DE102006050565A1 - Statorscheibe für eine Turbomolekularpumpe - Google Patents

Statorscheibe für eine Turbomolekularpumpe Download PDF

Info

Publication number
DE102006050565A1
DE102006050565A1 DE102006050565A DE102006050565A DE102006050565A1 DE 102006050565 A1 DE102006050565 A1 DE 102006050565A1 DE 102006050565 A DE102006050565 A DE 102006050565A DE 102006050565 A DE102006050565 A DE 102006050565A DE 102006050565 A1 DE102006050565 A1 DE 102006050565A1
Authority
DE
Germany
Prior art keywords
plate
stator
disk
ring
support ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102006050565A
Other languages
German (de)
English (en)
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE102006050565A priority Critical patent/DE102006050565A1/de
Priority to EP07019878.3A priority patent/EP1918588B1/fr
Publication of DE102006050565A1 publication Critical patent/DE102006050565A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
DE102006050565A 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe Withdrawn DE102006050565A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102006050565A DE102006050565A1 (de) 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe
EP07019878.3A EP1918588B1 (fr) 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006050565A DE102006050565A1 (de) 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
DE102006050565A1 true DE102006050565A1 (de) 2008-04-30

Family

ID=39102159

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006050565A Withdrawn DE102006050565A1 (de) 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe

Country Status (2)

Country Link
EP (1) EP1918588B1 (fr)
DE (1) DE102006050565A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102014100207B4 (de) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014102681A1 (de) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh Statorscheibe
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
EP4325061A1 (fr) * 2023-12-20 2024-02-21 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE9013671U1 (fr) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Also Published As

Publication number Publication date
EP1918588A3 (fr) 2015-05-20
EP1918588A2 (fr) 2008-05-07
EP1918588B1 (fr) 2017-07-19

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Legal Events

Date Code Title Description
OR8 Request for search as to paragraph 43 lit. 1 sentence 1 patent law
8105 Search report available
R012 Request for examination validly filed

Effective date: 20131002

R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee