EP1081387B1 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP1081387B1 EP1081387B1 EP00117868A EP00117868A EP1081387B1 EP 1081387 B1 EP1081387 B1 EP 1081387B1 EP 00117868 A EP00117868 A EP 00117868A EP 00117868 A EP00117868 A EP 00117868A EP 1081387 B1 EP1081387 B1 EP 1081387B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- gas
- parallel
- vacuum
- units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
- At least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum.
- Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint.
- Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
- Turbomolecular pumps are particularly suitable for generating high and ultra-high vacuum for use in wide areas of technology.
- their field of use is limited to higher pressures because they are fully effective only at low pressures to about 10 -3 mbar due to their operation.
- the D1 ( DE-A-198 48 406 ) teaches a favorable design for a parallel-working Gaedepumpe.
- the rotor is constructed from a cylinder, on which a plurality of radially or axially protruding ribs are arranged, which circulate in a channel which has a vapor barrier.
- the D2 ( US-A-5,238,362 ) deals with a built-up of turbomolecular pumping stage and side channel pumping vacuum pump. It is taught to arrange the side channel pumping stage in a self-contained housing, which is then installed in the housing of the vacuum pump.
- turbomolecular pumping stage or another molecular pumping stage can not be completed without vacuum technology.
- the compression of a turbomolecular pumping stage decreases after higher pressure and the compression of a side channel pumping stage decreases with lower pressure.
- the work areas of both pumps practically do not overlap.
- the invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to the high and ultra-high vacuum range.
- the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. Reliable and safe operation is one of the basic requirements.
- the arrangement according to the invention makes it possible by the parallel connection of Gaedepumpgen to present a compact vacuum pump, which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range.
- a compact vacuum pump which is adapted to cover the entire pressure range from atmospheric pressure to the high or ultra-high vacuum range.
- the suction capacity present at the intake opening can be optimally utilized over the entire pressure range, since the pressure compatibility can be designed in such a way that that of the respective preceding pumping unit or unit can be designed level of delivered gas from the next pump unit or stage is taken without loss.
- the illustrated vacuum pump houses in a housing 1 three pumping units 14, 16, 18.
- the housing is provided with a gas inlet opening 2 and a gas outlet opening 4.
- the pump units consist of rotating and fixed gas-conveying components.
- the rotating components are mounted on a shaft 6 in the axial direction one behind the other.
- To operate the shaft includes a drive system 8 and bearing elements 10 and 12.
- the fixed components are connected to the housing 1.
- the gas inlet opening facing pump unit 14 is formed as a turbomolecular pump.
- the following in the direction of gas flow pump unit 16 consists of several subunits 16a, 16b and 16c. These each have one or more molecular pumping stages according to the type of Gaede, hereinafter called Gaedeschen on. Within the subunits, the Gaedeschen are connected in parallel. This means that connecting elements 34a for the subunit 16a or 34b for the subunit 16b combine the input sides and on the other side the output sides of the Gaedeschen so that a parallel gas flow in the individual subunits is made possible.
- the subunit 16a consists of four parallel-pumping Gaedeculturen, the subunit 16b of two parallel pumping Gaedeschen and the subunit 16c of two individual, connected in series Gaedeschen.
- the subunits are interconnected by connecting members 36a, 36b and 36c so that the output side of one subunit is connected to the input side of the following subunit, respectively.
- the gas outlet opening facing pump unit is designed as a multi-stage side channel pump.
- the pumping units 14 and 16 are connected via connecting channels 32 and the pumping units 16 and 18 via connecting channels 38 in series such as the subunits 16a, 16b, 16c. Via a line 42, the pump unit 18 is connected to the gas outlet.
- the amount of gas sucked in via the gas inlet opening 2 on the high-vacuum side is compressed by the turbomolecular pump unit 14 and carried on via the connecting lines 32 to the second pump unit 16.
- the first sub-unit 16a consists of four Gaedeschen that take over the further promotion in parallel operation. The fact that several Gaedeschen are connected in parallel, the entire, funded by the turbomolecular pump and compressed gas quantity can be recorded. In the subunit 16a, the gas quantity is further compressed, so that for the second subunit 16b two parallel Gaedeschen are sufficient to further promote the total amount of gas and further compressing until finally a Gaedeici sufficient as a subunit 16c for the promotion. The side channel pump following the last gas stage can now continue to deliver the gas without loss and compress it to high pressure.
- the combination of the pump units can vary depending on the application and vacuum technical requirements. Thus, for some applications, only a combination of a turbomolecular pump with the pumping unit 16, consisting of Gaesterunn be sufficient. For other applications, a combination of Gaesterunn and side channel pump can meet the requirements.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electrophonic Musical Instruments (AREA)
Claims (3)
- Pompe à vide comprenant plusieurs unités de pompage (14, 16, 18) logées dans un corps de pompe (1) doté d'une ouverture (2) d'admission des gaz et d'une ouverture (4) de sortie des gaz, dans laquelle lesdites unités de pompage sont composées d'éléments rotatifs et d'éléments fixes de transport des gaz, les éléments rotatifs étant montés sur un arbre (6) équipé d'un dispositif d'entraînement (8) et de paliers (10, 12) et les éléments fixes étant liés au corps de pompe (1), et dans laquelle au moins une des unités de pompage (16) est constituée de plusieurs étages de pompe moléculaire du type de Gaede connectés en parallèle, lesdits étages étant agencés successivement dans la direction axiale et reliés entre eux, par le biais de canaux de liaison (34) communs, de telle sorte qu'ils assurent un transport en parallèle, caractérisée en ce que plusieurs unités secondaires (16a, 16b, 16c) constituées d'un ou de plusieurs étages de pompe du type de Gaede, sont connectées en série.
- Pompe à vide selon la revendication 1, caractérisée en ce que l'unité de pompage située en regard de l'ouverture (2) d'admission des gaz est une pompe turbomoléculaire.
- Pompe à vide selon la revendication 1 ou 2, caractérisée en ce que l'unité de pompage située en regard de l'ouverture (4) de sortie des gaz est une pompe à canal latéral.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19942410 | 1999-09-06 | ||
DE19942410A DE19942410A1 (de) | 1999-09-06 | 1999-09-06 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1081387A2 EP1081387A2 (fr) | 2001-03-07 |
EP1081387A3 EP1081387A3 (fr) | 2002-04-17 |
EP1081387B1 true EP1081387B1 (fr) | 2009-03-18 |
Family
ID=7920926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00117868A Expired - Lifetime EP1081387B1 (fr) | 1999-09-06 | 2000-08-19 | Pompe à vide |
Country Status (5)
Country | Link |
---|---|
US (1) | US6464451B1 (fr) |
EP (1) | EP1081387B1 (fr) |
JP (1) | JP2001090690A (fr) |
AT (1) | ATE426098T1 (fr) |
DE (2) | DE19942410A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10114585A1 (de) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US7171786B2 (en) * | 2003-12-01 | 2007-02-06 | Tapco International Corporation | Window well |
WO2007146882A1 (fr) * | 2006-06-12 | 2007-12-21 | Mag Aerospace Industries, Inc. | Pompe à vide régénérative pour avion et autres véhicules |
GB0618745D0 (en) † | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
WO2009142905A1 (fr) | 2008-05-20 | 2009-11-26 | Sundew Technologies, Llc | Procédé et appareil de déposition |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1809902C3 (de) * | 1968-11-20 | 1973-11-15 | Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar | Mehrstufige Turbo Molekularhoch vakuumpumpe |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
DE2354046A1 (de) * | 1973-10-29 | 1975-05-07 | Battelle Institut E V | Elektrisch angetriebene turbomolekularvakuumpumpe |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
DE4331589C2 (de) * | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
CN1115362A (zh) * | 1994-07-06 | 1996-01-24 | 储继国 | 多拖动面分子泵 |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
GB2333127A (en) * | 1997-10-21 | 1999-07-14 | Varian Associates | Molecular drag compressors having finned rotor construction |
-
1999
- 1999-09-06 DE DE19942410A patent/DE19942410A1/de not_active Withdrawn
-
2000
- 2000-08-19 DE DE50015596T patent/DE50015596D1/de not_active Expired - Lifetime
- 2000-08-19 EP EP00117868A patent/EP1081387B1/fr not_active Expired - Lifetime
- 2000-08-19 AT AT00117868T patent/ATE426098T1/de not_active IP Right Cessation
- 2000-09-05 JP JP2000268621A patent/JP2001090690A/ja active Pending
- 2000-09-06 US US09/655,981 patent/US6464451B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE50015596D1 (de) | 2009-04-30 |
EP1081387A2 (fr) | 2001-03-07 |
US6464451B1 (en) | 2002-10-15 |
ATE426098T1 (de) | 2009-04-15 |
EP1081387A3 (fr) | 2002-04-17 |
JP2001090690A (ja) | 2001-04-03 |
DE19942410A1 (de) | 2001-03-08 |
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