EP3034880B1 - Rotor pour une pompe à vide et son procédé de fabrication - Google Patents

Rotor pour une pompe à vide et son procédé de fabrication Download PDF

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Publication number
EP3034880B1
EP3034880B1 EP14197977.3A EP14197977A EP3034880B1 EP 3034880 B1 EP3034880 B1 EP 3034880B1 EP 14197977 A EP14197977 A EP 14197977A EP 3034880 B1 EP3034880 B1 EP 3034880B1
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EP
European Patent Office
Prior art keywords
rotor
rotor shaft
disk
welding
mechanical connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14197977.3A
Other languages
German (de)
English (en)
Other versions
EP3034880A1 (fr
Inventor
Florian Bader
Armin Conrad
Matthias Mädler
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP14197977.3A priority Critical patent/EP3034880B1/fr
Priority to CN201510790495.7A priority patent/CN105697395B/zh
Priority to JP2015241071A priority patent/JP6284519B2/ja
Publication of EP3034880A1 publication Critical patent/EP3034880A1/fr
Application granted granted Critical
Publication of EP3034880B1 publication Critical patent/EP3034880B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a rotor assembly according to the preamble of claim 1, a turbomolecular pump according to claim 7 and a method of manufacturing a rotor assembly according to the preamble of claim 8.
  • Vacuum pumps such as turbomolecular pumps, are used in various fields of technology to provide a vacuum necessary for a given process.
  • a turbomolecular pump typically includes a rotor shaft, a plurality of rotor disks connected to the rotor shaft, and stator disks disposed between the rotor disks.
  • the rotor and stator discs each have blades, which are also referred to as blades.
  • the blades form a pump-active structure and cause the desired pumping action with a fast rotation of the rotor assembly relative to the stator assembly.
  • WO 2010/052056 A1 It is also known to assemble a rotor assembly of a plurality of rotor elements. Each rotor element has a circular, cylindrical approach. The lugs are each connected to a rotor disk. The rotor elements are connected to each other via a shrinking process and thereby also form the rotor shaft.
  • the rotor disks In a rotor assembly having a rotor shaft with pressed-on, shrunk or clamped rotor disks, the rotor disks must be fastened with high joining forces on the rotor shaft, as only so can ensure that the rotor disks do not come loose during operation of the rotor shaft, especially at high rotational speeds of the Rötoran eleven, as they can occur in a vacuum pump and in particular in turbomolecular pumps, the joining forces are still reduced due to the high centrifugal forces. Also by temperature effects, the joining forces can be reduced. In addition, the material load at the joints between the rotor disks and the rotor shaft is already very high in the idle state. In addition, as the rotor speed increases, the reference stresses in the rotor disk increase significantly under the influence of centrifugal force.
  • the KR 10 2012 0073629 A describes a rotor assembly having a rotor shaft and a rotor disc mechanically connected thereto.
  • the EP 1 621 774 A2 describes a rotor assembly for a turbocharger with a rotor disk and a rotor shaft, at the axial end of which the rotor disk is fastened.
  • a pin on one side of the rotor disk is received in a receptacle at the axial end of the rotor shaft and fastened there by means of a heat shrinking process and a brazing process.
  • EP 1 666 730 A1 DE 20 50 555 A1 and JP 2006 046074 A known.
  • the present invention is therefore based on the object to provide an improved rotor assembly for a turbomolecular pump, which can be produced in a simple manufacturing technology and has the improved properties with respect to the joints and occurring on these material loads.
  • the invention is also based on the object to provide a method for producing an improved rotor assembly for a vacuum pump.
  • the object is achieved by a method for producing a rotor assembly having the features of claim 8.
  • a rotor assembly according to the invention for a turbomolecular pump comprises a rotor shaft and at least one rotor disk, which has a central receiving opening for receiving the rotor shaft, wherein the rotor disk is arranged on the rotor shaft and between the rotor disk and the rotor shaft, a mechanical connection is formed, wherein the mechanical connection means a joining process is realized, wherein the joining process is a welding process, in particular laser welding, electron beam welding, friction welding, friction stir welding or a combination of said welding processes, or a soldering process.
  • the rotor disk is thus not pressed on the rotor shaft, shrunk or clamped, but mechanically connected by means of the thermal joining method with the rotor shaft.
  • the thermal joining process realized mechanical connections between the rotor disks and the rotor shaft, the rotor shaft and the rotor disks are permanently and permanently joined together in one piece.
  • the rotor assembly according to the invention thus has at least substantially the same properties, in particular with regard to the internal stress conditions, such as a monolithically produced rotor assembly.
  • the rotor disks can be manufactured individually in the rotor assembly according to the invention, which compared to the production of a monolithic rotor assembly is cheaper from the time and production cost.
  • an inner wall of the rotor disk surrounding the receiving opening surrounds an outer side of the rotor shaft and the mechanical connection is formed between the inner wall and the outer side.
  • the inner side of the rotor disk is therefore mechanically connected to the outside of the rotor shaft forming the outer circumference.
  • the mechanical connection is formed over the entire circumference of the rotor shaft between the outer side and the inner wall. Seen in the circumferential direction of the rotor shaft, the mechanical connection is thus formed over the full circumference of the rotor shaft between the outer side and the inner wall of the rotor disk.
  • the running properties of the rotating rotor assembly can be improved.
  • an imbalance caused by the mechanical connection between the rotor disk and the rotor shaft can be avoided or at least minimized.
  • the mechanical connection between the inner wall and the outer side can be formed over the entire axial length of the inner wall. This allows a particularly strong mechanical connection between the rotor shaft and accomplish the rotor disk, so that even at very high speeds and thereby acting on the rotor disk high centrifugal forces, the rotor disc does not detach from the rotor shaft.
  • the rotor disk is not yet pressed onto the rotor shaft, shrunk or clamped in addition to the mechanical connection between the rotor disk and the rotor shaft accomplished by means of the thermal joining method.
  • the caused by pressing, shrinking or clamping material loads can therefore be avoided.
  • the rotor shaft preferably has at least one section whose outside diameter is greater than the outside diameter of a preceding section of the rotor shaft in the axial direction and smaller than the outside diameter of a downstream section of the rotor shaft, with at least one rotor disk being fitted onto the section is.
  • the rotor shaft can thus be configured in the manner of a stepped rotor shaft, which, viewed in its longitudinal extent, has regions or sections with different outside diameters.
  • at least one and preferably exactly one rotor disk can be attached to the section. If more than one rotor disk, e.g. two or three rotor disks, are attached to the section, then it is usually relatively thin or flat rotor disks.
  • the multiple rotor discs can be connected in a joining process with the rotor shaft.
  • the preceding area viewed in the axial direction, adjoins the section directly.
  • the transition from the preceding area into the section and from the section into the following area thus preferably proceeds abruptly.
  • the axial length of the section of the rotor shaft preferably corresponds at least substantially to the axial length of at least one rotor disk.
  • the axial length of the portion of the rotor shaft corresponds at least substantially to the axial length of the attached rotor disk.
  • another section of the rotor shaft whose outer diameter is greater than the outer diameter of the following region and on which in turn at least one rotor disk can be plugged, can adjoin the following region.
  • the axial length of the following region is preferably chosen such that a desired distance results between the rotor disk which is plugged onto the portion and the one which is fitted onto the further portion.
  • a non-inventive rotor assembly for a vacuum pump is described, in particular for a turbomolecular pump, with two or more rotor disks, which are aligned with respect to a rotation axis and viewed in the direction of the rotation axis arranged one behind the other, wherein between adjacent rotor disks, a mechanical connection is formed directly between the adjacent rotor disks is realized by means of a thermal joining process.
  • the thermal joining method is preferably a welding method such as laser welding, electron beam welding, friction welding, friction stir welding, or a combination of the aforementioned welding methods, or a soldering method.
  • the rotor disks By mechanically connecting the rotor disks by means of the thermal joining method, the rotor disks can be manufactured individually and then joined together in one piece, so that the rotor assembly formed therefrom has substantially the same properties as a monolithic rotor assembly, although the rotor assembly according to the invention with less effort in comparison to produce a monolithic rotor assembly.
  • the disk bodies of adjacent rotor disks are thus connected directly to one another by means of the thermal joining method.
  • the rotor disks are arranged one behind the other in such a way that an underside of the disk body of a rotor disk faces an upper side of the disk body of an adjacent rotor disk, and the mechanical connection is formed directly between the underside of one rotor disk and the upper side of the other rotor disk.
  • a direct mechanical connection between adjacent rotor disks can be accomplished in a simple manner.
  • each rotor disk is on the underside of the disk body of each rotor disk a receiving opening and on the upper side of the disk body of each rotor disk is formed a complementarily formed to the receiving opening essay, wherein the attachment of the disk body of a rotor disk, in particular with the formation of a plug-in connection, into the receiving opening of the disk body the adjacent rotor disk is inserted.
  • Adjacent rotor discs can thus be easily connected by mating with each other.
  • the rotor disks can then be mechanically permanently connected to one another by means of the thermal joining method.
  • the article on an outer diameter which is formed relative to the inner diameter of the receiving opening in the manner of an interference fit can thereby be achieved that mated rotor disks are already firmly connected to one another by the plug connection realized between the receiving opening and the attachment, which is known e.g. also advantageous for the thermal joining of the rotor disks.
  • the receiving opening and the attachment centric can be arranged to the axis of rotation at the bottom or top of the respective disk body. As a result, a centering of the disks relative to one another with respect to the axis of rotation or rotation can be achieved in a simple manner.
  • the invention also relates to a turbomolecular pump having a rotor arrangement according to the invention, a stator arrangement cooperating with the rotor arrangement, and a drive for rotating the rotor arrangement.
  • the invention also relates to a method for producing a rotor assembly for a turbomolecular pump, wherein a Rotor disk arranged with a central receiving opening for receiving a rotor shaft on the rotor shaft and between the rotor disk and the rotor shaft, a mechanical connection is formed, wherein the mechanical connection is realized by means of a thermal joining method, wherein the joining method is a welding method, in particular laser welding , Electron beam welding, friction welding, friction stir welding or a combination of said welding methods, or is a soldering process.
  • an inner wall surrounding the receiving opening and surrounding the rotor disk mounted on the rotor shaft surrounds an outer side of the rotor shaft and the mechanical connection is formed between the inner wall of the rotor disk and the outer side of the rotor shaft.
  • the mechanical connection is preferably formed over the entire circumference of the rotor shaft between the outer side of the rotor shaft and the inner wall of the rotor disk.
  • the mechanical connection is also formed over the entire axial length of the inner wall between the inner wall of the rotor disk and the outer side of the rotor shaft.
  • the rotor disk is not pressed, shrunk or clamped onto the rotor shaft.
  • a rotor shaft which has at least one portion whose outer diameter is greater than the outer diameter of an axially preceding portion of the rotor shaft and smaller than the outer diameter of an axially downstream portion of the rotor shaft, and the Rotor disc is slipped onto the section and the mechanical connection is made between the section and the rotor disc by means of the thermal joining process.
  • Also described herein is a method of making a rotor assembly for a turbomolecular pump having two or more rotor disks that is not in accordance with the present invention and which is oriented with respect to an axis of rotation and in the direction of rotation seen the axis of rotation are arranged one behind the other, wherein between adjacent rotor disks, a mechanical connection is formed, wherein the mechanical connection is realized directly between the adjacent rotor disks by means of a thermal joining method.
  • rotor disks each having a disk body, on which with respect to the axis of rotation radially outwardly projecting rotor blades are arranged, and the mechanical connection is formed directly between the disk bodies of adjacent rotor disks.
  • the rotor disks are in particular arranged one behind the other such that a lower side of the disk body of a rotor disk faces an upper side of the disk body of an adjacent rotor disk, and the mechanical connection is formed directly between the underside of the one rotor disk and the upper side of the other, adjacent rotor disk.
  • a receiving opening can be formed on the underside of the disk body of each rotor disk and on the upper side of the disk body of each rotor disk is a complementary formed to the receiving opening essay, wherein the attachment of the disk body of a rotor disk inserted into the receiving opening of the disk body of the adjacent rotor disk is, in particular with the formation of a plug connection between the two rotor discs.
  • the joining method used in the methods is, in particular, a welding method, in particular laser welding, electron beam welding, friction welding, friction stir welding or a combination of the abovementioned welding methods, or a soldering method.
  • the rotor disks can, in particular individually, be manufactured by means of laser, in particular by means of laser ablation and / or by means of laser cutting.
  • a rotor arrangement for a vacuum pump in particular for a turbomolecular pump, with a rotor shaft and at least one rotor disk, the rotor disk having a central receiving opening for receiving the rotor shaft, wherein the rotor disk is arranged on the rotor shaft and between the rotor disk and the rotor shaft a mechanical connection is formed, wherein the mechanical connection is realized by means of gluing.
  • An adhesive can thus be used to produce the mechanical connection.
  • a rotor assembly for a vacuum pump in particular for a turbomolecular pump, describe with two or more rotor disks, wherein the rotor disks are aligned with respect to a rotation axis and arranged in the direction of the rotation axis arranged one behind the other, wherein between adjacent rotor disks, a mechanical connection is formed, wherein the mechanical connection is realized directly between the adjacent rotor discs by gluing.
  • the vacuum pump shown comprises a pump inlet 10 surrounded by an inlet flange 11 and a pump outlet 12 and a plurality of process gas pumping stages for conveying the process gas at the pump inlet 10 to the pump outlet 12.
  • the vacuum pump comprises a housing 64 and a rotor 16 arranged in the housing 64 with one the rotational axis 14 rotatably mounted rotor shaft 15th
  • the pump is designed as a turbomolecular pump and comprises a plurality of turbomolecular pumping stages connected in series with a plurality of radial rotor disks 66 fixed to the rotor shaft 15 and stator disks 68 arranged between the rotor disks 66 and fixed in the housing 64, one rotor disk 66 and one rotor disk 66 adjacent stator disk 68 each form a turbomolecular pumping stage.
  • the stator disks 68 are held by spacer rings 70 at a desired axial distance from each other.
  • the vacuum pump also comprises four radially arranged pumping stages which are connected to one another in pumping fashion in series with each other.
  • the rotor of the Holweckpumplien comprises a rotor shaft 15 integrally formed with the rotor hub 72 and two attached to the rotor hub 72 and carried by this cylinder jacket Holweckrotorhülsen 74, 76, which are coaxial with the axis of rotation 14 oriented and nested in the radial direction.
  • two cylinder jacket-shaped Holweckstatorhülsen 78, 80 are provided, which are also coaxial with the axis of rotation 14 oriented and nested in the radial direction.
  • a third Holweckstatorhülse is formed by a receiving portion 132 of the housing 64, which serves for receiving and fixing the drive motor 20.
  • the pump-active surfaces of the Holweckpumpthroughn are through the lateral surfaces, i. the radially inner and outer surfaces, the Holweckrotorhülsen 74, 76, the Holweckstatorhülsen 78, 80 and the receiving portion 132 formed.
  • the radially inner surface of the outer Holweckstatorhülse 78 is opposite to the radial outer surface of the outer Holweckrotorhülse 74 to form a radial Holweckspalts 82 and forms with this the first Holweckpumpcut.
  • the radially inner surface of the outer Holweckrotorheckse 74 faces the radial outer surface of the inner Holweckstatorhülse 80 to form a radial Holweckspalts 84 and forms with this the second Holweckpumpch.
  • the radially inner surface of the inner Holweckstatorhülse 80 is opposite to the radial outer surface of the inner Holweckrotorhülse 76 to form a radial Holweckspalts 86 and forms with this the third Holweckpumpcut.
  • the radially inner surface of the inner Holweckrotorhülse 76 faces the radial outer surface of the receiving portion 132 to form a radial Holweckspalts 87 and forms with this the fourth Holweckpumpcut.
  • the aforementioned pump-active surfaces of Holweckstatorhülsen 78, 80 and the receiving portion 132 each have a plurality of spiral around the axis of rotation 14 around axially extending Holwecknuten, while the opposite lateral surfaces of Holweckrotorhülsen 74, 76 are smooth and the gas in the operation of the vacuum pump in drive the Holwecknuten.
  • a rolling bearing 88 in the region of the pump outlet 12 and a permanent magnet bearing 90 in the region of the pump inlet 10 are provided.
  • a conical injection nut 92 with an outer diameter increasing toward the rolling bearing 88 is provided on the rotor shaft 15.
  • the spray nut 92 is in sliding contact with at least one scraper of a resource storage.
  • the resource storage comprises a plurality of stacked absorbent pads 94 impregnated with a rolling bearing bearing means 88, for example a lubricant.
  • the resource is transmitted by capillary action of the resource storage on the scraper on the rotating spray nut 92 and due to the centrifugal force along the spray nut 92 in the direction of increasing outer diameter of the spray nut 92 to the roller bearing 88 promoted towards where there is a lubricating function fulfilled.
  • the rolling bearing 88 and the resource storage are enclosed by a trough-shaped insert 96 and a cover member 98 of the vacuum pump.
  • the permanent magnet bearing comprises a rotor-side bearing half 100 and a stator-side bearing half 102, which each comprise a ring stack of a plurality of axially stacked permanent magnetic rings 104 and 106, respectively.
  • the magnetic rings 104, 106 are opposed to each other to form a radial bearing gap 108, wherein the rotor-side magnet rings 104 are arranged radially on the outside and the stator magnet rings 106 radially inward.
  • the magnetic field present in the bearing gap 108 causes magnetic repulsive forces between the magnetic rings 104, 106, which cause a radial bearing of the rotor shaft 15.
  • the rotor-side magnetic rings 104 are carried by a support portion 110 of the rotor shaft, which surrounds the magnet rings 104 radially on the outside.
  • the stator-side magnet rings are supported by a stator-side support portion 112 which extends through the magnet rings 106 and is suspended from radial struts 114 of the housing 64.
  • Parallel to the axis of rotation 14, the rotor-side magnet rings 104 are fixed in one direction by a cover element 116 coupled to the carrier section 110 and in the other direction by a radially projecting shoulder section of the carrier section 110.
  • the stator-side magnet rings 106 are parallel to the axis of rotation 14 in one direction by a fastening ring 118 connected to the carrier section 112 and a compensation element 120 arranged between the fastening ring 118 and the magnet rings 106 and in the other direction by a support ring 122 connected to the carrier section 112 established.
  • an emergency or fishing camp 124 is provided, which runs empty during normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor 16 engages relative to the stator in engagement to a radial stop for the rotor 16 form, which prevents a collision of the rotor-side structures with the stator-side structures.
  • the backup bearing 124 is formed as an unlubricated rolling bearing and forms with the rotor 16 and / or the stator a radial gap, which causes the backup bearing 124 is disengaged in the normal pumping operation.
  • the radial deflection at which the fishing camp 124 engages is sized large enough so that the fishing camp 124 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures is prevented in all circumstances.
  • the vacuum pump includes a drive motor 20 for rotatably driving the rotor 16.
  • the drive motor 20 includes a motor stator 22 having a core 38 and having one or more in Fig. 1 only schematically illustrated coils 42 which are defined in provided on the radially inner side of the core 38 grooves 38 of the core.
  • the armature of the drive motor 20 is formed by the rotor 16, whose rotor shaft 15 extends through the motor stator 22 therethrough.
  • a permanent magnet assembly 128 is radially au- chat lake set.
  • a gap 24 is arranged, which comprises a radial motor gap over which the motor stator 22 and the permanent magnet assembly 128 magnetically influence for transmitting the drive torque.
  • the permanent magnet arrangement 128 is fixed to the rotor shaft 15 in the axial direction by a fastening sleeve 126 plugged onto the rotor shaft 15.
  • An encapsulation 130 surrounds the permanent magnet arrangement 128 on its radial outer side and seals it with respect to the intermediate space 24.
  • the motor stator 22 is fixed in the housing 64 by a housing-fixed receiving portion 132, which surrounds the motor stator 22 radially on the outside and supports the motor stator 22 in the radial and axial directions.
  • the receiving portion 132 defines together with the rotor hub 72 an engine compartment 18 in which the drive motor 20 is received.
  • the engine compartment 18 has an inlet 28 arranged on one side of the intermediate space 24 and gas-conductively connected to the inner, fourth Holweckpumpcut and an outlet 30 arranged on the opposite side of the intermediate space 24 and gas-conducting to the pump outlet 12.
  • the core 38 of the motor stator 22 has at its radial outer side in the in Fig. 1 On the left, a recess 34, which together with the adjacent portion of the receiving portion 132 forms a channel 32 through which the process gas delivered into the engine compartment 18 is conveyed to the gap 24 from the inlet 28 to the outlet 30.
  • the gas path on which the process gas passes from the pump inlet 10 to the pump outlet 12 is in Fig. 1 illustrated by arrows 26.
  • the process gas is first pumped from the pump inlet 10 sequentially through the turbomolecular pumping stages and then sequentially through the four Holweck pumping stages.
  • the gas exiting the fourth Holweckpumprise enters the engine compartment 18 and is conveyed from the inlet 28 of the engine compartment 18 through the channel 32 to the outlet 30 of the engine compartment 18 and the pump outlet 12.
  • the rotor 16 forms a rotor assembly comprising the rotor shaft 15 and arranged on the rotor shaft 15 rotor disks 66.
  • the rotor 16 may represent a rotor assembly according to the invention, in which the mechanical connection between the rotor shaft 15 and each rotor disk 66 is realized by means of a thermal joining process.
  • each rotor disk 66 may be welded to the rotor shaft 15, for example by means of laser welding, electron beam welding, friction welding, friction stir welding or a combination of said welding methods.
  • each rotor disk 66 may be soldered to the rotor shaft 15.
  • a variant of a rotor assembly according to the invention which comprises a stepped rotor shaft 15 and a plurality of rotor disks 66.
  • Each rotor disk 66 has an annular body 134 which has a central receiving opening for receiving the rotor shaft 15 and rotor blades 136 which are arranged offset relative to one another on its outer circumference in the circumferential direction.
  • each rotor disk 66 has an inner wall 138, which is radially inward relative to the axis of rotation 14 and surrounds the receiving opening, which faces the outer side of the rotor shaft 15 when the rotor disk 66 is plugged onto the rotor shaft 15, such as Fig. 2 shows.
  • the mechanical connection between the respective rotor disk 66 and the rotor shaft 15 is accomplished in that the inner wall 138 of the respective rotor disk 66 is mechanically connected to the outside of the rotor shaft 15 by means of the thermal joining process.
  • the mechanical connection is formed over the entire circumference of the rotor shaft 15 between the outer side and the inner wall 138 and over the entire axial length of the inner wall 138 of the respective rotor disk 66.
  • the axial length refers to the longitudinal extent of the inner wall 138 with respect to the axis of rotation 14.
  • each rotor disk 66 By thermally joining each rotor disk 66 to the rotor shaft 15, the rotor disks 66 can be permanently and firmly connected to the rotor shaft 15.
  • the rotor disks 66 therefore do not have to be additionally pressed, shrunk or clamped onto the rotor shaft 15.
  • the inner diameter of the receiving opening of each rotor disk 66 and the outer diameter of the respective portion of the rotor shaft 15, on which the respective rotor disk 66 is plugged in the manner of a transition fit or a slight interference fit dimensioned relative to each other.
  • the rotor shaft 15 is formed as a stepped rotor shaft.
  • the rotor shaft 15 includes a first portion 140, a second portion 142, and a third portion 144.
  • a first portion 146 of the rotor shaft 15 is located in front of the first portion 140 between the first portion 140 and the second portion 142 is a second portion 148 of the rotor shaft 15.
  • Between the second portion 142 and the third portion 144 is a third portion 150 of the rotor shaft 15 and seen in the axial direction behind the third portion 144 is a fourth portion 152 of the rotor shaft 15th
  • the step or staircase shape is achieved in that the outer diameter seen in the axial direction increases from section to section or from area to area.
  • the rotor disc 66 is attached to the third section 144, whose central receiving opening has an inner diameter, which is adapted to the outer diameter of the third portion 144, in particular in the manner of a transition fit or a slight interference fit.
  • the mechanical connection 154 is formed between the inner wall 138 of the rotor disk 66 and the outer side of the third portion 144 by means of a thermal joining process.
  • the rotor disk 66 In a corresponding manner, after the rotor disk 66 has been mechanically connected to the third portion 144, the rotor disk 66, the receiving opening of which has an inner diameter which is adapted to the outer diameter of the second portion 142, in particular in the form of a transition fit or a slight press fit, attached to the second section 142.
  • a mechanical connection 154 between the inner wall 138 of the rotor disk 66 and the outer side of the second portion 142 is formed by means of the thermal joining method.
  • a mechanical connection can additionally be formed by means of the thermal joining method between the annular wall 158 and the annular body 134 of the rotor disk 66.
  • the annular wall 158 extends in the radial direction between the outside of the second portion 142 and the outside of the third area 150 and serves when attaching the rotor disk 66 to the second portion 142 as a stop.
  • the rotor disk 66 In the corresponding manner as described above, the rotor disk 66, the receiving opening having an inner diameter, which is adapted to the outer diameter of the first portion 140, in particular in the form of a transition fit or a slight interference fit, fitted on the first portion 140 and by means of In the thermal joining process, the mechanical connection 154 is formed between the inner wall 138 and the outside of the first section 140.
  • a mechanical connection can be realized by means of the thermal joining method.
  • the annular wall 160 extends in the radial direction between the outside of the first portion 140 and the outside of the second region 148.
  • the axial length of the respective section 140, 142, 144 is adapted to the axial length of the respective rotor disk 66 and to the axial length of the inner wall 138 of the respective rotor disk 66.
  • the axial length of the region 150 corresponds to the intended distance between the rotor disks 66, which are attached to the second and third sections 142, 144.
  • the axial length of the second region 148 corresponds to the desired distance between the rotor disks 66, which are attached to the first and second sections 140, 142.
  • the mechanical connections 154 between the rotor shaft 15 and the respective rotor disk 66 are realized by means of the thermal joining method.
  • the rotor disks 66 are held permanently on the rotor shaft 15. Due to the use of a thermal joining process to realize the mechanical connections 154, the rotor assembly has substantially the same characteristics as a monolithic one manufactured rotor assembly and additionally has the advantage that the rotor shaft 15 and the rotor discs 66 can be made individually.
  • the rotor disks 66 can be produced, for example, by laser ablation and / or laser cutting.
  • the arrangement of three rotor disks 66 on the rotor shaft 15 of the rotor assembly of Fig. 2 is only an example.
  • the rotor shaft 15 may also have more or fewer stages, so that more or less rotor disks may be arranged on the rotor shaft.
  • At least one of the sections 140, 142, 144 may also be fitted with more than one rotor disk.
  • at least two or three thin rotor disks can be attached to one of the sections 140, 142, 144.
  • the rotor disks can be fixed in a joining operation on the rotor shaft 15.
  • the Fig. 3 shows a further variant of a rotor assembly according to the invention, in which three rotor discs 66 are aligned with respect to the axis of rotation 14 and arranged in the direction of the axis of rotation 14 arranged one behind the other. Between adjacent rotor disks 66, a respective mechanical connection 154 is realized directly by means of a thermal joining method.
  • the joining process again involves a welding process, such as laser welding, electron beam welding, friction welding, friction stir welding or a combination of the abovementioned welding processes, or a soldering process.
  • adjacent rotor disks 66 are thus directly welded or soldered together, so that a direct mechanical welding or solder joint 154 between adjacent rotor disks 66 of the rotor assembly of Fig. 3 is trained.
  • Each rotor disk 66 has a disk body 162, on the radially outer side of which, with respect to the axis of rotation, rotor blades 136 which are located radially outward are arranged. When viewed in the circumferential direction, a plurality of rotor blades 136, which are arranged offset next to one another, are arranged on each outer side of a respective disk body 162.
  • each disk body 162 is solid in the illustrated variant. Alternatively, however, each disk body 162 can also have a central through-opening, in particular a circular cross-section, in order to achieve material savings and to reduce the weight of the rotor assembly.
  • Each disk body 162 has an upper side and a lower side.
  • the rotor disks 66 are arranged one behind the other such that an underside of the disk body 162 of a rotor disk 66 faces an upper side of the disk body 162 of the adjacent rotor disk 66.
  • the mechanical connection 154 is formed between the bottom and the top of the adjacent rotor disks 66. That the underside of a rotor disk 66 is connected directly to the upper side of the adjacent rotor disk 66 mechanically by the thermal joining connection.
  • a receiving opening 164 is formed on the underside of each disk body 162 and an attachment 166, which can also be considered as a nub, is formed on each upper side.
  • an attachment 166 of a rotor disk 66 is inserted into the receiving opening 164 of the adjacent rotor disk 66.
  • the outer diameter of the cap 166 may be formed with respect to the inner diameter of the receiving opening 164 in the manner of an at least slight interference fit. Between adjacent, mated rotor disks 66 is thus - with respect to the axis of rotation 14 in the radial direction seen a positive connection 168 formed, which also causes a frictional connection between the two rotor discs 66 due to the at least slight interference fit in the axial direction.
  • the receiving openings 164 and the attachments 166 are also arranged centrally to the rotation axis 14 at the bottom or top of the respective disk body 162, which results in the mating of the rotor disks 66 centering with respect to the axis of rotation 14 for the rotor assembly formed.
  • the receiving openings 164 and correspondingly the attachments 166 preferably have a circular cross-section. However, other cross sections, such as a square cross section, are possible.
  • rotor disks 66 can form a rotor shaft.
  • number of three rotor disks 66 is again only to be seen as an example.

Claims (8)

  1. Ensemble de rotor pour une pompe turbomoléculaire, comprenant un arbre de rotor (15) et au moins un disque de rotor (66) présentant une ouverture de réception centrale pour recevoir l'arbre de rotor (15), le disque de rotor (66) étant agencé sur l'arbre de rotor (15), et une liaison mécanique (154) étant réalisée entre le disque de rotor (66) et l'arbre de rotor (15),
    caractérisé en ce que
    la liaison mécanique (154) est réalisée par un procédé d'assemblage thermique, le procédé d'assemblage étant un procédé de soudage, en particulier un soudage laser, un soudage à faisceau d'électrons, un soudage par friction, un soudage par friction-malaxage, ou une combinaison desdits procédés de soudage, ou bien un procédé de brasage.
  2. Ensemble de rotor selon la revendication 1,
    caractérisé en ce que
    une paroi intérieure (138) du disque de rotor (66), entourant l'ouverture de réception, entoure une face extérieure de l'arbre de rotor (15), et la liaison mécanique (154) est réalisée entre la paroi intérieure (138) et la face extérieure de l'arbre de rotor (15).
  3. Ensemble de rotor selon la revendication 2,
    caractérisé en ce que
    la liaison mécanique (154) est réalisée sur toute la périphérie entre la face extérieure de l'arbre de rotor (15) et la paroi intérieure (138) du disque de rotor (66), et/ou
    la liaison mécanique (154) est réalisée sur toute la longueur axiale de la paroi intérieure (138).
  4. Ensemble de rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    le disque de rotor (66) n'est appliqué sur l'arbre de rotor (66) ni par pressage, ni par rétraction, ni par serrage.
  5. Ensemble de rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    l'arbre de rotor (15) comprend au moins un tronçon (140, 142, 144) dont le diamètre extérieur est supérieur au diamètre extérieur d'une zone (146, 148, 150) de l'arbre de rotor (15) précédente, vue en direction axiale, et inférieur au diamètre extérieur d'une zone (148, 150, 152) de l'arbre de rotor (15) successive, vue en direction axiale, et en ce que
    au moins un disque de rotor (66) est enfiché sur ledit tronçon (140, 142, 144).
  6. Ensemble de rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la longueur axiale du tronçon (140, 142, 144) correspond au moins sensiblement à la longueur axiale d'au moins un disque de rotor (66).
  7. Pompe turbomoléculaire comportant au moins un ensemble de rotor (16) selon l'une des revendications précédentes, un ensemble de stator (68) coopérant avec l'ensemble de rotor (16), et un entraînement (20) pour entraîner en rotation de l'ensemble de rotor (16) par rapport à l'ensemble de stator (68).
  8. Procédé de réalisation d'un ensemble de rotor, en particulier selon l'une des revendications 1 à 6, pour une pompe turbomoléculaire,
    dans lequel
    un disque de rotor (66), pourvu d'une ouverture de réception centrale destinée à recevoir un arbre de rotor (15), est agencé sur l'arbre de rotor (15), et une liaison mécanique (154) est réalisée entre le disque de rotor (66) et l'arbre de rotor (15),
    caractérisé en ce que
    la liaison mécanique (154) est réalisée par un procédé d'assemblage thermique, le procédé d'assemblage étant un procédé de soudage, en particulier un soudage laser, un soudage à faisceau d'électrons, un soudage par friction, un soudage par friction-malaxage ou une combinaison desdits procédés de soudage, ou bien un procédé de brasage.
EP14197977.3A 2014-12-15 2014-12-15 Rotor pour une pompe à vide et son procédé de fabrication Active EP3034880B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP14197977.3A EP3034880B1 (fr) 2014-12-15 2014-12-15 Rotor pour une pompe à vide et son procédé de fabrication
CN201510790495.7A CN105697395B (zh) 2014-12-15 2015-11-16 用于真空泵的转子设施及其制造方法
JP2015241071A JP6284519B2 (ja) 2014-12-15 2015-12-10 真空ポンプの為のローター装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP14197977.3A EP3034880B1 (fr) 2014-12-15 2014-12-15 Rotor pour une pompe à vide et son procédé de fabrication

Publications (2)

Publication Number Publication Date
EP3034880A1 EP3034880A1 (fr) 2016-06-22
EP3034880B1 true EP3034880B1 (fr) 2019-10-16

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EP (1) EP3034880B1 (fr)
JP (1) JP6284519B2 (fr)
CN (1) CN105697395B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110043485A (zh) * 2019-05-16 2019-07-23 江苏博联硕焊接技术有限公司 一种涡轮分子泵转子及其扩散焊接方法
CN110005639A (zh) * 2019-05-16 2019-07-12 江苏博联硕焊接技术有限公司 一种复合型涡轮分子泵转子及其制备方法
CN114932329B (zh) * 2022-04-21 2023-12-22 楚天科技股份有限公司 一种用于加工超重力纯化床定子和转子的方法

Family Cites Families (18)

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DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
CH499019A (de) * 1970-04-10 1970-11-15 Balzers Patent Beteilig Ag Scheibe für eine Turbomolekular-Vakuumpumpe
JPS60162585A (ja) * 1984-02-01 1985-08-24 Hitachi Ltd タ−ボ分子ポンプのロ−タの製作方法
JPS61210289A (ja) * 1985-03-14 1986-09-18 Shimadzu Corp タ−ボ分子ポンプのロ−タ取付構造
JPS62265496A (ja) * 1986-05-12 1987-11-18 Mitsubishi Electric Corp 動翼付きロ−タ
JPS62184190U (fr) * 1986-05-16 1987-11-21
JPH02112997U (fr) * 1989-02-27 1990-09-10
JPH03249398A (ja) * 1990-02-28 1991-11-07 Shimadzu Corp ターボ分子ポンプ
JPH05133384A (ja) * 1991-11-12 1993-05-28 Mitsubishi Heavy Ind Ltd ロータ
JP2001129677A (ja) * 1999-11-02 2001-05-15 Omc Kk 回転体のレーザ溶接方法とその装置
JP2006194083A (ja) * 2003-09-16 2006-07-27 Boc Edwards Kk ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
US7287960B2 (en) * 2004-07-28 2007-10-30 B{dot over (o)}rgWarner, Inc. Titanium aluminide wheel and steel shaft connection thereto
JP2006046074A (ja) * 2004-07-30 2006-02-16 Boc Edwards Kk 真空ポンプ
EP2096317B1 (fr) * 2008-02-27 2012-08-15 Agilent Technologies, Inc. Procédé de fabrication d'un ensemble rotor d'une pompe à vide rotative
DE102008056352A1 (de) 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
JP5193960B2 (ja) * 2009-06-30 2013-05-08 株式会社日立製作所 タービンロータ
KR20120073629A (ko) * 2010-12-27 2012-07-05 주식회사 포스코 블레이드의 균열이 방지된 고강도 팬
JP6232713B2 (ja) * 2013-03-06 2017-11-22 株式会社島津製作所 真空ポンプ

Also Published As

Publication number Publication date
CN105697395B (zh) 2019-10-18
JP6284519B2 (ja) 2018-02-28
CN105697395A (zh) 2016-06-22
EP3034880A1 (fr) 2016-06-22
JP2016114059A (ja) 2016-06-23

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