EP4273405A1 - Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable - Google Patents

Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable Download PDF

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Publication number
EP4273405A1
EP4273405A1 EP23198541.7A EP23198541A EP4273405A1 EP 4273405 A1 EP4273405 A1 EP 4273405A1 EP 23198541 A EP23198541 A EP 23198541A EP 4273405 A1 EP4273405 A1 EP 4273405A1
Authority
EP
European Patent Office
Prior art keywords
sleeve
contour
holweck
sleeve section
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23198541.7A
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German (de)
English (en)
Inventor
Erfindernennung liegt noch nicht vor Die
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23198541.7A priority Critical patent/EP4273405A1/fr
Publication of EP4273405A1 publication Critical patent/EP4273405A1/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the present invention relates to a vacuum pump, also referred to here as a pump, in particular a turbomolecular vacuum pump, according to the preamble of claim 1 with an inner Holweck pump stage.
  • Vacuum pumps are used in various areas of technology. Depending on the requirements, vacuum pumps can have one or more pump stages.
  • Holweck pump stages belong to the category of molecular vacuum pumps and generate a molecular flow by rotating a Holweck rotor relative to a fixed Holweck stator.
  • a vacuum pump can comprise one or more Holweck pump stages, whereby several Holweck pump stages can be operated both in series and in parallel to one another.
  • Holweck pump stages are used in turbomolecular vacuum pumps, where they are connected downstream of one or more turbomolecular pump stages in the direction of flow.
  • a Holweck pump usually comprises a Holweck rotor and a Holweck stator, the Holweck rotor having a rotor shaft on which one or more Holweck rotor sleeves are concentrically provided by means of, for example, a disc-shaped Holweck hub.
  • the Holweck hub and the Holweck rotor sleeve can be designed integrally or in one piece; Alternatively, the Holweck hub and the Holweck rotor sleeve can initially be separately manufactured parts that are subsequently connected to one another, for example by welding.
  • a Holweck stator sleeve assigned to the respective Holweck rotor sleeves is equipped with a single or multi-start Holweck thread and forms a Holweck gap with the respective Holweck rotor sleeve.
  • the gas molecules to be conveyed are conveyed by the rotating movement of the Holweck rotor relative to the Holweck stator along the threads from an inlet to an outlet of the respective Holweck pump stage.
  • a thread includes a spirally circumferential Holweck channel delimited by the walls of a web in the form of a thread groove in which the gas molecules are conveyed when the rotor sleeve rotates relative to the stator sleeve.
  • Holweck pump stages are arranged concentrically to one another and nested one inside the other, so that the pumping direction of Holweck pump stages that follow one another radially is opposite to one another.
  • Two Holweck pump stages that follow one another in the direction of flow - a radially outer Holweck pump stage and a radially inner Holweck pump stage - can thus comprise a common Holweck stator sleeve, each provided with a Holweck thread on both sides, which is located in the radial direction between two rotor sleeves.
  • the radially outer rotor sleeve can in turn be surrounded by an outer stator sleeve in order to form a further Holweck pump stage together with the outer rotor sleeve.
  • the stator sleeve which is located radially outside the outer rotor sleeve is consequently also referred to as the inner stator sleeve, even if it may not surround an inner rotor sleeve.
  • the Holweck geometry and in particular the design of the Holweck thread influences the parameters of the respective Holweck pump stage, such as its suction and/or compression capacity as well as the power consumption of the pump motor.
  • the Holweck geometry usually does not extend over the axial extent of a Holweck stator sleeve changes, the parameters in question can only be adjusted to a limited extent when designing the pump.
  • the invention is therefore based on the object of providing a greater scope for design in the pump design with regard to the parameters such as the suction and/or compression capacity as well as the power consumption in a generic vacuum pump.
  • the stator sleeve can therefore be composed of several sleeve sections that can be handled separately during production and which are arranged one behind the other or immediately adjacent to one another in the axial direction.
  • the individual sleeve sections can differ, for example, in terms of the number of webs or the threads formed by the webs, whereby the parameters in question can be specifically influenced.
  • the inner or inner stator sleeve can comprise a first sleeve section with a first end and a second end opposite the first end and at least one second sleeve section also with a first end and a second end opposite the first end, the first end of the first sleeve section is attached to the stationary housing section of the vacuum pump and thus forms the fixed end of the stator sleeve.
  • the first end of the second sleeve section is attached to the second end of the first sleeve section.
  • the second end of the second sleeve section thus forms the free end of the stator sleeve, provided that no further sleeve section is attached to the second end of the second sleeve section.
  • the first sleeve section can, for example, be characterized by a thread geometry that differs from the thread geometry of the second sleeve section.
  • Sleeve sections with a wide variety of thread geometries can therefore be provided, which can then be assembled into a Holweck stator as required in order to be able to specifically model the suction and/or compression capacity of the Holweck pump stage. It is also possible, for example, to replace the first and/or the second sleeve section with another sleeve section with a different thread geometry, whereby the parameters of an already existing vacuum pump can be modified.
  • the external thread of the first sleeve section can differ from the external thread of the second sleeve section in at least one thread parameter, the at least one thread parameter being selected from the group of thread parameters consisting of the number of webs, the thread pitch, the width of the thread grooves, the width the webs and the height of the webs above the groove base.
  • the first end of the first sleeve section has a first front contour and the first end of the second sleeve section has a first one Has forehead contour that corresponds to the first forehead contour of the first sleeve section.
  • the second end of the first sleeve section can have a second front contour and the second end of the second sleeve section can have a second front contour that corresponds to the second front contour of the first sleeve section.
  • the first forehead contours can each be shaped essentially identically and the second forehead contours can also each be shaped essentially identically.
  • the second sleeve section can also be attached to the stationary housing section with its first end contour if necessary Housing section can be attached.
  • first end of the first sleeve section has a first forehead contour and the second end of the second sleeve section has a second forehead contour which is complementary to the first forehead contour of the first sleeve section is formed.
  • first end of the second sleeve section can have a first front contour and the second end of the first sleeve section can have a second front contour which is designed to be complementary to the first front contour of the second sleeve section.
  • the respective first end contour of one sleeve section thus fits together with the respective second end contour of the other sleeve section, so that the two sleeve sections can be assembled into a uniform stator sleeve.
  • first front contour of the first sleeve section is designed to be complementary to the second front contour of the second sleeve section, in the event that instead of the first sleeve section, the second sleeve section with its first front contour can be attached to the stationary one in the manner described above Housing section is attached, the first sleeve section is attached with its first end contour to the second end contour of the second sleeve section.
  • the two sleeve sections can therefore be interchanged in such a way that the second sleeve section with its first forehead contour is attached to the stationary housing section is attached and the first sleeve section is attached with its first end contour to the second end contour of the second sleeve section.
  • the respective first forehead contour has a first annular end face and a second annular end face, which is set back in the axial direction relative to the first annular end face.
  • the respective second end contour can have a first annular end face and a second annular end face, which is set back in the axial direction relative to the first annular end face.
  • the annular first and second end faces are arranged coaxially to one another and thus each form a stepped end contour.
  • the first annular end face surrounds the second annular end face on the first end contour
  • the first end contour is designed to be complementary to the second end contour
  • the second end face surrounds the first end face on the second end contour.
  • the distance between the first end face of the first forehead contour and the second end face of the second forehead contour corresponds to the distance between the second end face of the first forehead contour and the first end face of the second forehead contour.
  • the respective second end face can be set back in the axial direction relative to the first end face of the respective forehead contour.
  • first end face surrounds the second end face on the first forehead contour
  • second end face surrounds the first end face on the second forehead contour
  • the individual sleeve sections can be connected to one another with a precise fit in the manner described above;
  • the cylinder outer surface of the second forehead contour has a slightly larger diameter than the cylinder outer surface of the first forehead contour.
  • the two sleeves can thus be connected to one another via a press fit along the cylinder outer surface of the second forehead contour and the cylinder inner surface of the first forehead contour.
  • Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms the alignment of the vacuum pump according to Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also Fig. 3 ).
  • connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection via which flushing gas is supplied to protect the electric motor 125 (see e.g Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 is accommodated in the vacuum pump 111, in front of the gas delivered by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can therefore be operated hanging, so to speak.
  • the vacuum pump 111 can be designed so that it can be put into operation even if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 is not facing downwards, but to the side can be arranged facing upwards. In principle, any angle is possible.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening holes 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are in particular larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about a rotation axis 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another and having a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages that are arranged one inside the other in the radial direction and are effectively connected in series. There are other turbomolecular vacuum pumps (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages includes a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 which are fastened to the rotor hub 161 and supported by it, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested within one another when viewed in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, i.e. by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 and forms a radial Holweck gap 173 this one has a second Holweck pump stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175 and with this forms the third Holweck pump stage.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas is used to operate the Drive vacuum pump 111 into the Holweck grooves.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of an operating medium storage.
  • an injection nut can be used instead Spray screw may be provided. Since different designs are possible, the term “spray tip” is also used in this context.
  • the operating medium storage comprises several absorbent disks 187 stacked on top of one another, which are soaked with an operating medium for the rolling bearing 181, for example with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid storage via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the rolling bearing 181, where it e.g. fulfills a lubricating function.
  • the rolling bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack made up of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, with the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 on the radial outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • the rotor-side ring magnets 195 are parallel to the axis of rotation 151 through a cover element coupled to the carrier section 201 207 set.
  • the stator-side ring magnets 197 are fixed parallel to the rotation axis 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnets 197.
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement when there is an excessive radial deflection of the rotor 149 relative to the stator to form a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 comes into engagement is large enough so that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures occurs under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217.
  • a gap 219 is arranged, which comprises a radial motor gap over which The motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can be magnetically influenced.
  • the motor stator 217 is fixed in the housing within the engine compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purging gas and which can be, for example, air or nitrogen, can reach the engine compartment 137 via the sealing gas connection 135.
  • the barrier gas can be used to protect the electric motor 125 from process gas, for example from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing vacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the engine compartment 217 compared to the Holweck pump stages located radially outside.
  • the inner stator sleeve 10 has a substantially hollow cylindrical shape with a free end 16 and an axially opposite fixed end 14, which is fastened here to a stationary housing section 12 of the vacuum pump 111, for example by means of a press-fit connection. Even if this is here in the Fig. 6 is not shown, the stator sleeve 10 is surrounded concentrically by a rotor sleeve to form a Holweck gap, which means that the stator sleeve 10 is an internal or inner stator sleeve 10.
  • the stator sleeve 10 is designed in several parts or modularly and, in the embodiment shown here, is composed of a first hollow cylindrical sleeve section 18 and a second hollow cylindrical sleeve section 20, although it can also be provided that the stator sleeve 10 consists of composed of more than two, for example three, four or even more sleeve sections. Even if this is not shown here, the individual sleeve sections 18, 20 each have an external thread, with the external thread of the first sleeve section 18 differing from the external thread of the second sleeve section 20 in at least one thread parameter. In addition, the two sleeve sections 18, 20 can each have a different axial length.
  • the thread parameters in question can be, for example, the number of webs forming the individual thread grooves, the thread pitch, the width of the thread grooves, the width of the webs and/or the height of the webs above the groove base or the outer surface of the respective sleeve section 18 , 20 act.
  • the first sleeve section 18 has a first end 22 and a second end 24 opposite the first end 22.
  • the second sleeve section 20 has a first end 26 and a second end 28 opposite the first end 26.
  • the first end 22 of the first sleeve section 18 is that end of the first sleeve section 18 which is attached to the stationary housing section 12 and which therefore corresponds to the fixed end 14 of the stator sleeve 10.
  • the first end 26 of the second sleeve section 20 is that end of the second sleeve section 20 via which the second sleeve section 20 is attached to the second end 24 of the first sleeve section 20 is attached.
  • the second end 28 of the second sleeve section 20 forms the free end 16 of the stator sleeve 10, provided that no further sleeve section adjoins the second sleeve section 20 in the axial direction.
  • first ends 22, 26 of the first and second sleeve sections 18, 20 each form a first stepped forehead contour 30, the first forehead contour 30 of the first sleeve section 18 being identical to the first forehead contour 30 of the second sleeve section 20 is trained.
  • the second ends 24, 28 of the first and second sleeve sections 18, 20 each form a second stepped end contour 32, the second end contour 32 of the first sleeve section 18 being identical to the second end contour 32 of the second sleeve section 20.
  • the two sleeve sections 18, 20 are therefore essentially identical.
  • the first end contour 30 of the second sleeve section 20 is designed to be essentially complementary to the second end contour 32 of the first sleeve section 18.
  • the first end 26 of the second sleeve section 20 thus fits together in a substantially form-fitting manner with the second end 24 of the first sleeve section 18.
  • the first end contour 30 of the first sleeve section 18 is designed to be essentially complementary to the second end contour 32 of the second sleeve section 20.
  • the second sleeve section 20 can thus be attached to the stationary housing section 12 via its first front contour 30, whereas the first sleeve section 18 then attaches with its first front contour 30 the second forehead contour 32 of the second sleeve section 20 can be attached.
  • the two end contours 30, 32 are stepped and each have a first annular end face 34 and a second annular end face 36, which is set back in the axial direction relative to the first annular end face 34.
  • the second annular end face 36 is the end face of the respective end contour 30, 32, which is set back in the axial direction relative to the first end face 36.
  • the first annular end face 34 surrounds the second annular end face 36
  • the second annular end face 36 surrounds the first annular end face.
  • the distance on the respective sleeve section 18, 20 between the first end face 34 of the first end contour 30 and the second end face 36 of the second end contour 32 is each the same size as the distance between the second end face 36 of the first end contour 30 and the first end face 34 of the second end contour 32.
  • a cylinder inner surface 38 therefore extends between the first end face 34 of the first forehead contour 30 and the second end face 36 of the first forehead contour 30, whereas between the first end face 34 of the second forehead contour 32 and the second end face 36 of the second end contour 32 extends a cylinder outer surface 40.
  • the respective cylinder outer surface 40 can have a certain excess size in the radial direction compared to the respective cylinder inner surface 38 in order to be able to connect the sleeve sections 18, 20 to one another by means of a press-fit connection that is effective along the two cylinder surfaces 38, 40.
  • it can be provided to form an internal thread on the respective cylinder inner surface 38 and an external thread matching the internal thread on the respective cylinder outer surface 40 in order to be able to screw the sleeve sections 18, 20 together.
  • sleeve sections 18, 20 Due to the identical or complementary design of the sleeve sections 18, 20 with regard to the respective front contours 30, 32, these can be interchanged with one another if necessary or replaced with appropriately designed sleeve sections with a possibly different Holweck thread geometry, which allows for greater design freedom in the pump design with regard to the Parameters such as the suction and/or compression capacity as well as the power consumption are taken care of.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP23198541.7A 2023-09-20 2023-09-20 Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable Pending EP4273405A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP23198541.7A EP4273405A1 (fr) 2023-09-20 2023-09-20 Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23198541.7A EP4273405A1 (fr) 2023-09-20 2023-09-20 Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

Publications (1)

Publication Number Publication Date
EP4273405A1 true EP4273405A1 (fr) 2023-11-08

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Family Applications (1)

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EP23198541.7A Pending EP4273405A1 (fr) 2023-09-20 2023-09-20 Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011070856A1 (fr) * 2009-12-11 2011-06-16 エドワーズ株式会社 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant
EP2594803A1 (fr) * 2011-11-16 2013-05-22 Pfeiffer Vacuum Gmbh Pompe à vide à friction
EP2933497A2 (fr) * 2014-04-17 2015-10-21 Pfeiffer Vacuum GmbH Pompe à vide
EP4212730A1 (fr) * 2023-01-31 2023-07-19 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompage de holward optimisé pour compenser la perte de performance liée à la température

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011070856A1 (fr) * 2009-12-11 2011-06-16 エドワーズ株式会社 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant
EP2594803A1 (fr) * 2011-11-16 2013-05-22 Pfeiffer Vacuum Gmbh Pompe à vide à friction
EP2933497A2 (fr) * 2014-04-17 2015-10-21 Pfeiffer Vacuum GmbH Pompe à vide
EP4212730A1 (fr) * 2023-01-31 2023-07-19 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompage de holward optimisé pour compenser la perte de performance liée à la température

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