EP3657021B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3657021B1
EP3657021B1 EP18207551.5A EP18207551A EP3657021B1 EP 3657021 B1 EP3657021 B1 EP 3657021B1 EP 18207551 A EP18207551 A EP 18207551A EP 3657021 B1 EP3657021 B1 EP 3657021B1
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EP
European Patent Office
Prior art keywords
holweck
stator
pump
vacuum pump
groove base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18207551.5A
Other languages
German (de)
English (en)
Other versions
EP3657021A1 (fr
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18207551.5A priority Critical patent/EP3657021B1/fr
Priority to JP2019203832A priority patent/JP6913147B2/ja
Publication of EP3657021A1 publication Critical patent/EP3657021A1/fr
Application granted granted Critical
Publication of EP3657021B1 publication Critical patent/EP3657021B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/20—Three-dimensional
    • F05D2250/23—Three-dimensional prismatic
    • F05D2250/232—Three-dimensional prismatic conical

Definitions

  • the present invention relates to a vacuum pump, in particular a turbo-molecular vacuum pump, with an inlet, an outlet, and at least two Holweck stages which are concentric with respect to a common axis of rotation and which follow one another in the pumping direction between the inlet and the outlet according to the preamble of claim 1.
  • Vacuum pumps are used in various fields of technology. Depending on the requirements, the vacuum pumps have one or more pump stages.
  • a Holweck pump stage (also referred to here simply as a Holweck stage) belongs to the genus of molecular vacuum pumps and generates a molecular flow through the rotation of the Holweck rotor relative to the Holweck stator.
  • a vacuum pump can comprise one or more Holweck stages, with several Holweck stages being able to pump both in series and in parallel with one another. Holweck stages are typically used in turbo-molecular vacuum pumps and follow one or more turbo-molecular pump stages.
  • a Holweck stage comprises a Holweck rotor and a Holweck stator, the Holweck rotor having a rotor shaft on which one or more Holweck sleeves (hereinafter also referred to as rotor sleeves) are concentrically attached by means of a disk-shaped Holweck hub, for example.
  • the Holweck stator is provided with a single or multiple Holweck thread. The gas molecules to be conveyed are conveyed by the rotating movement of the Holweck rotor relative to the Holweck stator along the threads from an inlet to an outlet.
  • a thread comprises a circumferential Holweck channel, which is delimited by the walls of a web and in which the gas molecules are conveyed when the rotor sleeve rotates relative to the stator.
  • About backflow losses To minimize the width of the radial gap (Holweck gap) between the top of the web and the rotor sleeve must be kept small.
  • Two consecutive Holweck stages can comprise a common Holweck stator, which is provided on both sides with a Holweck thread, hereinafter also referred to as "double-sided" and which is located between two rotor sleeves.
  • the web height at a certain point in the axial direction should be understood to mean half the difference between the nominal diameter of the Holweck thread and its groove base diameter at this point. Consequently, the ridge height is equal to the thread depth at the relevant point.
  • Vacuum pumps with the features of the preamble of claim 1 are from EP 0 260 733 A1 and from JP H11 210674 A known.
  • the Holweck steps each comprise a Holweck thread and a Holweck sleeve rotating about the axis of rotation, and that in the Holweck steps the web height of the Holweck thread decreases in the pumping direction.
  • the invention is based on the general idea of not leaving the web height constant in at least two successive Holweck stages. For example, at least two Holweck steps each having their own Holweck stator or a common Holweck stator can follow one another, each of which is conical.
  • the pumping capacity of a Holweck arrangement can consequently be improved with sufficient mechanical stability.
  • the inlet of the Holweck arrangement is the actual inlet of the vacuum pump. Otherwise, if, for example, according to a preferred embodiment, a turbo-molecular pump stage (also in the following simply turbo stage) is connected upstream, then the inlet of the Holweck arrangement is downstream of the outlet of the turbo stage. Independently of this, one or more further Holweck steps can be connected upstream and / or downstream of the concentric Holweck steps.
  • three or more concentrically arranged Holweck steps can be provided, each with a web height decreasing in the pumping direction.
  • Two consecutive Holweck stages can have a common Holweck stator.
  • the Holweck stages can connect to a turbo stage.
  • two consecutive Holweck stages comprise a common Holweck stator provided on both sides with a Holweck thread and a Holweck sleeve rotating around the axis of rotation, the web height of the Holweck thread in each case on the outside of the Holweck stator and on the inside of the Holweck stator Pumping direction decreases.
  • a turbo stage is followed by three concentrically arranged Holweck stages, each with a web height decreasing in the pumping direction, the last two Holweck stages in the pumping direction having the common Holweck stator.
  • the vacuum pump can have an intermediate inlet which is assigned directly to the inlet of the outer Holweck stage.
  • split-flow vacuum pumps which are basically known to the person skilled in the art and do not need to be explained in more detail here.
  • the size of the Holweck gap can change slightly during operation of the pump due to the centrifugal force acting on the rotating rotor sleeve.
  • the extent of the change can depend on the axial position, i. a constant width of the Holweck gap in the axial direction when the rotor sleeve is stationary can vary in the axial direction during operation.
  • the outside of the Holweck stator has an outer groove base diameter which increases in the pumping direction.
  • the inside of the Holweck stator has an inner groove base diameter which decreases in the pumping direction.
  • the outer groove base diameter preferably increases in the pumping direction and the inner groove base diameter decreases in the pumping direction.
  • the groove base diameter is to be understood as the diameter of the Holweck stator at the respective axial point (hereinafter also "local"), based on the base of the respective Holweck channel.
  • the groove base diameter is the locally smallest diameter on the outside of the Holweck stator and the locally largest diameter on the inside of the Holweck stator.
  • the inlet-side groove base diameter on the outside of the Holweck stator is smaller than the inlet-side groove base diameter on the inside of the Holweck stator.
  • the groove bottom of the outer Holweck step is closer to the axis of rotation at its inlet than the groove bottom of the inner Holweck step on the inlet side.
  • an (outer) taper angle defined by the groove base of the outer Holweck thread and an (inner) taper angle defined by the groove base of the inner Holweck thread are different from one another.
  • the outer angle of conicity is preferably greater than the inner angle of conicity.
  • the following specific values and ratios relate to a Holweck stator with an axial length of 50mm, but can also be within the specified value ranges for a different axial length.
  • a preferred value for the size of the Holweck gap is 0.3 mm.
  • the outer angle of conicity can be between 5 and 15 °, preferably between 8 ° and 10 °, and in particular around 9.1 °.
  • the inner angle of conicity can be between 1 ° and 5 °, preferably between 2 ° and 4 ° and in particular around 3.1 °.
  • the ratio of double the web height to the groove base diameter is greater than 0.1, preferably greater than 0.15, and in particular approximately 0.19.
  • the ratio of double the web height to the groove base diameter is greater than 0.4, preferably greater than 0.6, and in particular approximately 0.8.
  • Relatively large web heights on the inlet side can ensure sufficient stability of the Holweck stator with a relatively small wall thickness of the Holweck stator at the same time.
  • the (local) wall thickness of the Holweck stator is half of the difference between the outer groove base diameter and the inner groove base diameter at the relevant axial point.
  • the ratio of the inlet-side web height to the outlet-side web height on the outer Holweck thread is less than 0.1, preferably less than 0.25, and in particular approximately 0.23.
  • the ratio of the web height on the inlet side to the web height on the outlet side is less than 0.5, preferably less than 0.4 and in particular about 0.36 on the inner Holweck thread.
  • the Holweck stator has a constant wall thickness along its axial extension.
  • the outer angle of conicity is equal to the inner angle of conicity.
  • the Holweck stator has an increasing wall thickness along its axial extent, in particular in the pumping direction of the outer Holweck stage, the wall thickness preferably increasing steadily.
  • the increasing wall thickness is accompanied by different conicity angles of the two Holweck steps. Different requirements can be placed on the two Holweck stages. For this purpose, different Holweck threads can be formed outside and inside.
  • the fact that the wall thickness increases in the pumping direction of the outer Holweck step means that the taper angle of the outer Holweck thread is greater than the taper angle of the inner Holweck thread.
  • the wall thickness of the Holweck stator is minimal in the area of the maximum web height.
  • the web height can contribute to the stability of the Holweck stator, so that comparatively small wall thicknesses can be present in the area of relatively large web heights.
  • the minimum wall thickness of the Holweck stator is preferably less than 2 mm, preferably less than 1.5 mm and particularly preferably about 1 mm.
  • the Holweck stator is made of aluminum.
  • the Holweck stator is manufactured integrally, in particular milled from one piece.
  • the turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 from the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 is in the vacuum pump 111 is housed, can be brought.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-shell-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested inside one another.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pumping stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 is opposite the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pump stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies with the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 opposite and with this forms the inner Holweck pump stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • the nested Holweck pump stages are connected in series with one another.
  • a connection channel 179 to the outlet 117 can also be provided.
  • a conical injection molded nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, for example with a lubricant.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • a Holweck arrangement according to the invention as described below with reference to the Figures 6 to 8 is described, can in particular in a vacuum pump according to the Figs. 1 to 5 can be used.
  • the Fig. 6 and 7th show only the Holweck arrangement of a vacuum pump 11, for example a turbomolecular pump, with three Holweck stages, each also referred to simply as a pump stage below.
  • the vacuum pump comprises a rotor shaft 15 which is rotatably mounted about an axis of rotation 13.
  • the pumping direction runs from an inlet 33 of the Holweck arrangement 25, 27, 29 to an outlet 35 of the pump stage 25, 27, 29.
  • the vacuum pump can have an intermediate inlet, not shown, which is directly assigned to the inlet of the outer Holweck stage .
  • This intermediate inlet can, for example, be a "split flow" inlet from which gas molecules to be conveyed - as in FIG Fig. 6 indicated by a dashed line - can flow to the inlet of the outer Holweck step 27.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (12)

  1. Pompe à vide (11), en particulier pompe à vide turbomoléculaire, comportant
    une entrée (33),
    une sortie (35), et
    au moins deux étages Holweck (25, 27, 29) concentriques par rapport à un axe de rotation commun (13) et se succédant en direction de pompage entre l'entrée (33) et la sortie (35), dont chacun comprend un filetage Holweck (37, 39) et un manchon Holweck (19) tournant autour de l'axe de rotation (13) et dont la hauteur de pas (43) du filetage Holweck (37, 39) respectif diminue en direction de pompage,
    dans laquelle
    deux étages Holweck successifs (27, 29) comprennent un stator Holweck (21) commun pourvu des deux côtés d'un filetage Holweck (37, 39), et aussi bien sur le côté extérieur du stator Holweck (21) que sur le côté intérieur du stator Holweck (21), la hauteur de pas (43) du filetage Holweck (37, 39) respectif diminue en direction de pompage,
    caractérisée en ce que
    un angle de conicité (αa) défini par le fond de rainure (53) du filetage Holweck extérieur (37) et un angle de conicité (αi) défini par le fond de rainure (55) du filetage Holweck intérieur (39) sont différents l'un de l'autre.
  2. Pompe à vide (11) selon la revendication 1,
    dans laquelle
    le côté extérieur du stator Holweck (21) commun présente un diamètre extérieur de fond de rainure qui augmente en direction de pompage.
  3. Pompe à vide (11) selon la revendication 1 ou 2,
    dans laquelle
    le côté intérieur du stator Holweck (21) commun présente un diamètre intérieur de fond de rainure qui diminue en direction de pompage.
  4. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle
    le diamètre extérieur de fond de rainure augmente en direction de pompage et le diamètre intérieur de fond de rainure diminue en direction de pompage.
  5. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle
    le diamètre côté entrée du fond de rainure (NGDAE) sur le côté extérieur du stator Holweck (21) est inférieur au diamètre côté entrée du fond de rainure (NGDIE) sur le côté intérieur du stator Holweck (21).
  6. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle
    un angle de conicité (αa) défini par le fond de rainure (53) du filetage Holweck extérieur (37) est compris entre 5° et 15°, de préférence entre 8° et 10°, et est en particulier d'environ 9,1° et/ou
    un angle de conicité (αi) défini par le fond de rainure (55) du filetage Holweck intérieur (39) est compris entre 1° et 5°, de préférence entre 2° et 4°, et est en particulier d'environ 3,1°.
  7. Pompe à vide (11) selon l'une des revendications précédentes, dans laquelle
    au niveau du filetage Holweck extérieur (37), du côté entrée, le rapport du double de la hauteur de pas (43) sur le diamètre de fond de rainure est supérieur à 0,10, de préférence supérieur à 0,15, et est en particulier d'environ 0,19, et/ou
    au niveau du filetage Holweck intérieur (39), du côté entrée, le rapport du double de la hauteur de pas (43) sur le diamètre de fond de rainure est supérieur à 0,4, de préférence supérieur à 0,6, et est en particulier d'environ 0,8.
  8. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle
    au niveau du filetage Holweck extérieur (37), le rapport de la hauteur de pas (43) côté entrée sur la hauteur de pas (43) côté sortie est inférieur à 0,3, de préférence inférieur à 0,25, et est en particulier d'environ 0,23, et/ou au niveau du filetage Holweck intérieur (39), le rapport de la hauteur de pas (43) côté entrée sur la hauteur de pas (43) côté sortie est inférieur à 0,5, de préférence inférieur à 0,4, et est en particulier d'environ 0,36.
  9. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle
    le stator Holweck (21) présente une épaisseur de paroi (45) qui augmente le long de son extension axiale, en particulier en direction de pompage de l'étage Holweck extérieur (27), l'épaisseur de paroi (45) augmentant de préférence en continu.
  10. Pompe à vide (11) selon la revendication 9,
    dans laquelle
    l'épaisseur de paroi (45) du stator Holweck (21) est minimale au niveau de la hauteur de pas (43) maximale de l'étage Holweck extérieur (27).
  11. Pompe à vide (11) selon la revendication 9 ou 10,
    dans laquelle
    l'épaisseur de paroi (45) minimale du stator Holweck (21) est inférieure à 2 mm, de préférence inférieure à 1,5 mm, et est en particulier de préférence d'environ 1 mm.
  12. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle
    le stator Holweck (21) est fabriqué en aluminium et/ou le stator Holweck (21) est fabriqué intégralement, en particulier fraisé d'une seule pièce.
EP18207551.5A 2018-11-21 2018-11-21 Pompe à vide Active EP3657021B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18207551.5A EP3657021B1 (fr) 2018-11-21 2018-11-21 Pompe à vide
JP2019203832A JP6913147B2 (ja) 2018-11-21 2019-11-11 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18207551.5A EP3657021B1 (fr) 2018-11-21 2018-11-21 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3657021A1 EP3657021A1 (fr) 2020-05-27
EP3657021B1 true EP3657021B1 (fr) 2020-11-11

Family

ID=64426766

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18207551.5A Active EP3657021B1 (fr) 2018-11-21 2018-11-21 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3657021B1 (fr)
JP (1) JP6913147B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4212730A1 (fr) * 2023-01-31 2023-07-19 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompage de holward optimisé pour compenser la perte de performance liée à la température

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump
EP3845764B1 (fr) * 2021-03-31 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide et système de pompe à vide
EP4194700A1 (fr) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
JPH11210674A (ja) * 1998-01-27 1999-08-03 Ebara Corp ターボ分子ポンプ
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ
CN102667169B (zh) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4212730A1 (fr) * 2023-01-31 2023-07-19 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompage de holward optimisé pour compenser la perte de performance liée à la température

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JP2020094582A (ja) 2020-06-18
JP6913147B2 (ja) 2021-08-04
EP3657021A1 (fr) 2020-05-27

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