EP2409039A1 - Pompe à vide à entrées multiples - Google Patents

Pompe à vide à entrées multiples

Info

Publication number
EP2409039A1
EP2409039A1 EP10707509A EP10707509A EP2409039A1 EP 2409039 A1 EP2409039 A1 EP 2409039A1 EP 10707509 A EP10707509 A EP 10707509A EP 10707509 A EP10707509 A EP 10707509A EP 2409039 A1 EP2409039 A1 EP 2409039A1
Authority
EP
European Patent Office
Prior art keywords
rotor
diameter
pumping device
inlet
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10707509A
Other languages
German (de)
English (en)
Inventor
Markus Henry
Heinz ENGLÄNDER
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2409039A1 publication Critical patent/EP2409039A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2250/00—Geometry
    • F05B2250/50—Inlet or outlet
    • F05B2250/501—Inlet

Definitions

  • the invention relates to a multi-inlet vacuum pump.
  • Multi-inlet vacuum pumps have a plurality of pump devices in a common housing, which are, for example, turbomolecular pumps possibly in conjunction with a Holweck stage.
  • the individual pumping devices are usually carried by a common rotor shaft and driven by a single electric motor.
  • the pump housing has a main inlet through which a first fluid flow is sucked by the first pumping means.
  • the first fluid stream is then conveyed after flowing through the first pumping device from the second pumping device and optionally further pumping devices in the direction of an outlet.
  • an intermediate inlet is provided, through which a second fluid flow is sucked by the second pumping device. From the second pumping device thus the first and the second fluid flow is conveyed in the direction of the outlet.
  • Possibly. may be arranged between the second and a third pumping device, a further intermediate inlet.
  • a corresponding third fluid flow is also conveyed by the third pumping device in the direction of the outlet, in which case all three fluid streams are then conveyed by the third pumping device.
  • the object of the invention is to realize a multi-inlet vacuum pump with high pumping speed in the intermediate inlet.
  • the object is achieved according to the invention by a multi-inlet vacuum pump having the features of claim 1.
  • the first pumping device has, in particular, a rotor disc with a larger diameter that is last in the conveying direction.
  • the diameter of the last rotor disk of the first pumping device in this case preferably corresponds to the diameter of the first rotor disk of the second pumping device, wherein it is particularly preferred that the rotor disks of the second pumping device all have the same diameter.
  • the intermediate inlet is in this case preferably arranged such that it is provided between the last rotor disk of the first pumping device with an enlarged diameter and the first rotor disk of the second pumping device.
  • the larger diameter of the last wing of the first rotor stage improves the compression to the outlet in the intermediate inlet and thus reduces the backflow of the fluids from the intermediate inlet against the flow.
  • At least one rotor disk of the first rotor element has a diameter which is smaller than the diameter of the second rotor disks of the second rotor element.
  • a gradation of the diameter of the rotor disks thus takes place within the first rotor element.
  • the first rotor element thus according to the invention has rotor disks with different diameters, wherein a multiple gradation can be done within the first rotor element.
  • At least the first rotor disk of the first rotor element is preferably designed in the flow direction such that it has a smaller diameter than the rotor disks of the second rotor element. It is particularly preferred that at least 50%, in particular at least 75%, of the rotor disks of the first rotor element have a smaller diameter than the second rotor disks of the second rotor element.
  • the last rotor disk of the first pumping device has a larger, substantially the same diameter as the rotor disks of the second pumping device.
  • the last two, or even more than two, last rotor disks of the first pump device may have a larger diameter than the remaining rotor disks of the first pump device.
  • at least two last rotor disks of the first pumping device have substantially the same diameter as the first rotor disk of the second pumping device, wherein the rotor disks of the second pumping device preferably all have the same diameter.
  • the diameter of the last rotor disks of the first pumping means may increase stepwise.
  • the diameter of the rotor disks thus increases stepwise until at least the last rotor disk has a diameter corresponding to the diameter of the rotor disks of the second pumping devices.
  • the multi-inlet vacuum pump can also have several intermediate inlets.
  • a further pumping device is arranged in flow direction before and / or after the first or second pumping device. Between adjacent pumping devices each intermediate inlets can be provided. According to the invention, this is the two adjacent ones Pumping devices, which are referred to for simplicity as first and second pumping means, as described above are formed according to the invention.
  • the design according to the invention is provided several times in the region of an intermediate inlet.
  • the figure shows a schematic longitudinal section of a preferred embodiment of the invention.
  • the figure shows the essential part of the invention of a multi-inlet vacuum pump.
  • This is a first pumping device 10 and a further or second pumping device 12, which are arranged in a common housing 14.
  • a third pumping device such as a Holwecklace be provided in the housing on the right side in the figure.
  • the first pumping device 10 has a rotor element 18 arranged on a rotor shaft 16.
  • the rotor element 18 has four radially extending rotor disks 20 with the same outside diameter and a rotor disk 21 with a larger outside diameter.
  • the rotor disks 20, 21 have rotor blades for transporting fluid, in particular gas.
  • stationary stator disks 22 are arranged between adjacent rotor disks 20.
  • the stator disks 22 are held firmly in the housing 14, for example via rings.
  • the second rotor element 26 also has five rotor disks 28 in the exemplary embodiment shown.
  • stationary stator disks 30, possibly connected to housing 14 via stator rings, are arranged between rotor disks 28.
  • the rotor disks 28 in turn have wings for transporting fluid in an outer region, shown unshaded in the figure.
  • the first pumping device 10 sucks the gas through a main inlet 32 in the housing 14. This results in a first fluid flow 34 in the direction of the second pumping device 12, or in the conveying direction 36.
  • the conveying direction 36 corresponds to the main conveying direction from the main inlet 32 in the direction of an outlet downstream of the last pumping device in the conveying direction, that is to say in the figure on the right-hand side is provided in the housing.
  • the housing 14 has an intermediate inlet 38.
  • the intermediate inlet is disposed in the housing 14 between the first pumping device 10 and the second pumping device 12.
  • a second fluid stream 40 also generated in the conveying direction 36.
  • the second fluid flow 40 is conveyed by the second pumping device 12 and an optionally downstream further pumping device in the direction of the pump outlet.
  • a high vacuum is present at the main inlet 32 and a somewhat lower vacuum at the intermediate inlet 38.
  • the radius of the rotor disks 28 of the second pumping device 12 is greater than the radius of the rotor disks 20 of the first pumping device 10 in the illustrated embodiment.
  • the first pumping device 10 has an additional rotor disk 21 with a larger one in the conveying direction 36 Outer diameter than the rotor disks 20 on.
  • the first fluid stream 34 is deflected radially outward by the rotor disk 21 (arrow 42).
  • the first fluid flow passes through the rotor disk 21 (arrow 44).
  • the last rotor disk 21 of the first pumping device 10 has an outer diameter that substantially corresponds to the outer diameter of the rotor disk 28 of the second pumping device 12. In this way, despite the different diameters of the rotor disks relative to the overall multi-inlet vacuum pump, it is ensured that the first fluid flow and the second fluid flow 40 combine well.
  • the two rotor elements 18, 26 are supported by a common shaft 16 and driven by a common electric motor.
  • a multi-inlet vacuum pump with a plurality of intermediate inlets, wherein at least one of the intermediate inlets as explained above with reference to the figure, is formed.
  • several intermediate inlets can be designed according to the invention.
  • at least one further pumping device is arranged in the flow direction 36 in front of the first pumping device.
  • at least one further pumping device may be provided in the flow direction 36 after the second pumping device 12.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide à entrées multiples qui présente un premier dispositif de pompage (10) et un second dispositif de pompage (12). Le premier dispositif de pompage (10) présente un premier élément rotor (18) muni de plusieurs premiers disques de rotor (20, 21) disposés les uns derrière les autres dans le sens du refoulement (36). Le second disque de rotor présente un second élément rotor (26) muni de plusieurs seconds disques de rotor (28) disposés les uns derrière les autres dans le sens du refoulement (36). Par une entrée principale (32), un premier flux de fluide (34) est aspiré par le premier dispositif de pompage (10) et refoulé en direction du second dispositif de pompage (12). Par une entrée intermédiaire (38), un second flux de fluide (40) est aspiré par le second dispositif de pompage et refoulé en direction d'une sortie de la pompe. Selon l'invention, le diamètre du dernier disque de rotor (21) de la première pompe (10) correspond sensiblement au diamètre du premier disque de rotor (28) du second dispositif de pompage (12).
EP10707509A 2009-03-19 2010-03-03 Pompe à vide à entrées multiples Withdrawn EP2409039A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200920003880 DE202009003880U1 (de) 2009-03-19 2009-03-19 Multi-Inlet-Vakuumpumpe
PCT/EP2010/052698 WO2010105908A1 (fr) 2009-03-19 2010-03-03 Pompe à vide à entrées multiples

Publications (1)

Publication Number Publication Date
EP2409039A1 true EP2409039A1 (fr) 2012-01-25

Family

ID=42199942

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10707509A Withdrawn EP2409039A1 (fr) 2009-03-19 2010-03-03 Pompe à vide à entrées multiples

Country Status (6)

Country Link
US (1) US8992162B2 (fr)
EP (1) EP2409039A1 (fr)
JP (1) JP5553883B2 (fr)
DE (1) DE202009003880U1 (fr)
TW (1) TW201102512A (fr)
WO (1) WO2010105908A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
GB2604382A (en) * 2021-03-04 2022-09-07 Edwards S R O Stator Assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1508006A (en) * 1921-09-01 1924-09-09 American Pulley Co Shaft hanger
JPS61247893A (ja) 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
DE58905852D1 (de) 1989-07-14 1993-11-11 Haberl Ralph Einrichtung zur Bewertung ausgewählter Signalanteile in physiologischen Messsignalen, insbesondere von Spätpotentialen in Elektrokardiogrammen.
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
EP1249613B1 (fr) 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010105908A1 *

Also Published As

Publication number Publication date
TW201102512A (en) 2011-01-16
DE202009003880U1 (de) 2010-08-05
JP5553883B2 (ja) 2014-07-16
JP2012520961A (ja) 2012-09-10
US20120087776A1 (en) 2012-04-12
WO2010105908A1 (fr) 2010-09-23
US8992162B2 (en) 2015-03-31

Similar Documents

Publication Publication Date Title
EP2295812B1 (fr) Récipient repliable
EP3408503B1 (fr) Turbomachine avec diffuseur à aubes
EP2505842A1 (fr) Agrégat de pompe centrifuge à plusieurs étages
DE602004008089T2 (de) Vakuumpumpe
EP1811184A1 (fr) Roue pour une unité de pompage et unité de pompage correspondante
DE102012003680A1 (de) Vakuumpumpe
WO2005047707A1 (fr) Pompe à vide à frottement à plusieurs étages
EP3112688B2 (fr) Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
DE102009011082A1 (de) Multi-Inlet-Vakuumpumpe
EP2409039A1 (fr) Pompe à vide à entrées multiples
DE60002966T2 (de) Vakuumpumpen
DE202013010204U1 (de) Multi-Inlet-Vakuumpumpe
DE102016208265A1 (de) Rückführstufe, Radialturboverdichter
DE102018215068A1 (de) Laufrad für einen radialen Turboverdichter
EP3032107B1 (fr) Pompe turbomoleculaire
EP3577346B1 (fr) Turbocompresseur pourvu de canaux d'écoulement intégrés
DE202011002809U1 (de) Statorelement sowie Hochvakuumpumpe
EP2886870B2 (fr) Pompe à vide avec géométrie d'admission perfectionnée
DE102011108115A1 (de) Turbomolekularpumpe
DE112015002919T5 (de) Turbolader
DE202010012795U1 (de) Vakuumpumpe
DE202017103826U1 (de) Turboverdichter mit integrierten Strömungskanälen
EP3577347B1 (fr) Turbo-compresseur avec canaux de retour de fluide
EP3486494B1 (fr) Boîtier de ventilateur radial et ventilateur radial
DE189064C (fr)

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110905

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20150219

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20150630