EP4325061A1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire Download PDF

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Publication number
EP4325061A1
EP4325061A1 EP23218595.9A EP23218595A EP4325061A1 EP 4325061 A1 EP4325061 A1 EP 4325061A1 EP 23218595 A EP23218595 A EP 23218595A EP 4325061 A1 EP4325061 A1 EP 4325061A1
Authority
EP
European Patent Office
Prior art keywords
stator
section
fastening
pump
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23218595.9A
Other languages
German (de)
English (en)
Inventor
Florian Bader
Maximilian Birkenfeld
Jan Hofmann
Matthias Mädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23218595.9A priority Critical patent/EP4325061A1/fr
Publication of EP4325061A1 publication Critical patent/EP4325061A1/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular vacuum pump comprising a stator, at least one rotor with a plurality of rotor blades arranged distributed in the circumferential direction, which can be driven to rotate about a rotation axis in order to generate a pumping effect, and at least one stator disk attached to the stator, which is connected to the rotor cooperates to generate the pumping effect and comprises a plurality of stator blades distributed in the circumferential direction and defining a blade plane.
  • the blade plane is to be understood as meaning a plane that runs perpendicular to the axis of rotation and in which the stator blades lie. That is, the blade plane can be defined by any portion of the stator blades as long as it intersects or touches the stator blades. For example, the blade plane can run centrally through the stator blades or be defined by the upper or lower blade edges in relation to the axial direction running parallel to the axis of rotation.
  • Turbomolecular vacuum pumps should, among other things, have the highest possible pumping speed.
  • the design of the suction area is particularly relevant, i.e. the area close to the pump inlet, which defines an inlet level.
  • optimal use of the installation space available in the housing of the pump for accommodating pump-active components in particular the rotor-stator package closest to the pump inlet.
  • a rotor-stator package is understood to mean a package of rotor disks and stator disks arranged alternately one above the other in the axial direction.
  • stator disks are attached to the stator by bracing their radially outer regions, the bracing or clamping taking place by means of spacer rings inserted into the pump housing, in a plane that lies axially at the level of the blade plane.
  • the spacer rings and the pump housing are components of the stator of the vacuum pump, i.e. within the scope of the present disclosure, the pump housing is viewed as a component of the stator.
  • a stator disk is clamped between two axially immediately successive spacer rings.
  • a radially external collar area of the stator disks is axially clamped via spacer rings.
  • stator disks In the case of milled or sawn stator disks, however, the blades can be axially braced with their radially outer blade tips, i.e. their free end sections.
  • the axial clamping of the stator disks on the stator requires radial installation space in the pump housing.
  • the suction area of a turbomolecular vacuum pump i.e. the area of the pump-active components closest to the pump inlet
  • the rotor-stator package axially as close as possible to the pump inlet, i.e. the first on the suction side Stator disk should be axially as close as possible to the pump inlet to minimize flow losses.
  • the rotor-stator package and thus also the first stator disk should have an external diameter that is as large as possible in relation to the internal diameter of the respective pump housing.
  • the installation space is limited by the pump flange and by the means that serve to connect the pump flange to the flange of a recipient.
  • These means can in particular be screws, although it should also be taken into account that they are used for handling the screws and for a tool There must be enough space in the flange area to operate the screws.
  • the pump flange must meet certain specifications such as ISO standards, particularly with regard to its diameter.
  • the stated boundary conditions limit the installation space available for the rotor and stator disks in the area of the pump inlet, so that the rotor-stator package cannot be arranged arbitrarily close to the pump inlet if at the same time the outside diameter of the first stator disk should also be as large as possible.
  • turbomolecular vacuum pump which has an improved pumping speed based on the respective conditions in the area of the pump inlet.
  • a turbomolecular vacuum pump according to claim 1 and in particular in that the stator disc for attachment to the stator comprises a fastening section with an end section with which the stator disc is fastened to the stator and which defines a fastening plane, the blade plane and the fastening plane runs perpendicular to the axis of rotation and are spaced apart from one another along the axis of rotation.
  • the end section is the section of the fastening section which interacts directly with the stator (e.g. with a spacer ring and a shoulder section of the pump housing or with two spacer rings) to fasten the stator disk to the stator.
  • stator e.g. with a spacer ring and a shoulder section of the pump housing or with two spacer rings
  • the attachment plane is a plane in which at least a portion of the end section lies, which is axially further away from the blade plane than other areas of the attachment section.
  • the blade plane can be placed closer to the pump inlet with the same axial position of the fastening on the stator. Flow losses in the inlet area can be reduced and the suction speed can be improved.
  • Calculations based on the parameters of existing turbomolecular vacuum pumps have shown that pumping speed improvements of more than 3% can be achieved for a gas that is relevant in practice, namely nitrogen.
  • the calculation assumed that the rotor-stator package closest to the pump inlet is positioned 10 mm closer to the pump inlet than without the embodiment according to the invention.
  • the result for the nitrogen gas was an increase from 240 liters/second in the conventional design to 249 liters/second in the inventive design.
  • a pump according to the invention therefore continues to meet the respective specifications such as ISO standards.
  • the blade plane is located axially closer to a pump inlet than the mounting plane.
  • the stator disk is formed in one piece.
  • the stator disk can be a stamped and/or bent part made of sheet metal, i.e. a so-called laminated stator disk, or can be produced by machining an initial part.
  • These options for producing stator disks are basically known and are compatible with the invention in that they also allow the production of stator disks designed according to the invention with axially spaced blade and fastening planes.
  • laminated stator disks usually consist of two semicircular or semicircular ring-shaped halves in order to make assembly easier or even possible in the first place.
  • the stator disk in this case, we mean its two halves together. If the present disclosure refers to a one-piece or one-piece design in connection with such laminated stator disks, then this is to be understood as meaning that the two halves of the stator disk are each in one piece.
  • the fastening section can be formed by a radially outer collar of the stator disk, which has the end section radially on the outside and is connected to the stator blades radially on the inside.
  • known laminated stator disks are disk-shaped over their entire diameter, i.e. including the radially outer collar
  • a laminated stator disk according to the invention is provided radially on the outside with a fastening section which leads from the blade plane to the fastening plane defined by its end section.
  • a radially inner collar Stator disk is designed as a fastening section, so that the stator disk can be clamped radially on the inside with the stator.
  • the fastening section can have a radially outer or radially inner collar section, which lies in the blade plane and is connected to the stator blades.
  • the fastening section is formed by free end sections of the stator blades.
  • sawn or milled stator disks can be designed in this way.
  • At least some, preferably all, stator blades then have a radial, in particular radially outer, end section which leads from the blade plane to the fastening plane, these end sections together forming the fastening section of the stator disk.
  • the fastening section comprises a transition section which leads from the blade plane to the end section of the fastening section.
  • the dimensions and/or the shape of the transition section can basically be chosen arbitrarily, in particular to adjust the axial distance between the blade plane and the fastening plane.
  • the transition section is not attached directly to the stator, but the stator disk is attached to the stator, for example by clamping, via the end section.
  • the transition section has, at least in sections, a cylindrical or conical shape with the axis of rotation as the central axis.
  • the end section of the fastening section has a circular ring shape or a conical shape with the axis of rotation as the central axis or points in a sectional plane containing the axis of rotation a curved course.
  • the shape of the end section can basically be chosen arbitrarily and in particular depending on the desired manner of bracing on the stator.
  • the fastening section comprises or has an L-shape in a sectional plane containing the axis of rotation.
  • the stator disk can be pot-shaped or hat-shaped.
  • the L-shape is formed by a transition section and the end section of the fastening section.
  • the transition section runs parallel to the axis of rotation, while the end section extends perpendicular to the axis of rotation and thus in the fastening plane, i.e. the end section defining the fastening plane lies completely in the fastening plane.
  • the stator disk is part of a turbomolecular pump stage, which comprises a plurality of stator disks and a plurality of rotor disks of the rotor, each comprising a plurality of rotor blades, wherein the stator disks and the rotor disks cooperate to produce the pumping effect.
  • the turbomolecular pump stage may include one or more rotor-stator packages.
  • the stator disk is in particular a part of the first rotor-stator package, i.e. the one closest to the pump inlet.
  • the first stator disk of the rotor-stator package i.e. the one closest to the pump inlet, is designed in accordance with the invention.
  • the stator disk is the stator disk of a plurality of axially spaced stator disks of the stator that is axially closest to a pump inlet.
  • one or more stator disks of identical construction can be provided, in which the blade plane is axially closer to one Pump inlet is located as the mounting level.
  • the axial distance between the blade plane and the fastening plane can either be the same or vary for all stator disks designed according to the invention, for example increase or decrease in the direction of the pump inlet.
  • Identical stator disks are understood to mean those in which the blade plane and the fastening plane are spaced apart axially, i.e. along the axis of rotation.
  • Stator disks that are structurally identical in this sense can be identical, although this is not mandatory and the stator disks can differ from one another in other respects.
  • identical stator disks can have different diameters.
  • the axial distance between the blade plane and the mounting plane can also be different for identical stator disks.
  • stator disk is axially clamped on the stator with the end section of the fastening section.
  • This option for attaching stator disks to the stator is basically known and is therefore compatible with the invention, i.e. the invention does not necessarily require new attachment methods.
  • exactly one stator disk is clamped between two spacer rings, each designed as a separate component.
  • two or more stator disks can also be clamped between the same two spacer rings. Only one, several or all of the two or more stator disks can be designed according to the invention, i.e. have a distance between the blade plane and the fastening plane.
  • exactly one stator disk is clamped between a spacer ring designed as a separate component and a shoulder section of the stator, in particular a shoulder section of a pump housing forming part of the stator.
  • two or more can also be used Stator disks can be clamped between the spacer ring and the shoulder section. Only one, several or all of the two or more stator disks can be designed according to the invention, ie have a distance between the blade plane and the fastening plane. The invention is therefore also compatible with these basically known fastening methods.
  • the stator in particular a pump housing forming part of the stator, comprises a flange section in the area of a pump inlet for establishing a mechanical connection with a recipient and a shoulder section axially spaced from the pump inlet, which together with the flange section provides a mounting area for at least one on the flange section Connecting element to be attached, in particular at least one screw, is defined, with exactly one stator disk being clamped between a spacer ring designed as a separate component and the shoulder section, or with two or more stator disks being clamped between the spacer ring and the shoulder section.
  • only one, several or all of the two or more stator disks can be designed according to the invention, i.e. have a distance between the blade plane and the fastening plane.
  • stator disk according to the invention can therefore in particular be designed in such a way that it can be clamped on a shoulder section of the stator, in particular of the pump housing.
  • stator disk clamped between the spacer ring and the shoulder section is the stator disk axially closest to the pump inlet, the mounting plane of which is in the area of Shoulder section and the blade level is located between the pump inlet and shoulder section.
  • the invention further relates, according to independent claim 15, to a stator disc for a turbomolecular vacuum pump, comprising a plurality of stator blades distributed in the circumferential direction, which define a blade plane, and a fastening section with an end section with which the stator disc can be fastened to a stator of the turbomolecular vacuum pump and which defines a mounting plane, wherein the stator disk defines a central axis and the blade plane and the mounting plane run perpendicular to the central axis and are spaced apart from one another along the central axis.
  • the central axis of the stator disk and the axis of rotation of the rotor coincide.
  • the stator disk can be designed like the stator disk of the turbomolecular vacuum pump according to the invention described above, i.e. the developments of the stator disk disclosed in connection with the turbomolecular vacuum pump also apply to the stator disk claimed in independent claim 15.
  • Turbomolecular pump 111 shown according to the prior art comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and passed through the pump Pump outlet 117 are conveyed, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms the alignment of the vacuum pump according to Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also Fig. 3 ).
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection via which flushing gas is supplied to protect the electric motor 125 (see e.g Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 is accommodated in the vacuum pump 111, in front of the gas delivered by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can therefore be operated hanging, so to speak.
  • the vacuum pump 111 can be designed so that it can be put into operation even if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 can be arranged not facing downwards, but facing to the side or facing upwards. In principle, any angle is possible.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening holes 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are in particular larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about a rotation axis 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another and having a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages that are arranged one inside the other in the radial direction and are effectively connected in series. There are other turbomolecular vacuum pumps (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages includes a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 which are fastened to the rotor hub 161 and supported by it, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested within one another when viewed in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are through the lateral surfaces, i.e. through the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169 are formed.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and forms a second Holweck pump stage with this.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175 and with this forms the third Holweck pump stage.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas is used to operate the Drive vacuum pump 111 into the Holweck grooves.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of an operating medium storage.
  • an injection screw may be provided instead of an injection nut. Since different designs are possible, the term “spray tip” is also used in this context.
  • the operating medium storage comprises several absorbent disks 187 stacked on top of one another, which are soaked with an operating medium for the rolling bearing 181, for example with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid storage via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the rolling bearing 181, where it e.g. fulfills a lubricating function.
  • the rolling bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack made up of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, with the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 on the radial outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • the rotor-side ring magnets 195 are fixed parallel to the rotation axis 151 by a cover element 207 coupled to the carrier section 201.
  • the stator-side ring magnets 197 are fixed parallel to the rotation axis 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnets 197.
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement when there is an excessive radial deflection of the rotor 149 relative to the stator to form a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 comes into engagement is large enough so that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures occurs under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other for transmitting the drive torque.
  • the motor stator 217 is fixed in the housing within the engine compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purging gas and which can be, for example, air or nitrogen, can reach the engine compartment 137 via the sealing gas connection 135.
  • the barrier gas can be used to protect the electric motor 125 from process gas, for example from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing vacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the engine compartment 217 compared to the Holweck pump stages located radially outside.
  • a turbomolecular vacuum pump according to the invention as described below with reference to Fig. 7 ff is explained, can be with regard to the in the Fig. 7 ff features not shown can be designed as described above based on Fig. 1 to 5 has been described.
  • FIGS. 6A and 6B illustrate in a highly simplified side view laminated stator disks 20 according to the prior art, as they are used in a conventional suction area of a turbomolecular vacuum pump.
  • the blade plane 26 defined by the collars is tilted by bending. According to Fig. 6A the stator blades 22 protrude on both sides of the blade plane 26, according to Fig. 6B only to one side.
  • the outer collar 24 is used to fasten the stator disk 20 to a stator, not shown, by clamping the outer collar 24, for example, between two spacer rings.
  • the outer collar 24 thus also defines a fastening plane 32, ie in the known stator disks 20, the blade plane 26 and the fastening plane 32 coincide.
  • laminated stator disk 20 comprises corresponding to a known laminated stator disk (such as in Fig. 6B shown) between an inner collar, not shown, and a radially outer collar section 24a - hereinafter referred to as outer collar 24a - stator blades 22 positioned towards one side.
  • the outer collar 24a lying in the blade plane 26 is part of a specially designed fastening section 28, which has one in addition to the outer collar 24a End section 30, which defines a fastening plane 32 running at an axial distance 52 from the blade plane 26, and a transition section 34 leading from the outer collar 24a - i.e.
  • laminated stator disk 20 can also be produced by punching and bending in accordance with a known laminated stator disk.
  • the distance 52 between the blade plane 26 and the fastening plane 32 is, for example, 10 mm.
  • the end section 30 serves to attach the stator disk 20 to a stator of a turbomolecular vacuum pump. This will be discussed in connection with Fig. 9A discussed in more detail.
  • Fig. 8 It can be seen that the halves of a two-part laminated stator disk 20 according to the invention, of which in Fig. 8 only one half is shown and each correspondingly Fig. 7 and Fig. 9A are formed, each have a circular ring shape, ie both the outer collar 24a and the inner collar section 24b in the radial direction R - hereinafter referred to as inner collar 24b - are each semicircular.
  • the inclined stator blades 22 are located between the inner collar 24b and the outer collar 24a.
  • the two inner collars 24b of the two halves of the stator disk 20 delimit a circular opening through which the rotor (not shown) of the turbomolecular pump extends, whose axis of rotation then also the central axis of the stator disk 20 formed by the two halves coincides.
  • the transition section 34 running in the axial direction Z and the end section 30 which runs perpendicular thereto and projects radially outwards from the transition section 34.
  • the end portion 30 of the fastening portion 28 of the stator disk 20 closest to the pump inlet 36 is clamped between a spacer ring 50 and a shoulder portion 40 of the pump housing 38.
  • the blade plane 26 is therefore closer to the inlet plane 54 defined by the flange section 42 and the pump inlet 36 than the fastening plane 32. This allows a distance 56 between the Inlet level 54 and the blade level 26 can be reduced in comparison to known pumps, which has a positive effect on the performance of the turbomolecular vacuum pump 10 since flow losses are reduced.
  • a mounting area 44 Between the shoulder section 40 and the flange section 42 there is a mounting area 44, via which the heads 48 of circumferentially distributed fastening screws 46 are accessible, with which the flange section 42 can be screwed to a recipient, not shown.
  • the blade plane 26 is located at the height of the mounting area 44, which has so far remained unused for the arrangement of stator disks due to the reduced inner diameter of the pump housing 12 there.
  • Stator disk 20 shown is the first, i.e. the stator disk 20 closest to the pump inlet 36, and forms part of a turbomolecular pump stage, which comprises a plurality of stator disks 20 and a plurality of rotor disks 58 of the rotor 14 provided with rotor blades 16. Only the first rotor disk 58 is in Fig. 9A shown.
  • the further stator disks, not shown, are each clamped between two spacer rings 50 and can be designed to be continuously disk-shaped as in the prior art or also in the manner according to the invention with a fastening plane axially spaced from the blade plane.
  • the transition section 34 has a cylindrical shape, with the outer collar 24a and the transition section 34 as well as the transition section 34 and the end section 30 each enclosing an angle of at least substantially 90 °, so that the fastening section 28 has an L shape in a sectional plane containing the axis of rotation 18.
  • Has shape and the stator disk 20 has a hat or pot shape overall.
  • FIG. 9B and 9C show that two or more stator disks 20 can also be clamped between a spacer ring 50 and the shoulder section 40.
  • a further rotor disk 58 with rotor blades 16 is provided between the stator disk 20 closest to the pump inlet 36 and the further or subsequent stator disk 20.
  • the further stator disk 20 clamped between the spacer ring 50 and the shoulder section 40 can be designed in the manner according to the invention with a fastening plane 32 axially spaced from the blade plane 26 (see Fig. 9B ).
  • the further stator disk 20 can also be designed to be continuously disk-shaped as in the prior art (see Fig. 9C ).
  • Fig. 10A shows that the stator disk 20 can also be clamped with the end section 30 of its fastening section 28 between two spacer rings 50 of the stator 12.
  • the exemplary embodiments of the 10B to 10E differ from that of Fig. 9A by the shape of the fastening section 28 including the end section 30 and by the shape of the clamping surfaces of the spacer rings 50.
  • These exemplary embodiments illustrate by way of example that the design of a stator disk 20 according to the invention does not correspond to the hat or pot shape Fig. 9A is limited, but the fastening section 28 can basically have any shape.
  • the spacer rings 50 can each be adapted with their clamping surfaces to the shape of the end section 30, as is the case 10B to 10E can also be removed.
  • the clamping surfaces of the spacer rings 50 do not have to be adapted exactly to the shape of the respective end section 30.
  • the transition section 34 is conical and merges into the end section 30, which is also conical and has the same cone angle, the free end of which defines the fastening plane 32 here.
  • Fig. 10C In the exemplary embodiment of Fig. 10C is different from that of Fig. 10B no outer collar lying in the blade plane 26 is provided, ie the transition section 34 leads directly from the radially outer ends of the blades 22 to the end section 30.
  • Both the transition section 34 and the end section 30 are curved.
  • the curved course can basically be chosen arbitrarily.
  • the attachment level 32 is defined here by the apex of the end section 30.
  • Fig. 10E corresponds to that of Fig. 10B , whereby, however, there is no transition section, but rather the end section 30 clamped between the spacer rings 50 connects directly to the outer collar 24a.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP23218595.9A 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire Pending EP4325061A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP23218595.9A EP4325061A1 (fr) 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23218595.9A EP4325061A1 (fr) 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire

Publications (1)

Publication Number Publication Date
EP4325061A1 true EP4325061A1 (fr) 2024-02-21

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ID=89224563

Family Applications (1)

Application Number Title Priority Date Filing Date
EP23218595.9A Pending EP4325061A1 (fr) 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire

Country Status (1)

Country Link
EP (1) EP4325061A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967395A2 (fr) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Pompe turbo moléculaire
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
EP1918588A2 (fr) * 2006-10-26 2008-05-07 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
EP3734078A2 (fr) * 2020-03-05 2020-11-04 Pfeiffer Vacuum Technology AG Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967395A2 (fr) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Pompe turbo moléculaire
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
EP1918588A2 (fr) * 2006-10-26 2008-05-07 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
EP3734078A2 (fr) * 2020-03-05 2020-11-04 Pfeiffer Vacuum Technology AG Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

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