EP1128069B1 - Pompe à effet visqueux - Google Patents

Pompe à effet visqueux Download PDF

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Publication number
EP1128069B1
EP1128069B1 EP01102552.5A EP01102552A EP1128069B1 EP 1128069 B1 EP1128069 B1 EP 1128069B1 EP 01102552 A EP01102552 A EP 01102552A EP 1128069 B1 EP1128069 B1 EP 1128069B1
Authority
EP
European Patent Office
Prior art keywords
pump
gas
components
rotor
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01102552.5A
Other languages
German (de)
English (en)
Other versions
EP1128069A3 (fr
EP1128069A2 (fr
Inventor
Armin Conrad
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1128069A2 publication Critical patent/EP1128069A2/fr
Publication of EP1128069A3 publication Critical patent/EP1128069A3/fr
Application granted granted Critical
Publication of EP1128069B1 publication Critical patent/EP1128069B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • gas friction pumps of various types are known. Their mode of operation is based on the transmission of impulses from moving walls to the gas particles. In this way, a gas flow is generated in the desired direction.
  • Gas friction pumps which operate in a pressure range in which the mean free path of the gas molecules is large compared to the geometrical dimensions of the pump, ie in the molecular flow area, are called molecular pumps.
  • the first gas friction pump of this type was presented by Gaede [1], further technical modifications while retaining the basic principle are designs of Siegbahn [2], Holweck [3] and Becker [4].
  • the latter is known as a turbomolecular pump and has proven successful in many areas of technology and science with great success. It is therefore used as an example for the description of the present invention.
  • the pumping speed of a turbomolecular pump is essentially dependent on the inlet cross-section of the suction flange, on the average circumferential speed of the space to be pumped facing the rotor blade ring and its geometric structure, beyond the internal structure of the pump through which determines the gradation of pressure ratio and pumping speed between the individual stages is, and not least of that part of the pump or the pump combination, which expels against atmospheric pressure.
  • the WO 97/15760 shows a vacuum pump with alternately arranged bladed rotor and stator discs. Relative to the rotor longitudinal axis is located at mid-height of the rotor-stator packet, an intermediate inlet, can enter through the gas in the vacuum pump.
  • the longitudinal axes of the blades on rotor and stator disks are in the disk plane.
  • the invention has for its object to present a gas friction pump, which has a significantly higher pumping capacity over the conventional constructions with constant cross section of the intake.
  • an additional pump unit which may consist of one or more stages, designed so that outside of the pump housing takes place in addition to the axial promotion and promotion in the radial direction.
  • a promotion only in the radial direction is possible according to the features of the first claim. This ensures that the pumping speed of the pump is no longer limited by the cross section of the intake flange.
  • the entire area provided with gas-promoting structure, which captures the molecules, is significantly enlarged and provided with a radial conveying component.
  • Fig. 1 shows a gas friction pump with the housing 1, which is provided with a suction port 2 and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the rotor disks 12 are fixed. These are provided with a pump-active structure and effect with the stator discs 14, which are also provided with a pump-active structure, the pumping effect.
  • a pump unit 20 is mounted according to the invention. This is carried out in one step in the present example.
  • Fig. 1 a is a section along the line A / A-
  • Fig. 1b a section along the line B / B
  • Fig. 1c a perspective view shown.
  • the rotor components 21 and the stator components 22 of this additional pumping unit each consist of an end-face disk-shaped section 23, 24 and cylindrical sections 25, 26.
  • the pump-active structure 23a, 24a of the end-side disk-shaped section is modeled on the structure of corresponding components in turbomolecular pumps.
  • the pump-active structure 25a, 26a of the cylindrical portion 25, 26 corresponds to that of paddle wheels.
  • the rotor components 31 and stator components 32 of the additional pump unit 30 are designed in a conical design.
  • the pump-active structure of these components corresponds to a blade profile inclined in the conveying direction.
  • the additional pumping unit 40 shows rotor components 41 and stator components 42, each having a dome-shaped design.
  • the pump-active structure corresponds to a blade profile inclined in the conveying direction.
  • Fig. 4 an example is shown in which the additional pumping unit 20 is located within the housing 1. This is the example of embodiment 20 of the additional pumping unit Fig. 1 shown. Similarly, the embodiments 30 and 40 of the additional pumping unit in the Fig. 2 and 3 are inside the case.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (4)

  1. Pompe à gaz à friction, comprenant un boîtier (1) avec une ouverture d'aspiration (2) et une ouverture de sortie de gaz (3), des composants de rotor (12) et de stator (14) étant disposés dans le boîtier pour refouler des gaz et générer un rapport de pression, et du côté de l'ouverture d'aspiration (2) étant montée une unité de pompe (20, 30, 40) à un ou plusieurs étages, qui présente une structure de refoulement de gaz configurée de telle sorte qu'un refoulement de gaz dans la direction radiale se produise et que les composants de rotor (21, 31, 41) de cette unité de pompe et les composants de rotor (12) du reste de la pompe à gaz à friction se trouvent sur le même arbre de rotor (4), caractérisée en ce que les composants de rotor (21) et les composants de stator (22) de l'unité de pompe (20) se composent à chaque fois d'une portion active de pompe (23, 24) en forme de disque du côté frontal et d'une portion active de pompe cylindrique (25, 26), et en ce que les composants (23a, 24a) de la portion active de pompe du côté frontal reproduisent des composants correspondants dans des pompes turbomoléculaires et en ce que la structure active de pompe (25a, 26a) de la portion active de pompe cylindrique correspond à la structure de roues à aube.
  2. Pompe à gaz à friction selon la revendication 1, caractérisée en ce qu'un refoulement de gaz dans la direction axiale et radiale a lieu à travers l'unité de pompe (20, 30, 40).
  3. Pompe à gaz à friction selon la revendication 1 ou 2, caractérisée en c que l'unité de pompe (20, 30, 40) est montée complètement ou partiellement à l'extérieur du boîtier (1).
  4. Pompe à friction selon la revendication 1 ou 2, caractérisé en ce que l'unité de pompe (20, 30, 40) est montée complètement ou partiellement à l'intérieur du boîtier (1).
EP01102552.5A 2000-02-24 2001-02-06 Pompe à effet visqueux Expired - Lifetime EP1128069B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10008691 2000-02-24
DE10008691.8A DE10008691B4 (de) 2000-02-24 2000-02-24 Gasreibungspumpe

Publications (3)

Publication Number Publication Date
EP1128069A2 EP1128069A2 (fr) 2001-08-29
EP1128069A3 EP1128069A3 (fr) 2002-11-06
EP1128069B1 true EP1128069B1 (fr) 2016-03-30

Family

ID=7632258

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01102552.5A Expired - Lifetime EP1128069B1 (fr) 2000-02-24 2001-02-06 Pompe à effet visqueux

Country Status (4)

Country Link
US (1) US6524060B2 (fr)
EP (1) EP1128069B1 (fr)
JP (1) JP4907774B2 (fr)
DE (1) DE10008691B4 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
DE102009035812A1 (de) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpenrotor
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (fr) * 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Pompe a vide a friction a admission intermediaire

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US3734640A (en) * 1971-06-23 1973-05-22 W Daniel Airfoil vacuum pump with tapered rotor
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
DE3885899D1 (de) * 1988-10-10 1994-01-05 Leybold Ag Pumpenstufe für eine Hochvakuumpumpe.
JPH0313495A (ja) * 1989-06-12 1991-01-22 Natl House Ind Co Ltd 吊上げ金具
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum Gmbh Compoundpumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (fr) * 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Pompe a vide a friction a admission intermediaire

Also Published As

Publication number Publication date
US6524060B2 (en) 2003-02-25
JP4907774B2 (ja) 2012-04-04
JP2001280289A (ja) 2001-10-10
EP1128069A3 (fr) 2002-11-06
DE10008691B4 (de) 2017-10-26
US20010018018A1 (en) 2001-08-30
EP1128069A2 (fr) 2001-08-29
DE10008691A1 (de) 2001-08-30

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