EP1243796B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1243796B1
EP1243796B1 EP02005166A EP02005166A EP1243796B1 EP 1243796 B1 EP1243796 B1 EP 1243796B1 EP 02005166 A EP02005166 A EP 02005166A EP 02005166 A EP02005166 A EP 02005166A EP 1243796 B1 EP1243796 B1 EP 1243796B1
Authority
EP
European Patent Office
Prior art keywords
pump
gas
vacuum pump
connected downstream
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02005166A
Other languages
German (de)
English (en)
Other versions
EP1243796A3 (fr
EP1243796A2 (fr
Inventor
Wolfgang Eberl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1243796A2 publication Critical patent/EP1243796A2/fr
Publication of EP1243796A3 publication Critical patent/EP1243796A3/fr
Application granted granted Critical
Publication of EP1243796B1 publication Critical patent/EP1243796B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts

Definitions

  • the invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
  • At least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum.
  • Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint.
  • Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
  • EP-A-1 067 290 shows a generic vacuum pump which compresses to atmospheric pressure and consists of two single or multi-stage gas friction pumps.
  • US Pat. No. 4,090,815 shows a combined vacuum pump comprising a plurality of pump stages which operate on the Siegbahn, Holweck and rotary valve principle. All pump stages are arranged serially one behind the other. An overflow valve is not shown.
  • US-A-5 040 949 shows a screw vacuum pump with a serial gas flow which is compressed by intermeshing rotors.
  • the compressed gas is recompressed by a simple screw structure, which can be completely bypassed by a bypass with an overflow valve.
  • US-A-3 536 418 shows a pumping station constructed of several individual vacuum pumps. An overflow valve is not shown.
  • DE 34 42 843 A shows a double-flow vacuum pump, wherein in each of the parallel flow paths a plurality of pumps with different operating principle are combined in such a way that higher outlet pressures are achieved. An overflow valve completely bypasses the last pump before reaching atmospheric pressure.
  • the invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to high vacuum pressure of about 10 -4 mbar and less.
  • the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use.
  • a reliable one and safe operation is one of the basic requirements.
  • Another aim is a lubricant-free operation on the high vacuum side.
  • a vacuum pump which covers the entire pressure range from atmospheric pressure to the high-vacuum range in a compact design. Due to the parallel arrangement of the gas friction pumps on the high-vacuum side, a double-flow suction area is formed, which allows a high pumping speed. Within the gas friction pump, the sucked gas is sufficiently compressed, so that the subsequent pump only needs to be single-flow. This combination, together with the feature that the two gas flows of the gas friction pump are combined within this and fed to the suction chamber of the subsequent stage, allows the compact design and reduces the size and design complexity considerably.
  • the present arrangement makes it possible to mount the shaft bearings at both ends of the rotor, results in a stable storage, can be used in the bearings with a small diameter, which allow easy operation at high speeds.
  • the bearings are separated by the gas friction pump from the high vacuum side, which has the advantage that the high vacuum side can be considered as lubricant-free.
  • the structural arrangement and the mode of operation offer to train the gas friction pump as Holweckpumpe. This is particularly suitable for forming a maximum pressure ratio in a confined space. Due to the double-flow arrangement, the required pumping speed is achieved.
  • a side channel pump is used. This is particularly suitable for compressing the gas ejected from the parallel gas friction pumps to atmospheric pressure.
  • an intermediate stage be connected directly to the Gasausdorfflansch via a connecting line.
  • the large quantities of gas then do not have to be pumped through the geometrically smaller end stages, which would result in long pumping times.
  • the connecting line is closed by a pressure relief valve and the compression to atmospheric pressure via the last pump stages.
  • a major advantage for the side channel pump is that its stator elements consist of undivided disks, as mentioned in claim 5.
  • the usual design, in which split disks are mounted between the rotor disks, has the consequence that the resulting column backflows are possible, which represent losses and significantly reduce the pressure ratio.
  • This crucial disadvantage of side channel pumps is avoided by the one-piece stator discs according to the invention.
  • the use of undivided stator elements is only possible if the rotor elements, as described in claim 6, are fastened with clamping rings on the rotor, because only then rotor and stator elements can be mounted successively and optimal axial play can be maintained.
  • the gas friction pump is designed as Holweckpumpe and the subsequent pump as a side channel pump.
  • the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 are housed.
  • the rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is centered in the two bearings 9a and 9b. In this case, the bearing 9a is in the range of the atmospheric pressure and the bearing 9b in the region of the fore-vacuum pressure. In this area, there is also the drive assembly 5.
  • the rotor elements of the double-flow Holweckpumpe consist of a support ring 10, on which cylindrical Components 11a and 11b are housed for the two parallel pumping stages. Together with the stator elements 12a and 12b, which are formed as spiral grooves surrounding the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweckpumpen.
  • the side channel pump consists of the one-piece rotor discs 13, which are fastened with clamping rings 14 on the rotor 4. In between, there are the stator components 15 with the delivery channels 16.
  • the gas is conveyed according to the arrows in the figure.
  • the gas is supplied from the suction portion 22 through the parallel pumping Holweckmakern 6 and 7, which consist of two series-connected pumping stages 11a / 12a and 11b / 12b, in the discharge regions 23 and 24.
  • the gas streams are merged into the discharge space 25 of the gas friction pump.
  • the gas flow from the discharge space 25 into the suction chamber 27 of the side channel pump.
  • the gas in several pumping stages, which are connected to each other via channels 20, compressed to atmospheric pressure and fed via the discharge chamber 29 the Gasaussorbflansch 3.
  • a connecting line 30 leads via a pressure relief valve 31 directly to the gas discharge flange 3.

Claims (8)

  1. Pompe à vide comprenant deux pompes à gaz à friction (6) et (7) à un ou plusieurs étages et une pompe multi-étagée (8) placée en aval, dans laquelle les deux pompes à gaz à friction sont agencées en parallèle dans le sens de passage du gaz, de sorte que le flux de gaz admis est divisé, dans une zone d'admission (22), en deux flux partiels dont chacun est refoulé par la pompe à gaz à friction correspondante, de la zone d'admission (22) vers la zone d'éjection (23) ou (24) respectivement, les deux flux de gaz étant ensuite réunis par le biais d'éléments de liaison (26) dans une chambre d'éjection (25), celle-ci étant reliée au moyen de conduites (28) à la chambre d'admission (27) de la pompe (8) placée en aval qui poursuit ainsi la compression du gaz, caractérisée en ce qu'une conduite de liaison (30) va d'un étage intermédiaire de la pompe (8) placée en aval jusqu'à une bride d'éjection de gaz (3) et en ce que dans la conduite de liaison (30), il est agencé une soupape de surpression (31).
  2. Pompe à vide selon la revendication 1, caractérisée en ce que la pompe (8) placée en aval refoule le gaz vers une chambre d'éjection supplémentaire (29).
  3. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que les deux pompes à gaz à friction (6) et (7) sont des pompes du type de Holweck.
  4. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que les éléments de liaison (26) sont des alésages axiaux pratiqués à l'intérieur des pompes à gaz à friction (6) et (7).
  5. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la pompe (8) placée en aval est une pompe à canal latéral.
  6. Pompe à vide selon la revendication 5, caractérisée en ce que les éléments de stator (15) de la pompe à canal latéral sont constitués de disques non divisés.
  7. Pompe à vide selon l'une quelconque des revendications 5 ou 6, caractérisée en ce que les éléments de rotor (13) de la pompe à canal latéral sont fixés sur l'arbre de rotor (4) au moyen de bagues de serrage (14).
  8. Pompe à vide du type pompe à canal latéral comportant plusieurs étages de refoulement et de compression de gaz jusqu'à la pression atmosphérique, caractérisée en ce qu'une conduite de liaison (30) va d'un étage intermédiaire jusqu'à la bride d'éjection de gaz (3), en contournant le dernier étage situé du côté de la pression atmosphérique, et en ce que dans la conduite de liaison (30), il est agencé une soupape de surpression (31).
EP02005166A 2001-03-24 2002-03-08 Pompe à vide Expired - Lifetime EP1243796B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10114585A DE10114585A1 (de) 2001-03-24 2001-03-24 Vakuumpumpe
DE10114585 2001-03-24

Publications (3)

Publication Number Publication Date
EP1243796A2 EP1243796A2 (fr) 2002-09-25
EP1243796A3 EP1243796A3 (fr) 2003-08-27
EP1243796B1 true EP1243796B1 (fr) 2006-11-08

Family

ID=7678927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02005166A Expired - Lifetime EP1243796B1 (fr) 2001-03-24 2002-03-08 Pompe à vide

Country Status (4)

Country Link
US (1) US6676384B2 (fr)
EP (1) EP1243796B1 (fr)
JP (1) JP2002310092A (fr)
DE (2) DE10114585A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system
WO2009142905A1 (fr) * 2008-05-20 2009-11-26 Sundew Technologies, Llc Procédé et appareil de déposition
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102009056218A1 (de) * 2009-11-28 2011-06-01 Robert Bosch Gmbh Schraubenspindelpumpe mit integriertem Druckbegrenzungsventil
US20150377239A1 (en) * 2013-02-15 2015-12-31 Edwards Limited Vacuum pump
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2592030B (en) * 2020-02-12 2022-03-09 Edwards Ltd Multiple stage vacuum pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067290A2 (fr) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Pompe à vide

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
JPS5267810A (en) * 1975-12-03 1977-06-04 Aisin Seiki Co Ltd High vacuum pump
DE2621201C3 (de) * 1976-05-13 1979-09-27 Maschinenfabrik Augsburg-Nuernberg Ag, 8900 Augsburg Laufrad für eine Strömungsmaschine
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
DE19942410A1 (de) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067290A2 (fr) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Pompe à vide

Also Published As

Publication number Publication date
US6676384B2 (en) 2004-01-13
EP1243796A3 (fr) 2003-08-27
EP1243796A2 (fr) 2002-09-25
DE10114585A1 (de) 2002-09-26
DE50208630D1 (de) 2006-12-21
US20020136643A1 (en) 2002-09-26
JP2002310092A (ja) 2002-10-23

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