EP3561307B1 - Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration - Google Patents

Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration Download PDF

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Publication number
EP3561307B1
EP3561307B1 EP19165573.7A EP19165573A EP3561307B1 EP 3561307 B1 EP3561307 B1 EP 3561307B1 EP 19165573 A EP19165573 A EP 19165573A EP 3561307 B1 EP3561307 B1 EP 3561307B1
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EP
European Patent Office
Prior art keywords
flange
vacuum device
accordance
carrier
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19165573.7A
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German (de)
English (en)
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EP3561307A1 (fr
Inventor
Siamak Rafii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Priority to EP19165573.7A priority Critical patent/EP3561307B1/fr
Publication of EP3561307A1 publication Critical patent/EP3561307A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Definitions

  • the present invention relates to a vacuum device, in particular a turbomolecular pump, comprising a passage, namely an inlet or an outlet, and a flange for the vacuum-tight connection of the passage of the vacuum device to a further flange of a further vacuum device, the flange being distributed over a circumference of the flange arranged fastening points, in particular with through-openings for fastening elements to be assigned in each case, at which the flange can be fastened to the further flange, with a carrier for a functional element being arranged in the passage and the carrier comprising at least two arms which connect the carrier with the flange to a respective Connect the connection point, the connection points being arranged axially at the height of the flange.
  • the invention also relates to a vacuum system with a vacuum device with a flange and a further vacuum device with a further flange.
  • An exemplary turbomolecular pump has a so-called hybrid bearing and includes a roller bearing, in particular a ball bearing, on the fore-vacuum side and a magnetic bearing, in particular a permanent magnetic bearing, on the high-vacuum side to support a turbo rotor.
  • the ball bearing is usually not designed to absorb large axial forces. Due to thermal expansion of the rotor shaft of the turbo rotor during operation, the length of the shaft changes and as a result the position of the rotor magnet in relation to the stator magnet of the magnetic bearing changes. This creates large axial forces that load the ball bearing. Part of this load can be reduced by presetting the permanent magnet bearing on the high vacuum side be compensated.
  • the stator magnet of the permanent magnet bearing is offset relative to the rotor magnet by relatively small length units during assembly in such a way that the magnetic field exerts a certain axial force or so-called restoring force on the rotor and partially counteracts the thermal load of the ball bearings.
  • the position of the stator magnet adjusted in this way can change when connecting a flange of the pump to a counter-flange.
  • the flange is attached to the mating flange using fasteners.
  • a certain deformation of the flange occurs due to clamping forces. This deformation can continue to the stator magnet, in particular via a so-called star, ie a carrier in the passage that holds the stator magnet, in such a way that its position is changed.
  • the GB 2 545 423 A is aimed at solving a similar problem in the context of a continuous flange without predefined attachment points. It discloses a vacuum device comprising a passage, namely an inlet, and a flange for the vacuum-tight connection of the passage of the vacuum device to a further flange of a further vacuum device, with a carrier for a functional element being arranged in the passage and the carrier comprising at least two arms that Join beams to the flange at a respective junction, the junctions being located axially at the level of the flange.
  • the problem of the axial deformation of the support that occurs in this context is solved by the teaching of this document by a flexible support, in particular with a notch on the support.
  • the EP 3 051 138 A1 discloses a vacuum device, in particular a turbomolecular pump, comprising a passage, namely an inlet, and a flange for the vacuum-tight connection of the passage of the vacuum device to a further flange of a further vacuum device, the flange having a plurality of attachment points distributed over the circumference of the flange, in particular with through openings for fastening elements to be assigned in each case, to which the flange on the further flange can be fastened, with a carrier for a functional element being arranged in the passage and the carrier comprising at least two arms which connect the carrier with the flange at a respective connection point and with all connection points are arranged in the circumferential direction between two adjacent attachment points.
  • a set position of the stator magnet should not be changed by flanging the pump to the recipient.
  • connection points are arranged in the circumferential direction between two adjacent attachment points.
  • connection point between the attachment points the connection point is somewhat spaced from the attachment points and thus there is only minor deformation at the connection point.
  • the joint or arm does not lie under the immediate pressure cone in the flange that forms when it is fastened with a fastener such as a screw.
  • the invention also describes a particularly simple way of reducing the deformation and/or change in position on the functional element and on the carrier.
  • no additional components or special post-processing of the components are necessary.
  • the construction of a known vacuum device or its flange can be adapted according to the invention in a particularly simple manner, in which case the production costs can essentially remain the same. For example, it is sufficient to constructively adapt the angular orientation of a carrier or its arms and/or the attachment points of a known vacuum device.
  • connection point in particular with a center point of the connection point in relation to the circumferential direction, is arranged in a central third between two adjacent attachment points in the circumferential direction.
  • the deformation of the flange is particularly low here, so that the deformation and change in position of the functional element is also correspondingly low.
  • connection point is arranged symmetrically in the circumferential direction between two adjacent attachment points.
  • the flange can, for example, be of the ISO-F type, in particular according to ISO 1609 or DIN 28404. Such a flange is usually fastened to another flange with a centering ring.
  • the additional flange can generally also be referred to as a counter-flange.
  • the centering ring is the fulcrum of the lever. This can lead to a displacement of the functional element, such as a permanent magnet bearing element, via the carrier or star. Due to the no longer optimal positioning of the bearing points of the rotor, this can lead to increased wear of a ball bearing and increased noise emissions from the pump.
  • the ISO-F flange which is known and customary as such, the invention therefore has a particularly advantageous effect.
  • the stress is distributed particularly advantageously and with little deformation for the functional element if the flange has at least four, in particular at least six, in particular at least ten, fastening points. In principle, 6 or 12 attachment points are advantageous.
  • the number of attachment points is an even multiple of the number of arms and/or junctions.
  • the connection points can be arranged, in particular distributed, particularly uniformly over the circumference relative to the fastening points.
  • a preferred connection point can be implemented for each arm and the deformation on the functional element can be implemented as particularly small overall.
  • the carrier can advantageously have three or four arms and/or connection points.
  • the arm is integrally connected to the flange and/or a housing of the vacuum device.
  • the arm or the carrier can also be formed separately from the flange and/or the housing.
  • the deformation can be further reduced, for example, by providing a recess, in particular a relief recess and/or a puncture, on at least one arm.
  • the functional element can be designed, for example, as a bearing element, which is held in the passage by the carrier.
  • mounting of the vacuum device in particular mounting of a rotor of a vacuum pump, can be carried out particularly precisely.
  • the bearing element can be designed as part of a magnetic bearing, in particular as a stator magnet.
  • the invention has a particularly advantageous effect.
  • the arms lie in a common plane.
  • the carrier can be designed as a star, for example.
  • the vacuum device can advantageously be designed as a vacuum pump, in particular a turbomolecular pump.
  • the arms of the carrier can be distributed uniformly in the circumferential direction. This results in a particularly even stress distribution in the carrier.
  • the attachment points on the flange can be distributed evenly over the circumference. This results in a particularly even stress distribution in the flange, which also has a positive effect on the deformation in the beam.
  • the through-openings can be in the form of bores or recesses open to the outside. Screws, for example, can be used as fastening elements. As an alternative or in addition, however, clamp-like fastening elements can in principle also be used.
  • the object is also achieved by a vacuum system according to the claim directed thereto.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be brought.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant which can be conducted into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 can be arranged not downwards but to the side or upwards.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 with the radially inner Holweck gap 175 is connected.
  • the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases toward the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir to the rotating spray nut 185 via the scraper and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203 .
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form since collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the structures on the rotor side prevent the structures on the stator from colliding under all circumstances will.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a so-called labyrinth seal 223 be provided, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages lying radially outside.
  • the invention can be used in particular in a turbomolecular pump of the type described above in order to improve it, in particular to reduce wear and increase service life.
  • the turbomolecular pump according to 6 includes a flange 20 which is arranged on a housing 22, in particular is integrally connected thereto.
  • the flange 20 surrounds an inlet 34 of the pump.
  • a carrier 36 is arranged in the inlet 34, which has a plurality of webs or arms 62 and carries a functional element 38, which in turn is designed here as a stator part of a magnetic bearing.
  • the carrier 36 is connected in one piece to the housing 22 or the flange 20, but can in principle also be designed as a separate part.
  • the flange 20 is connected to a counter-flange 46, which is part of a housing 48 of another vacuum device, otherwise not shown.
  • Flanges 20 and 46 are of type ISO-F design.
  • the flanges 20, 46 have through-openings 50 for fastening elements 52.
  • the through openings 50 and fastening elements 52 are distributed over the circumference of the bottle 20, 46 around a connection axis 42 and define respective fastening points 60.
  • a respective connecting element 52 is formed here by a screw 54 with a screw shank 56 and by a corresponding nut 58 .
  • a sealing element here a centering ring 26, being clamped in the axial direction.
  • an O-ring 28 of the centering ring 26 is compressed up to an axial height corresponding to the ring elements 30 adjacent to the O-ring.
  • the forces introduced by the fastening elements 52 and the forces resulting therefrom are indicated by several arrows.
  • the fastening elements 52 first cause a tensile force along a respective fastening axis, which runs through the fastening point. Since the centering ring 26 with its ring elements 30 is to be regarded as essentially fixed in the axial direction, a certain deformation of the outer flange ends of the flanges 20, 46 towards one another results, with a lever effect resulting between the fastening element 52 and the centering ring 26.
  • the deformation of the flange 20 can lead to a change in position or deformation of the carrier 36 and thus of the functional element 38 , as indicated by the arrow pointing downwards on the connecting axis 42 .
  • the axial positioning of the magnetic bearing inner ring and the rotor of the turbomolecular pump are disturbed, which can result in increased wear.
  • a flange 20 of a vacuum pump is shown which is not designed according to the invention. Rather also serves 8 the further illustration of the findings on which the invention is based.
  • the vacuum pump includes a bracket 36 having an arm 62 connecting the bracket 36 to the flange 20 at a joint 64 .
  • the carrier 36 has a socket for a functional element (not shown here), in particular a magnetic bearing element.
  • the carrier 36 is the so-called star.
  • Junction 64 is in 7 arranged in the circumferential direction at essentially the same position as a fastening point 60 . Therefore, a deformation of the flange 20 in the area of the attachment point 60 continues to a large extent in the arm 62 and consequently up to the functional element.
  • the 8 shows the flange 20 and the support 36 of a vacuum pump according to the invention.
  • the connection point 64 is arranged between, specifically in this example symmetrically between, two adjacent attachment points 60 .
  • the deformation prevailing at a respective attachment point 60 cannot continue directly into the arm 62 here. Rather, the deformation or the stress introduced is distributed in the flange, with the connection point 64 being arranged in such a way that only a comparatively small flange deformation is present in its area.
  • connection point 64 is arranged in the circumferential direction in this middle third 66, in particular with a center point of the connection point in the circumferential direction.
  • a passage 34 of another exemplary vacuum pump is shown in a perspective and sectional view.
  • a carrier 36 arranged in the passage 34 can be seen, which has a plurality of arms 62, but only one of which is visible.
  • the arm 62 includes a recess 68. This is designed as a recess.
  • the recess 68 has the effect that only a small proportion of a voltage introduced by the flange is passed on to a central area of the carrier 36 and to a functional element (not shown). The deformation of the carrier 36 is thus further reduced. However, the rigidity of the carrier 36 is reduced, which significantly influences the vibration behavior and must therefore be taken into account in the design.
  • the recess may preferably be located adjacent a joint 64 and/or on a side of the arm 62 that faces and/or faces away from rotor elements.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (14)

  1. Appareil à vide, en particulier pompe turbomoléculaire, comprenant un passage (34), à savoir une entrée ou une sortie ; et
    une bride (20) pour relier de manière étanche au vide le passage (34) de l'appareil à vide à une autre bride (46) d'un autre appareil à vide,
    un support (36) pour un élément fonctionnel (38) étant disposé dans le passage (34), et le support (36) comprenant au moins deux bras (62) qui relient le support (36) à la bride (20) en un emplacement de liaison respectif (64), tous les emplacements de liaison (64) étant disposés axialement à la hauteur de la bride (20),
    caractérisé en ce que
    la bride (20) présente plusieurs points de fixation (60) répartis sur une périphérie de la bride, ayant en particulier des ouvertures de passage (50) pour des éléments de fixation (52) respectifs à associer, sur lesquels la bride (20) peut être fixée sur l'autre bride (46), et en ce que tous les emplacements de liaison (64) sont disposés dans la direction périphérique respectivement entre deux points de fixation (60) voisins.
  2. Appareil à vide selon la revendication 1,
    dans lequel l'emplacement de liaison (64) respectif est disposé dans la direction périphérique dans un tiers central entre deux points de fixation (60) voisins.
  3. Appareil à vide selon la revendication 1 ou 2,
    dans lequel l'emplacement de liaison (64) respectif est disposé dans la direction périphérique symétriquement entre deux points de fixation (60) voisins.
  4. Appareil à vide selon l'une des revendications précédentes,
    dans lequel la bride (20) est une bride ISO-F.
  5. Appareil à vide selon l'une des revendications précédentes,
    dans lequel la bride (20) comporte au moins quatre points de fixation, en particulier au moins six, en particulier au moins dix.
  6. Appareil à vide selon l'une des revendications précédentes,
    dans lequel le nombre de points de fixation (60) est un multiple pair du nombre de bras (62) et/ou d'emplacements de liaison (64).
  7. Appareil à vide selon l'une des revendications précédentes,
    dans lequel les bras (62) sont reliés d'un seul tenant à la bride (20) et/ou à un boîtier (22) de l'appareil à vide.
  8. Appareil à vide selon l'une des revendications précédentes,
    dans lequel un évidement (68) est prévu sur au moins un bras (62).
  9. Appareil à vide selon l'une des revendications précédentes,
    dans lequel l'élément fonctionnel (38) est réalisé sous forme d'élément de palier qui est maintenu par le support (36) dans le passage (34).
  10. Appareil à vide selon la revendication 9,
    dans lequel l'élément de palier est réalisé sous forme de partie d'un palier magnétique.
  11. Appareil à vide selon l'une des revendications précédentes,
    dans lequel les bras (62) sont situés dans un plan commun et/ou le support (36) est conçu sous forme d'étoile.
  12. Appareil à vide selon l'une des revendications précédentes,
    dans lequel les bras (62) du support (36) sont disposés en étant répartis uniformément dans la direction périphérique.
  13. Appareil à vide selon l'une des revendications précédentes,
    dans lequel les points de fixation (60) sur la bride (20) sont disposés en étant répartis uniformément sur la périphérie.
  14. Système à vide comportant un appareil à vide selon l'une des revendications précédentes, comportant une bride (20) et un autre appareil à vide avec une autre bride, de préférence en supplément avec au moins deux éléments de fixation (52) pour fixer la bride (20) de l'appareil à vide à l'autre bride (48) de l'autre appareil à vide au niveau des points de fixation (60).
EP19165573.7A 2019-03-27 2019-03-27 Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration Active EP3561307B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19165573.7A EP3561307B1 (fr) 2019-03-27 2019-03-27 Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19165573.7A EP3561307B1 (fr) 2019-03-27 2019-03-27 Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration

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Publication Number Publication Date
EP3561307A1 EP3561307A1 (fr) 2019-10-30
EP3561307B1 true EP3561307B1 (fr) 2022-02-16

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EP19165573.7A Active EP3561307B1 (fr) 2019-03-27 2019-03-27 Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration

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Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3051138B1 (fr) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Carter de pompe à vide, pompe à vide et procédé de fabrication d'un carter de pompe à vide
GB2545423B (en) * 2015-12-14 2019-06-26 Edwards Ltd Vacuum pump

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EP3561307A1 (fr) 2019-10-30

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