EP1164294B1 - Pompe à gaz à friction - Google Patents

Pompe à gaz à friction Download PDF

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Publication number
EP1164294B1
EP1164294B1 EP20010110210 EP01110210A EP1164294B1 EP 1164294 B1 EP1164294 B1 EP 1164294B1 EP 20010110210 EP20010110210 EP 20010110210 EP 01110210 A EP01110210 A EP 01110210A EP 1164294 B1 EP1164294 B1 EP 1164294B1
Authority
EP
European Patent Office
Prior art keywords
rotor
component
gas
stator
friction pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP20010110210
Other languages
German (de)
English (en)
Other versions
EP1164294A1 (fr
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10111546A external-priority patent/DE10111546A1/de
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1164294A1 publication Critical patent/EP1164294A1/fr
Application granted granted Critical
Publication of EP1164294B1 publication Critical patent/EP1164294B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • gas friction pumps of various types are known. Their mode of operation in the molecular flow regime is based on the transmission of impulses from moving walls to the gas particles.
  • the first gas friction pump of this type was presented by Gaede. Further technical modifications while retaining the basic principle are designs by Siegbahn, Holweck and Becker. The latter is known as a turbomolecular pump and has proven successful in many areas of technology and science with great success. It is therefore used as an example for the description of the present invention.
  • the pumping speed of turbomolecular pumps is determined not only by the internal structure of the pump and the speed but also by the inlet cross-section of the intake flange.
  • the dimensions of the intake flange are through Standards are set to a few sizes. If a larger suction capacity is to be achieved with such a predetermined intake cross-section, the diameter of the disks and thus the pump-active surface can be increased. This leads to a design in which the diameter of the discs is greater than the diameter of the intake flange. It is obvious that the pumping speed is limited by the cross section of the intake flange. This acts as a flow resistance between the upper rotor disk and the recipient.
  • the object of the invention is to largely overcome this flow resistance and thus maximize the suction capacity, which is predetermined by the diameter of the upper rotor disk.
  • the modified rotor component Due to the modified rotor component, the conductance loss, which is caused by the predetermined diameter of the intake flange, is largely eliminated.
  • the gas to be pumped is fed from the recipient through the gas-conveying structure to the other, larger-diameter rotor and stator components and can be further conveyed from here without additional losses.
  • the modified rotor component can be optimally adapted to the recipient and its connection to the intake flange. This also opens up the possibility of partially projecting the rotor component beyond the intake flange into the recipient.
  • Stator components with respect to the modified rotor component can be provided with pump-active structures. As a result, the transition from smaller to larger diameter of the modified rotor component is made even more effective.
  • FIG. 1 shows a turbomolecular pump with the inventive arrangement.
  • FIGS. 2a-4b and 5 show further embodiments which are shown in section in FIGS. 2a, 3a, 4a and 5 and in the associated perspective in FIGS. 2b, 3b and 4b.
  • Fig. 1 shows a gas friction pump with the housing 1, which is provided with a suction port 2 for connecting a recipient and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the rotor components 12 are attached on the rotor shaft 4, the rotor components 12 are attached. These are provided with a pump-active structure and cause with the stator components 14, which are also provided with a pump-active structure, the pumping effect.
  • the Intake port has an inner diameter that is smaller than the outer diameter of the rotor and stator components.
  • a modified rotor component 16 is mounted according to the invention, which is shown in section in FIGS. 2a and 2b as a detail of FIG. 1 in section and perspective.
  • This rotor component is provided with a gas-promoting structure. Its radial extent increases from the intake opening in the direction of the other rotor and stator components and can finally reach their radial extent.
  • the radial expansion may increase either in stages as in Figs. 1, 2a and 2b, or continuously in conical 17 in Figs. 3a and 3b, or dome-shaped 18 in Figs. 4a and 4b. Mixed forms of the embodiments are possible.
  • a multi-part design of the modified component 19a, 19b, as in FIG. 5, can be useful for reasons of production possibilities.
  • the possibility should be mentioned that the radial extent of the modified rotor component is smaller than that of the other rotor components and remains constant in the axial direction.
  • stator components 26-29 with a pump-active structure can be attached. These stator components are formed either as individual components or as part of the housing 1.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (11)

  1. Pompe à gaz à friction constituée d'un carter (1) comportant une ouverture d'aspiration (2) pour le raccordement d'un récipient et une ouverture de sortie de gaz (3), dans laquelle se trouvent - à l'intérieur du carter - des éléments de rotor (12) et de stator (14) qui favorisent le pompage et sont destinés au transport de gaz et à la création d'un rapport de pression, et dans laquelle le diamètre intérieur de l'ouverture d'aspiration (2) est inférieur au diamètre des éléments de rotor et de stator favorisant le pompage, caractérisée en ce qu'il est disposé, du côté de l'ouverture d'aspiration (2), un élément modifié de rotor (16, 17, 18, 19a, 19b) possédant une structure de transport de gaz dont la dimension radiale augmente à partir de l' ouverture d'aspiration en direction des autres éléments de rotor et de stator.
  2. Pompe à gaz à friction selon la revendication 1, caractérisée en ce que la dimension radiale de l'élément modifié de rotor augmente par paliers.
  3. Pompe à gaz à friction selon la revendication 1, caractérisée en ce que la dimension radiale de l'élément modifié de rotor augmente de façon continue.
  4. Pompe à gaz à friction selon une quelconque des revendications 1 - 3, caractérisée en ce que l'élément modifié de rotor est entièrement ou partiellement de forme conique.
  5. Pompe à gaz à friction selon une quelconque des revendications 1 - 3, caractérisée en ce que l'élément modifié de rotor est entièrement ou partiellement en forme de coupole.
  6. Pompe à gaz à friction selon une quelconque des revendications précédentes, caractérisée en ce que la dimension radiale de l'élément modifié de rotor correspond, du côté qui fait face à l'élément de stator, à la dimension radiale des autres éléments de rotor.
  7. Pompe à gaz à friction selon une quelconque des revendications précédentes, caractérisée en ce que l'élément modifié de rotor dépasse l'ouverture d'aspiration et entre partiellement dans le récipient.
  8. Pompe à gaz à friction selon une quelconque des revendications précédentes, caractérisée en ce que l'élément modifié de rotor est constitué de plusieurs pièces.
  9. Pompe à gaz à friction constituée d'un carter (1) comportant une ouverture d'aspiration (2) pour le raccordement d'un récipient et une ouverture de sortie de gaz (3), dans laquelle se trouvent - dans le carter - des éléments de rotor (12) et de stator (14) qui favorisent le pompage et sont destinés au transport de gaz et à la création d'un rapport de pression, et dans laquelle le diamètre intérieur de l'ouverture d'aspiration (2) est inférieur au diamètre des éléments de rotor et de stator favorisant le pompage, caractérisée en ce qu'il est disposé, du côté de l'ouverture d'aspiration (2), un élément modifié de rotor (16, 17, 18, 19a, 19b) possédant une structure de transport de gaz dont la dimension radiale est inférieure à celle des autres éléments de rotor et de stator.
  10. Pompe à gaz à friction selon une quelconque des revendications précédentes, caractérisée en ce qu'en face de l'élément modifié de rotor se trouve un élément de stator (26, 27, 28, 29) possédant une structure qui favorise le pompage.
  11. Pompe à gaz à friction selon la revendication 10, caractérisée en ce que l'élément de stator (26, 27, 28, 29) constitue une partie du carter (1).
EP20010110210 2000-05-15 2001-04-25 Pompe à gaz à friction Expired - Lifetime EP1164294B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10023799 2000-05-15
DE10023799 2000-05-15
DE10111546A DE10111546A1 (de) 2000-05-15 2001-03-10 Gasreibungspumpe
DE10111546 2001-03-10

Publications (2)

Publication Number Publication Date
EP1164294A1 EP1164294A1 (fr) 2001-12-19
EP1164294B1 true EP1164294B1 (fr) 2003-09-10

Family

ID=26005688

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010110210 Expired - Lifetime EP1164294B1 (fr) 2000-05-15 2001-04-25 Pompe à gaz à friction

Country Status (2)

Country Link
EP (1) EP1164294B1 (fr)
JP (1) JP5149472B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10208795A1 (de) * 2002-02-28 2003-09-04 Pfeiffer Vacuum Gmbh Maschine mit schnelldrehendem Rotor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS6214198U (fr) * 1985-07-10 1987-01-28
JPS62168994A (ja) * 1985-12-26 1987-07-25 Morihiko Kimata 高真空排気装置
JPS6456597U (fr) * 1987-10-05 1989-04-07
JPH02153294A (ja) * 1988-12-05 1990-06-12 Nippon Soken Inc 可変容量型真空ポンプ
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE59305085D1 (de) * 1992-06-19 1997-02-20 Leybold Ag Gasreibungsvakuumpumpe
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
EP1164294A1 (fr) 2001-12-19
JP2002005079A (ja) 2002-01-09
JP5149472B2 (ja) 2013-02-20

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