EP3845764B1 - Pompe à vide et système de pompe à vide - Google Patents

Pompe à vide et système de pompe à vide Download PDF

Info

Publication number
EP3845764B1
EP3845764B1 EP21166257.2A EP21166257A EP3845764B1 EP 3845764 B1 EP3845764 B1 EP 3845764B1 EP 21166257 A EP21166257 A EP 21166257A EP 3845764 B1 EP3845764 B1 EP 3845764B1
Authority
EP
European Patent Office
Prior art keywords
holweck
pump
stator
vacuum pump
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP21166257.2A
Other languages
German (de)
English (en)
Other versions
EP3845764A3 (fr
EP3845764A2 (fr
Inventor
Jan Hofmann
Michael Schweighöfer
Martin Lohse
Sebastian Südwasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21166257.2A priority Critical patent/EP3845764B1/fr
Publication of EP3845764A2 publication Critical patent/EP3845764A2/fr
Publication of EP3845764A3 publication Critical patent/EP3845764A3/fr
Application granted granted Critical
Publication of EP3845764B1 publication Critical patent/EP3845764B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/08—Units comprising pumps and their driving means the working fluid being air, e.g. for ventilation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular vacuum pump, with an inlet, an outlet, a housing which encloses a pump chamber for a gas to be pumped from the inlet to the outlet in a pumping direction, and at least one Holweck pump stage which has at least one Holweck stator and at least one Holweck rotor, which rotates about an axis of rotation during operation and delimits a Holweck pump region together with the Holweck stator, wherein the Holweck pump region has an axial length with reference to the axis of rotation with a first axial end and a second axial end, and wherein at least one further inlet for gas to be pumped is provided, which leads via an inlet channel to an opening of the further inlet formed in the Holweck stator into the Holweck pump region.
  • Vacuum pumps with multiple inlets are known in principle and are also referred to as split-flow vacuum pumps.
  • the terms "Split-Flow” and "SPLIT-FLOW” are registered trademarks of Pfeiffer Vacuum GmbH.
  • Other designations for such a vacuum pump are also multi-inlet vacuum pump and multi-inlet vacuum pump.
  • split-flow vacuum pumps are used in particular for pumping several chambers (recipients) with different pressures, in particular those arranged one behind the other in a row.
  • split flow vacuum pumps include two to six inlets spaced along an axis of the pump.
  • the split flow vacuum pumps usually include a stack, ie a cascade arrangement of cascaded pump stages within the pump chamber.
  • these pumping stages include one or more turbomolecular pumping stages and one or more molecular pumping stages, in particular one or more Holweck pumping stages.
  • the highest pump speed and lowest pressure range is available at the first inlet, ie upstream of all other inlets.
  • the downstream inlets are in higher pressure ranges according to their order and deliver lower pump speeds.
  • split-flow vacuum pumps are also known in which the highest pumping speed or the highest pumping speed is available at an inlet which is arranged between two other inlets. The specific configuration of a respective split-flow pump depends in particular on the respective application.
  • a vacuum pump can include one or more Holweck pump stages, where multiple Holweck pump stages can pump both in series and in parallel with one another.
  • Holweck pump stages are used in turbomolecular vacuum pumps and are then usually downstream of one or more turbomolecular pump stages in the pumping direction.
  • a Holweck pump stage comprises a Holweck rotor and a Holweck stator, the Holweck rotor having a rotor shaft to which one or more Holweck sleeves (sometimes also referred to as rotor sleeves) are concentrically attached by means of a disc-shaped Holweck hub, for example are.
  • the Holweck stator is provided with a single or multi-start Holweck thread. The gas molecules to be conveyed are moved by the rotating movement of the Holweck rotor relative to the Holweck stator is conveyed along the threads from an inlet to an outlet.
  • a thread includes a circumferential Holweck channel (groove) delimited by the walls of a web, in which the gas molecules are conveyed when the rotor sleeve rotates relative to the stator.
  • the width of the radial gap (Holweck gap) between the top of the web, i.e. the web tip, and the rotor sleeve is kept small.
  • the Holweck stator can be located either radially outside or radially inside the rotor sleeve, i.e. both a (radially) outer and a (radially) inner stator can be connected to the corresponding side, i.e. the outside or the inside, of the rotor sleeve form a pump-active Holweck pump region.
  • a Holweck rotor can therefore interact with two Holweck stators at the same time, and conversely, a Holweck stator can also interact with two Holweck rotors at the same time.
  • Holweck pump stages are arranged concentrically one inside the other and are connected in series in a pumping manner, i.e. they follow one another directly as seen in the pumping direction, so that the gas to be pumped is pumped through the successive Holweck pump regions one after the other and the pumping directions of Holweck pump stages that follow one another radially are opposite to one another.
  • Two immediately consecutive Holweck pump stages i.e. a (radial) outer Holweck pump stage and a (radial) inner Holweck pump stage, can comprise a common Holweck stator provided with a Holweck thread on both sides (also referred to as "double-sided"), located between two rotor sleeves.
  • Holweck pump stages in which the Holweck stator is designed in such a way that the Web height decreases in the pumping direction. This can be achieved in particular with a constant web tip diameter in that the so-called groove base diameter increases in the pumping direction.
  • Such Holweck pump stages can have improved pumping properties.
  • split flow vacuum pumps are also often referred to as bleeds. If a split-flow vacuum pump is not only provided with one or more turbomolecular pump stages - i.e. generally a turbo area - but also has one or more Holweck pump stages - i.e. generally a Holweck area - then it is generally known that such a split flow -Vacuum pumps can not only have taps in the turbo area, but also in the Holweck area.
  • the Holweck region has a so-called "folded" Holweck arrangement with at least two serially connected Holweck pump stages, then it is also known to provide a tap in the transition region of two directly consecutive Holweck pump stages.
  • the advantage of such a tapping is that the tapping provided for this tapping between the inlet, also referred to as port, and the opening into the transition area can in most cases be implemented particularly easily.
  • the object of the invention is therefore to eliminate this disadvantage and to create a vacuum pump with multiple inlets and at least one Holweck pump stage, which can be adapted to different requirements.
  • the opening into the Holweck pumping area is located in the axial direction between the first axial end and the second axial end of the Holweck pumping area, and that the inlet channel comprises at least one opening section which is formed by the Holweck stator and leads to the confluence with the Holweck pumping area.
  • the vacuum pump according to the invention provides that, in addition to the Holweck pump stage, at least one further Holweck pump stage is provided, with these at least two Holweck pump stages being arranged concentrically with respect to the rotational axis forming a common axis of rotation and consecutively in the pumping direction and at least two Holweck stators, one disposed radially inward of the other, with the orifice and the orifice portion extending to the orifice being formed in the radially inner Holweck stator.
  • the gas to be pumped is first through the radially outer Holweck pumping region and then - after passing the transition between the two Holweck pumping stages - through the radially inner Holweck pumping region pumped.
  • the mouth of the further inlet is formed in the Holweck stator of the radially inner Holweck pump region, then the invention can be described as a tapping in the downstream direction, relative to the pumping direction, compared to the known tapping at the transition region.
  • the opening of the further inlet into the Holweck pumping area is located downstream of a transition area between two directly consecutive Holweck pumping stages, with respect to the pumping direction.
  • the tapping into the Holweck range does not take place at a transition between two directly consecutive Holweck pump stages, but rather at a point on the Holweck stator between the two axial ends of the Holweck pump range.
  • the vacuum pump according to the invention is not dependent on the presence of a transition between two directly consecutive Holweck pump stages.
  • tapping into the Holweck range can also take place when there are several Holweck pump stages that do not follow one another directly.
  • the axial position of the opening into the Holweck pump area can in principle be chosen at will. This has the advantage that, depending on this axial position of the orifice, the pressure at the tap can be selected comparatively freely.
  • the invention also relates to a vacuum pump system with a vacuum pump, in particular a turbomolecular vacuum pump, of the type disclosed herein and with at least one device to be evacuated or at least one device which comprises at least one vacuum chamber to be evacuated.
  • this vacuum pump system provides that the device comprises a plurality of vacuum chambers to be evacuated, which are arranged one behind the other and each have a gas outlet which is in flow communication with an inlet of the vacuum pump during pumping operation.
  • pump stages are provided, which are connected in series in the pump chamber in the pumping direction between the inlet and the outlet, which include the Holweck pump stage and at least one turbomolecular pump stage, which is arranged in front of the Holweck pump stage in the pumping direction.
  • the invention can thus also be implemented on multi-inlet or split-flow vacuum pumps that have different types of pump stages, in particular one or more turbomolecular pump stages and one or more Holweck pump stages that are connected in series in the pumping direction.
  • the mouth section has at least two channel sections that do not run parallel to one another.
  • the mouth section comprises a channel section which is formed in the Holweck stator and which starts from a base side of the Holweck stator.
  • the base side of the Holweck stator is the side that faces away from a turbomolecular pump stage—if one is present.
  • this channel section formed on the Holweck stator can run in the axial direction, starting from the base side, parallel to the axis of rotation in the Holweck stator.
  • Such a channel section can be produced in a particularly advantageous manner by drilling or milling.
  • the mouth section comprises a channel section formed in the Holweck stator, which ends at the mouth and runs in the radial direction perpendicular to the axis of rotation.
  • a channel section can also be produced in a particularly advantageous manner by drilling or milling.
  • the inlet duct has an inlet section which is located between the further inlet and the Holweck stator and in an adjacent to the Holweck stator, which is formed in one piece with the Holweck stator or is separated from the Holweck Stator separate component of the vacuum pump is formed.
  • This component can in particular be a so-called lower part of the vacuum pump or an intermediate component.
  • the inlet section can merge directly into the outlet section of the inlet channel, which is formed in the Holweck stator and leads to the outlet.
  • Such a course of the inlet channel between the further inlet and the opening into the Holweck pump area can be provided in particular when the Holweck stator and another component, in particular a lower part or an intermediate component of the vacuum pump, are in direct contact with one another, with such a direct contact with one another Concern does not rule out that one or more sealing elements are arranged between the Holweck stator and the component or lower part or intermediate component.
  • the invention is not limited to the additional inlet opening into the Holweck pump area at only one point.
  • the inlet channel can consequently lead to a plurality of openings into the Holweck pump region, starting from the further inlet.
  • the inlet duct comprises a plurality of opening sections formed in the Holweck stator, which each lead to at least one, preferably exactly one, of the plurality of openings.
  • the inlet duct has an inlet section which is located between the further inlet and the Holweck stator and is designed as a collecting section or at least comprises a collecting section which is connected to a plurality of orifices, preferably with all orifices, is in flow communication.
  • each orifice By providing such a collecting section, it is consequently not necessary for each orifice to have its own inlet channel, which leads from the further inlet to the respective orifice.
  • the collecting section can in particular be formed in a component of the vacuum pump adjoining the Holweck stator, formed in one piece with the Holweck stator or separate from the Holweck stator, ie in a component as has already been described elsewhere.
  • This component for the collection section can in turn be a so-called bottom part or an intermediate component of the vacuum pump.
  • the Holweck stator is provided with a Holweck thread and the groove base diameter varies in the pumping direction.
  • the further inlet opens into the Holweck pump area of such a conical Holweck pump stage.
  • this conical Holweck pump stage is part of a so-called "folded" Holweck arrangement, i.e. in addition to the Holweck pump stage with the opening according to the invention, at least one further Holweck pump stage is provided, with these at least two Holweck pump stages are arranged concentrically with respect to the axis of rotation forming a common axis of rotation and are arranged one after the other in the pumping direction, i.e. connected in series, and comprise at least two Holweck stators, one of which is arranged radially inside the other, and the mouth and the mouth section running up to the mouth are formed in the radially inner Holweck stator.
  • the radially outer Holweck pump stage can likewise be a conical Holweck pump stage. However, it is provided in particular that the groove base diameter decreases in the pumping direction.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ). Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be conducted into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Also provided are two cylinder jacket-shaped Holweck stator sleeves 167, 169, which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • the nested Holweck pump stages are connected in series with one another.
  • a connection channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures with the stator-side structures is prevented becomes.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the electric motor 125 can be protected against process gas, for example against corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117 , ie the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • turbomolecular vacuum pump described above and known from the prior art is not a split-flow vacuum pump.
  • structure and mode of operation of this turbomolecular vacuum pump also apply in principle to the vacuum pump according to the invention.
  • FIG. 6 shows a possible vacuum system according to the invention with a split flow vacuum pump 10 according to the invention and a device 12 to be evacuated by means of this vacuum pump 10.
  • the device 12 comprises three vacuum chambers 14 arranged one behind the other, with gas entering the bottom chamber 14 being able to reach the respective subsequent chamber 14, as indicated by the arrows.
  • Each chamber has a gas outlet 16 which leads to an inlet 11 or 33 of the vacuum pump 10, also referred to as a port.
  • the inlet 33 of the vacuum pump 10 corresponding to the gas outlet 16 of the lowermost chamber 14 is a further inlet within the meaning of the invention, which—as described in more detail elsewhere—leads to a Holweck area of the vacuum pump 10 .
  • the split-flow vacuum pump 10 which is only shown schematically here, has a housing 15 and, within the housing 15 in a pump chamber 17, a rotor shaft 18 which rotates during operation and thus rotates the rotating components of the individual pump stages attached to it, namely by one Axis of rotation A, which is defined by the rotor shaft 18.
  • these pump stages are turbomolecular pump stages 47, which are followed in a pumping direction P in the pump chamber 17 by a Holweck region with two Holweck pump stages 19, 21.
  • a Holweck rotor 31 is shown only schematically, which comprises a Holweck sleeve 32 and a Holweck hub 30, via which the Holweck sleeve 32 is attached to the rotor shaft 18.
  • This Holweck rotor 31 is associated with both Holweck pump stages 19, 21, as discussed below in connection with 7 is explained in more detail.
  • Gas to be pumped thus exits the device 12 to be evacuated via the outlets 16 of the individual chambers 14 at different points via the inlets 11, 33 into the pump chamber 17 of the split-flow vacuum pump 10 and is pumped by means of the individually mentioned pump stages 47, 19, 21 pumped in the pumping direction P to an outlet 13 through which the gas leaves the vacuum pump 10 .
  • the basic structure explained above and its functionality is known in principle and can—as also mentioned in the introductory part—be varied in many ways, in particular with regard to the number and arrangement of the chambers 14 to be evacuated of the device 12 to be evacuated and with regard to the number, arrangement and design of the individual pump stages of the split flow vacuum pump 10.
  • the schematically illustrated area of a split flow vacuum pump 10 according to the invention would change in the case of the 6
  • the vacuum pump 10 shown is located approximately (apart from the position of a lower part of the pump) at the point shown in 6 is indicated by a dashed square V, i.e. to the left of in 7 axis of rotation A, not shown, at the lower end of the Holweck sleeve 32 of the Holweck rotor 31, pointing towards the outlet 13.
  • the Holweck stators 23, 25 are each provided with a Holweck thread on their pump-active side facing the Holweck sleeve 32.
  • a Holweck slot 55 is shown for each Holweck stator 23, 25, which is delimited by a web 53.
  • the Holweck sleeve 32 and the radially outer Holweck stator 23 form a radially outer Holweck pumping region 27 and the Holweck sleeve 32 and the radially inner Holweck stator 25 form a radially inner Holweck pumping region 29.
  • the two Holweck pump regions 27, 29 merge into one another in a transition region 43.
  • the height of the webs 53 decreases in the pumping direction P in both Holweck pumping regions 27, 29, with the groove base diameter decreasing in the pumping direction P in the radially outer Holweck pumping stage 19, whereas in the radially inner Holweck - Pump stage 21 increases the groove base diameter in the pumping direction P.
  • an inlet channel 35 extends from a further inlet 33 of the vacuum pump to an orifice 37 in the radially inner Holweck pump region 29 , the orifice 37 being formed in the groove 55 of the radially inner Holweck stator 25 .
  • the inlet channel 35 consists of an inlet section 49 which initially runs in the radial direction and which, like the further inlet 33 , is also formed in the lower pump part 51 .
  • the inlet section 49 extends in an axial direction - in relation to the axis of rotation A (not shown here) (cf. 6 ) - extending section in the lower part 51, which is immediately followed by an axial channel section 39 which is formed in the radially inner Holweck stator 25.
  • This axial channel section 39 transitions into a radial channel section 41 of the inner Holweck stator 25 which leads to the opening 37 .
  • the inlet duct 35 which extends from the further inlet 33 to the mouth 37, therefore has an inlet section 49 formed in the lower part 51, which begins at the further inlet 33, and an inlet section 49 formed in the radially inner Holweck stator 25 and formed by the two mentioned duct sections 39, 41 Muzzle section ending at mouth 37.
  • the radially inner Holweck stator 25 has a comparatively large wall thickness--measured in the radial direction--the axial channel section 39 and the radial channel section 41 can be provided with a comparatively large diameter, as a result of which relatively large conductivity values can be achieved.
  • the two channel sections 39, 41 can be produced by drilling or milling.
  • a different axial position for the orifice 37 can also be selected depending on the respective requirement.
  • the length of the axial channel section 39 is then to be varied accordingly.
  • the radial bore or radial milling 41 can in principle be made at any desired axial position in order to reach the bore starting from the base side 45 of the radially inner Holweck stator 25 facing the lower part 51 and forming the axial channel section 39 .
  • a plurality of channels can also open into the radially inner Holweck pump region 29, i.e. a plurality of openings 37 can be provided which differ in terms of their axial position and/or in terms of their circumferential position - in each case in relation to the Axis of rotation A (cf. 6 ) - differ from each other.
  • the inlet channel can be formed in another component separate from the outer Holweck stator, in particular in an intermediate component, which is also referred to as an intermediate piece.
  • a gas flow for the tap on the other inlet 33 must not as in the embodiment 7 through the pump base 51, but can also be done in other ways. As mentioned elsewhere, the gas can be routed through a portion of the pump that is integral with the Holweck stator.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (14)

  1. Pompe à vide, en particulier pompe à vide turbomoléculaire, comprenant
    - une entrée (11),
    - une sortie (13),
    - un boîtier (15) qui renferme une chambre de pompage (17) pour un gaz à pomper de l'entrée (11) à la sortie (13) dans une direction de pompage (P), et
    - au moins un étage de pompage Holweck (19, 21) qui comprend au moins un stator Holweck (23, 25) et au moins un rotor Holweck (31) qui tourne en fonctionnement autour d'un axe de rotation (A) et qui délimite avec le stator Holweck (23, 25) une zone de pompage Holweck (27, 29),
    dans laquelle
    la zone de pompage Holweck (27, 29) présente, par rapport à l'axe de rotation (A), une longueur axiale avec une première extrémité axiale et une deuxième extrémité axiale, et
    il est prévu au moins une autre entrée (33) pour le gaz à pomper, laquelle mène via un canal d'entrée (35) jusqu'à une embouchure (37), formée dans le stator Holweck (25), de l'autre entrée (33) dans la zone de pompage Holweck (29),
    l'embouchure (37) est située dans la direction axiale entre la première extrémité axiale et la deuxième extrémité axiale de la zone de pompage Holweck (29), et le canal d'entrée (35) comprend au moins une portion d'embouchure (39, 41) qui est formée dans le stator Holweck (25) et qui mène jusqu'à l'embouchure (37) dans la zone de pompage Holweck (29),
    il est prévu, en plus de l'étage de pompage Holweck (21), au moins un autre étage de pompage Holweck (19),
    lesdits au moins deux étages de pompage Holweck (19, 21) sont disposés concentriquement par rapport à l'axe de rotation (A), formant un axe de rotation commun, et se succèdent dans la direction de pompage (P) et comprennent au moins deux stators Holweck (23, 25), dont l'un est disposé radialement à l'intérieur de l'autre, et
    l'embouchure (37) et la portion d'embouchure (39, 41) s'étendant jusqu'à l'embouchure (37) sont formées dans le stator Holweck (25) radialement intérieur.
  2. Pompe à vide selon la revendication 1,
    dans laquelle il est prévu plusieurs étages de pompage montés les uns derrière les autres dans la chambre de pompage (17) dans la direction de pompage (P) entre l'entrée (11) et la sortie (13), qui comprennent l'étage de pompage Holweck (19, 21) et au moins un étage de pompage turbomoléculaire (47) qui est disposé dans la direction de pompage (P) avant l'étage de pompage Holweck (19, 21).
  3. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle
    l'embouchure (37) est située, par rapport à la direction de pompage (P), en aval d'une zone de transition (43) entre deux étages de pompage Holweck (19, 21) qui se suivent directement.
  4. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle la portion d'embouchure comprend au moins deux portions de canal (39, 41) qui ne sont pas parallèles entre elles.
  5. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle la portion d'embouchure comprend une portion de canal (39) formée dans le stator Holweck (25) et s'étendant depuis une face de base (45) du stator Holweck (25), en particulier la face de base (45) étant détournée d'un étage de pompage turbomoléculaire (47) de la pompe à vide.
  6. Pompe à vide selon la revendication 5,
    dans laquelle la portion de canal (39) s'étend dans la direction axiale parallèlement à l'axe de rotation (A) en partant de la face de base (45).
  7. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle la portion d'embouchure comprend une portion de canal (41) formée dans le stator Holweck (25), laquelle se termine au niveau de l'embouchure (37) et s'étend dans une direction radiale perpendiculairement à l'axe de rotation (A).
  8. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle le canal d'entrée (35) comprend une portion d'entrée (49) située entre l'autre entrée (33) et le stator Holweck (25) et réalisée dans un composant (51) de la pompe à vide adjacent au stator Holweck (25), formé d'un seul tenant avec le stator Holweck (25) ou séparé du stator Holweck (25), en particulier le composant (51) étant une partie inférieure ou un composant intermédiaire, en particulier une pièce intermédiaire, de la pompe à vide.
  9. Pompe à vide selon la revendication 8,
    dans laquelle la portion d'entrée (49) se transforme directement en la portion d'embouchure (39, 41).
  10. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle plusieurs embouchures (37) dans la zone de pompage Holweck (29) situées chacune dans la direction axiale entre la première extrémité axiale et la deuxième extrémité axiale de la zone de pompage Holweck (29) sont formées dans le stator Holweck (25), qui se distinguent les unes des autres en ce qui concerne leur position par rapport à l'axe de rotation (A) dans la direction axiale et/ou dans la direction circonférentielle.
  11. Pompe à vide selon la revendication 10,
    dans laquelle le canal d'entrée (35) comprend plusieurs portions d'embouchure (39, 41) formées dans le stator Holweck (25), qui mènent chacune à au moins une, de préférence exactement une, desdites plusieurs embouchures (37).
  12. Pompe à vide selon la revendication 10 ou 11,
    dans laquelle le canal d'entrée (35) comprend une portion d'entrée (49) qui est située entre l'autre entrée (33) et le stator Holweck (25) et est réalisée sous forme de portion de collecte ou comprend au moins une portion de collecte qui est en communication fluidique avec une pluralité des embouchures (37), de préférence avec toutes les embouchures (37).
  13. Pompe à vide selon l'une des revendications précédentes,
    dans laquelle le stator Holweck (25) est pourvu d'un filetage Holweck, et le diamètre de fond de gorge varie, en particulier augmente, dans la direction de pompage (P), et/ou
    il est prévu, en plus de l'étage de pompage Holweck (21), au moins un autre étage de pompage Holweck (19), lesdits au moins deux étages de pompage Holweck (19, 21) sont disposés concentriquement par rapport à l'axe de rotation (A), formant un axe de rotation commun, et se succèdent dans la direction de pompage (P) et comprennent au moins deux stators Holweck (23, 25), dont l'un est disposé radialement à l'intérieur de l'autre, et l'embouchure (37) et la portion d'embouchure (39, 41) s'étendant jusqu'à l'embouchure (37) sont formées dans le stator Holweck (25) radialement intérieur qui est pourvu d'un filetage Holweck et dont le diamètre de fond de gorge varie, en particulier augmente, dans la direction de pompage (P).
  14. Système de pompe à vide comprenant au moins une pompe à vide (10), en particulier une pompe à vide turbomoléculaire, selon l'une des revendications précédentes, et au moins un dispositif (12) à mettre sous vide ou au moins un dispositif (12) qui comprend au moins une chambre à vide (14) à mettre sous vide,
    en particulier, le dispositif (12) comprenant plusieurs chambres à vide (14) à mettre sous vide, qui sont disposées les unes derrière les autres et qui présentent chacune une sortie de gaz (16) qui, en fonctionnement de la pompe, est en communication fluidique avec une entrée (11, 33) de la pompe à vide (10).
EP21166257.2A 2021-03-31 2021-03-31 Pompe à vide et système de pompe à vide Active EP3845764B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP21166257.2A EP3845764B1 (fr) 2021-03-31 2021-03-31 Pompe à vide et système de pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21166257.2A EP3845764B1 (fr) 2021-03-31 2021-03-31 Pompe à vide et système de pompe à vide

Publications (3)

Publication Number Publication Date
EP3845764A2 EP3845764A2 (fr) 2021-07-07
EP3845764A3 EP3845764A3 (fr) 2021-10-27
EP3845764B1 true EP3845764B1 (fr) 2023-05-03

Family

ID=75339520

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21166257.2A Active EP3845764B1 (fr) 2021-03-31 2021-03-31 Pompe à vide et système de pompe à vide

Country Status (1)

Country Link
EP (1) EP3845764B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3657021B1 (fr) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
EP3845764A3 (fr) 2021-10-27
EP3845764A2 (fr) 2021-07-07

Similar Documents

Publication Publication Date Title
EP2829734B1 (fr) Pompe à vide
EP2826999B1 (fr) Pompe à vide
EP3657021B1 (fr) Pompe à vide
EP0675289B1 (fr) Pompe à friction
EP4212730A1 (fr) Pompe à vide avec étage de pompage de holward optimisé pour compenser la perte de performance liée à la température
EP3845764B1 (fr) Pompe à vide et système de pompe à vide
EP4108932A1 (fr) Reciate et pompe à vide élevé
DE102014105582A1 (de) Vakuumpumpe
EP3608545B1 (fr) Pompe à vide
EP3196471B1 (fr) Pompe a vide
EP3670924B1 (fr) Pompe à vide et procédé de fabrication d'une telle pompe à vide
EP3693610B1 (fr) Pompe à vide moléculaire
EP3734078B1 (fr) Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe
EP3683447B1 (fr) Pompe à vide
EP3907406B1 (fr) Pompe à vide
EP3730802B1 (fr) Élément de bride
EP3135932B1 (fr) Pompe à vide et palier à aimant permanent
EP3767109B1 (fr) Système à vide
EP3327293B1 (fr) Pompe à vide avec une pluralté d'entrées
EP3267040B1 (fr) Pompe turbomoléculaire
EP3628883B1 (fr) Pompe à vide
EP4194700A1 (fr) Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable
EP3564538B1 (fr) Système à vide et procédé de fabrication d'un tel système à vide
DE102020116770B4 (de) Vakuumpumpe mit integriertem miniaturventil
EP3760872B1 (fr) Pompe à vide pourvue d'un agencement de fixation destiné à l'application de la pompe à une structure de fixation ainsi qu'un poste de pompage doté d'une telle pompe à vide montée sur celui-ci

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 19/04 20060101ALI20210920BHEP

Ipc: F04D 1/00 20060101AFI20210920BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20211111

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

INTG Intention to grant announced

Effective date: 20230228

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502021000630

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1564814

Country of ref document: AT

Kind code of ref document: T

Effective date: 20230515

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20230503

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230904

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230803

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230903

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230804

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502021000630

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20240206

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CZ

Payment date: 20240325

Year of fee payment: 4

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20230503