EP2401505B1 - Pompe à vide à plusieurs entrées - Google Patents

Pompe à vide à plusieurs entrées Download PDF

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Publication number
EP2401505B1
EP2401505B1 EP10711634.5A EP10711634A EP2401505B1 EP 2401505 B1 EP2401505 B1 EP 2401505B1 EP 10711634 A EP10711634 A EP 10711634A EP 2401505 B1 EP2401505 B1 EP 2401505B1
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EP
European Patent Office
Prior art keywords
rotor
pump device
inlet
vacuum pump
pumping device
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Active
Application number
EP10711634.5A
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German (de)
English (en)
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EP2401505A2 (fr
Inventor
Christian Beyer
Markus Henry
Heinz ENGLÄNDER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
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Leybold GmbH
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Publication of EP2401505A2 publication Critical patent/EP2401505A2/fr
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Publication of EP2401505B1 publication Critical patent/EP2401505B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a multi-inlet vacuum pump.
  • Multi-inlet vacuum pumps have a plurality of pump devices in a common housing, which are, for example, turbomolecular pumps possibly in conjunction with a Holweck stage.
  • the individual pumping devices are usually carried by a common rotor shaft and driven by a single electric motor.
  • the pump housing has a main inlet through which a first fluid flow is sucked by the first pumping means.
  • the first fluid stream is then conveyed after flowing through the first pumping device from the second pumping device and optionally further pumping devices in the direction of an outlet.
  • an intermediate inlet is provided, through which a second fluid flow is sucked by the second pumping device. From the second pumping device thus the first and the second fluid flow is conveyed in the direction of the outlet.
  • a second intermediate inlet can be arranged between the second and a third pumping device.
  • a corresponding third fluid flow is also conveyed by the third pumping device in the direction of the outlet, in which case all three fluid streams are then conveyed by the third pumping device.
  • Such a multi-inlet vacuum pump is, for example, from US 6,030,189 known.
  • a multi-inlet pump in which the outer diameter of the rotor disks of the first pumping device is smaller, as the outer diameter of the rotor disks of the second pumping device.
  • a relatively high pumping speed is realized at the intermediate inlet.
  • the object of the invention is to realize a multi-inlet vacuum pump with improved partial pressure and the possibility of increased pumping speed in the intermediate inlet.
  • the multi-inlet vacuum pump according to the invention has a first pump device, which is in particular a turbomolecular pump.
  • the first pumping device has a first rotor element with a plurality of rotor disks arranged one behind the other in the conveying direction.
  • the multi-inlet vacuum pump has a further pumping device, which is preferably likewise a turbomolecular pump. This has a further rotor element with also several in the conveying direction one behind the other arranged rotor disks.
  • a multi-inlet vacuum pump according to the invention has at least two pumping devices, it also being possible for a plurality of pumping devices to be provided.
  • the multi-inlet vacuum pump has a main inlet, through which a first fluid flow is sucked in by the first pumping device and conveyed in the direction of the further, in particular second pumping device.
  • the intake of a further fluid flow from the further pumping device takes place via an intermediate inlet.
  • a plurality of intermediate inlets and a plurality of pumping means are provided, wherein the intermediate inlets are preferably arranged between two adjacent pumping devices.
  • the preferably two fluid streams are conveyed in the direction of a pump outlet.
  • a unification of the fluid streams does not take place directly in the region of the intermediate inlet.
  • the association of two in particular Fluid flows thus occur outside the intermediate inlet but within the vacuum pump. Since the gas mixture sucked in through the main inlet possibly has a different composition than the gas mixture sucked through the intermediate inlet, the association of the fluid streams outside the intermediate inlet according to the invention is advantageous since the ratio of the partial pressures in the intermediate inlet is less affected.
  • the unifying of the fluid flows takes place only within the further pumping device, in particular between two adjacent rotor discs of the second pumping device. The association takes place according to the invention after the first rotor disk of the further pumping device.
  • the area between the second and the third or between adjacent pumping devices can of course be designed accordingly.
  • the second and third fluid streams are combined, for example, outside the corresponding intermediate inlet, preferably within the third pumping device, for example.
  • the diameter of the further, for example second rotor disk is preferably at least partially larger than the diameter of the first rotor disks.
  • the diameter of several, in particular all rotor disks of the further pumping device is greater than the diameter of the first rotor disks.
  • the first rotor disk of the further pumping device has a passage opening in the conveying direction, that is to say preferably in the axial direction of the rotor shaft.
  • the passage opening is preferably radially within the first rotor disk carrying the blades arranged further pumping device. The association of the fluid flows thus takes place after the first fluid flow has passed through the passage opening. Since only the first rotor disk of the further pumping device has passage openings, the fluid streams are united between the two first rotor disks of the further pumping device, if necessary.
  • the rotor disks of the further pumping device can also have a plurality of rotor disks of the further pumping device through-openings, so that the unifying of the fluid flows takes place not only between the two first rotor disks but also between other rotor disks of the further pumping device. If, according to a preferred embodiment of the invention, at least a portion of the rotor disks of the further pumping device has a larger diameter than the rotor disks of the first pumping device, the provision of such through-openings results in that the first fluid stream does not radially outwardly due to the change in the diameter of the rotor disks must be deflected, so that takes place directly in the area of the intermediate inlet no association of the two fluid streams.
  • the two fluid streams are combined, for example only between the first and second rotor disks of the second pumping device. It is also possible that further rotor disks of the second pumping device have passage openings, so that the combining of the two fluid streams takes place not only between two rotor disks, but between a plurality of rotor disks. In this case, the total cross-sectional area of the passage openings in the conveying direction can be reduced, so that always a part of the first fluid stream must unite with the second fluid stream between two adjacent rotor disks and a smaller part of the first fluid stream continues to flow unconfined and only between the next two adjacent rotor disks a club with the second fluid flow takes place.
  • the passage opening in the at least first rotor disk of the further pumping device preferably has a plurality of individual openings. These are arranged in particular along a circular line. This ensures that the stability of the rotor disks is not impaired by the provision of a plurality of individual openings, which are arranged in particular regularly on a circular line.
  • a particularly radially arranged housing wall is provided in a particularly preferred embodiment between adjacent pumping devices.
  • the housing wall is preferably sealingly connected to a housing outer wall of the pump housing and projects close to the passage opening or the rotor shaft.
  • the housing wall is formed such that between the housing wall and the rotor shaft, an annular opening is formed, wherein the passage openings in the one or more rotor disks of the further pumping means in the flow direction, are arranged within this annular opening. This avoids a deflection of the first fluid flow between this annular opening and the passage openings.
  • the first fluid flow After exiting the first pumping device, the first fluid flow thus flows through the through-opening in the housing wall and then through the through-opening of the first or several rotor disks of the further pumping device to then be combined with the second fluid flow within the further pumping device.
  • a flow channel is formed between adjacent pumping devices.
  • the at least one flow channel is designed such that an outlet of the first pumping device is connected via the flow channel to a region within the further pumping device.
  • the at least one flow channel is at least partially disposed within a rotor shaft which carries the rotor elements.
  • the rotor shaft to form a flow channel on a particular extending in the longitudinal direction groove.
  • the grooves are in this case preferably arranged symmetrically on the circumference of the rotor shaft.
  • the grooves are preferably introduced into an outer peripheral surface of the rotor shaft, for example by milling.
  • the grooves are closed by a sleeve and / or an inner side of a rotor element.
  • the first fluid flow flows after passing through the first pumping device, in particular completely into the preferably a plurality of flow channels.
  • the first fluid stream flows through the flow channels and then exits from the flow channels, preferably within a further, in particular the adjacent pumping device.
  • the first fluid flow is combined with another fluid flow drawn in through an intermediate inlet not within the intermediate inlet, but within the second pumping device.
  • the rotor shaft is designed as a hollow shaft.
  • the first fluid flow preferably flows into the flow channel or the rotor shaft through one or more first transverse bores arranged in the rotor shaft.
  • a plurality of first transverse bores are arranged, which are provided distributed radially on the circumference of the hollow shaft.
  • the first fluid stream is preferably introduced from the flow channel or the interior of the hollow rotor shaft into the further pumping device. This is done in a particularly preferred embodiment between two adjacent Rotor disks of the second pumping device, in particular in the conveying direction between the first and second rotor disk.
  • the second transverse bores in such a way that the inflow of the first fluid flow takes place in several regions of the second pumping device, that is, for example, between the first and the second rotor disc and also between the second and third rotor discs.
  • a sealing disc is arranged in the outlet of the first pumping device.
  • This, preferably radially extending sealing disc ensures that the first fluid flow is mostly directed in particular completely in the direction of the at least one flow channel.
  • the sealing disk can in this case be designed or arranged corresponding to the stator disks which are arranged between adjacent rotor disks.
  • the sealing disk can be held in the housing corresponding to the stator disks via a stator ring or fixedly connected to the housing.
  • the sealing disk protrudes close to the rotor shaft, so that a narrow sealing gap is formed between the sealing disk and the rotor shaft.
  • the inlet of the groove or grooves is preferably arranged in the conveying direction between the last rotor disk of the first pumping device and the sealing disk.
  • At least the last rotor disk of the first pumping device is designed such that a countercurrent is generated.
  • the conveying direction of this last rotor disk of the first pumping device is thus opposite to the main conveying direction of the vacuum pump.
  • a sealing washer can be dispensed with in this embodiment.
  • a fluid flow drawn in through an intermediate inlet is split, in which case part of this further fluid flow flows in the opposite direction.
  • the last rotor disk of the first pumping device is designed to generate a counterflow, but preferably a plurality of rotor disks generate a counterflow.
  • a compression of the part of the further fluid flow flowing into the countercurrent takes place through these rotor disks.
  • the countercurrent flowing part of the further fluid flow is combined within the first pumping means with the first fluid flow.
  • the first fluid flow flows together with the part of the further fluid flow conveyed in the opposite direction into flow channels.
  • the flow channels are preferably in turn arranged in the rotor shaft longitudinal grooves and / or transverse bores, as described above.
  • the first fluid flow then flows together with the part of the further fluid flow through the flow channels in the direction of another pumping device.
  • this fluid flow again emerges from the at least one flow channel, so that a combining of this fluid flow with the second part of the further fluid flow sucked in through the intermediate inlet occurs within the further pumping device.
  • the individual embodiments described above are at least partially with each other combined.
  • the provision of a passage opening in at least the first rotor disk of the further pumping device described with reference to the first embodiment can be combined with the provision of at least one flow channel, so that part of the first fluid stream flows through the at least one through opening and a part through the at least one flow channel.
  • Fig. 1 shows the essential part of the invention of a multi-inlet vacuum pump. This is a first pumping device 10 and a further or second pumping device 12, which are arranged in a common housing 14. In addition, in the housing on the in Fig. 1 right side, a third pumping device, such as a Holweckcut be provided.
  • the first pumping device 10 has a rotor element 18 arranged on a rotor shaft 16.
  • the rotor element 18 has five radially extending rotor disks 20.
  • the rotor disks 20 have rotor blades for transporting fluid, in particular gas.
  • stationary stator disks 22 are arranged between adjacent rotor disks 20.
  • the stator disks 22 are held firmly in the housing 14, for example via rings.
  • another or second rotor element 26 of the second pump device 12 is supported by the rotor shaft 16, which is mounted in the illustrated embodiment via two bearings 24.
  • the second rotor element 26 also has five rotor disks 28 in the exemplary embodiment shown. Between the rotor disks 28 are in turn stationary if necessary, arranged on stator with the housing 14 stator disks 30 are arranged.
  • the rotor disks 28 point in an outer, in Fig. 1 unshaded area, turn wings for transport of fluid.
  • the first pumping device 10 sucks the gas through a main inlet 32 in the housing 14. This results in a first fluid flow 34 in the direction of the second pumping device 12, or in the conveying direction 36.
  • the conveying direction 36 corresponds to the main conveying direction of the main inlet 32 in the direction of an outlet in the conveying direction behind the last pumping device, that is in Fig. 1 is provided on the right side in the housing.
  • the housing 14 has an intermediate inlet 38.
  • the intermediate inlet is disposed in the housing 14 between the first pumping device 10 and the second pumping device 12.
  • a second fluid flow 40 also in the conveying direction 36 generated.
  • the second fluid flow 40 is conveyed by the second pumping device 12 and an optionally downstream further pumping device in the direction of the pump outlet.
  • a high vacuum is present at the main inlet 32 and a somewhat lower vacuum at the intermediate inlet 38.
  • the radius of the rotor disks 28 of the second pumping device 12 is greater than the radius of the rotor disks 20 of the first pumping device 10 in the illustrated embodiment.
  • the first in Fig. 2 left rotor disk 28 of the second pumping device 12 has a passage opening 42.
  • the passage opening 42 preferably has a plurality of individual openings arranged on a circle line concentric with the rotor shaft.
  • the passage opening 42 or the individual openings of the passage opening 42 are provided within the area in which the vanes of the first rotor disk 28 are arranged. In the figure, the area of the wings is shown unshaded.
  • a housing wall 46 is additionally provided in the exemplary embodiment shown.
  • the housing wall 46 is arranged between the two pumping devices 10, 12 and extends radially.
  • the housing wall 46 is fixedly connected to the housing 14 and extends in the direction of the rotor shaft 16.
  • the first fluid flow 34 thus flows after passing through the first pumping device 10 through an annular openings 50 and then through the through holes 42 of the first rotor disc 28 to between the two first rotor disks 28 of the second pumping device 12 to get into this.
  • Fig. 2 illustrated second embodiment The main difference of in Fig. 2 illustrated second embodiment is that the first rotor disk 28 of the second pumping device 12 has no through holes 42. Rather, the first fluid flow 34 at the end of the first pumping device is deflected radially inwards (arrow 52).
  • a sealing washer 54 is connected to the housing or the stator rings. This runs similar to the housing wall 46, in which Fig. 1 illustrated embodiment radially inwardly and is sealed relative to the rotor shaft 16 by a sealing gap 56.
  • the shaft 16 is formed as a hollow shaft, so that the first Fluid flow 34 through transverse bores 58 into the interior 60 of the hollow shaft 16 flows, (arrow 62).
  • a plurality of transverse bores 58 are arranged symmetrically on the circumference of the hollow shaft 16 in particular.
  • second transverse bores 64 are arranged in the hollow shaft.
  • a plurality of second transverse bores 64 are in turn arranged symmetrically distributed on the circumference.
  • the position of the second transverse bore 64 is selected such that the fluid flows in the direction of an arrow 67 through the transverse bores 64 in the second pumping means 12, wherein in the illustrated embodiment, the fluid between the first two rotor discs 28 of the second pumping device 12 flows.
  • a flow channel 58, 60, 64 is formed, wherein the flow channel connects an outlet of the first pumping device with a region within the second pumping device, wherein in the illustrated embodiment, the area between the two first rotor disks 28 of the second pumping device 12 acts.
  • the second transverse bores 64 may, for example, also end between the second and third, third and fourth, etc. rotor disks 28 of the second pump device 12. It is also possible that a plurality of levels of transverse bores are provided, so that transverse bores end, for example, both between the first and second and between the second and third rotor disk 28.
  • the second fluid stream 40 flows as well as in the Fig. 1 illustrated embodiment through the intermediate inlet 38 and is supported by the second pumping device 12 in the direction of the outlet of the multi-inlet vacuum pump, not shown.
  • the combining of the two fluid streams 34, 40 takes place as in the first embodiment ( Fig. 1 ), for example between the two first rotor disks 28 of the second pumping device 12.
  • Fig. 3 illustrated third embodiment is the in Fig. 2 illustrated second embodiment, so that identical and similar components are identified by the same reference numerals.
  • the third embodiment ( Fig. 3 ) has no sealing washer 54.
  • the third embodiment ( Fig. 3 ) has no sealing washer 54.
  • one last one, in Fig. 3 right rotor disk 68 of the first pumping device 10 is formed such that the rotor disk 68 fluid opposite to the main conveying direction 36 of the multi-inlet vacuum pump in the direction of arrow 70 promotes. This is realized in that the wings of the rotor disk 68 point in the opposite direction. Due to the conveying direction of the rotor disk 68, the first fluid flow can not pass through the rotor disk 68. As a result, the first fluid flow 34 according to the second embodiment (FIG. Fig.
  • the first fluid stream is conveyed through the flow channel 58, 60, 64 within the second pumping device 12.
  • the second transverse bores 64 are in this case arranged in the hollow shaft 16, that the first fluid flow between the two first rotor discs 28 of the second pumping device 12 enters into this.
  • the sucked by the Swisseilass 38 fluid flow is 40th immediately after entering the vacuum pump into two fluid streams 70, 71 divided.
  • the partial fluid flow 70 is conveyed against the main conveying direction 36. This creates a counterflow in the first pumping device 10. This is generated by the blades of the rotor disk 21 and the stator disk 23 firmly connected to the housing 14.
  • the rotor disk 21 and the associated stator disk 23 has a larger diameter than the other rotor disks 20 and stator disks 22 of the first pumping device.
  • the outer diameter of the rotor disk 21 and the stator disk 23 are essentially corresponding to the rotor disks 28, and / or the stator disks 30 of the second or further pump apparatus 12.
  • the first fluid flow 34 does not exit the first pumping device in the region of the intermediate inlet 38. Instead, the partial fluid flow 70 and the first fluid flow 34 are combined into a region 72 of the first pumping device 10.
  • the region 72 is a substantially annular region.
  • the combined fluid flow from the first fluid flow 34 and the partial fluid flow 70 then flows through in the illustrated embodiment formed as grooves 74 flow channels.
  • the grooves 74 may in this case be arranged directly in the shaft 16.
  • an intermediate member 76 is disposed on the shaft 16.
  • the intermediate member 76 is fixedly connected to the shaft 16, for example, by shrinking.
  • By providing the intermediate member 76 it is possible to displace the flow channels 74 radially outward with respect to the shaft 16.
  • This has the advantage that the flow channels or grooves 74 are arranged such that the first fluid stream 34 without having to be deflected, flows into the grooves 74.
  • a sleeve 78 is arranged around the intermediate element 76.
  • the rotor shaft 16 may be formed as a stepped shaft.
  • the circular cylindrical sleeve 78 is not only used to form the flow channels 74, but also serves in the illustrated embodiment, in addition to supporting the rotor disc 21, which generates the counterflow 70.
  • a first rotor disk 77 of the second pumping device 12 is not supported by the second rotor element 26 but also by the sleeve 78.
  • This has the advantage that it is ensured in a simple manner that the medium flowing through the grooves 74 only unites with the further fluid flow or the partial fluid flow 71 within the second pumping device.
  • the union of the fluid flows between the rotor disk 27 and the adjacent rotor disk 28 takes place, wherein it is rotor disks of the second pumping device 12 in both rotor disks 27, 28.
  • flow channels can also in the in the Figures 2 and 3 be provided embodiments shown.
  • a correspondingly to the fourth embodiment (FIG. FIGS. 4 and 5 ) provided with grooves rotor shaft 16 is provided.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (15)

  1. Pompe à vide à plusieurs entrées, comprenant
    un premier dispositif pompe (10) pourvu d'un premier élément rotor (18), comprenant plusieurs premiers disques de rotor (20, 21) disposés les uns derrière les autres dans la direction de l'écoulement (36),
    au moins un autre dispositif pompe (12) pourvu d'un autre élément rotor (26), comprenant plusieurs autres disques de rotor (27, 28) disposés les uns derrière les autres dans la direction de l'écoulement (36),
    une entrée principale (32) à travers laquelle un premier courant fluidique (34) est aspiré par le premier dispositif pompe (10) et refoulé en direction de l'autre dispositif pompe (12), et
    au moins une entrée intermédiaire (38) à travers laquelle un second courant fluidique (40) est aspiré par le second dispositif pompe (12) et refoulé en direction d'une sortie de pompe,
    une réunion des deux courants fluidiques (34, 40) opérée à l'intérieur de la pompe à vide étant réalisée à l'extérieur de l'entrée intermédiaire (38), caractérisée en ce que
    le premier courant fluidique (34) dans la direction de l'écoulement (36) n'afflue dans le second dispositif pompe (12) qu'après le premier disque de rotor du second dispositif pompe (12).
  2. Pompe à vide à plusieurs entrées selon la revendication 1, caractérisée en ce que la réunion des deux courants fluidiques s'opère au moins principalement à l'intérieur de l'autre dispositif pompe (12), au moins au nombre de un, en particulier entre deux autres disques de rotor (28 ; 27, 28) adjacents de l'autre dispositif pompe (12).
  3. Pompe à vide à plusieurs entrées selon la revendication 1 ou 2, caractérisée en ce que le diamètre des seconds disques de rotor (27, 28) est, au moins en partie, plus grand que le diamètre des premiers disques de rotor (20).
  4. Pompe à vide à plusieurs entrées selon l'une des revendications 1 à 3, caractérisée en ce que, dans la direction de l'écoulement (36), au moins le premier disque de rotor (28) de l'autre dispositif pompe (12) présente une ouverture de passage (42) à travers laquelle le premier courant fluidique (34) afflue dans le second dispositif pompe (12).
  5. Pompe à vide à plusieurs entrées selon la revendication 4, caractérisée en ce que l'ouverture de passage (42) est disposée radialement à l'intérieur du premier disque de rotor (28), portant les pales, du second dispositif pompe (12).
  6. Pompe à vide à plusieurs entrées selon l'une des revendications 1 à 5, caractérisée par une paroi de carter (46) disposée, en particulier radialement, entre le premier dispositif pompe (10) et le second dispositif pompe (12), laquelle est de préférence reliée de façon étanche à une paroi extérieure de carter.
  7. Pompe à vide à plusieurs entrées selon la revendication 6, caractérisée en ce qu'est prévue un jeu d'étanchéité étroit (48) entre la paroi de carter (46) et un arbre de rotor (16).
  8. Pompe à vide à plusieurs entrées selon la revendication 1, caractérisée par au moins un canal d'écoulement (58, 60, 64, 74) qui relie le premier dispositif pompe (10) à une région située à l'intérieur de l'autre dispositif pompe (12).
  9. Pompe à vide à plusieurs entrées selon la revendication 8, caractérisée en ce que le canal d'écoulement (58, 60, 64, 74) est disposé, au moins en partie, à l'intérieur d'un arbre de rotor (16) portant le premier élément rotor (18) et le second élément rotor (26), qui est réalisé de préférence sous la forme d'un arbre creux.
  10. Pompe à vide à plusieurs entrées selon la revendication 8 ou 9, caractérisée en ce que le canal d'écoulement (58, 60, 64, 74), au moins au nombre de un, est réalisé par au moins une rainure (74) s'étendant en direction longitudinale dans l'arbre de rotor, la rainure (74), au moins au nombre de une, étant fermée radialement de préférence par une douille (78) et/ou un élément de rotor (18).
  11. Pompe à vide à plusieurs entrées selon la revendication 10, caractérisée en ce que l'arbre de rotor (16) comporte plusieurs rainures (74) s'étendant dans la direction longitudinale de l'arbre de rotor et réparties en particulier de manière symétrique autour de sa périphérie.
  12. Pompe à vide à plusieurs entrées selon l'une des revendications 9 à 11, caractérisée par au moins un premier alésage transversal (58) disposé dans l'arbre de rotor (16) dans la région d'une sortie du premier dispositif pompe (10), et de préférence par au moins un second alésage transversal (64) disposé dans l'arbre de rotor (16) et qui se termine entre deux disques de rotor (28) adjacents du second dispositif pompe (12).
  13. Pompe à vide à plusieurs entrées selon l'une des revendications 8 à 12, caractérisée par une rondelle d'étanchéité (54) disposée dans la région de sortie du premier dispositif pompe (10), qui s'étend du carter de pompe (14) à l'arbre de rotor (16).
  14. Pompe à vide à plusieurs entrées selon la revendication 13, caractérisée en ce que le premier alésage transversal (58) est disposé dans la direction d'écoulement (36) entre le dernier disque de rotor (20) du premier dispositif pompe (10) et la rondelle d'étanchéité (54).
  15. Pompe à vide à plusieurs entrées selon l'une des revendications 8 à 14, caractérisée en ce qu'au moins le dernier disque de rotor (68) du premier dispositif pompe (10) est conçu de manière à déplacer une partie du second courant fluidique (40) aspiré par l'entrée intermédiaire (38) en sens opposé à la direction de l'écoulement (36) en direction du premier dispositif pompe (10).
EP10711634.5A 2009-02-28 2010-02-23 Pompe à vide à plusieurs entrées Active EP2401505B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009011082A DE102009011082A1 (de) 2009-02-28 2009-02-28 Multi-Inlet-Vakuumpumpe
PCT/EP2010/052282 WO2010097384A2 (fr) 2009-02-28 2010-02-23 Pompe à vide à plusieurs entrées

Publications (2)

Publication Number Publication Date
EP2401505A2 EP2401505A2 (fr) 2012-01-04
EP2401505B1 true EP2401505B1 (fr) 2018-09-26

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EP10711634.5A Active EP2401505B1 (fr) 2009-02-28 2010-02-23 Pompe à vide à plusieurs entrées

Country Status (6)

Country Link
US (1) US8926266B2 (fr)
EP (1) EP2401505B1 (fr)
JP (1) JP5553847B2 (fr)
DE (1) DE102009011082A1 (fr)
TW (1) TW201040394A (fr)
WO (1) WO2010097384A2 (fr)

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TWI457503B (zh) * 2012-05-23 2014-10-21 Prosol Corp 一種渦輪真空泵浦結構改良
DE202013010204U1 (de) * 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE202013010209U1 (de) * 2013-11-12 2015-02-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Welle
KR101843394B1 (ko) * 2015-12-21 2018-03-29 최태천 믹싱 기능이 구비된 펌프 어셈블리
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
EP3767109B1 (fr) 2019-07-15 2021-09-08 Pfeiffer Vacuum Gmbh Système à vide
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

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DE102009011082A1 (de) 2010-09-02
JP2012519247A (ja) 2012-08-23
TW201040394A (en) 2010-11-16
EP2401505A2 (fr) 2012-01-04
WO2010097384A3 (fr) 2010-11-18
US20110311348A1 (en) 2011-12-22
JP5553847B2 (ja) 2014-07-16
WO2010097384A2 (fr) 2010-09-02
US8926266B2 (en) 2015-01-06

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