EP2886869B1 - Disque de stator - Google Patents

Disque de stator Download PDF

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Publication number
EP2886869B1
EP2886869B1 EP14192849.9A EP14192849A EP2886869B1 EP 2886869 B1 EP2886869 B1 EP 2886869B1 EP 14192849 A EP14192849 A EP 14192849A EP 2886869 B1 EP2886869 B1 EP 2886869B1
Authority
EP
European Patent Office
Prior art keywords
stator
stiffening element
inner ring
stator disk
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14192849.9A
Other languages
German (de)
English (en)
Other versions
EP2886869A1 (fr
Inventor
Florian Bader
Jan Hofmann
Sönke Gilbrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2886869A1 publication Critical patent/EP2886869A1/fr
Application granted granted Critical
Publication of EP2886869B1 publication Critical patent/EP2886869B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a stator disk for a turbomolecular pump, wherein the stator disc extends in a part-annular manner in a plane and has an inner ring and an outer ring, which are interconnected by stator blades.
  • Turbomolecular pumps serve to generate a vacuum, for example for electron microscopes or mass spectrometers.
  • gas particles are accelerated by rotor disks of the turbomolecular pump and guided by stator disks in a preferred direction, whereby a vacuum generating flow is formed.
  • both the rotor disks and the stator disks comprise inclined planes to the plane, which accelerate the gas particles or deflecting.
  • a stator disc is usually fixed by spacers in the region of its outer ring when the stator is installed in a turbomolecular pump.
  • the area of the inner ring of the stator is not fixed.
  • twisting or bending of the stator disk and thereby collision with an adjacent rotor disk can occur, which is why a certain axial distance between the stator - And rotor discs must be respected.
  • the invention has for its object to provide a stator for a turbomolecular pump, which has an improved rigidity.
  • the invention is based on the finding that bending of the stator disk, for example during flooding of the evacuated space, is maximal in the region of the inner ring. In the area of the outer ring, however, the stator disk is clamped by spacer rings and can not bend there. As a result of the arrangement of the stiffening element between the inner and outer rings, the rigidity caused by the interplay of spacer rings and outer ring of the stator disk is transferred to the inner ring in the region of the outer ring. In other words, by means of the stiffening element provided between inner and outer ring, the connection between the inner and the outer ring is stiffened and the inner ring is supported. In this way, the axial bending stiffness of the stator increases.
  • a stiffening element is arranged on a stator blade.
  • at least one separately formed stiffening element can be applied to the stator blade, eg glued or welded on.
  • the stator blade itself may form the stiffening element, for example by being provided with a concave or convex curvature which extends over the length of the stator disk.
  • an additional stiffening element is arranged on a connecting web connecting the inner and outer ring.
  • the end bar extends between inner and outer ring, but does not serve as a stator blade and thus lies in the plane defined by the stator.
  • the arrangement of the stiffened end webs at the ends of the stator disc has the advantage that in particular the ends of the inner ring are effectively protected against bending, which are exposed to the strongest loads.
  • a stiffening element is formed by a bead and / or a fold.
  • the stator disk is e.g. As a stamped and bent part, in particular made in one piece from a metal sheet, the formation of beads and / or bends can be easily integrated into the manufacturing process and ideally produced in a stamped bending step.
  • a bead can also be provided as a stiffening element a flanged edge.
  • the stiffening element may also be formed by additionally applied material, which is attached to the stator disk, for example, by gluing or welding.
  • the end web is arranged at one end of the partially annular stator disk.
  • the stator is schbring- or semicircular formed with two end webs.
  • two semi-circular stator discs are joined together to form a solid disc, with two end webs adjacent to each other.
  • a stiffening element extends at least partially along the inner ring.
  • the inner ring itself is protected against bending.
  • the inner ring can be thickened by the stiffening element, whereby an axial gap between the stator and the adjacent rotor discs is reduced. The reduced gap reduces the conductance and reduces backflow of molecules to be pumped.
  • the stiffening element extending along the inner ring can be formed by two corrugations arranged next to one another, resulting in a meander-shaped cross-section of the stator disk in this area.
  • a stiffening element extends at least partially along the outer ring.
  • the stator disk can also be stiffened in the area of the outer ring.
  • stator can be semicircular, i. So with an angular range of 180 °.
  • the stator disc covers an angular range of greater than 180 °, for example of 190 °. If two stator disks surrounding the rotor shaft of a turbomolecular pump in the assembled state are each formed with an angular range of 190 °, then these stator disks can each have an angular range at their mutually pointing ends of 10 ° to each other, ie overlap, whereby an additional stiffening of the stator is achieved.
  • the axial flexural rigidity of a stator disk is further increased if the stator disk has a stiffening element in an overlapping region provided for abutment against a further stator disk.
  • the overlapping region can be formed by a terminating web.
  • the overlapping areas of two stator disks can be seen one above the other in the axial direction, in order to bring about an additional stiffening of the stator disks.
  • the stiffening elements in the overlapping region can also be designed such that they engage in one another and fix the position of the stator disks relative to one another in the plane.
  • a stiffening element is arranged both on the end web and on the inner ring and formed continuously. In this way, a force acting on the inner ring force can be transferred particularly well to the end web, which is held by the fixed outer ring. In this way, the inner ring is better protected against bending.
  • the stator disc has two end webs, wherein a stiffening element extends from a region of the first end web over the inner ring to a region of the second end web. A force acting on the inner ring force can thus be transmitted at two points by the stiffening element to the outer ring.
  • stiffening elements can be combined with one another and connected and, in particular, continuously formed.
  • the invention further comprises a method for producing a stator disk provided for a turbomolecular pump which extends part-ring-shaped in a plane and has an inner ring and an outer ring, which are interconnected by stator blades, in which method at least one stiffening element stiffening the stator disk between the inner ring and the outer ring is formed.
  • the stiffening element or the stiffening elements, the inner ring and the outer ring and the blades of the stator can be produced in one and the same process steps and thus particularly economical.
  • the invention also relates to a turbomolecular pump with at least one stator disk of the type described above, for which the aforementioned advantages and developments of the stator disk apply accordingly.
  • turbomolecular pump 10 comprises a pump inlet 14 surrounded by an inlet flange 12 and a plurality of pumping stages for conveying the gas present at the pump inlet 14 to a in Fig. 1 not shown pump outlet.
  • a rotor 18 is arranged with a about a rotational axis 20 rotatably mounted rotor shaft 22.
  • the turbomolecular pump 10 comprises a plurality of pump-effectively connected in series turbomolecular pumping stages with a plurality of attached to the rotor shaft 22 rotor disks 24 and in the axial direction between the rotor disks 24 stator 26th
  • the stator 26 are by spacer rings 28 at a desired axial distance from one another held.
  • Holweckpumpgen arranged one inside the other in the radial direction and pump-connected in series with one another.
  • the rotor-side part of the Holweckpumptreatmentn comprises one connected to the rotor shaft 22 rotor hub 30 and two attached to the rotor hub 30 and from this supported cylinder jacket-shaped Holweckrotorhülsen 32, 34, which are coaxial with the axis of rotation 22 oriented and nested in the radial direction.
  • two cylinder jacket-shaped Holweckstatorhülsen 36, 38 are provided, which are also coaxial with the axis of rotation 22 oriented and nested in the radial direction.
  • the pump-active surfaces of the Holweckpumpgen are each formed by each other with the formation of a narrow radial Holweckspalts radial lateral surfaces of a Holweckrotorhülse 32, 34 and a Holweckstatorhülse 36, 38.
  • one of the pump-active surfaces is smooth - mainly that of Holweckrotorhülse 32, 34 - and the opposite pumping surface of the Holweckstatorhülse 36, 38 has a structuring with helically around the rotation axis 22 around in the axial direction extending grooves in which during rotation of the rotor 18, the gas is propelled and thereby pumped.
  • the rotatable mounting of the rotor shaft 22 is effected by a roller bearing 40 in the region of the pump outlet and a permanent magnet bearing 42 in the region of the pump inlet 14.
  • the permanent magnet bearing 42 comprises a rotor-side bearing half 44 and a stator bearing half 46, each comprising a ring stack of several stacked in the axial direction of permanent magnetic rings 48, 50, wherein the magnetic rings 48, 50 opposite to form a radial bearing gap 52.
  • an emergency or fishing camp 54 is provided, which is designed as an unlubricated rolling bearing and idles in normal operation of the turbomolecular pump 10 without contact and only with an excessive radial displacement of the rotor 18 with respect to the stator engages, to form a radial stop for the rotor 18, which prevents a collision of the rotor-side structures with the stator-side structures.
  • the emergency bearing 54 thus defines the maximum radial deflection of the rotor 18th
  • a conical injection nut 56 with an outer diameter increasing towards the rolling bearing 40 is provided on the rotor shaft 22.
  • the spray nut 56 is in sliding contact with at least one wiper of a plurality of stacked absorbent disks 58 having an operating means such as e.g. a lubricant for the rolling bearing 40 are soaked.
  • the resource is transmitted by capillary action of the resource storage on the scraper on the rotating spray nut 56 and due to the centrifugal force along the spray nut in the direction of increasing outer diameter of the spray nut 56 to the rolling bearing 40 promoted towards where it for example fulfills a lubricating function.
  • Turbomolecular pump 10 includes an engine compartment 60 into which rotor shaft 22 extends.
  • the engine compartment 60 is sealed in the region of the entry of the rotor shaft 22 by a victory track 62 with respect to a working or suction chamber of the turbomolecular pump 10.
  • a barrier gas inlet 64 allows delivery of a barrier gas into the engine compartment 60.
  • a drive motor 66 is arranged, which serves for the rotational driving of the rotor 18.
  • the drive motor 66 comprises a motor stator 68 with a core 70 and with several in Fig. 1 only schematically illustrated coils 72 which are defined in provided on the radially inner side of the core 70 grooves of the core 70.
  • the core 70 consists of a laminated core with several in the axial direction stacked sheet metal discs made of a soft magnetic material.
  • the rotor of the drive motor 77 which is also referred to as an armature, is formed by the rotor shaft 22, which extends through the motor stator 68 therethrough.
  • a permanent magnet assembly 74 is fixed radially on the outside.
  • a radial motor gap 76 is formed, via which the motor stator 68 and the permanent magnet arrangement 74 magnetically influence the transmission of the drive torque.
  • the permanent magnet assembly 74 is fixed to the rotor shaft 22 by means of gluing and / or shrinking and / or pressing.
  • the permanent magnet arrangement 74 comprises a soft magnetic yoke 75a made of iron sheets or solid iron and a permanent magnet 75b.
  • An encapsulation 80 which is designed as a CFK or stainless steel sleeve, surrounds the permanent magnet arrangement 74 on its radial outer side and seals it against the motor gap 76.
  • a balancing ring 78 is further attached by gluing and / or shrinking and / or pressing, which has threaded holes for receiving balancing weights.
  • the balancing ring 78 has no direct mechanical connection to the permanent magnet assembly 74 in order to transmit any axial constraining forces on the permanent magnet assembly 74.
  • a control and power supply unit 82 is configured to supply the drive motor 66 with electrical energy during operation of the turbomolecular pump 10.
  • FIG. 2 a first embodiment of a stator 26 is shown.
  • the stator disc 26 defines a plane and includes an inner ring 84 and a
  • stator blades 88 are respectively rotated about the webs 90 and inclined to the plane defined by the stator disk 26 ( Fig. 2a ).
  • stator blades 88 are approximately trapezoidal in shape, wherein the base connected to the inner ring 84 is formed shorter than the side connected to the outer ring 86 base side.
  • imprints 92 are introduced, which serve as stiffening elements and in particular stiffen the inner ring 84 relative to the outer ring 86.
  • the embossments 92 are also shaped approximately trapezoidal and go in the area of the base sides of the trapezoidal shape in triangular transition regions 94 on.
  • the legs of the trapezoidal embossing 92 extend in the radial direction and accordingly have a constant distance from the circumferentially oriented edges of the stator blades 88.
  • the stator disc 26 is formed in one piece and made by means of a stamping bending process of a metal sheet.
  • the impressions 92 of the stator blades 88 are also produced by means of the stamping bending process.
  • the stator disc 26 covers an angular range of 180 ° and is thus semicircular ( Fig. 2b ).
  • two stator disks 26 are respectively arranged in a plane to form a solid disk.
  • Fig. 3 shows a second embodiment of a stator 26, which is semicircular or half-ring-shaped and thus covers an angular range of 180 °.
  • Fig. 3 For example, only two stator blades 88 are shown, however, as in the first embodiment, further stator blades 88 are present, as indicated by the arrow 89.
  • FIG. 3 In addition, two of the inner ring 84 and the outer ring 86 of the stator 26 connecting end webs 96 are shown, each defining the completion of the stator 26 in the circumferential direction.
  • the end webs 96 are trapezoidal, wherein the legs of the trapezoidal shape each extend in the radial direction.
  • the stator 26 includes an additional stiffening element, which is formed as a bead 98.
  • the bead 98 begins in the radial direction approximately centrally in the one end web 96, extends from there to the semicircular inner ring 84, follows the inner ring 84 completely and also extends into the other end web 96 about half of it.
  • the bead 98 is formed continuously and thus forms in plan view approximately the Greek letter Omega ( ⁇ ).
  • the bead 98 protrudes upward from the plane defined by the stator disk 26 and may, for example, have a V-shaped, U-shaped, rectangular or round cross-section.
  • FIG. 4 A third embodiment of a stator disk 26 is shown, which differs from the second embodiment in that the end webs 96 are rectangular.
  • the bead 98 serving to stiffen the stator disk 26 extends only over a majority of the inner ring 84 from a central region of the one end web 96, but not along the other end web 96.
  • the bead 98 forms approximately the shape of a sickle.
  • Fig. 5 shows a fourth embodiment of a stator 26, which differs from the in Fig. 3 differs in that two beads 98 are provided, each extending approximately along the radially inner half of a terminal web 96 and continue along the inner ring 84 and cover each over an angular range of about 30 °. The two beads 98 are separated.
  • Fig. 6 schematically shows the arrangement of a stator 26 according to the prior art between two rotor discs 24 which are coupled to the rotor shaft 22.
  • the rotor shaft 22 facing inner ring 84 of the stator 26 is formed flat here. Radially outward, the stator blades 88, which are inclined to the plane, adjoin the inner ring 84.
  • Fig. 7 shows in contrast to Fig.
  • a stator according to the invention 26 which on the inner ring 84 has two double-right-angled bends 100, which serve to further stiffen the stator 26. Seen in cross section, this results in a meandering course of the inner ring 84.
  • the folds 100 reduces the axial gap 102 between the stator 26 and the adjacent rotor disks 24, whereby a backflow of molecules to be pumped is difficult, which reduces the conductance and thus the Efficiency of the turbomolecular pump 10 increases.
  • stiffening elements on the stator blades and the beads 98 according to Fig. 3 to 5 can be combined with each other.
  • the beads 98 can also be bent 100, as in Fig. 7 shown to be used.
  • a further stiffening element may be provided on the outer ring 86, for example in the form of a closed circumferential one Bead, which extends over the entire outer ring 86, the two end webs 96 and the entire inner ring 84.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (11)

  1. Disque de stator (26) pour une pompe turbomoléculaire (10), le disque de stator (26) s'étendant en forme d'anneau partiel dans un plan et comprenant un anneau intérieur (84) et un anneau extérieur (86) qui sont reliés l'un à l'autre par des aubes de stator (88),
    dans lequel
    au moins un élément de rigidification (92, 98, 100) rigidifiant le disque de stator (26) est prévu entre l'anneau intérieur (84) et l'anneau extérieur (86),
    caractérisé en ce que
    un élément de rigidification (92, 98, 100) est agencé sur un aube de stator (88).
  2. Disque de stator (26) selon la revendication 1,
    caractérisé en ce que
    un élément de rigidification est formé par une moulure (98) et/ou par un rebord plié (100).
  3. Disque de stator (26) selon la revendication 1 ou 2,
    caractérisé en ce que
    un élément de rigidification (92, 98, 100) est agencé sur une barrette de terminaison (96) reliant les anneaux intérieur et extérieur (84, 86).
  4. Disque de stator (26) selon l'une des revendications précédentes,
    caractérisé en ce que
    un élément de rigidification (92, 98, 100) s'étend au moins localement également le long de l'anneau intérieur (84).
  5. Disque de stator (26) selon l'une des revendications précédentes,
    caractérisé en ce que
    un élément de rigidification (92, 98, 100) s'étend au moins localement également le long de l'anneau extérieur (86).
  6. Disque de stator (26) selon l'une des revendications précédentes,
    caractérisé par
    un élément de rigidification (92, 98, 100) dans une zone de chevauchement prévue pour l'appui contre un autre disque de stator (26).
  7. Disque de stator (26) selon l'une des revendications précédentes,
    caractérisé en ce que
    le disque de stator (26) recouvre une zone angulaire supérieure à 180°, par exemple égale à 190°.
  8. Disque de stator (26) selon l'une des revendications précédentes,
    caractérisé en ce que
    un élément de rigidification (92, 98, 100) est agencé sur la barrette de terminaison (96) et sur l'anneau intérieur (84), et il est conçu en continu.
  9. Disque de stator (26) selon l'une des revendications précédentes,
    caractérisé en ce que
    le disque de stator (26) comprend deux barrettes de terminaison (96), et un élément de rigidification (92, 98, 100) s'étend depuis une zone de la première barrette de terminaison (96) sur l'anneau intérieur (84) jusqu'à une zone de la seconde barrette de terminaison (96).
  10. Procédé de réalisation d'un disque de stator (26) prévu pour une pompe turbomoléculaire (10), lequel s'étend en forme d'anneau partiel dans un plan et comprend un anneau intérieur (84) et un anneau extérieur (86) qui sont reliés l'un à l'autre par des aubes de stator (88),
    dans lequel
    au moins un élément de rigidification (92, 98, 100) rigidifiant le disque de stator (26) est réalisé entre l'anneau intérieur (84) et l'anneau extérieur (86),
    caractérisé en ce que
    un élément de rigidification (92, 98, 100) est réalisé sur un aube de stator (88).
  11. Pompe turbomoléculaire (10) comportant au moins un disque de stator (26) selon l'une des revendications 1 à 9.
EP14192849.9A 2013-12-19 2014-11-12 Disque de stator Active EP2886869B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013114576.0A DE102013114576A1 (de) 2013-12-19 2013-12-19 Statorscheibe

Publications (2)

Publication Number Publication Date
EP2886869A1 EP2886869A1 (fr) 2015-06-24
EP2886869B1 true EP2886869B1 (fr) 2018-09-05

Family

ID=51904735

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14192849.9A Active EP2886869B1 (fr) 2013-12-19 2014-11-12 Disque de stator

Country Status (3)

Country Link
EP (1) EP2886869B1 (fr)
JP (1) JP6027601B2 (fr)
DE (1) DE102013114576A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3611381B1 (fr) * 2018-08-13 2023-10-04 Pfeiffer Vacuum Gmbh Procédé de fabrication d'une pompe à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
JP2006046074A (ja) * 2004-07-30 2006-02-16 Boc Edwards Kk 真空ポンプ
DE102010052659A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102010052660A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102011108115A1 (de) * 2011-07-20 2013-01-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP3183571U (ja) * 2013-03-07 2013-05-23 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
DE102013114576A1 (de) 2015-06-25
JP6027601B2 (ja) 2016-11-16
JP2015117699A (ja) 2015-06-25
EP2886869A1 (fr) 2015-06-24

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