l'étage de pré-pompage (300) est une unité non autonome, dont le fonctionnement exige une ou plusieurs parties fonctionnelles de la pompe turbomoléculaire (110), et/ou
    en ce qu'une commande commune et/ou une alimentation en énergie commune sont prévues pour l'étage de pompage turbomoléculaire (250) et pour l'étage de pré-pompage (300).
  4. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) est du type d'une pompe à vide à spirale ou scroll.
  5. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) est d'un type différent d'une pompe à vide à canal latéral ou à régénération.
  6. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) comprend un carter (302) formé au moins en partie par le carter de pompe (119), et/ou
    en ce que l'étage de pré-pompage (300) ou au moins une structure active en pompage (304) de l'étage de pré-pompage (300) est disposé(e) dans le carter de pompe (119) ou sur le carter de pompe (119).
  7. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) ou au moins une structure active en pompage (304) de l'étage de pré-pompage (300) est au moins partiellement formé(e) par le carter de pompe (119).
  8. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) est plusieurs fois, au moins 5 à 10 fois, plus petit que le carter de pompe (119).
  9. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) est disposé de manière asymétrique et/ou excentrée par rapport à un axe de rotation (151) d'un arbre de rotor (153) de l'étage de pompage turbomoléculaire (250).
  10. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage de pré-pompage (300) est disposé à l'intérieur d'une plage angulaire limitée autour d'un axe de rotation (151) d'un arbre de rotor (153) de l'étage de pompage turbomoléculaire (250), ladite plage angulaire étant inférieure à 180°, en particulier inférieure à 135°, de préférence inférieure à 90°.
  11. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    une zone de sortie (310) de l'étage de pré-pompage (300) forme la sortie de pompe (117), ou
    en ce que la zone de sortie (310) de l'étage de pré-pompage (300) est reliée à la sortie de pompe (117) directement ou par l'intermédiaire d'un chemin d'écoulement de gaz (312) délimité par une ou plusieurs parties du carter et/ou par des éléments structurels stationnaires fixes (314) situés à l'intérieur du carter de pompe (119).
  12. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    une zone d'entrée (316) de l'étage de pré-pompage (300) est directement reliée à la zone de sortie (118) de l'étage de pompage turbomoléculaire (250) ou à une zone de sortie (272) d'un autre étage de pompage (270) disposé entre l'étage de pompage turbomoléculaire (250) et l'étage de pré-pompage (300).
  13. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    un chemin d'écoulement de gaz (312) entre la zone de sortie (118) de la pompe turbomoléculaire (250) ou une zone de sortie (272) d'un autre étage de pompage (270), disposé entre l'étage de pompage turbomoléculaire (250) et l'étage de pré-pompage (300), d'une part, et une zone d'entrée (316) de l'étage de pré-pompage (300), d'autre part, est délimité par une ou plusieurs parties du carter et/ou par des éléments structurels stationnaires fixes (314) situés à l'intérieur du carter de pompe (119).
EP16177824.6A 2016-07-04 2016-07-04 Pompe turbomoléculaire Active EP3267040B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP16177824.6A EP3267040B1 (fr) 2016-07-04 2016-07-04 Pompe turbomoléculaire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP16177824.6A EP3267040B1 (fr) 2016-07-04 2016-07-04 Pompe turbomoléculaire

Publications (2)

Publication Number Publication Date
EP3267040A1 EP3267040A1 (fr) 2018-01-10
EP3267040B1 true EP3267040B1 (fr) 2023-12-20

Family

ID=56321867

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16177824.6A Active EP3267040B1 (fr) 2016-07-04 2016-07-04 Pompe turbomoléculaire

Country Status (1)

Country Link
EP (1) EP3267040B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020239975A1 (fr) * 2019-05-29 2020-12-03 Edwards Limited Pompe turbomoléculaire, système de pompage à vide et procédé d'évacuation d'une chambre à vide

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1297347B1 (it) 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
JP2002168192A (ja) * 2000-12-01 2002-06-14 Seiko Instruments Inc 真空ポンプ
DE60101368T2 (de) 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
DE102015113821B4 (de) * 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
EP3267040A1 (fr) 2018-01-10

Similar Documents

Publication Publication Date Title
EP2826999B1 (fr) Pompe à vide
EP1252445B1 (fr) Pompe turbo-moléculaire
EP2060794B1 (fr) Pompe à vide dotée d'une pompe à lubrifiant
EP2295812B1 (fr) Récipient repliable
WO2001057403A1 (fr) Joint dynamique
EP3657021B1 (fr) Pompe à vide
EP1067290B1 (fr) Pompe à vide
EP2039941B1 (fr) Pompe à vide
DE60319585T2 (de) Vakuumpumpe
EP3267040B1 (fr) Pompe turbomoléculaire
EP3693610B1 (fr) Pompe à vide moléculaire
EP1559914B1 (fr) Pompe à effet visqueux
DE102015113821B4 (de) Vakuumpumpe
WO2003031823A1 (fr) Pompe a vide rotative a refoulement axial
EP3327293B1 (fr) Pompe à vide avec une pluralté d'entrées
EP3196471A1 (fr) Aimant permanent monolithique, palier à aimant permanent, pompe à vide et procédé de fabrication d'un aimant permanent monolithique
EP3135932B1 (fr) Pompe à vide et palier à aimant permanent
EP3628883B1 (fr) Pompe à vide
EP3767109B1 (fr) Système à vide
EP3564538B1 (fr) Système à vide et procédé de fabrication d'un tel système à vide
EP4293232A1 (fr) Pompe
DE102020116770B4 (de) Vakuumpumpe mit integriertem miniaturventil
EP3845764A2 (fr) Pompe à vide et système de pompe à vide
EP4194700A1 (fr) Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable
EP4273405A1 (fr) Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

17P Request for examination filed

Effective date: 20171214

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20191106

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20231004

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502016016282

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240321

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20231220

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20231220

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20231220

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20231220

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240321

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20231220

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20231220

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20240320

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20231220