EP3657021A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3657021A1
EP3657021A1 EP18207551.5A EP18207551A EP3657021A1 EP 3657021 A1 EP3657021 A1 EP 3657021A1 EP 18207551 A EP18207551 A EP 18207551A EP 3657021 A1 EP3657021 A1 EP 3657021A1
Authority
EP
European Patent Office
Prior art keywords
holweck
stator
vacuum pump
pump
thread
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18207551.5A
Other languages
German (de)
English (en)
Other versions
EP3657021B1 (fr
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18207551.5A priority Critical patent/EP3657021B1/fr
Priority to JP2019203832A priority patent/JP6913147B2/ja
Publication of EP3657021A1 publication Critical patent/EP3657021A1/fr
Application granted granted Critical
Publication of EP3657021B1 publication Critical patent/EP3657021B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/20—Three-dimensional
    • F05D2250/23—Three-dimensional prismatic
    • F05D2250/232—Three-dimensional prismatic conical

Definitions

  • the present invention relates to a vacuum pump, in particular a turbomolecular vacuum pump, with an inlet, an outlet, and at least two Holweck stages, which are concentric with respect to a common axis of rotation, in the pumping direction between the inlet and the outlet.
  • Vacuum pumps are used in various fields of technology. Depending on the requirements, the vacuum pumps have one or more pump stages.
  • a Holweck pump stage (also simply referred to here as the Holweck stage) belongs to the genus of molecular vacuum pumps and generates a molecular flow by rotating the Holweck rotor relative to the Holweck stator.
  • a vacuum pump can comprise one or more Holweck stages, with several Holweck stages being able to pump both in series and in parallel with one another. Holweck stages are typically used in turbomolecular vacuum pumps and are followed by one or more turbomolecular pump stages.
  • a Holweck stage comprises a Holweck rotor and a Holweck stator, the Holweck rotor having a rotor shaft to which one or more Holweck sleeves (hereinafter also referred to as rotor sleeves) are concentrically attached by means of a disk-shaped Holweck hub, for example.
  • the Holweck stator is provided with a single or multi-start Holweck thread. The gas molecules to be conveyed are conveyed from an inlet to an outlet by the rotating movement of the Holweck rotor relative to the Holweck stator along the threads.
  • a thread course comprises a circumferential Holweck channel delimited by walls of a web, in which the gas molecules are conveyed when the rotor sleeve rotates relative to the stator.
  • Backflow losses To minimize the width of the radial gap (Holweck gap) between the top of the web and the rotor sleeve must be kept small.
  • Two consecutive Holweck stages can comprise a common Holweck stator, which is provided on both sides with a Holweck thread, hereinafter also referred to as "double-sided", and which is located between two rotor sleeves.
  • the web height at a specific point in the axial direction should be understood to mean half the difference between the nominal diameter of the Holweck thread and its groove base diameter at this point. Consequently, the web height is equal to the thread depth at the point in question.
  • the Holweck steps each comprise a Holweck thread and a Holweck sleeve rotating about the axis of rotation, and that in the Holweck steps the web height of the Holweck thread decreases in the pumping direction.
  • the invention is based on the general idea of not leaving the web height constant in at least two successive Holweck stages.
  • at least two Holweck stages each with its own Holweck stator or a common Holweck stator, can follow one another, each of which is conical.
  • the inlet of the Holweck arrangement is the actual inlet of the vacuum pump. Otherwise, if, for example, according to a preferred embodiment, a turbomolecular pump stage (hereinafter also simply turbo stage) is connected upstream, then the inlet of the Holweck arrangement is located downstream of the outlet of the turbo stage. Irrespective of this, one or more further Holweck stages can be connected upstream and / or downstream of the concentric Holweck stages.
  • three or more concentrically arranged Holweck stages can be provided, each with a web height that decreases in the pumping direction. Two consecutive Holweck stages can have a common Holweck stator. Such a special configuration is discussed in more detail below.
  • the Holweck stages can connect to a turbo stage.
  • two consecutive Holweck stages comprise a common Holweck stator provided on both sides with a Holweck thread and a Holweck sleeve rotating around the axis of rotation, the web height of both on the outside of the Holweck stator and on the inside of the Holweck stator Holweck thread decreases in the pumping direction.
  • a turbo stage is followed by three concentrically arranged Holweck stages, each with a web height that decreases in the pumping direction, the last two Holweck stages in the pumping direction having the common Holweck stator.
  • the vacuum pump can have an intermediate inlet, which is directly assigned to the inlet of the outer holweck stage, between the outer holweck stage of these two holweck stages and the first holweck stage in the pumping direction.
  • split-flow vacuum pumps which are known to the person skilled in the art are generally known and do not need to be explained in more detail here.
  • the size of the Holweck gap may change slightly during operation of the pump due to the centrifugal force acting on the rotating rotor sleeve.
  • the extent of the change may depend on the axial position, i.e. a constant width of the Holweck gap in the axial direction when the rotor sleeve is stationary can vary in the axial direction during operation.
  • the outside of the Holweck stator has an outer groove base diameter, which increases in the pumping direction.
  • the inside of the Holweck stator has an inner groove base diameter, which decreases in the pumping direction.
  • the outer groove base diameter preferably increases in the pump direction and the inner groove base diameter decreases in the pump direction.
  • the groove base diameter is to be understood here as the diameter of the Holweck stator based on the base of the respective Holweck channel at the respective axial position (hereinafter also “locally”).
  • the groove base diameter on the outside of the Holweck stator is the smallest locally Diameter and on the inside of the Holweck stator the locally largest diameter.
  • the inlet-side groove base diameter on the outside of the Holweck stator is smaller than the inlet-side groove base diameter on the inside of the Holweck stator.
  • the groove base of the outer holweck step at its inlet is located closer to the axis of rotation than the inlet-side groove bottom of the inner holweck step.
  • an (outer) conicity angle defined by the groove bottom of the outer Holweck thread and an (inner) conicity angle defined by the groove bottom of the inner Holweck thread are different from one another.
  • the outer taper angle is preferably larger than the inner taper angle.
  • the following specific values and ratios relate to a Holweck stator with an axial length of 50mm, but can also be within the specified value ranges for a different axial length.
  • a preferred value for the size of the Holweck gap is 0.3 mm.
  • the outer taper angle can be between 5 and 15 °, preferably between 8 ° and 10 ° and in particular around 9.1 °.
  • the inner taper angle can be between 1 ° and 5 °, preferably between 2 ° and 4 ° and in particular approximately 3.1 °.
  • the ratio of double web height to groove base diameter on the outer Holweck thread on the inlet side is greater than 0.1, preferably greater than 0.15, and in particular approximately 0.19.
  • the ratio of double web height to groove base diameter on the inner Holweck thread on the inlet side is greater than 0.4, preferably greater than 0.6, and in particular approximately 0.8.
  • Relatively large web heights on the inlet side can ensure sufficient stability of the Holweck stator with at the same time a relatively small wall thickness of the Holweck stator.
  • the (local) wall thickness of the Holweck stator is half the difference between the outer groove base diameter and the inner groove base diameter at the relevant axial location.
  • the ratio of the web height on the inlet side to the wall height on the outlet side is less than 0.1, preferably less than 0.25, and in particular about 0.23.
  • the ratio of the inlet-side web height to the outlet-side web height on the inner Holweck thread is less than 0.5, preferably less than 0.4 and in particular about 0.36.
  • the Holweck stator has a constant wall thickness along its axial extent.
  • the outer taper angle is equal to the inner taper angle.
  • the Holweck stator has an increasing wall thickness along its axial extent, in particular in the pumping direction of the outer Holweck step, the wall thickness preferably increasing steadily.
  • the increasing wall thickness goes hand in hand with different conicity angles of the two Holweck steps. Different requirements can be placed on the two Holweck stages. Different Holweck threads can be formed on the outside and inside. That the wall thickness increases in the pumping direction of the outer Holweck step means that the taper angle of the outer Holweck thread is greater than the taper angle of the inner Holweck thread.
  • the wall thickness of the Holweck stator is minimal in the area of the maximum web height.
  • the web height can contribute to the stability of the Holweck stator, so that comparatively small wall thicknesses can be present in the area of relatively large web heights.
  • the minimum wall thickness of the Holweck stator is preferably less than 2 mm, preferably less than 1.5 mm and particularly preferably approximately 1 mm.
  • the Holweck stator is made of aluminum.
  • the Holweck stator is manufactured integrally, in particular milled from one piece.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms in accordance with the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged on the side. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump.
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 from the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is housed, can be brought.
  • two coolant connections 139 are arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be guided into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can thus be operated to a certain extent in a hanging manner.
  • the vacuum pump 111 can be designed so that it can also be operated if it is aligned in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be realized, in which the underside 141 cannot be arranged facing downwards, but turned to the side or directed upwards.
  • various screws 143 are also arranged, by means of which components of the vacuum pump, which are not further specified here, are fastened to one another.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another with effective pumping, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 fastened to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested one inside the other in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and of the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and forms with it the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms a second Holweck pump stage with the latter.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies against the radial outer surface of the inner Holweck rotor sleeve 165 opposite to form a radial Holweck gap 175 and forms the inner Holweck pumping stage with this.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the central Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series.
  • a connection channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter increasing toward the roller bearing 181.
  • the spray nut 185 is in sliding contact with at least one scraper of an operating fluid reservoir.
  • the operating medium storage comprises a plurality of absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, for example with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating spray nut 185 and, as a result of the centrifugal force along the spray nut 185, is conveyed in the direction of the increasing outer diameter of the spray nut 92 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which comprises an annular stack of a plurality of permanent magnetic rings 195, 197 stacked on one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or catch bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator in order to provide a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the catch bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which causes the catch bearing 215 to be disengaged in normal pumping operation.
  • the radial deflection at which the catch bearing 215 engages is dimensioned large enough that the catch bearing 215 does not engage during normal operation of the vacuum pump, and at the same time is small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 which extends through the motor stator 217.
  • an intermediate space 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can magnetically influence one another.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a purge gas and which can be, for example, air or nitrogen, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can use process gas, for example, in front of process gas Corrosive parts of the process gas are protected.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure brought about by the forevacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor space 137, in particular in order to achieve a better seal of the motor space 217 with respect to the radially outside Holweck pump stages.
  • a Holweck arrangement according to the invention as described below with reference to 6 to 8 is described, in particular in a vacuum pump according to the 1 to 5 be used.
  • the Fig. 6 and 7 only show the Holweck arrangement of a vacuum pump 11, for example a turbomolecular pump, with three Holweck stages, also referred to below simply as the pump stage.
  • the vacuum pump comprises a rotor shaft 15 which is rotatably mounted about an axis of rotation 13.
  • a rotor hub 17 is arranged on the rotor shaft 15 and carries two cylindrical rotor sleeves 19.
  • the internal Holweck stator 21 positioned between the two rotor sleeves 19 is double-sided in the manner according to the invention, ie provided on both sides with a Holweck thread 37, 39 ( Fig. 7 ).
  • the outer Holweck stator 23, which can be formed, for example, by the pump housing, is arranged radially outside the outer rotor sleeve 19.
  • the outer Holweck stator 23 and the outer rotor sleeve 19 form a first Holweck stage 25.
  • the outer rotor sleeve 19 also forms with the inner Holweck stator 21, more precisely with the outside thereof, a second pump stage 27, which is also referred to here as the outer pump or Holweck stage.
  • Arrows indicate the pumping direction and thus the direction of conveyance of the gas molecules conveyed in the Holweck stages 25, 27, 29.
  • the pumping direction runs from an inlet 33 of the Holweck arrangement 25, 27, 29 to an outlet 35 of the pump stage 25, 27, 29.
  • the vacuum pump can have an intermediate inlet, not shown, which is directly assigned to the inlet of the outer Holweck stage .
  • This intermediate inlet can be, for example, a "splitflow" inlet, from which gas molecules to be conveyed - as in Fig. 6 indicated by a dashed line - can flow to the inlet of the outer Holweckcut 27.
  • the Holweck stator 21 according to the invention is shown in FIG Fig. 7 described in more detail.
  • Fig. 7 is a detailed view of the Fig. 6 . A section along the axis of rotation 13 through one half of the Holweck arrangement is shown.
  • the pump direction illustrated by arrows extends from the outer Holweck stage 27 from its inlet to its outlet.
  • the outlet of the outer holweck stage 27 is consequently located on the outside of the holweck stator 21.
  • the outlet of the inner holweck stage 29 connects to it.
  • the inlet is accordingly located on the inside of the Holweck stator 21.
  • the pumping direction runs from this inlet to the outlet of the inner Holweck stage 29.
  • the Holweck stator 21 has an outer thread 37 and an inner thread 39.
  • the webs 41 of the threads 37, 39 each have a web height 43 that decreases in the pumping direction, that is, the thread depth decreases, the top side of the web lying both outside and inside on a circular cylinder about the axis of rotation 13, around a constant Holweck gap 47 with the respective rotor sleeve 19 to form.
  • This is achieved by a conical shape of the Holweck stator 21 both on the inside and on the outside, the conicity angle being larger on the outside than on the inside.
  • the size of the Holweck gap 47 can change slightly during operation of the pump due to the effective centrifugal force.
  • the taper angles are in Fig. 6 and 7 Exaggeratedly large for illustration only and in concrete embodiments amount to (see also Fig. 8 ) preferably not more than 10 °.
  • the wall thickness of the Holweck stator 21 is not constant.
  • the wall thickness of the Holweck stator 21 increases in the pumping direction of the outer pump stage 27.
  • the wall thickness at the inlet of the outer pump stage 27 and thus at the outlet of the inner pump stage 29 is minimal and smaller than at the outlet of the outer pump stage 27 and thus at the inlet of the inner pump stage 29.
  • Fig. 8 shows a longitudinal section along the axis of rotation 13 of a possible specific embodiment of a Holweck stator 21.
  • the Holweck stator 21 has an inside with an internal Holweck thread and an outside with an outer Holweck thread. Arrows again illustrate the pumping direction of the respective pump stage.
  • the geometry of the Holweck stator 21 according to Fig. 8 corresponds qualitatively to that of in Fig. 7 schematic, not to scale Holweck stator 21.
  • the wall thickness of the Holweck stator 21 consequently increases again in the pumping direction of the outer pump stage and in the pumping direction of the inner pump stage, while the height of each with its top on a circular cylinder around the axis of rotation 13 lying webs 41 decreases both in the pumping direction of the outer pump stage 27 and in the pumping direction of the inner pump stage 29.
  • the conicity of the two pump stages is defined in each case by the groove base 53, 55, ie by the respective groove base 53, 55 - as in FIG Fig. 8 shown - a cone is defined with a conicity angle , the conicity angle ⁇ a relating to the outer groove base 53 and the conicity angle ⁇ i relating to the inner groove base 55.
  • the taper angle ⁇ a is larger than the taper angle ⁇ i ., Which results in the changing wall thickness. If the two taper angles ⁇ a , ⁇ i were the same size, the wall thickness would be constant.
  • Such a Holweck stator 21 would also be conical on both sides in the manner according to the invention.
  • the outer groove base diameter at the inlet of the outer pump stage is in Fig. 8 with NGDAE, the outer groove base diameter at the outlet of the outer pump stage with NGDAA, the inner groove base diameter at the inlet of the inner pump stage with NGDIE and the inner groove base diameter at the outlet of the inner pump stage with NGDIA.
  • the axial positions of the inlets and outlets are defined here by the respective axial end of the Holweck stator.
  • NGDAE is slightly smaller than NGDIE.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP18207551.5A 2018-11-21 2018-11-21 Pompe à vide Active EP3657021B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18207551.5A EP3657021B1 (fr) 2018-11-21 2018-11-21 Pompe à vide
JP2019203832A JP6913147B2 (ja) 2018-11-21 2019-11-11 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18207551.5A EP3657021B1 (fr) 2018-11-21 2018-11-21 Pompe à vide

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EP3657021A1 true EP3657021A1 (fr) 2020-05-27
EP3657021B1 EP3657021B1 (fr) 2020-11-11

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3845764A3 (fr) * 2021-03-31 2021-10-27 Pfeiffer Vacuum Technology AG Pompe à vide et système de pompe à vide
WO2022112745A1 (fr) * 2020-11-25 2022-06-02 Edwards Limited Mécanisme de pompage de traînée pour pompe turbomoléculaire
EP4194700A1 (fr) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4155549B1 (fr) 2022-11-14 2024-09-04 Pfeiffer Vacuum Technology AG Pompe à vide à capacité d'aspiration améliorée de l'étage de pompage holweck
EP4212730A1 (fr) * 2023-01-31 2023-07-19 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompage de holward optimisé pour compenser la perte de performance liée à la température

Citations (3)

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Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
JPH11210674A (ja) * 1998-01-27 1999-08-03 Ebara Corp ターボ分子ポンプ
WO2011070856A1 (fr) * 2009-12-11 2011-06-16 エドワーズ株式会社 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant

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Publication number Priority date Publication date Assignee Title
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
JPH11210674A (ja) * 1998-01-27 1999-08-03 Ebara Corp ターボ分子ポンプ
WO2011070856A1 (fr) * 2009-12-11 2011-06-16 エドワーズ株式会社 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022112745A1 (fr) * 2020-11-25 2022-06-02 Edwards Limited Mécanisme de pompage de traînée pour pompe turbomoléculaire
EP3845764A3 (fr) * 2021-03-31 2021-10-27 Pfeiffer Vacuum Technology AG Pompe à vide et système de pompe à vide
EP4194700A1 (fr) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable

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EP3657021B1 (fr) 2020-11-11
JP2020094582A (ja) 2020-06-18
JP6913147B2 (ja) 2021-08-04

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