EP2894348B1 - Disque de stator - Google Patents

Disque de stator Download PDF

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Publication number
EP2894348B1
EP2894348B1 EP14195965.0A EP14195965A EP2894348B1 EP 2894348 B1 EP2894348 B1 EP 2894348B1 EP 14195965 A EP14195965 A EP 14195965A EP 2894348 B1 EP2894348 B1 EP 2894348B1
Authority
EP
European Patent Office
Prior art keywords
stator
turbomolecular pump
securing device
plane
stator disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14195965.0A
Other languages
German (de)
English (en)
Other versions
EP2894348A1 (fr
Inventor
Sönke Gilbrich
Herbert Stammler
Bernd Hofmann
Miriam Schmitz
Johannes Schnarr
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2894348A1 publication Critical patent/EP2894348A1/fr
Application granted granted Critical
Publication of EP2894348B1 publication Critical patent/EP2894348B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump according to claim 1.
  • Turbomolecular pumps serve to generate a vacuum, for example for electron microscopes or mass spectrometers.
  • gas particles are accelerated by rotor disks of the turbomolecular pump and guided by stator disks in a preferred direction, whereby a vacuum generating flow is formed.
  • both the rotor disks and the stator disks comprise inclined planes to the plane, which accelerate or deflect the gas particles.
  • the rotor disks are non-rotatably connected to a high-speed shaft whose axis of rotation defines an axial direction of the turbomolecular pump, while the stator disks are not coupled to the shaft but fixed to a housing of the turbomolecular pump.
  • the rotor and stator discs are alternately arranged in the axial direction and spaced apart by spacers.
  • the rotor and stator disks and the spacer rings are arranged on the shaft and the resulting package is introduced into the housing of the turbomolecular pump. It is desirable that in particular the stator discs do not move laterally out of the package and wedging with the same when inserted into the housing.
  • a stator disk is in the EP 1 918 588 A2 described. This stator disc includes a projection which extends away from the plane of the stator disc. A stator disc with a locking tab is out of the EP 2 458 221 A2 known. A stator disc with a circumferential bent edge is in the DE 297 17 764 U1 shown.
  • the invention has for its object to provide a turbomolecular pump, which prevents wedging a stator when assembling the turbomolecular pump in a simple manner.
  • the securing device allows the stator disk to be secured against any radial movement in the plane during assembly of the turbomolecular pump so that it can not slip out of the rotor disk, stator disk and spacer ring package and become wedged with the turbomolecular pump housing during insertion.
  • the introduction of the disk package into the housing of the turbomolecular pump and thus ultimately the assembly of the turbomolecular pump as a whole are considerably simplified.
  • stator disks, stator disks and spacer rings are successively stacked on one another in the axial direction, for example, so that the rotor and stator disks alternate with spacers between them. If the stator disks and spacer rings abut each other, the stator disks are prevented from radial displacement by means of the securing device on the spacer rings secured in the plane. An axial movement and a rotation of the stator disks about the axial direction, however, can remain possible.
  • the securing device comprises at least three protrusions projecting out of the plane.
  • the projections may be formed, for example, as protruding noses or folds, which protrude in particular perpendicularly, that is in the axial direction of the stator disc. If the projections engage in complementary recesses of an adjacent spacer ring, the stator disk is effectively secured against rotation and displacement in the plane.
  • a stop surface which comes to lie on a shoulder of an adjacent spacer ring.
  • the stop surface extends in the circumferential direction and thus prevents the stator disk from coming out of the stack of stator, rotor and spacer disks. It is additionally advantageous that a radial centering of the stator can be achieved by the concerns of the stop surface on the shoulder.
  • the projections can also engage in grooves formed as grooves of an adjacent spacer ring.
  • the projections can engage in at least two grooves, the directions of extension of which enclose an angle with each other, ie not parallel to each other.
  • At least three projections are provided, of which two engage in parallel grooves and a third projection can engage in a groove which forms an angle with the other grooves.
  • At least two projections with the center of curvature of the stator disc form an angle which is not equal to 180 °.
  • Such an arrangement of the projections prevents in particular in grooves extending in the circumferential direction, a displacement of the stator in the radial direction. The protection against radial displacement takes place all the more reliable, the further the angle formed by two projections with the center approaches 90 °.
  • the angle is 75 ° to 105 ° and preferably 90 °.
  • two projections may be arranged in the region of the ends of the stator disk, and at least one further projection may be arranged in the circumferential direction centrally between the ends of the stator disk. This means that the further projection encloses an angle of approximately 90 ° with the center of curvature and the projections arranged at the ends.
  • one or more further projections may be provided.
  • the projections at the ends of the stator disc also serve to prevent a superposition of two adjacent semicircular stator discs.
  • the protrusions may also be defined by a single protruding nose or fold and by blades of the stator disc, which are set to be inclined to the plane defined by the stator and thus protrude from the plane, be formed.
  • the nose or fold can engage in a groove of an adjacent spacer ring and secure the stator so against radial movement in the direction of the nose or fold to the shaft of the turbomolecular pump.
  • the blades may abut an outer wall of the groove to secure the stator disk against any radial movement away from the shaft of the turbomolecular pump.
  • the stator is integrally formed.
  • the stator disc may e.g. be formed as a stamped bent part of a metal sheet.
  • the stator can also be worked out of a solid material, for example by milling.
  • the securing device is formed by bent material of the stator.
  • the securing device in a stamping bending process, for example, an edge portion of the stator can be bent to form the securing device.
  • the safety device no additional material must be attached to the stator in this way.
  • an in-plane recess of the stator is formed by the bent material.
  • the blades are usually limited at least in some areas by recesses. If the material to be punched out anyway for the recess is instead bent over and used as a securing device, it is possible to dispense with the provision of additional recesses or the use of additional material for the securing device.
  • the securing device can be formed in the same process step of the stamping bending process, such as, for example, the blades of the stator disk.
  • a section of at least one of the projections extends at least partially parallel to the plane.
  • the projection may thus have, for example, an L or S shape, whereby the projection has an enlarged contact surface in a groove of the spacer ring.
  • the securing device is designed like a bayonet. This means that, for example, an L-shaped or S-shaped projection can engage behind an undercut of the spacer ring. When mounting the rotor and stator, the stator can thus be secured in the axial direction of the spacer.
  • the securing device comprises at least two recesses in the stator disk.
  • recesses for example, projections of the spacers can engage and prevent in this way a radial displacement of the stator relative to the spacer ring.
  • the projections of the spacers can engage in already existing recesses which define the blades.
  • the securing device may be formed plastically deformable and be brought by bending in a predetermined position. In this way, tolerances, for example a spacer ring, which occur in the production process can be compensated by bending the securing device.
  • the invention thus relates to a turbomolecular pump having at least one stator disk of the type described above and a spacer ring, wherein the Safety device cooperates with the spacer ring to secure the stator against movement in the plane.
  • the stator disc comprises a securing device, which cooperates with at least one recess of the spacer ring.
  • the at least one recess may be formed by a groove extending in the circumferential direction of the spacer ring or by at least one depression of the spacer ring.
  • turbomolecular pump 10 comprises a pump inlet 14 surrounded by an inlet flange 12 and a plurality of pumping stages for conveying the gas present at the pump inlet 14 to a in Fig. 1 not shown pump outlet.
  • a rotor 18 is arranged with a about a rotational axis 20 rotatably mounted rotor shaft 22.
  • the turbomolecular pump 10 comprises a plurality of pump-effectively connected in series turbomolecular pumping stages with a plurality of attached to the rotor shaft 22 rotor disks 24 and in the axial direction between the rotor disks 24 stator 26th
  • the stator 26 are by spacer rings 28 at a desired axial distance from one another held.
  • the rotor-side part of the Holweckpumptreatmentn comprises a rotor shaft connected to the rotor hub 30 and two fixed to the rotor hub 30 and carried by this cylinder jacket Holweckrotorhülsen 32, 34, which are coaxial with the axis of rotation 22 oriented and nested in the radial direction.
  • two cylinder jacket-shaped Holweckstatorhülsen 36, 38 are provided, which are also oriented coaxially to the axis of rotation 22 and are nested in the radial direction.
  • the pump-active surfaces of the Holweckpumpgen are each formed by each other with the formation of a narrow radial Holweckspalts radial lateral surfaces of a Holweckrotorhülse 32, 34 and a Holweckstatorhülse 36, 38.
  • one of the pump-active surfaces is smooth - mainly that of Holweckrotorhülse 32, 34 - and the opposite pumping surface of the Holweckstatorhülse 36, 38 has a structuring with helically around the rotation axis 22 around in the axial direction extending grooves in which during rotation of the rotor 18, the gas is propelled and thereby pumped.
  • the rotatable mounting of the rotor shaft 22 is effected by a roller bearing 40 in the region of the pump outlet and a permanent magnet bearing 42 in the region of the pump inlet 14.
  • the permanent magnet bearing 42 comprises a rotor-side bearing half 44 and a stator bearing half 46, each comprising a ring stack of several stacked in the axial direction of permanent magnetic rings 48, 50, wherein the magnetic rings 48, 50 opposite to form a radial bearing gap 52.
  • an emergency or fishing camp 54 is provided which is designed as an unlubricated roller bearing and idles in normal operation of the turbomolecular pump 10 without contact and only with an excessive radial deflection of the rotor 18 with respect to the stator engages to a radial Form stop for the rotor 18, which prevents a collision of the rotor-side structures with the stator-side structures.
  • the emergency bearing 54 thus defines the maximum radial deflection of the rotor 18th
  • a conical injection nut 56 with an outer diameter increasing towards the rolling bearing 40 is provided on the rotor shaft 22.
  • the spray nut 56 is in sliding contact with at least one wiper of a plurality of stacked absorbent disks 58 having an operating means such as e.g. a lubricant for the rolling bearing 40 are soaked.
  • the resource is transmitted by capillary action of the resource storage on the scraper on the rotating spray nut 56 and due to the centrifugal force along the spray nut in the direction of increasing outer diameter of the spray nut 56 to the rolling bearing 40 promoted towards where it for example fulfills a lubricating function.
  • Turbomolecular pump 10 includes an engine compartment 60 into which rotor shaft 22 extends.
  • the engine compartment 60 is sealed in the region of the entry of the rotor shaft 22 by a victory track 62 with respect to a working or suction chamber of the turbomolecular pump 10.
  • a barrier gas inlet 64 allows delivery of a barrier gas into the engine compartment 60.
  • a drive motor 66 is arranged, which serves for the rotational driving of the rotor 18.
  • the drive motor 66 comprises a motor stator 68 with a core 70 and with several in Fig. 1 only schematically illustrated coils 72 which are defined in provided on the radially inner side of the core 70 grooves of the core 70.
  • the core 70 consists of a laminated core with several stacked in the axial direction of sheet metal discs of a soft magnetic material.
  • the rotor of the drive motor 77 which is also referred to as an armature, is formed by the rotor shaft 22, which extends through the motor stator 68 therethrough.
  • a permanent magnet assembly 74 is fixed radially on the outside.
  • a radial motor gap 76 is formed, via which the motor stator 68 and the permanent magnet arrangement 74 influence magnetically for transmission of the drive torque.
  • the permanent magnet assembly 74 is fixed to the rotor shaft 22 by means of gluing and / or shrinking and / or pressing.
  • the permanent magnet arrangement 74 comprises a soft-magnetic yoke 75a made of iron sheets or solid iron and a permanent magnet 75b.
  • An encapsulation 80 which is designed as a CFK or stainless steel sleeve, surrounds the permanent magnet arrangement 74 on its radial outer side and seals it against the motor gap 76.
  • a balancing ring 78 is further attached by gluing and / or shrinking and / or pressing, which has threaded holes for receiving balancing weights.
  • the balancing ring 78 has no direct mechanical connection to the permanent magnet assembly 74 in order to transmit any axial constraining forces on the permanent magnet assembly 74.
  • a control and power supply unit 82 is configured to supply the drive motor 66 with electrical energy during operation of the turbomolecular pump 10.
  • a first embodiment of a stator 26 is shown.
  • the stator disc 26 is formed in a partial ring shape, defining a plane and has a circular outer periphery 84 defining an outer radius and a circular inner periphery defining an inner radius ( Fig. 2b ). Furthermore, the stator 26 is integrally formed and by means of a stamping bending process made from a sheet metal. Circumferentially extending recesses 86 are provided in the stator disk 26 in the region of the outer circumference 84, which are separated from one another by webs 88, which in turn connect blades 90 to an outer edge region 91 of the stator disk 26.
  • the circumferentially extending recesses 86 in each case pass centrally into radial recesses 92, whereby approximately T-shaped recesses are formed, which separate the respective adjacent blades 90 from each other.
  • the blades 90 are each rotated about the webs 88 and inclined to the plane defined by the stator 26 level ( Fig. 2a ).
  • a circumferentially extending fold 94 is bent downwards ( Fig. 2a ).
  • the fold 94 extends in the circumferential direction over the entire length of the recess 86 and serves as a securing device.
  • the securing device can include further folds 94.
  • the fold engages, for example, in a corresponding recess of a spacer ring 28, as based on Fig. 6 is explained in more detail.
  • the crease 94 is formed of material which emerges from the outer edge region 91 and is punched and bent to form the recess 86.
  • Fig. 3a and Fig. 3b show a second embodiment of a stator 26, which differ from the in Fig. 2 shown embodiment differs in that instead of the fold 94 two lugs 96 are provided, each resulting from the webs 88 shown.
  • the lugs 96 together with at least two further, not shown, from the webs 88 resulting, circumferentially spaced lugs 96, the securing device.
  • a projection 98 is provided which is S-shaped.
  • the protrusion 98 shown forms together with at least one further protrusion 98 (not shown) and preferably at least two further protrusions 98 (not shown) the securing device.
  • the S-shaped projection 98 includes a circumferentially extending portion 99a in the plane of the stator disc 26 and a portion 99b spaced parallel to the plane, which are interconnected by a transition portion 99c.
  • the S-shaped projection 98 is formed of material of the stator disc 26, which emerges from the webs 88 and was punched and bent to form the recesses 86.
  • the S-shaped projection 98 allows a bayonet-like locking of the stator 26 on a spacer ring 28th
  • the S-shaped projection 98 is plastically deformable or bendable within certain limits, as indicated by arrows in FIG Fig. 4b is clarified. Due to the deformability of the projection 98 during assembly of the turbomolecular pump 10 or even in the manufacture of the stator 26 can be adapted to the position of an associated recess of the spacer ring 28.
  • Fig. 5 shows a fourth embodiment of a stator 26th
  • Fig. 5a are in each case two semicircular stator discs 26a, 26b shown, which rest in a transition region 106 to each other.
  • the stator disks 26a, 26b have an inner periphery 108 and an outer periphery 84.
  • a plurality of vanes 90 are outwardly defined by circumferentially extending recesses 86, radially extending recesses 92, and inner circumferential recesses 110.
  • Fig. 5b represents a view in the direction of arrows B of Fig. 5a
  • the blades 90 are employed relative to the plane formed by the stator 26.
  • Fig. 5c shows a radial section through the stator disc 26.
  • the inner circumference 108 is located in Fig. 5c above and the outer circumference 84 below.
  • the outer periphery 84 is formed as a circumferential bent over collar 112 which extends at least approximately perpendicularly away from the plane of the stator disc 26.
  • the circumferential collar 112 serves as a securing device and engages in the installed state in a circumferential groove of a spacer ring 28, whereby the stator disc 26 is secured against any movement in the plane.
  • Fig. 6 shows the interaction of the stator 26 of Fig. 2 with an adjacent spacer ring 28, wherein the fold 94 of the stator 26 engages in a recess of the spacer ring 28, here a circumferential groove 104. Alternatively, it could be in the recess but also a slot or a hole.
  • a movement of the stator disc 26 in the radial direction relative to the spacer ring 28 is prevented, in Fig. 6 So right or left.
  • at least two folds 94 offset by 90 ° in the circumferential direction any radial displacement of the stator disk 26 relative to the spacer ring 28 is prevented.
  • At least one nose, L or S-shaped projection 96, 98 and / or circumferential collar 112, which is offset by 90 ° in the circumferential direction, can engage in the groove 104.
  • the blades 90 bear against a radially inner wall 106, which delimits the groove 104 radially on the inside.
  • the wall 114 extends in the circumferential direction of the spacer ring 28 and forms a stop for the blades 90 of the stator 26. By the concerns of the blades 90 on the wall 114, the stator 26 is secured against radial movement away from the axis of rotation 20.
  • stator disks 26 and spacer rings 28 When assembling rotor disks 24, stator disks 26 and spacer rings 28, the securing devices of the stator disks 26 engage in the grooves 104 of the spacer rings 28. By the cooperation of securing devices and grooves 104, the radial displacement of the stator disks 26 is prevented, whereby the package of rotor disks 24, stator disks 26 and spacer rings 28 without the risk of jamming with the housing 16 can be introduced into the same. If the disk package is installed in the housing 16 of the turbomolecular pump 10, then the stator disks 26 are fixed by the housing 16 and the spacer rings 28.
  • Fig. 7 shows a fifth embodiment of a stator 26th This embodiment differs from the fourth embodiment according to Fig. 5 in that the semicircular stator disks 26a, 26b ( Fig. 7a ) are free at their ends in the region of the outer circumference 84 and the inner circumference 108, so that the stator disks 26a, 26b do not bear directly against one another, but define a gap 116 between them.
  • each semicircular stator disk 26a, 26b When viewed in the circumferential direction, each semicircular stator disk 26a, 26b comprises a bent nose 118, which protrudes from the plane defined by the stator disk 26 and forms a securing device.
  • the area marked by the letter A of Fig. 7a and thus the nose 118 is in Fig. 7c in side view and in Fig. 7d shown in more detail in plan view.
  • Fig. 7b is a side sectional view of the semicircular stator discs 26a, 26b and their interaction with a spacer ring 28 is shown.
  • the semicircular stator disks 26a, 26b have stator blades 90 projecting out of the plane between the inner circumference 108 and the outer circumference 84, which have approximately a rectangular cross section.
  • stator blades 90 engage with a radially inwardly pointing double stage 124 of the spacer ring 28.
  • the outer profile of the stator blades 90 is adapted to the double stage 124.
  • Fig. 8 shows a sixth embodiment of a stator 26, in contrast to the embodiment of Fig. 7 a plurality of parallel offset to the outer periphery 84 bent tips, teeth or projections 128 ( Fig. 8a ).
  • Recesses 126 each ensure the flatness of the zones 128 surrounding the tips 128 of the outer edge region 91, since the shaping of the tips 128 can lead to the formation of beads in the area of the bending edge.
  • the tips 128 engage in recesses of the axially adjacent spacer ring 28, which are designed as radially encircling knurling 130 ( Fig. 8b ).
  • a plurality of tips, teeth or projections 128 may be provided which enclose an angle of 90 ° with each other. This way will a movement, both displacement and rotation, prevents the stator 26 in the plane defined by it by engaging the projections 128 in the knurling 130 of the spacer ring.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe turbomoléculaire (10) comprenant au moins un disque de stator (26, 26a, 26b) et un anneau d'écartement (28), le disque de stator (26, 26a, 26b) s'étendant en forme d'anneau partiel dans un plan, ayant un rayon intérieur et un rayon extérieur et comprenant un moyen de blocage (98), le moyen de blocage (98) comprenant au moins deux saillies (94, 96, 98, 128) dépassant hors du plan, lesdites au moins deux saillies (94, 96, 98, 128) formant un angle inégal à 180° avec le centre de courbure du disque de stator (26, 26a, 26b),
    dans laquelle
    le disque de stator (26, 26a, 26b) peut être bloqué à l'aide du moyen de blocage (98) au moins à l'encontre d'un déplacement radial dans le plan par rapport à un anneau d'écartement adjacent (28), et
    une portion (99b) de l'une au moins des saillies (94, 98) s'étend au moins localement parallèlement et avec écartement par rapport audit plan, et
    le moyen de blocage (98) et l'anneau d'écartement (28) coopèrent pour bloquer le disque de stator (26, 26a, 26b) à l'encontre d'un mouvement dans ledit plan.
  2. Pompe turbomoléculaire (10) selon la revendication 1,
    caractérisée en ce que
    le moyen de blocage (98) est réalisé sous forme de fermeture à baïonnette.
  3. Pompe turbomoléculaire (10) selon la revendication 1 ou 2,
    caractérisée en ce que
    le moyen de blocage (98) comprend au moins trois saillies (94, 96, 98) dépassant hors dudit plan.
  4. Pompe turbomoléculaire (10) selon l'une des revendications précédentes,
    caractérisée en ce que
    ledit angle est de 75° à 105° et de préférence de 90°.
  5. Pompe turbomoléculaire (10) selon l'une des revendications précédentes,
    caractérisée en ce que
    le disque de stator (26, 26a, 26b) est réalisé d'un seul tenant.
  6. Pompe turbomoléculaire (10) selon l'une des revendications précédentes,
    caractérisée en ce que
    le moyen de blocage (98) est réalisé par un matériau recourbé du disque de stator (26, 26a, 26b).
  7. Pompe turbomoléculaire (10) selon la revendication 6,
    caractérisée en ce que
    une échancrure (86, 92, 110), située dans ledit plan, du disque de stator (26, 26a, 26b) est formée par le matériau recourbé.
  8. Pompe turbomoléculaire (10) selon l'une des revendications précédentes,
    caractérisée en ce que
    le moyen de blocage (98) présente au moins deux échancrures (86, 92, 110) dans le disque de stator.
  9. Pompe turbomoléculaire selon la revendication 1,
    caractérisée en ce que
    le disque de stator (26, 26a, 26b) comprend un moyen de blocage (98) qui coopère avec au moins une échancrure (104) de l'anneau d'écartement (28).
EP14195965.0A 2014-01-09 2014-12-02 Disque de stator Active EP2894348B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014100207.5A DE102014100207B4 (de) 2014-01-09 2014-01-09 Statorscheibe

Publications (2)

Publication Number Publication Date
EP2894348A1 EP2894348A1 (fr) 2015-07-15
EP2894348B1 true EP2894348B1 (fr) 2019-09-18

Family

ID=52023211

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14195965.0A Active EP2894348B1 (fr) 2014-01-09 2014-12-02 Disque de stator

Country Status (3)

Country Link
EP (1) EP2894348B1 (fr)
JP (1) JP6118829B2 (fr)
DE (1) DE102014100207B4 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1918588A2 (fr) * 2006-10-26 2008-05-07 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
EP2644899A1 (fr) * 2010-11-24 2013-10-02 Edwards Japan Limited Treillis protecteur pour pompe à vide et pompe à vide équipée de ce treillis

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE9013672U1 (de) 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
JP4517724B2 (ja) * 2004-05-24 2010-08-04 株式会社島津製作所 ターボ分子ポンプ
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
JP2011001825A (ja) * 2009-06-16 2011-01-06 Shimadzu Corp ターボ分子ポンプ
DE102010052660A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102010052659A1 (de) 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102011108115A1 (de) * 2011-07-20 2013-01-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1918588A2 (fr) * 2006-10-26 2008-05-07 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
EP2644899A1 (fr) * 2010-11-24 2013-10-02 Edwards Japan Limited Treillis protecteur pour pompe à vide et pompe à vide équipée de ce treillis

Also Published As

Publication number Publication date
EP2894348A1 (fr) 2015-07-15
JP2015132259A (ja) 2015-07-23
DE102014100207A1 (de) 2015-07-09
JP6118829B2 (ja) 2017-04-19
DE102014100207B4 (de) 2020-07-09

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