EP2886870B1 - Pompe à vide avec géométrie d'admission perfectionnée - Google Patents

Pompe à vide avec géométrie d'admission perfectionnée Download PDF

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Publication number
EP2886870B1
EP2886870B1 EP14196002.1A EP14196002A EP2886870B1 EP 2886870 B1 EP2886870 B1 EP 2886870B1 EP 14196002 A EP14196002 A EP 14196002A EP 2886870 B1 EP2886870 B1 EP 2886870B1
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EP
European Patent Office
Prior art keywords
vacuum pump
inlet
rotor
stage
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14196002.1A
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German (de)
English (en)
Other versions
EP2886870B2 (fr
EP2886870A1 (fr
Inventor
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2886870A1 publication Critical patent/EP2886870A1/fr
Application granted granted Critical
Publication of EP2886870B1 publication Critical patent/EP2886870B1/fr
Publication of EP2886870B2 publication Critical patent/EP2886870B2/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump or vacuum pump stage with a housing which has at least one inlet.
  • Rotating sleeves have proven themselves in vacuum pumps, for example in the form of a Holweckpumpcut.
  • One or a plurality of sleeves are fixed on one side to a hub, which in turn is arranged on a shaft.
  • a hub which in turn is arranged on a shaft.
  • Such a structure shows, for example, the DE 10 2011 112 689 A1 ,
  • the inlet is not as in the prior art ( DE 10 2011 112 689 A1 ) associated pump axially to the shaft, but arranged radially to the shaft and the rotating sleeve, as shown in the EP 1 302 667 A1 is shown.
  • the disadvantage arises that, in view of the probable direction of movement of a gas molecule, it may happen that the molecule does not enter the Holweck channels, but leaves the suction area again in the direction of the recipient. This has a disadvantageous effect on the pumping speed.
  • the prior art also includes a vacuum pump, are provided in the deflection in the inlet area. This deflecting effect that a deflection of the particles takes place in the flow or conveying direction of the pump.
  • the prior art ( EP 2 385 257 A2 ) includes a side channel pumping stage with a scraper and a vacuum pump with a high vacuum pumping stage, which may be designed as a Holweck or Turbomolekularpumpcut. This prior art vacuum pump can be further improved in terms of the pumping speed.
  • the technical problem underlying the invention is to provide a vacuum pump or vacuum pumping stage with a radially arranged inlet, in which the pumping speed is increased with an unchanged size of the inlet.
  • the vacuum pump or vacuum pump stage with a housing having at least one inlet with a rotor having a shaft, the inlet being arranged radially to the shaft, in which the vacuum pump or vacuum pump stage comprises at least one Holweckpumpcut with a rotor, which has a shaft, A hub connected to the shaft and a sleeve connected to the hub and concentric with the shaft are characterized in that the inlet is designed to widen in the direction of the sleeve and in the direction of the shaft and that the inlet is designed to widen in the direction of rotation of the rotor ,
  • the direction of movement of the molecules is influenced such that they can no longer leave the suction flange of the pump or pump stage in the direction of the recipient and continue to remain in the pumping process.
  • the Gas molecules that hit this inner wall are deflected towards the rotating sleeve after hitting the inner wall and are likely to enter the vacuum pump or vacuum pump stage.
  • the number of gas molecules that do not enter directly into the pumping area of the vacuum pump or vacuum pumping stage, after an impact on the inner wall of the expanding inlet it is very likely to be fed to the pump region of the vacuum pump or vacuum pumping stage, thereby significantly increasing the suction capacity of the vacuum pump or vacuum pumping stage.
  • this inlet can be located either on the high-vacuum side of the rotor before or in the region of the first rotor disk, as well as in the further course of the pump-active structure at any point to form an additional inlet for a split-flow pump.
  • the embodiment according to the invention not only increases the probability that a gas molecule successfully enters the pump-active region, but also that a gas molecule, which was already in the pump-active region, re-enters the inlet channel after an undesired exit from the pump-active region is returned to the pump active area, so that it can still be promoted and thus the pumping speed is additionally increased.
  • the vacuum pump has at least one Holweck note with one-piece shaft and surrounding stator, wherein the promotional structure is located on one of the two parts, or at least one cross-thread Holweck note with one-piece shaft, wherein the promotional structure is an opposing thread structure or a turbo-rotor of a turbo pump, wherein the promotional structure at least one Turbo rotor disc and a turbo stator includes.
  • the embodiment according to the invention with the inlet widening in the direction of the shaft can be used particularly advantageously with these vacuum pumps.
  • the vacuum pumping stage is designed as a Holwecklace with one-piece shaft and surrounding stator, wherein the promotional structure is located on one of the two parts, or as a cross-thread Holwecklace with one-piece shaft, wherein the promotional structure a opposite thread structure is formed.
  • the embodiment according to the invention can be used particularly advantageously with the inlet widening in the direction of the shaft.
  • the inlet is designed as a channel of the rotor-conducting inlet disposed as a gas through the inlet in the direction of rotation of the rotor.
  • This embodiment has the advantage that the entering through the suction port Gas molecules is conveyed directly into the arranged in the direction of rotation of the rotor channels, such as a Holweckstators. This direct feed also increases the suction capacity of the vacuum pump or vacuum pump stage.
  • the inlet is designed to widen in the direction of rotation of the rotor.
  • the opposite side of the inlet flange may, as known from the prior art, be formed partially cylindrical.
  • the inlet is formed widening in cross section with a curved outer contour.
  • the inlet can also be formed widening with a straight outer contour.
  • the curved outer contour has the advantage that the contour can be adjusted in such a way that the gas molecules are deflected with the greatest probability after an impact on the outer contour in the direction of the rotating sleeve and not in the opposite direction.
  • the curved outer contour allows a smaller extension of the inlet in the direction of the pump chamber than is the case with a straight outer contour.
  • the inlet can, as already stated, be designed to widen in a linear conical manner in cross-section. This embodiment is easy to manufacture and the suction capacity of the vacuum pump or vacuum pump stage is increased anyway.
  • the inlet is designed to widen in all directions.
  • the inlet is formed widening only in the direction of rotation of the rotor. If the inlet is formed widening only on the side which is arranged in the direction of rotation of the rotor, the costs for the widening configuration of the inlet are reduced.
  • the vacuum pump is designed as a molecular vacuum pump, in particular as a Holweck pump.
  • the inventive design of the inlet flange can be applied to Holweckpumphn, in which the pump-active surfaces are arranged in the stator.
  • the invention can also be applied to Holweckpumpmeasuren, in which the pump-active structures on the sleeve, that are arranged on the rotor.
  • the invention can also be applied to cross-thread Holweckpump taskn in which pump-active structures are arranged both on the rotor and stator.
  • the invention can be applied to turbomolecular pumping stages in which the pump-active structure consists of rotor and stator blades.
  • Fig. 1 shows a longitudinal section through a belonging to the prior art vacuum pump 1.
  • a suction port 4 is provided, is sucked through the gas in the vacuum pump 1. After compression, the gas is expelled from the vacuum pump 1 through an outlet 6.
  • a rotor 10 which generates the pumping action together with a stator 30.
  • the rotor 10 has a shaft 12, whose end facing the suction opening 4 is supported by a permanent magnet bearing 14. The opposite end is from a rolling bearing 16 supported.
  • This bearing assembly has over other, also possible types of bearings, such as the flying bearing with bearings on the opposite side of the intake, the advantage that a lubricant-free bearing is used on the suction side and due to the rotor dynamic simpler storage narrow column and a shorter overall length can be achieved.
  • a permanent magnet 20 is provided, which cooperates with an energized drive coil.
  • the rotor 10 is set in a sufficiently fast speed. This is measured according to the pumping principle used and, with molecular principles, is generally around 10,000 revolutions per minute.
  • the stator 30 has one or a plurality of helical channels 30 on its surface facing the rotor.
  • a hub 40 is attached on the shaft 12. It has a first side 42 and a second side 44 opposite this first side 42. The second side 44 faces the suction opening.
  • a first sleeve 50 is secured to the first side and a second sleeve 52 to the second side. Both sleeves 50, 52 cooperate with the stator 30 and its helical channel 32 to create a holweck pumping action.
  • the gas flow leads through the suction opening into a gap S between the second sleeve 52 and the stator 30.
  • the first sleeve 50 is arranged downstream in the gas flow of the second sleeve 52 and thus compresses toward the sleeve pressure.
  • Fig. 2 the housing 2 is shown having the inlet 4.
  • the rotating sleeve 52 is shown as well as the pump-active structure 32.
  • FIG. 2 schematically shows how a gas molecule 60 hits the sleeve 52. Due to the probable direction of movement of the gas molecule 60, it may happen that the molecule does not enter the Holweck channels 32, but instead leaves the suction region 62 again in the direction of the recipient, that is, opposite to the direction of the arrow A. The resulting velocity is shown by the arrow 80.
  • Fig. 3 shows a known from practice inlet flange 4, which is designed as an asymmetrically drilled inlet channel. This embodiment directs the gas molecules 60 in different directions of the inlet 4. The resulting velocity is shown by the arrow 80.
  • Fig. 4 shows an inventive inlet geometry, which represents a further improvement over the prior art, in which the inlet 4 is formed widening in the direction of sleeve 52.
  • the direction of movement of the molecules 60 is influenced so that they can no longer leave the suction flange of the pump 1 as far as possible in the direction of the recipient, ie counter to the direction of the arrow A and continue to remain in the pumping process.
  • Fig. 5 shows a modified embodiment of the invention.
  • the inlet 64 is according to Fig. 5 formed linear conically widening. Also according to this inlet geometry, the gas molecules, which abut the inner wall of the extension 64 of the inlet flange 4, move back in the direction of the pump chamber, so that the pumping speed of the pump also increases significantly.
  • Fig. 6 1 shows a turbo-pumping stage 66 with a suction opening 62.
  • the turbo-pumping stage has a rotor 68 with rotor blades 70.
  • the gas molecules (not shown) enter into the vacuum pumping stage 66 in the direction of the arrow A. If the gas molecules are deflected by the rotor blades 70 in the direction of the outlet, they abut against the inner wall of the extension 64 of the suction port 62 and are in turn directed in the direction of the rotor 68.
  • Fig. 7 shows a schematic representation of the pumping stage 66 with the rotor 68.
  • the rotor 68 has rotor disks 72, 74 and stator 76, 78, wherein the rotor disks 72, 74 and the stator disks 76, 78 have opposite rotor and Statorbeschaufelept.
  • a gas molecule which enters the suction opening 62 in the direction of the arrow A is deflected by the extension 64 of the suction opening 62 and "passes" through the pumping stage 66 and exits the pumping stage 66 in the direction of the arrow B.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe à vide ou étage de pompe à vide avec un corps, qui présente au moins une entrée, avec un rotor, qui présente un arbre, dans laquelle/lequel l'entrée est disposée radialement par rapport à l'arbre, dans laquelle/lequel la pompe à vide ou l'étage de pompe à vide présente au moins un étage de pompe Holweck avec un rotor, qui présente un arbre, un moyeu assemblé à l'arbre et un manchon (52) relié au moyeu et concentrique à l'arbre, caractérisé(e) en ce que l'entrée (4) est réalisée sous forme évasée en direction du manchon (52) et en direction de l'arbre (12), et en ce que l'entrée (4) est réalisée sous forme évasée dans le sens de rotation du rotor.
  2. Pompe à vide selon la revendication 1, caractérisée en ce que la pompe à vide présente au moins un étage de pompe Holweck avec un arbre en une seule pièce et un stator enveloppant, ou au moins un étage Holweck à filetage croisé avec un arbre en une seule pièce, dans laquelle une structure de transport représente une structure filetée contraire, ou un turbo-rotor d'une turbopompe, dans laquelle la structure de transport comprend au moins un disque de turbo-rotor (72, 74) et un disque de turbo-stator (76, 78) .
  3. Etage de pompe à vide selon la revendication 1, caractérisé en ce que l'étage de pompe à vide est réalisé sous la forme d'un étage Holweck avec un arbre en une seule pièce et un stator enveloppant, ou sous la forme d'un étage Holweck à filetage croisé avec un arbre en une seule pièce, dans lequel la structure de transport représente une structure filetée contraire.
  4. Pompe à vide ou étage de pompe à vide selon la revendication 1, caractérisé(e) en ce que l'entrée (4) est réalisée sous la forme d'une entrée (4) conduisant du gaz à travers l'entrée (4) dans des canaux (32) disposés dans le sens de rotation du rotor.
  5. Pompe à vide ou étage de pompe à vide selon la revendication 1, caractérisé(e) en ce que l'entrée (4) est réalisée simplement sous forme évasée dans le sens de rotation du rotor.
  6. Pompe à vide ou étage de pompe à vide selon l'une quelconque des revendications précédentes, caractérisé(e) en ce que l'entrée (4) est réalisée sous forme évasée en section transversale avec un contour extérieur courbe (64).
  7. Pompe à vide ou étage de pompe à vide selon l'une quelconque des revendications 1 à 5, caractérisé(e) en ce que l'entrée (4) est réalisée sous forme évasée conique linéaire en section transversale.
  8. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la pompe à vide (1) est réalisée sous la forme d'une pompe à vide moléculaire.
  9. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la pompe à vide (1) est réalisée sous la forme d'une pompe Holweck.
EP14196002.1A 2013-12-18 2014-12-03 Pompe à vide avec géométrie d'admission perfectionnée Active EP2886870B2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013114290.7A DE102013114290A1 (de) 2013-12-18 2013-12-18 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2886870A1 EP2886870A1 (fr) 2015-06-24
EP2886870B1 true EP2886870B1 (fr) 2017-12-20
EP2886870B2 EP2886870B2 (fr) 2020-12-23

Family

ID=52023216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14196002.1A Active EP2886870B2 (fr) 2013-12-18 2014-12-03 Pompe à vide avec géométrie d'admission perfectionnée

Country Status (4)

Country Link
US (1) US20150167679A1 (fr)
EP (1) EP2886870B2 (fr)
JP (1) JP6118784B2 (fr)
DE (1) DE102013114290A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146492A (ja) 1984-08-11 1986-03-06 Mitsuwa Seiki Co Ltd 分子ポンプ
US5707213A (en) 1995-03-10 1998-01-13 Balzers-Pfeiffer Gmbh Molecular vacuum pump with a gas-cooled rotor
GB2360066A (en) 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
US6371735B1 (en) 1999-09-16 2002-04-16 The Boc Group Plc Vacuum pumps
US6435811B1 (en) 1998-05-14 2002-08-20 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
EP1243796A2 (fr) 2001-03-24 2002-09-25 Pfeiffer Vacuum GmbH Pompe à vide
EP1302667A1 (fr) 2001-10-15 2003-04-16 The BOC Group plc Pompes à vide
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008024764A1 (de) 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102009035332A1 (de) 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2385257A2 (fr) 2010-05-08 2011-11-09 Pfeiffer Vacuum Gmbh Etage de pompe à vide
EP2565463A2 (fr) 2011-09-05 2013-03-06 Pfeiffer Vacuum GmbH Pompe à vide
DE102011112689A1 (de) 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP1759118B2 (fr) 2004-06-25 2016-10-05 Edwards Limited Pompe à vide

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213195U (fr) * 1988-06-30 1990-01-26
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH0475196U (fr) * 1990-11-09 1992-06-30
JPH0717986U (ja) * 1993-09-08 1995-03-31 二国機械工業株式会社 渦流ポンプ
GB2333127A (en) * 1997-10-21 1999-07-14 Varian Associates Molecular drag compressors having finned rotor construction
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
DE202010012795U1 (de) 2010-09-21 2012-01-13 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146492A (ja) 1984-08-11 1986-03-06 Mitsuwa Seiki Co Ltd 分子ポンプ
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US5707213A (en) 1995-03-10 1998-01-13 Balzers-Pfeiffer Gmbh Molecular vacuum pump with a gas-cooled rotor
US6435811B1 (en) 1998-05-14 2002-08-20 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
US6371735B1 (en) 1999-09-16 2002-04-16 The Boc Group Plc Vacuum pumps
GB2360066A (en) 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
EP1243796A2 (fr) 2001-03-24 2002-09-25 Pfeiffer Vacuum GmbH Pompe à vide
EP1302667A1 (fr) 2001-10-15 2003-04-16 The BOC Group plc Pompes à vide
EP1759118B2 (fr) 2004-06-25 2016-10-05 Edwards Limited Pompe à vide
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008024764A1 (de) 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102009035332A1 (de) 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2385257A2 (fr) 2010-05-08 2011-11-09 Pfeiffer Vacuum Gmbh Etage de pompe à vide
EP2565463A2 (fr) 2011-09-05 2013-03-06 Pfeiffer Vacuum GmbH Pompe à vide
DE102011112689A1 (de) 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2013053627A (ja) 2011-09-05 2013-03-21 Pfeiffer Vacuum Gmbh 真空ポンプ

Also Published As

Publication number Publication date
EP2886870B2 (fr) 2020-12-23
JP6118784B2 (ja) 2017-04-19
EP2886870A1 (fr) 2015-06-24
DE102013114290A1 (de) 2015-06-18
JP2015117697A (ja) 2015-06-25
US20150167679A1 (en) 2015-06-18

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