EP1243796A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1243796A2
EP1243796A2 EP02005166A EP02005166A EP1243796A2 EP 1243796 A2 EP1243796 A2 EP 1243796A2 EP 02005166 A EP02005166 A EP 02005166A EP 02005166 A EP02005166 A EP 02005166A EP 1243796 A2 EP1243796 A2 EP 1243796A2
Authority
EP
European Patent Office
Prior art keywords
pump
gas
vacuum pump
stage
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02005166A
Other languages
German (de)
English (en)
Other versions
EP1243796B1 (fr
EP1243796A3 (fr
Inventor
Wolfgang Eberl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1243796A2 publication Critical patent/EP1243796A2/fr
Publication of EP1243796A3 publication Critical patent/EP1243796A3/fr
Application granted granted Critical
Publication of EP1243796B1 publication Critical patent/EP1243796B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts

Definitions

  • the invention relates to a vacuum pump for conveying gases and for generating of high vacuum according to the preamble of the first claim.
  • At least two vacuum pumps have been used to generate high vacuum different types and working methods combined to form a pumping station.
  • pumping stations consisting of a turbomolecular pump have proven successful as a high vacuum pump and a rotary vane pump, which against Ejects atmospheric pressure.
  • Pumping stations consisting of at least two vacuum pumps, which are used to achieve the required vacuum parameters, such as Pressure ratio and pumping speed, are necessary, have the disadvantage that they are complex and take up a lot of space. Every pump requires one own drive system with power supply, monitoring and control as well its own storage system. Connection lines between the pumps with valves and control devices increase the effort.
  • the invention has for its object to develop a vacuum pump which covers the entire pressure range from atmospheric pressure to high vacuum pressure of approximately 10 -4 mbar and less.
  • the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations which consist of several pumps, are avoided. Furthermore, it should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use.
  • a reliable and safe mode of operation is one of the basic requirements.
  • Another goal is lubricant-free operation on the high vacuum side.
  • a vacuum pump is presented, which in compact design the entire pressure range from atmospheric pressure to High vacuum area covers. Due to the parallel arrangement of the gas friction pumps on the high vacuum side, a double-flow suction area is formed, the one enables high pumping speed. This is sucked in within the gas friction pump Gas compresses sufficiently so that the subsequent pump only has one flow needs to be. This combination along with the characteristic that the two Gas flows of the gas friction pump merged within this and the Intake chamber are fed to the subsequent stage, which enables the compact Construction and significantly reduces the size and design effort.
  • the present arrangement allows the shaft bearings on both Attaching ends of the rotor results in a stable bearing, with the bearing small diameter can be used, which is a problem Allow operation at high speeds.
  • the bearings are powered by the gas friction pump separated from the high vacuum side, which has the advantage that the high vacuum side can be considered lubricant-free.
  • the structural arrangement and the mode of operation offer the gas friction pump as Train Holweck pump. This is particularly suitable in a confined space to develop a maximum pressure ratio. Due to the double flow arrangement reaches the required pumping speed.
  • a side channel pump is advantageously used for the subsequent pump. This is particularly suitable for that of the parallel gas friction pumps compress the expelled gas to atmospheric pressure. If there is a large amount of gas, bypassing the last stages facing atmospheric pressure, an intermediate stage directly connected to the gas discharge flange via a connecting line become. The large amounts of gas then do not have to go through the geometric Smaller sized amplifiers are pumped, which leads to long pumping times Episode. With smaller amounts of gas, the connecting line is replaced by a pressure relief valve closed and the compression up to atmospheric pressure takes place over the last pump stages. This measure is not based on the example here a side channel pump, but can be limited to all others, after higher Pressures emitting multi-stage pumps can be applied.
  • a big advantage for the side channel pump is that its stator elements are made of undivided washers, as mentioned in claim 5.
  • This crucial one The disadvantage of side channel pumps is one-piece by the inventive Stator disks avoided.
  • the use of undivided stator elements is only possible, however, if the rotor elements, as described in claim 6, with Clamping rings are attached to the rotor, because only in this way can rotor and stator elements assembled one after the other and optimal axial clearances are observed.
  • the pump housing 1 with intake flange 2 and gas discharge flange 3 are the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 housed.
  • the rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is in the centered two bearings 9a and 9b.
  • the bearing 9a is in the area of Atmospheric pressure and the bearing 9b in the area of the fore-vacuum pressure.
  • the drive arrangement 5 is also located in the area.
  • the rotor elements of the double-flow Holweck pump consist of a support ring 10, on which cylindrical Components 11a and 11b for the two parallel pump stages are housed. Together with the stator elements 12a and 12b, which are designed as spiral grooves surround the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweckpumpen.
  • the side channel pump consists of the one-piece rotor disks 13, which with Clamping rings 14 are attached to the rotor 4.
  • the stator components are located in between 15 with the delivery channels 16.
  • the gas is pumped according to the arrows in the illustration.
  • the gas is pumped from the suction area 22 through the parallel Holweck stages 6 and 7, each consisting of two pump stages connected in series 11a / 12a and 11b / 12b exist in the discharge areas 23 and 24 promoted.
  • the gas flows merged into the discharge space 25 of the gas friction pump.
  • the gas flow passes from the discharge space 25 into the intake space 27 of the side channel pump.
  • the gas is pumped in several stages, which are connected to one another via channels 20, compressed to atmospheric pressure and supplied to the gas discharge flange 3 via the discharge chamber 29. From one An intermediate stage 30 of the side channel pump introduces a connecting line 30 Pressure relief valve 31 directly to the gas discharge flange 3.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP02005166A 2001-03-24 2002-03-08 Pompe à vide Expired - Lifetime EP1243796B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10114585 2001-03-24
DE10114585A DE10114585A1 (de) 2001-03-24 2001-03-24 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1243796A2 true EP1243796A2 (fr) 2002-09-25
EP1243796A3 EP1243796A3 (fr) 2003-08-27
EP1243796B1 EP1243796B1 (fr) 2006-11-08

Family

ID=7678927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02005166A Expired - Lifetime EP1243796B1 (fr) 2001-03-24 2002-03-08 Pompe à vide

Country Status (4)

Country Link
US (1) US6676384B2 (fr)
EP (1) EP1243796B1 (fr)
JP (1) JP2002310092A (fr)
DE (2) DE10114585A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2886870A1 (fr) * 2013-12-18 2015-06-24 Pfeiffer Vacuum GmbH Pompe à vide avec géométrie d'admission perfectionnée

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102009056218A1 (de) * 2009-11-28 2011-06-01 Robert Bosch Gmbh Schraubenspindelpumpe mit integriertem Druckbegrenzungsventil
US20150377239A1 (en) * 2013-02-15 2015-12-31 Edwards Limited Vacuum pump
GB2592030B (en) * 2020-02-12 2022-03-09 Edwards Ltd Multiple stage vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
US4183719A (en) * 1976-05-13 1980-01-15 Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) Composite impeller wheel with improved centering of one component on the other
DE3442843A1 (de) * 1983-11-30 1985-06-05 Hitachi, Ltd., Tokio/Tokyo Vakuumpumpe
US5040949A (en) * 1989-06-05 1991-08-20 Alcatel Cit Two stage dry primary pump
EP1067290A2 (fr) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Pompe à vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
DE19942410A1 (de) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
US4183719A (en) * 1976-05-13 1980-01-15 Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) Composite impeller wheel with improved centering of one component on the other
DE3442843A1 (de) * 1983-11-30 1985-06-05 Hitachi, Ltd., Tokio/Tokyo Vakuumpumpe
US5040949A (en) * 1989-06-05 1991-08-20 Alcatel Cit Two stage dry primary pump
EP1067290A2 (fr) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Pompe à vide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2886870A1 (fr) * 2013-12-18 2015-06-24 Pfeiffer Vacuum GmbH Pompe à vide avec géométrie d'admission perfectionnée
EP2886870B1 (fr) 2013-12-18 2017-12-20 Pfeiffer Vacuum GmbH Pompe à vide avec géométrie d'admission perfectionnée

Also Published As

Publication number Publication date
DE50208630D1 (de) 2006-12-21
US20020136643A1 (en) 2002-09-26
US6676384B2 (en) 2004-01-13
DE10114585A1 (de) 2002-09-26
EP1243796B1 (fr) 2006-11-08
EP1243796A3 (fr) 2003-08-27
JP2002310092A (ja) 2002-10-23

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