EP3032107B1 - Pompe turbomoleculaire - Google Patents

Pompe turbomoleculaire Download PDF

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Publication number
EP3032107B1
EP3032107B1 EP15191438.9A EP15191438A EP3032107B1 EP 3032107 B1 EP3032107 B1 EP 3032107B1 EP 15191438 A EP15191438 A EP 15191438A EP 3032107 B1 EP3032107 B1 EP 3032107B1
Authority
EP
European Patent Office
Prior art keywords
pump
rotor
blade
stator
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15191438.9A
Other languages
German (de)
English (en)
Other versions
EP3032107A2 (fr
EP3032107A3 (fr
Inventor
Florian Bader
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3032107A2 publication Critical patent/EP3032107A2/fr
Publication of EP3032107A3 publication Critical patent/EP3032107A3/fr
Application granted granted Critical
Publication of EP3032107B1 publication Critical patent/EP3032107B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
    • F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
    • F04D29/685—Inducing localised fluid recirculation in the stator-rotor interface

Definitions

  • the invention relates to a turbomolecular pump with at least one turbomolecular pump stage, which comprises at least one blade rotor which is rotatably mounted about an axis.
  • turbomolecular pumps are generally known and are e.g. used in the semiconductor industry and in physical research to generate the high vacuum required there.
  • the turbomolecular pump is characterized by a blade rotor, also referred to below as a rotor, the structure of which is reminiscent of the rotor of a turbine.
  • the blade rotor interacts with a blade stator, also referred to below as the stator, and usually rotates at such a high speed that the tangential speed of the individual rotor blades is of a similar order of magnitude to the average thermal speed of the particles to be conveyed.
  • With a vertical pumping direction from top to bottom the majority of the particles collide with an underside of an angled rotor blade. A pumping action results from a preferred direction of the underside of the rotor blade in the pumping direction.
  • the rotor must also be surrounded by a wall to prevent the particles from flowing back outside the rotor area.
  • a wall is formed, for example, from the inside of a housing containing the turbomolecular pump stage or from the inside of stator spacer rings arranged between individual stator disks.
  • This wall has a cylindrical inner surface which is arranged concentrically to the rotor and whose preferred direction points radially inward and thus in the pumping direction. Particles by themselves or after colliding with a rotor blade on the cylindrical inner surface of the wall, there is no longer any pumping action.
  • a turbomolecular pump according to the preamble of claim 1 is known from the EP 0 568 069 A2 known.
  • a turbomolecular pump having the features of claim 1, and in particular in that a wall which at least partially surrounds the blade rotor is provided with at least one depression on at least one pump-effective subarea of its side facing the blade rotor, the depression being a spiral or has a helical course and / or the pump-effective portion is designed as a Holweck stator.
  • the performance of the turbomolecular pump can be improved by giving particles that strike the wall a preferred direction in the pumping direction.
  • the pumping speed and the compression can be increased on an existing flange with an existing pump.
  • the invention enables the technical adaptation of a static component of the turbomolecular pump. Static components are not exposed to such high mechanical loads like rotor components. They can therefore be changed and installed without qualification. For this reason, further developments of turbomolecular pumps are particularly advantageous in terms of development technology if they only relate to static components, as is possible here according to the invention.
  • the depression has a spiral or helical shape.
  • the depression therefore has a thread course which corresponds to the course of the depression in Gaede thread pumps or molecular pumps according to Holweck.
  • the depression can be designed as a helix.
  • the spiral or screw-shaped course of the depression advantageously has the same direction of rotation as the blade rotor.
  • the pump-effective part of the wall is alternatively or additionally designed as a Holweck stator.
  • the Holweck stator which is known per se, is applied to a turbomolecular pump stage with a few constructive measures.
  • the pumping action is further improved if the depression has a course with an axial component and / or with a slope different from zero. This gives the particles a preferred direction, also with an axial component. The pumping action in the axial direction is thus improved.
  • the depression can furthermore be designed in the manner of a groove or channel. This further improves the guidance of the particles in their preferred direction.
  • a groove or such a channel can be made particularly easily in an inside wall.
  • the pump-effective partial area is advantageously provided with a plurality of, in particular non-contiguous, depressions.
  • the depressions can advantageously run parallel to one another.
  • the pumping action of the inside of the wall can be increased in particular in proportion to the number of depressions. Disjointed and / or parallel depressions can also be introduced particularly easily and prevent backflow between the depressions.
  • the wall can advantageously be formed by a housing surrounding the blade rotor.
  • the pump-effective section is formed on the inside of the housing. This means that there is no need to insert an additional wall into the pump housing.
  • the recess can also be made by casting the housing or by milling.
  • the housing can represent the outer housing of the pump. As a result, even fewer individual parts are required.
  • the wall can also be formed, for example, by a ring element surrounding the blade rotor and the pump-effective partial area can be formed on the inside of the ring element.
  • the ring element is easy to machine and assemble, but represents an additional part of the vacuum pump.
  • the ring element can be designed to be arranged between two stator disks and thus to define their axial distance between them.
  • the ring element can in particular be a spacer ring, a spacer ring, a spacer sleeve and / or a spacer sleeve.
  • the blade rotor comprises a plurality of rotor disks arranged axially one after the other, integrally connected to one another or separate.
  • the pump performance of the turbomolecular pump can be further improved by several rotor disks.
  • the pump-effective partial area extends in the axial direction only over a subset of rotor disks, preferably comprising the rotor disk closest to the suction side of the pump, in particular over exactly one rotor disk.
  • the pumping effect can be improved particularly effectively by the depression according to the invention.
  • At least some blades of a blade stator interacting with the blade rotor can be connected to the wall. This results in a simpler construction of the turbomolecular pump.
  • the pump-effective subarea can advantageously be located axially outside of blades of a blade stator interacting with the blade rotor.
  • the pump-effective subarea is then only arranged opposite the blades of the blade rotor, that is to say not at the level of the stator.
  • a pump-effective region of the wall can extend at least substantially over the entire axial length of the turbomolecular pump.
  • a blade stator which interacts with the blade rotor comprises a plurality of stator disks arranged axially one after the other, the pump-effective partial region being located only axially between the stator disks and / or axially adjacent to at least one of the stator disks.
  • the pump-effective subarea can be formed by the inner sides of stator spacer rings located between stator disks and thus at the level of a rotor disk. This facilitates the insertion of the depression.
  • blades of a blade stator interacting with the blade rotor each have an angle of attack in a radially outer end region which is at least approximately equal to a slope of the depression.
  • the depression extends at least substantially parallel to the alignment or the angle of attack of the stator blades. This further improves the forwarding of the particles.
  • the blades of the blade rotor each have an angle of attack in a radially outer end region which differs between 45 ° and 90 ° from an increase in the depression.
  • the depression is arranged perpendicularly or at an acute angle to the rotor blades.
  • the pump-effective sub-area has a plurality of parallel depressions which are separated from one another by webs, the number of webs being at least approximately equal to the number of blades per stator disk of a blade stator interacting with the blade rotor. It can be advantageous to provide the same number of depressions or as many webs as stator blades. Furthermore, the number of rotor blades can also be the same as the number of stator blades. The probability of passage of the individual particles can thereby be further improved.
  • the stator blades can be firmly connected to the webs on the inside of the wall, in particular they can be made of material.
  • the stator blades can thus spring from the webs between the depressions.
  • the depressions can also extend between the stator blades.
  • the depressions can also extend continuously over several turbomolecular pump stages or over several alternately arranged rotor and stator disks.
  • the depressions can be designed as multi-start internal threads. In this way, an improved continuous particle flow in the pump-effective sub-area can be achieved.
  • a depression according to the invention can also be arranged on the inside of a stator spacer ring. This facilitates the manufacture of turbomolecular pumps with several turbomolecular pump stages or with several alternating rotor and stator disks.
  • the object of the invention also achieves a turbomolecular pump with at least one turbomolecular pump stage, which is surrounded at least in a partial axial area by a Holweck stator, the pump-effective side of which faces the blade rotor of the turbomolecular pump stage.
  • the invention combines a turbomolecular pump stage with a Holweck pump stage or creates a hybrid pump stage from these two pump types.
  • Fig. 1 shows, purely by way of example, a typical basic structure of a turbomolecular pump with a turbomolecular pump section 56 and a Holweck pump section 58.
  • the turbomolecular pump comprises a rotor shaft 36 which is rotatable in a housing 38 by a ball or generally a roller bearing 30 on the discharge side and by a A radial bearing 32 designed as a permanent magnet bearing is mounted on the suction side 40 of the turbomolecular pump.
  • a plurality of rotor disks 12 are seated on the rotor shaft 36 and rotate together with the rotor shaft 36 during operation.
  • Stator disks 14 are arranged axially alternating with the rotor disks 12 between the rotor disks 12.
  • the stator disks 14 are in their mutual axial distance by spacer rings 54 set.
  • the spacer rings 54 each have a wall on their side facing the rotor disks 12, the wall according to the invention each having one or more depressions, for example according to the embodiment of FIG Fig. 5 , are provided.
  • the Fig. 2 shows a blade rotor 12 and a blade stator 14 of a turbomolecular pump stage.
  • the blade rotor is surrounded by a wall 16 in the radial direction.
  • the blade rotor 12 rotates about a concentric axis (not shown) with the direction of rotation 44.
  • Rotor blades 18, which are twisted in themselves, extend from radially inward to radially outward. That is, the angle of attack, which relates to the radially outer ends of the stator blades, is steeper than the angle of the origin of the rotor blades.
  • the blade rotor is also essentially designed as a disk, ie it extends essentially in the radial direction and has a thickness in the axial direction.
  • the blade stator 14 of the Fig. 2 is essentially the same as the blade rotor 12, but is, in a way, mirror-inverted.
  • the stator blades 20 likewise originate radially on the inside of the blade stator 14. However, they can also originate radially on the outside, for example on the wall 16.
  • the wall 16 surrounds the blade rotor 12 in the radial direction.
  • the wall 16 has depressions 22 on the inside, ie on the side facing the blade rotor.
  • the depressions 22 are each designed as a groove and extend helically in the axial direction.
  • Crosspieces 24 are formed between the depressions 22.
  • the number of depressions 22 and the number of webs 24 are in each case equal to the number of stator blades 20 and equal to the number of rotor blades 18.
  • the depressions 22 are arranged parallel to one another and parallel to the outer ends of the stator blades 20.
  • the pump direction is in Fig. 2 from top to bottom, i.e. axially downwards.
  • the Fig. 3 shows an alternative view of the turbomolecular pump stage of FIG Fig. 2 .
  • the blade rotor 12 and the blade stator 14 are arranged axially adjacent.
  • the blade rotor is radially enclosed by the wall 16.
  • the wall 16 has on its inside the depressions 22 and the webs 24 arranged between them.
  • the blade rotor 12 rotates with its rotor blades 18 within the wall 16.
  • the stator blades 20 of the blade stator 14 are arranged statically.
  • the pump-effective partial area that is to say the axial extent of the depressions 22, extends only over the axial width of the rotor blades 18.
  • the webs 24 between the depressions 22 run parallel to the depressions 22. They are narrower than the depressions 22.
  • the depressions 22 are designed as channel-like, rectangular grooves on the inside of the wall 16. Accordingly, the webs 24 are also rectangular.
  • the webs 24 and the depressions 22 extend parallel to the radially outer ends of the stator blades 20.
  • the webs 24 are each arranged in the circumferential direction at the same location as the stator blades 20.
  • the axially lower, i.e. in the Fig. 3 the rear ends of the depressions 22 are arranged between the stator blades 20 in the circumferential direction. A particle stream in a depression 22 can thereby flow freely between the stator blades 20.
  • the axially lower ends of the depressions 22 face the blade stator.
  • the Fig. 4 shows a schematic diagram of two turbomolecular pump stages.
  • a rotor region 26, a stator region 28, a further rotor region 26 and a further stator region 28 are arranged axially adjacent.
  • turbomolecular pump comprises two rotor and two stator disks, which together can also be referred to as a turbomolecular pump stage.
  • the pumping direction runs from top to bottom.
  • the rotor blades 18 move from left to right.
  • the stator blades 20 are arranged statically in the stator regions.
  • depressions 22 are arranged inside on a wall 16, not shown (e.g. after Fig. 2 or 3rd ) depressions 22 are arranged.
  • Crosspieces 24 are arranged between the depressions 22.
  • the webs 24 are made wider than the depressions 22.
  • the depressions 22 as well as the webs 24 are arranged parallel to the stator blades 20.
  • the angle of attack 46 of the stator blades 20 is therefore at their radially outer ends equal to the slope 48 of the depressions 22.
  • the depressions 22 are also located centrally between the stator blades 20 in the circumferential direction. The depressions 22 thus extend in the pumping direction from an upper suction side to a lower discharge side continuously over both turbomolecular pump stages shown.
  • the angle of incidence 50 of the rotor blades 18 is 90 ° greater than the angle of incidence 46 of the stator blades 20.
  • the rotor blades 18 and the stator blades 20 are therefore aligned perpendicular to one another at their radially outer ends.
  • the radially outer ends of the rotor blades 18 are therefore also arranged perpendicular to the slope 48 of the depressions 22.
  • FIG. 5 schematically shows some components of a turbomolecular pump according to the invention, specifically in a basic illustration a vane rotor 12 also known as a rotor disk with vanes 18, which is rotatably mounted on a rotor shaft 36 and of which only one rotor disk 12 is shown.
  • a vane rotor 12 also known as a rotor disk with vanes 18, which is rotatably mounted on a rotor shaft 36 and of which only one rotor disk 12 is shown.
  • the Blade rotor 12 rotates with rotor shaft 36 in rotor direction of rotation 44. As a result, it effects a pumping process in pumping direction 42 from an intake side 40 to an exhaust side 52.
  • the rotor disk 12 is shown in section.
  • the visible rotor blade 18 to the right of the axis of rotation 34 extends axially upward away from the viewer, while the visible rotor blade 18 to the left of the axis of rotation 34 extends axially upward to the viewer.
  • the rotor shaft 36 and the rotor disk 12 rotate about their axis of rotation 34.
  • the rotor shaft 36 is mounted radially and preferably also axially on the ejection side 52 with a roller bearing 30.
  • the roller bearing 30 can be designed, for example, as a ball bearing or as a cylindrical roller bearing.
  • the rotor shaft 36 is supported on the suction side 40 with a contactless and lubrication-free radial bearing 32, preferably with a magnetic bearing.
  • the blade rotor 12 of the Fig. 5 is surrounded by a housing 38.
  • the housing 38 has depressions 22 on its inner side facing the blade rotor 12.
  • a ring element such as a spacer ring 54 (cf. Fig. 1 ) can be provided with depressions 22 according to the invention, ie component 38 in Fig. 5 then represents such a spacer ring which interacts with the rotor disk 12 in the manner according to the invention.
  • the depressions 22 are arranged helically around the blade rotor 12 in the form of grooves.
  • the direction of rotation of the helical recesses 22 corresponds to the direction of rotation 44 of the blade rotor 12. In the Fig. 2 , 3rd and 5 the direction of rotation corresponds to that of a left-handed thread.
  • Crosspieces 24 are formed between the depressions 22.
  • the webs 24 are here just as wide as the depressions 22.
  • the pump-active partial area of the inner wall of the housing 38 goes into Fig. 5 axially in both directions beyond the blade rotor 12. In Fig. 5 the depressions 22 have an incline which is less than 45 °.
  • the depressions 22 are designed as vertically milled grooves.
  • a blade stator also referred to as a stator disk, can be arranged axially below and / or above the blade rotor 12.
  • Further turbomolecular pump stages can also be arranged axially above and below the blade rotor 12.
  • the structure can therefore, for example, correspond to the turbomolecular pump section Fig. 1 be chosen.
  • stator disk adjacent to the rotor disk 12.
  • two or more rotor disks can be arranged axially in direct succession before another stator disk follows, ie there are then at least one pair of immediately successive rotor disks, between which no stator disk is arranged in each case.
  • stator disks can also be provided, ie stator disks can also be dispensed with entirely, at least for a turbomolecular pump section of the turbomolecular pump.
  • a turbomolecular pump section of the turbomolecular pump For such a construction of one or more turbomolecular pump sections of a turbomolecular pump and for such a turbomolecular pump as a whole, which otherwise have a typical construction as for example in Fig. 1 protection can be shown separately.
  • Axial areas of such a pump section, in which there is no stator disk, can then have, according to the present invention, one or more ring-shaped or sleeve-shaped elements, each of which forms a wall surrounding the rotor disks, which on at least one pump-effective partial area of its side facing the rotor disks at least one recess is provided, but this is not mandatory.
  • a Holweck stator can therefore be arranged around the blade rotor of a turbomolecular pump stage according to the invention.
  • gas particles which are accelerated outwards by the rotor against the inner wall of the housing are deflected in an axial direction by a Holweck stator thread. This in turn makes the probability of passage increases in the conveying direction and thus improves the power density of a turbomolecular pump.
  • the particles to be conveyed hit a smooth surface in the radial gap between the radially outer end of the rotor blades and the inner wall of the housing or the inside of the stator spacer ring. There the particles stuck briefly and left this surface again with a cosine distribution, whereby they did not experience any other preferred direction.
  • the Holweck thread according to the invention more particles can now leave the inner wall of the housing or the inside of a wall facing the blade rotor with an axial component which points in the direction of the pump outlet, ie in the pumping direction.
  • Simulation results for a single-stage turbomolecular pump with nitrogen to be pumped resulted in the following:

Claims (12)

  1. Pompe turbomoléculaire, comportant
    au moins un étage de pompage turbomoléculaire qui comprend au moins un rotor à aubes (12) monté de façon mobile en rotation autour d'un axe (34),
    dans laquelle
    une paroi (16) entourant au moins partiellement le rotor à aubes (12) est munie d'au moins un renfoncement (22) sur au moins une zone partielle active en pompage de son côté dirigé vers le rotor à aubes (12),
    caractérisée en ce que
    le renfoncement (22) présente un tracé de forme spiralée ou hélicoïdale et/ou la zone partielle active en pompage est réalisée sous forme de stator Holweck.
  2. Pompe turbomoléculaire selon la revendication 1,
    caractérisée en ce que
    le renfoncement (22) présente un tracé ayant une composante axiale et/ou un pas non nul.
  3. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    le renfoncement (22) est réalisé en forme de rainure ou de canal.
  4. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    la zone partielle active en pompage est pourvue d'une pluralité de renfoncements (22), en particulier non reliés entre eux, les renfoncements (22) s'étendant en particulier parallèlement les uns aux autres.
  5. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    la paroi (16) est formée par un carter (38) entourant le rotor à aubes (12), et la zone partielle active en pompage est réalisée sur le côté intérieur du carter (38), en particulier le carter (38) étant le carter extérieur de la pompe.
  6. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    la paroi (16) est formée par au moins un élément annulaire entourant le rotor à aubes (12) et réalisé en particulier sous forme d'insert séparé, et la zone partielle active en pompage est réalisée sur le côté intérieur de l'élément annulaire, et en particulier l'élément annulaire est un anneau d'écartement (54), un anneau d'espacement, une douille d'écartement et/ou une douille d'espacement, qui est disposé(e) entre deux disques de stator (14) qui se suivent en direction axiale.
  7. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    le rotor à aubes (12) comprend une pluralité de disques de rotor qui sont disposés de manière à se suivre axialement et qui sont reliés d'un seul tenant les uns aux autres ou qui sont séparés, et/ou en ce que la zone partielle active en pompage s'étend en direction axiale uniquement sur une quantité partielle de disques de rotor, comprenant de préférence le disque de rotor le plus proche du côté aspiration (40) de la pompe, en particulier sur exactement un disque de rotor.
  8. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins quelques-unes des aubes (20) d'un stator à aubes (14) coopérant avec le rotor à aubes (12) sont reliées à la paroi (16),
    et/ou en ce que
    la zone partielle active en pompage se situe axialement à l'extérieur des aubes (20) d'un stator à aubes (14) coopérant avec le rotor à aubes (12).
  9. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    un stator à aubes (14) coopérant avec le rotor à aubes (12) comprend une pluralité de disques de stator (14) disposés de manière à se suivre axialement, la zone partielle active en pompage s'étendant uniquement axialement entre les disques de stator (14) et/ou axialement au voisinage de l'un au moins des disques de stator (14).
  10. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    dans une zone d'extrémité radialement extérieure, les aubes (20) d'un stator à aubes (14) coopérant avec le rotor à aubes (12) présentent un angle d'incidence respectif (46) qui est au moins approximativement égal à un pas (48) du renfoncement (22).
  11. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    dans une zone d'extrémité radialement extérieure, les aubes (18) du rotor à aubes (12) présentent chacune un angle d'incidence (48) qui diffère de 45° à 90° d'un pas (48) du renfoncement (22).
  12. Pompe turbomoléculaire selon l'une des revendications précédentes,
    caractérisée en ce que
    la zone partielle active en pompage comprend une pluralité de renfoncements (22) s'étendant parallèlement les uns aux autres et séparés les uns des autres par des barrettes (24), le nombre des barrettes (24) étant au moins approximativement égal au nombre d'aubes (20) par disque de stator (14) d'un stator à aubes (14) coopérant avec le rotor à aubes.
EP15191438.9A 2014-12-08 2015-10-26 Pompe turbomoleculaire Active EP3032107B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014118083.6A DE102014118083A1 (de) 2014-12-08 2014-12-08 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP3032107A2 EP3032107A2 (fr) 2016-06-15
EP3032107A3 EP3032107A3 (fr) 2016-08-31
EP3032107B1 true EP3032107B1 (fr) 2020-04-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP15191438.9A Active EP3032107B1 (fr) 2014-12-08 2015-10-26 Pompe turbomoleculaire

Country Status (2)

Country Link
EP (1) EP3032107B1 (fr)
DE (1) DE102014118083A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579028A (en) * 2018-11-14 2020-06-10 Edwards Ltd Molecular drag stage
CN114352553B (zh) * 2021-12-31 2024-01-09 北京中科科仪股份有限公司 一种旋涡机构及复合分子泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum Gmbh Stator für eine Turbomolekularvakuumpumpe
DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10111546A1 (de) * 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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Publication number Publication date
DE102014118083A1 (de) 2016-06-09
EP3032107A2 (fr) 2016-06-15
EP3032107A3 (fr) 2016-08-31

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