EP1918588B1 - Disque de stator pour une pompe turbomoléculaire - Google Patents

Disque de stator pour une pompe turbomoléculaire Download PDF

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Publication number
EP1918588B1
EP1918588B1 EP07019878.3A EP07019878A EP1918588B1 EP 1918588 B1 EP1918588 B1 EP 1918588B1 EP 07019878 A EP07019878 A EP 07019878A EP 1918588 B1 EP1918588 B1 EP 1918588B1
Authority
EP
European Patent Office
Prior art keywords
disk
stator
ring
plane
outer ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP07019878.3A
Other languages
German (de)
English (en)
Other versions
EP1918588A3 (fr
EP1918588A2 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1918588A2 publication Critical patent/EP1918588A2/fr
Publication of EP1918588A3 publication Critical patent/EP1918588A3/fr
Application granted granted Critical
Publication of EP1918588B1 publication Critical patent/EP1918588B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • turbomolecular pumps In the field of high-vacuum pumps, turbomolecular pumps have long been technically and economically highly successful. Their pumping action is based on alternately arranged one behind the other rapidly rotating and stationary discs, each having a plurality of blades. The standing disks are called stator disks. Both the pumping power and the cost of a turbomolecular pump are influenced, among other factors, by the design of the stator disks.
  • annular component which has an L-shaped cross section, wherein one leg is connected to at least one tab and the other leg is oriented parallel to the disk plane.
  • the connection can, for example, by laser spot welding, bonding, riveting or the like.

Claims (7)

  1. Disque stator pour une pompe turbomoléculaire comportant une aube (1), une bague intérieure (2) et une bague extérieure (3), dans lequel la bague intérieure (2) et la bague extérieure (3) définissent conjointement un plan de disque,
    caractérisé en ce que
    sur le côté de la bague extérieure (3) tourné vers l'extérieur, en direction radiale, le disque stator comprend au moins une patte (4) dressée hors du plan de disque et réalisée par estampage et par cintrage successif, de telle sorte que la patte (4) remplit la fonction d'une bague d'écartement.
  2. Disque stator selon la revendication 1,
    caractérisé en ce que
    une bague de soutien (5) est reliée à au moins une patte (4), la bague de soutien (5) constituant une partie d'un cylindre d'axe perpendiculaire au plan de disque.
  3. Disque stator selon la revendication 2,
    caractérisé en ce que
    la bague de soutien (5) présente un composant (10) présentant une section transversale au moins localement en forme de U, et au moins une partie des pattes (4) est agencée à l'intérieur du U.
  4. Disque stator selon la revendication 1,
    caractérisé en ce que
    un composant annulaire (11) présentant une section transversale en forme de L est agencé de telle sorte qu'une branche est reliée à au moins une patte (4) et l'autre branche est orientée parallèlement au plan de disque.
  5. Disque stator selon la revendication 1,
    caractérisé en ce que
    les pattes (4) présentent une portion (12) parallèle au plan de disque.
  6. Disque stator selon l'une des revendications 2 à 5,
    caractérisé en ce que
    il comprend au moins deux pattes (4) dont l'une est agencée radialement à l'intérieur de la bague de soutien (5) et dont l'autre est agencée radialement à l'extérieur de celle-ci.
  7. Procédé de réalisation d'un disque stator pour une pompe turbomoléculaire comportant une aube (1), une bague intérieure (2) et une bague extérieure (3), dans lequel la bague intérieure (2) et la bague extérieure (3) définissent conjointement un plan de disque,
    caractérisé en ce que
    il comprend dans l'ordre indiqué les étapes suivantes consistant à :
    - estamper une ébauche à partir d'une tôle de manière à obtenir une bague extérieure (3),
    - cintrer hors du plan de disque une zone située radialement à l'extérieur de la bague extérieure (3) en formant une ou plusieurs pattes (4),
    - relier une ou plusieurs pattes (4) à une bague de soutien (5).
EP07019878.3A 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire Not-in-force EP1918588B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006050565A DE102006050565A1 (de) 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1918588A2 EP1918588A2 (fr) 2008-05-07
EP1918588A3 EP1918588A3 (fr) 2015-05-20
EP1918588B1 true EP1918588B1 (fr) 2017-07-19

Family

ID=39102159

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07019878.3A Not-in-force EP1918588B1 (fr) 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire

Country Status (2)

Country Link
EP (1) EP1918588B1 (fr)
DE (1) DE102006050565A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102014100207B4 (de) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014102681A1 (de) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh Statorscheibe
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
EP4325061A1 (fr) * 2023-12-20 2024-02-21 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE9013671U1 (fr) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Also Published As

Publication number Publication date
DE102006050565A1 (de) 2008-04-30
EP1918588A3 (fr) 2015-05-20
EP1918588A2 (fr) 2008-05-07

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