EP3636879A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3636879A1
EP3636879A1 EP19210270.5A EP19210270A EP3636879A1 EP 3636879 A1 EP3636879 A1 EP 3636879A1 EP 19210270 A EP19210270 A EP 19210270A EP 3636879 A1 EP3636879 A1 EP 3636879A1
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum pump
channel
channel section
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19210270.5A
Other languages
German (de)
English (en)
Other versions
EP3636879B1 (fr
Inventor
Sebastian Oberbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19210270.5A priority Critical patent/EP3636879B1/fr
Publication of EP3636879A1 publication Critical patent/EP3636879A1/fr
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/13—Noise

Definitions

  • the present invention relates to a vacuum pump comprising: a pump chamber in which a gas to be pumped can be pumped from an inlet to an outlet by means of a pump body; a first channel, which opens into the pump chamber, for supplying a ballast gas into the pump chamber, and a second channel, which opens into the pump chamber, for supplying a further gas, in particular different from the gas to be conveyed, into the pump chamber.
  • a noise damping device is provided, through which air with atmospheric pressure is led to the pump chamber of the pump via a channel which contains a constriction, in particular a nozzle, for regulating the volume flow.
  • Another channel also carries air or gas as gas ballast, e.g. to increase the water vapor capacity, in the pump room.
  • the pump according to the invention operates quieter in certain operating states. This is explained by the fact that the ballast gas can escape through the second channel if the pressure of the ballast gas is too high. This prevents an undesirable overpressure in the pump room.
  • the channels have a common channel section. This further simplifies production, since further drilling operations can be saved.
  • the common channel section can comprise, for example, an outlet channel section which is arranged, for example, transversely, in particular perpendicularly, to at least one of its own channel section of one of the channels and / or to another section of the common channel section, in particular a longer section or a main section.
  • the mouth channel section can be defined, for example, by a bore, in particular the other section of the common channel section being defined by a bore running transversely to this bore.
  • the mouth channel section can generally run, for example, at least substantially parallel to an axis of rotation of the pump body.
  • a separate channel section of at least one of the channels and the common channel section each run at least partially at least substantially in one plane.
  • both channels can have their own channel section, in particular with their own channel sections at least partially running at least essentially in one plane.
  • Both the own channel sections and the common channel section preferably run at least partially at least essentially in one plane.
  • the channel sections in each of the combinations shown, in particular, at least insofar as they are defined in a common component, run completely in one plane.
  • At least one channel section in particular at least one dedicated channel section and / or a common channel section, can preferably run transversely, in particular perpendicularly, to a rotor axis of the pump body. This represents a particularly space-saving solution in terms of installation space.
  • first channel and / or the second channel can be defined at least in sections by a bore.
  • a separate channel section of one of the channels is defined by a bore.
  • the common channel section can also be at least partially defined by this bore. This can further simplify production.
  • the first channel can preferably be defined by the bore which defines the common channel section.
  • a separate channel section of the other channel can, for example, open into the bore, in particular the one that defines the common channel section.
  • the own channel section of the other channel itself can be defined by a bore which runs, for example, transverse to the bore of the common channel section.
  • the common mouth can be defined in a structural component, a housing component, a component which carries a bearing element for the pump body, and / or in a component which axially and / or radially delimits the pump chamber with respect to an axis of rotation of the pump body.
  • the component in which the mouth is defined can also meet several or all of these characteristics.
  • the component can be a so-called bearing plate.
  • At least one channel section defines in a structural component, a housing component, a component that carries a bearing element for the pump body, and / or in a component that axially and / or radially delimits the pump chamber with respect to an axis of rotation of the pump body is.
  • a separate channel section of the first channel, a separate channel section of the second channel and / or a common channel section can be defined in the component.
  • At least one of the channels in particular in or on its own channel section, can have a valve for controlling the gas inlet into the channel.
  • a gas ballast valve can be provided for the first channel.
  • the second channel can preferably be provided for admitting the additional gas for the purpose of noise reduction.
  • the further gas can be, for example, air, in particular ambient air and / or atmospheric pressure.
  • At least one of the channels, in particular of the second channel has a constriction and / or a nozzle on or in its own channel section.
  • the vacuum pump can be, for example, a rotary displacement vacuum pump.
  • the vacuum pump is particularly preferably a rotary vane vacuum pump, preferably an oil-lubricated rotary vane vacuum pump.
  • the pump body can be formed by a rotor shaft and in particular at least one rotary slide valve.
  • the vacuum pump can be single-stage or multi-stage, for example two-stage.
  • ballast gas can be provided as ballast gas.
  • additional gas generally referred to here as ballast gas, as entraining gas, purge gas or sealing gas.
  • ballast gas in the form of an inert barrier gas is introduced into the pump chamber in order to protect sensitive components of the vacuum pump.
  • the ballast gas can also be used for cooling, for example when the vacuum pump heats up due to a shift in the operating point.
  • trailing gas is introduced in order to be able to pump particularly light gases such as hydrogen or helium better.
  • Towing gas can also be used to prevent unwanted accumulations, e.g.
  • ballast gas can be introduced as the purge gas in order to prevent condensation of, in particular corrosive, gases in the pump chamber.
  • nitrogen can be used as ballast gas for this application.
  • Passive addition for example to an ignitable gas concentration to avoid, which can result from a compression of the medium during the pumping process in different places in the pump system.
  • the pumped medium is changed to a more harmless type in the case of an “active addition”, it being possible, for example, to add and remove corrosive or otherwise harmful components of the pumped medium by adding suitable reactants or catalysts.
  • the supply of ballast gas into the pump chamber is controlled, for example, by a valve, the inlet opening of which is connected to a ballast gas container by means of a connecting hose and the outlet opening of which is connected to the pump chamber.
  • the common mouth is preferably arranged in a region of the pump chamber in which there is a higher pressure during operation than at the inlet.
  • the common mouth can be arranged in a region of the pump chamber with a pressure between 50 and 300 mbar during operation.
  • the invention also relates to a system comprising a vacuum pump of the type described above, a ballast gas supply device being connected to the first channel and an air inlet being provided or connected to the second channel.
  • a vacuum pump of the type described above a ballast gas supply device being connected to the first channel and an air inlet being provided or connected to the second channel.
  • This system is disclosed here, for example, for later use. It goes without saying that the system can advantageously be developed further in the sense of the features and embodiments described here with regard to the vacuum pump.
  • FIG. 1 A vacuum pump 10 is shown in a side view.
  • the vacuum pump 10 is designed as a rotary vane vacuum pump and is designed to move a gas to be pumped from an inlet 12 to an in Fig. 1 to promote outlet not shown.
  • the vacuum pump 10 comprises a housing component 14 in which the pump-active components of the pump are accommodated.
  • Fig. 2 shows a sectional view of the vacuum pump 10 with a sectional plane in the region of the inlet 12.
  • a rotor shaft 16 with rotatably mounted slide valves 18 which are provided for rotation in a pump chamber 20 and which, when the rotor shaft 16 rotates, convey the gas to be conveyed from the inlet 12 to an outlet 22.
  • the section of the rotor shaft 16 arranged in the pump chamber 20 forms, together with the rotary valves 18, a pump body of the pump 10.
  • FIG. 3 The vacuum pump 10 is shown in a sectional view, the sectional plane in FIG Fig. 1 is indicated by the line AA.
  • the rotor shaft 16 is visible, as it is mounted in the housing component 14.
  • the sectional plane runs through a wall 21 of the housing component 14 that axially delimits the pump chamber 20, for which reason the pump chamber 20 is not visible here.
  • the rotor shaft 16 is mounted on this wall 21 by means of a bearing element 23, here a plain bearing.
  • the vacuum pump 10 comprises a gas ballast valve 24, which is provided for connection to a ballast gas supply device (not shown), for example a ballast gas container.
  • the vacuum pump 10 comprises a connection 26 for admitting air, preferably for the purpose of noise reduction. Both the ballast gas and the air for noise reduction are supplied to the pump chamber 20.
  • a first and a second channel are provided, namely in each case from the gas ballast valve 24 or from the connection 26 to the pump chamber 20.
  • the channels have a common opening 28 into the pump chamber 20.
  • the first channel runs from the gas ballast valve 24 to the mouth 28 and comprises its own channel section 30 and a common channel section 32.
  • the second channel runs from the connection 26 to the mouth 28 and comprises its own channel section 34 and the common channel section 32.
  • all the channel sections are designed as bores which are introduced into the housing component 14 or into the wall 21 which axially delimits the pump chamber 20.
  • the own channel section 30 of the first channel and the common channel section 32 are hereby formed in the same bore, a first longitudinal section of the bore forming the channel section 30 and a second longitudinal section of the bore forming the channel section 32.
  • the own channel section 34 of the second channel is designed as a further bore which runs transversely to the first bore and opens into it.
  • the two bores lie in a plane that runs perpendicular to the axis of rotation of the rotor shaft 16.
  • the Fig. 4 shows a further sectional view of the vacuum pump 10 of FIG Fig. 1 , the cutting plane along an in Fig. 1 indicated line BB runs.
  • a cross section of the common channel section 32 and the common mouth 28 visible in the pump chamber 20.
  • the mouth 28 is connected to the common channel section 32 via a mouth channel section 36, which is also designed as a bore.
  • the mouth channel section 36 runs transversely to the common channel section 32 and here in particular parallel to the rotor shaft 16.
  • the wall 21 axially delimiting the pump chamber 20 is formed in one piece with the housing component 14.
  • a separate version would also be possible.
  • the common mouth 28 and the own and common channel sections 30, 32, 34 are consequently defined in a component which axially delimits the pump chamber 20, namely in the housing component 14.
  • a position of the mouth would also be radial Arrangement conceivable, in particular in the cylinder wall of the housing part 14 which radially delimits the pump chamber 20.
  • the position and shape of the channel sections 32 and 36 and the mouth 28 could be different than shown.
  • the mouth would then not run parallel to the axis of rotation and / or not axially to the channel section 36, but in particular at right angles to the axis of rotation and / or at a suitable angle to the channel section 36.
  • the solution shown ultimately integrates the ducting and spraying of the noise damping into the gas ballast duct (or vice versa). This means that fewer holes have to be drilled on the pump. The pump becomes more compact and less expensive to manufacture. In contrast to other pumps of similar construction, which have a higher noise level when the gas ballast is open, the noise level can even decrease in the described invention when the gas ballast is open.
  • the pump 10 shown in the figures can also include further channel sections, for example for similar or other purposes, which can be formed, for example, in the housing component 14 and / or other housing components.
  • the pump 10 on which the drawings are based has further channel sections which are hidden in the figures for the sake of clarity.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP19210270.5A 2019-11-20 2019-11-20 Pompe à vide Active EP3636879B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19210270.5A EP3636879B1 (fr) 2019-11-20 2019-11-20 Pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19210270.5A EP3636879B1 (fr) 2019-11-20 2019-11-20 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3636879A1 true EP3636879A1 (fr) 2020-04-15
EP3636879B1 EP3636879B1 (fr) 2022-01-05

Family

ID=68621142

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19210270.5A Active EP3636879B1 (fr) 2019-11-20 2019-11-20 Pompe à vide

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EP (1) EP3636879B1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH353117A (de) * 1956-03-12 1961-03-31 Leybolds Nachfolger E Rotierende Gasballastpumpe
US7186098B2 (en) * 2002-03-22 2007-03-06 Oerlikon Leybold Vacuum Gmbh Eccentric pump and method for operation of said pump
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
EP3483448A1 (fr) * 2017-11-13 2019-05-15 Pfeiffer Vacuum Gmbh Pompe à vide pourvue de soupape de gaz de ballast

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE951884C (de) 1953-12-23 1956-11-08 Leybold S Nachfolger E Vakuumpumpe
US3301474A (en) 1965-09-24 1967-01-31 Bendix Balzers Vacuum Inc Oil sealed mechanical rotary vacuum pump
DE2401177A1 (de) 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Vorrichtung zur geraeuschdaempfung bei drehschieberpumpen
US4268230A (en) 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
IT201700115881A1 (it) 2017-10-13 2019-04-13 D V P Vacuum Tech S P A Pompa per il vuoto lubrificata
CN109915377B (zh) 2019-04-16 2021-03-09 成都中科唯实仪器有限责任公司 一种双级旋片式真空泵

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH353117A (de) * 1956-03-12 1961-03-31 Leybolds Nachfolger E Rotierende Gasballastpumpe
US7186098B2 (en) * 2002-03-22 2007-03-06 Oerlikon Leybold Vacuum Gmbh Eccentric pump and method for operation of said pump
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
EP3483448A1 (fr) * 2017-11-13 2019-05-15 Pfeiffer Vacuum Gmbh Pompe à vide pourvue de soupape de gaz de ballast

Also Published As

Publication number Publication date
EP3636879B1 (fr) 2022-01-05

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