EP1918588A2 - Disque de stator pour une pompe turbomoléculaire - Google Patents

Disque de stator pour une pompe turbomoléculaire Download PDF

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Publication number
EP1918588A2
EP1918588A2 EP20070019878 EP07019878A EP1918588A2 EP 1918588 A2 EP1918588 A2 EP 1918588A2 EP 20070019878 EP20070019878 EP 20070019878 EP 07019878 A EP07019878 A EP 07019878A EP 1918588 A2 EP1918588 A2 EP 1918588A2
Authority
EP
European Patent Office
Prior art keywords
stator
tabs
plane
disk
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20070019878
Other languages
German (de)
English (en)
Other versions
EP1918588A3 (fr
EP1918588B1 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1918588A2 publication Critical patent/EP1918588A2/fr
Publication of EP1918588A3 publication Critical patent/EP1918588A3/fr
Application granted granted Critical
Publication of EP1918588B1 publication Critical patent/EP1918588B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a stator disk for a turbomolecular pump according to the preamble of the first claim and to a method for producing a stator disk for a turbomolecular pump.
  • turbomolecular pumps In the field of high-vacuum pumps, turbomolecular pumps have long been technically and economically highly successful. Their pumping action is based on alternately arranged one behind the other rapidly rotating and stationary discs, each having a plurality of blades. The standing disks are called stator disks. Both the pumping power and the cost of a turbomolecular pump are influenced, among other factors, by the design of the stator disks.
  • stator and stator disks means that the successive stator disks must be spaced to leave room for the interposed rotor disk.
  • spacer rings are usually used. To build the stator of a turbomolecular pump, therefore, a variety of stator and spacer rings are needed.
  • the DE-OS 199 37 393 proposes to produce spacer ring and stator in one piece.
  • the stator disc presented there is very complicated to manufacture, for example, elaborate milling work is necessary to produce the stator from a solid disc. Therefore, there is no economic advantage through this stator.
  • the object of the invention is therefore to present a cost-effective stator, which simplifies the construction of the turbomolecular pump.
  • a stator with the features of the first claim can be particularly easy to manufacture. Elaborate milling work on a solid piece of material, which must have the thickness of the spacer, are not necessary. This leads to a considerable saving of material. A flap exposed out of the window plane assumes the function of the spacer ring. It must be made before removing the tab only a thin disc. Cost-effective and advantageous here is the punching with subsequent bending forming. Overall, the stator is much easier to manufacture than those in the prior art.
  • a support ring is adapted to increase the mechanical stability, being designed to be part of a hollow cylinder whose axis is perpendicular to the disk surface.
  • An advantageous development is to design a portion of the support ring with U-shaped cross-section and to arrange a part of the tabs within the u. This further increases the mechanical stability.
  • annular component which has an L-shaped cross-section, wherein one leg is connected to at least one tab and the other leg is oriented parallel to the disk plane.
  • the connection can, for example, by laser spot welding, bonding, riveting or the like.
  • the stator disc has at least two tabs, one of which is arranged radially inside and the other radially outside of the support ring.
  • one of the tabs alone can take over the function of the spacer ring, while the other only serves to attach the support ring.
  • Such an arrangement may arise when a radial section of a stamped stator disk is bent over and in this section a further section is provided, which is bent so that between the bent-over sections the support ring can be arranged.
  • stator half-disks i. Disks divided in half, so that the inner ring and outer ring are circular arc sections. This is common to facilitate the assembly of the turbomolecular pump.
  • the invention is not limited to such Stator Halbifn, measures such as the various types of support rings come in such discs but especially to advantage.
  • the first figure shows in its part a) a plan view of a Stator Halbique.
  • a second such Stator Halbique is arranged such that there is a full circle in the drawn view.
  • the stator disc has an inner ring 2 and an outer ring 3.
  • the indication “inside” and “outside” here refers to the radial distance to the center of the stator disc. Both rings together define the slice plane. Between these rings at least one blade 1 is arranged, usually a plurality of which is connected via an inner web 7 and an outer web 8 with the rings. At the outer edge of the outer ring exposed tabs 4 are arranged from the disk plane. Immediately radially within these tabs, a support ring 5 is drawn, which has the shape of a cylinder surface section. This support ring is with at least one of the tabs, preferably one Majority connected. It is also conceivable to arrange the tabs alternately radially inside and radially outside of the support ring.
  • this Stator Halbusion is shown from a viewing direction in the disk plane and the pitch of the disc.
  • the blades 1 are unscrewed from the disk plane.
  • An advantageous and suitable method is bending.
  • the blades protrude only in an axial direction out of the disk plane, the axial direction being that which is perpendicular to the disk plane. It is also conceivable to let the blades protrude up and down from the disk plane.
  • the tabs 4 are exposed from the disk plane and substantially perpendicular to this. They assume the function of a spacer ring, which is why they are designed so that their height H is so much greater than the distance S of the free blade tips to the disk plane, that there is still room for the rotor disk and an axial gap.
  • the support ring 5 has in the figure a height which is less than the height H of the tab. He can also be just as high.
  • a support ring is provided. This comprises a component 10 with a U-shaped cross-section and is seated on the end facing away from the disk plane of the tabs 4. The tab is thus wholly or partially clasped.
  • the cross section of the support ring may be U-shaped over its entire length, so that it clasps all tabs. It is also conceivable to provide it only in some places with a U-shaped cross-section, so that he only clings to a part of the tabs.
  • the u-shape is then particularly simple and can for example be generated by tabs that are bent over.
  • FIG. 3 A second development, which also builds on the principle of the embodiment shown in Figure 1, is shown in Figure 3.
  • the support ring in this case comprises a component 11 with an L-shaped cross section.
  • One leg of the L is connected to at least one of the tabs 4. This connection can be made by welding or gluing.
  • the other leg is aligned parallel to the disk plane. He only protrudes inward so far that he does not cover the blades of the stator.
  • This development also results in a mechanically fixed arrangement with a large contact surface for the axially adjacent stator.
  • Part a) of the figure shows a section through the axial plane. Shown are a blade 1 and an outer ring 3. Integrally connected thereto are tabs 4, which are exposed from the disk plane. A portion 12 of these tabs is bent so that it is aligned substantially parallel to the disk plane. Part b) of the figure illustrates how the disk looks before bending the tab 4 and section 12.
  • a part of the disc is shown in the axial direction. From the outer ring 3, the tabs protrude radially outward. They have a largely rectangular shape. Sections 12 are formed on the side facing away from the outer ring 3 side. They have a radially outwardly tapering shape. In the example shown this is realized by a trapezoidal shape. Such a disc is very easy to produce by punching. After punching, the tabs 4 are bent in a subsequent step.
  • FIG. 1 A fourth development of the stator disk equipped with blades 1 is shown in FIG.
  • a second tab 15 is provided.
  • a support ring 10 is arranged, which is held securely by the embrace by the tabs.
  • a plurality of such tabs 15 may be arranged, whereby the stability of the arrangement is further increased.
  • a connection between the support ring and one or more of the tabs can be made, for example by laser spot welding, gluing, riveting, u.s.w.
  • FIG 6 an example is shown in which a part of the tabs 4 exposed to one side and the remaining part of the tabs to the other side of the Statoriminebene.
  • the tabs of a first stator disk 20 and a second stator disk 21 can then be arranged such that the tabs of a stator disk engage in the gap between the tabs of the second stator disk.
  • the stator 20 and 21 are shown axially spaced. They are moved towards each other during assembly of the vacuum pump in the arrow direction and brought into engagement with each other.
  • the intermeshing of the stator disks increases the mechanical stability of the arrangement, so that it is possible to dispense with lower requirements on the stability of the support ring 10 shown in the figure.
  • the radial slots can still be punched out, which form the gaps between the blades with each other and the blades and the rings.
  • the area lying outside of the outer ring is formed in the examples shown by a plurality of tabs.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP07019878.3A 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire Not-in-force EP1918588B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006050565A DE102006050565A1 (de) 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1918588A2 true EP1918588A2 (fr) 2008-05-07
EP1918588A3 EP1918588A3 (fr) 2015-05-20
EP1918588B1 EP1918588B1 (fr) 2017-07-19

Family

ID=39102159

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07019878.3A Not-in-force EP1918588B1 (fr) 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire

Country Status (2)

Country Link
EP (1) EP1918588B1 (fr)
DE (1) DE102006050565A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140205431A1 (en) * 2013-01-22 2014-07-24 Shimadzu Corporation Vacuum pump
EP2913533A1 (fr) * 2014-02-28 2015-09-02 Pfeiffer Vacuum Gmbh Disque de stator
EP3051140A1 (fr) * 2015-01-29 2016-08-03 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
EP2894348B1 (fr) * 2014-01-09 2019-09-18 Pfeiffer Vacuum Gmbh Disque de stator
EP4325061A1 (fr) * 2023-12-20 2024-02-21 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE9013671U1 (fr) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140205431A1 (en) * 2013-01-22 2014-07-24 Shimadzu Corporation Vacuum pump
US10161403B2 (en) * 2013-01-22 2018-12-25 Shimadzu Corporation Vacuum pump
EP2894348B1 (fr) * 2014-01-09 2019-09-18 Pfeiffer Vacuum Gmbh Disque de stator
EP2913533A1 (fr) * 2014-02-28 2015-09-02 Pfeiffer Vacuum Gmbh Disque de stator
EP3051140A1 (fr) * 2015-01-29 2016-08-03 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
JP2016142268A (ja) * 2015-01-29 2016-08-08 プファイファー・ヴァキューム・ゲーエムベーハー ステーターディスク
CN105840525A (zh) * 2015-01-29 2016-08-10 普发真空有限公司 定子盘
CN105840525B (zh) * 2015-01-29 2019-06-21 普发真空有限公司 定子盘
EP4325061A1 (fr) * 2023-12-20 2024-02-21 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire

Also Published As

Publication number Publication date
EP1918588A3 (fr) 2015-05-20
DE102006050565A1 (de) 2008-04-30
EP1918588B1 (fr) 2017-07-19

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