EP2933497B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2933497B1
EP2933497B1 EP15159512.1A EP15159512A EP2933497B1 EP 2933497 B1 EP2933497 B1 EP 2933497B1 EP 15159512 A EP15159512 A EP 15159512A EP 2933497 B1 EP2933497 B1 EP 2933497B1
Authority
EP
European Patent Office
Prior art keywords
pump
holweck
pumping
thread
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15159512.1A
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German (de)
English (en)
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EP2933497A2 (fr
EP2933497A3 (fr
Inventor
Tobias Stoll
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP2015084159A priority Critical patent/JP6185957B2/ja
Publication of EP2933497A2 publication Critical patent/EP2933497A2/fr
Publication of EP2933497A3 publication Critical patent/EP2933497A3/fr
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Publication of EP2933497B1 publication Critical patent/EP2933497B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the present invention relates to a vacuum pump, in particular a turbo-molecular pump, comprising at least one pumping mechanism for pumping gas along a pump channel running from a main inlet to an outlet for the gas.
  • Vacuum pumps in which an intermediate inlet for the gas opens into the pumping channel, are used, for example, in connection with a mass spectrometer in order to pump out different pressure chambers to different pressure levels.
  • One of the pressure chambers can be pumped out via the main inlet and each additional pressure chamber can be pumped out via an intermediate inlet.
  • Such vacuum pumps are also referred to as split-flow pumps.
  • the EP 0 603 694 A1 describes a vacuum pump comprising a pumping mechanism for pumping gas along a pumping channel extending from a main inlet to an outlet for the gas, the pumping mechanism is designed such that a first pumping section of the pumping mechanism, which is provided upstream with respect to a second pumping section of the pumping mechanism, has a higher compressibility than the second pumping section, and / or wherein the second pumping section has a higher pumping speed than the first pumping section having.
  • an intermediate inlet for the gas opens into the pumping channel, the first pumping section being upstream of the mouth of the intermediate inlet and the second pumping section being located downstream of the mouth of the intermediate inlet.
  • the present invention is therefore based on the object of providing an improved vacuum pump in which the flow of gas against the pumping direction is as low as possible.
  • the vacuum pump according to the invention is designed such that a first pumping section of the pumping mechanism, which is provided upstream with respect to a second pumping section of the pumping mechanism, has a higher compressibility than the second pumping section, and / or that the pumping mechanism is designed such that the second pumping section has a higher pumping speed than the first pumping section.
  • At least one intermediate inlet and / or at least one flood opening opens into the pumping channel, the first section that is effective for pumping is located upstream of the mouth of the intermediate inlet and / or the flood opening, and the second section that is effective for pumping is located downstream of the mouth of the intermediate inlet and / or the flood opening .
  • the volume flow is regarded as the pumping speed, i.e. the volume that can be conveyed through a cross-sectional area of the pump channel per unit of time.
  • the first section that is effective for pumping is designed in such a way that it conveys a lower volume flow per unit of time through the pump channel than the second section that is effective for pumping.
  • the compressibility is preferably related to the overall length, i.e. it is based on the compression capacity per length.
  • the pump mechanism is thus preferably designed in such a way that the first section that is effective for pumping has a higher compressibility per structural length than the second section that is effective for pumping.
  • the compression ratio can be regarded as the compression ratio that can be achieved by the respective pumping effective first or second section at its respective downstream end.
  • the first section which is effective for pumping can thus achieve a higher compression ratio than the second section which is effective for pumping.
  • the pump mechanism comprises a Holweck pump mechanism.
  • the Holweck pump mechanism is a well-known pump mechanism that is used in turbo molecular pumps and that is particularly effective in the molecular flow range.
  • a Holweck pump mechanism has one or more Holweck pump stages, which are connected in series or in parallel to one another and, in turbo-molecular pumps, are normally connected downstream of the turbo-molecular pump stages.
  • a Holweck pump stage typically comprises a cylinder jacket-shaped stator element and a likewise cylinder jacket-shaped rotor element, with one The jacket surface of the stator element and a jacket surface of the rotor element form a pump-active surface of the Holweck pumping stage and are opposite one another, forming a narrow gap, which is referred to as the Holweck gap.
  • the Holweck gap Normally, several helically extending webs and also helical grooves arranged between the webs are formed in the jacket surface of the stator element, which form the pumping channel for the gas in the area of the Holweck pump stage.
  • the opposite lateral surface of the rotor element is smooth.
  • the webs and grooves can also be provided on the outer surface of the rotor element and the outer surface of the stator element can be smooth. However, this rarely occurs in practice.
  • the pumping action of the Holweck pumping stage is based on the fact that the gas molecules to be conveyed are propelled within the grooves by the rotating movement of the rotor element and are thereby conveyed in the axial direction.
  • the webs formed between the grooves seal the grooves and prevent or reduce an outflow or backflow of the gas molecules counter to the pumping direction.
  • the helically extending webs and grooves form a Holweck thread, whereby a helical shape is also to be understood as a shape which only forms a partial revolution of a helical line.
  • the stator element can have a Holweck thread on the outer or the inner jacket surface.
  • the stator element can also have such a pump-active surface on both lateral surfaces.
  • Each pump-active surface can form a Holweck pump stage with a pump-active jacket surface of a rotor element which is also essentially cylindrical and which rotates with respect to the stator element.
  • the opening of the intermediate inlet and / or the opening of the flood opening into the pump channel is located within a Holweck pump stage of a Holweck pump mechanism.
  • a Holweck pumping stage by appropriately designing the Holweck thread downstream or upstream of the mouth of the intermediate inlet and / or the mouth of the flood opening, a higher compression capacity can be achieved in front of the mouth and / or a higher suction capacity of the Holweck downstream of the mouth Pump stage is effected.
  • the first pumping section is formed by the part of the Holweck pumping stage located upstream of the mouth and the second pumping section is formed by the part of the Holweck pumping stage located downstream of the mouth.
  • the Holweck pumping stage or the Holweck stator of the pumping stage can thus be divided into two parts: the first pumping section with a high compression capacity upstream of the mouth and the second pumping section with a high pumping speed downstream of the mouth. This can be implemented in a simple design.
  • the mouth of the intermediate inlet and / or the mouth of the flood opening into the pump channel lies between two Holweck pump stages of a Holweck pump mechanism, which are arranged in series, in particular nested one inside the other.
  • the first pumping section can be formed by the Holweck pumping stage located upstream of the mouth and the second pumping section can be formed by the Holweck pumping stage located downstream of the mouth.
  • the first, upstream pumping stage can thus be designed in such a way that it has a higher compression capacity than the downstream Holweck pumping stage connected downstream of the orifice.
  • the downstream Holweck pumping stage can be designed in such a way that its pumping speed is higher than the pumping speed of the Holweck pumping stage in front of the mouth.
  • the first pumping section can have a first Holweck thread and the second pumping section can have a second Holweck thread.
  • the first Holweck thread is preferably designed in such a way that it achieves a higher compressive capacity than the second Holweck thread.
  • the first Holweck thread and the second Holweck thread can also be designed in such a way that the second Holweck thread achieves the higher suction capacity compared to the first Holweck thread.
  • the respective Holweck thread can be formed on a jacket surface of a stator element or a rotor element of the respective pumping section that interacts with the stator element and be formed by webs running helically on the jacket surface with grooves in between.
  • the higher compression capacity of the first Holweck thread and / or the higher suction capacity of the second Holweck thread can be achieved in that the two Holweck threads differ in at least one of the following parameters: the number of grooves, the pitch angle of the grooves or The webs, the size of a Holweck gap between the respective stator element and the associated rotor element, the depth of the grooves, the height of the webs, the width of the grooves and the width of the webs.
  • the first pumping section with the first Holweck thread and / or the second pumping section with the second Holweck thread can be designed in such a way that upstream of the opening of the intermediate inlet and / or the opening of the Flood opening a higher compression capacity and / or downstream of the mouth a higher suction capacity is provided.
  • the invention also relates to a vacuum device, in particular a leak detector or a mass spectrometer, with a vacuum pump according to the invention integrated into the vacuum device or arranged on the vacuum device.
  • the invention also relates to a vacuum pump, in particular a turbo-molecular pump, comprising at least one pump mechanism for pumping gas along a pump channel running from a main inlet to an outlet for the gas, at least one intermediate inlet and / or a flood opening for the gas opening into the pump channel, wherein the pump mechanism is designed in such a way that a first section of the pump mechanism which is effective for pumping, which is located upstream of the mouth of the intermediate inlet and / or the flood opening, has a higher compressibility than a second section of the pump mechanism which is effective for pumping, which is located downstream of the mouth, and / or wherein the pumping mechanism is designed in such a way that the second pumping section has a higher pumping speed than the first pumping section.
  • a vacuum pump in particular a turbo-molecular pump, comprising at least one pump mechanism for pumping gas along a pump channel running from a main inlet to an outlet for the gas, at least one intermediate inlet and / or a flood opening for the
  • the vacuum pump shown comprises a pump inlet 70 surrounded by an inlet flange 68 and a plurality of pump stages for conveying the gas present at the pump inlet 70 through a pump channel 10 to an in Fig. 1 pump outlet not shown.
  • the vacuum pump comprises a stator with a static housing 72 and a rotor which is arranged in the housing 72 and has a rotor shaft 12 which is rotatably mounted about an axis of rotation 14.
  • the vacuum pump is designed as a turbo-molecular pump and comprises a pumping mechanism which is formed by several turbo-molecular pumping stages connected in series with one another.
  • the turbomolecular Pump stages have a plurality of turbomolecular rotor disks 16 connected to the rotor shaft 12 and a plurality of turbomolecular stator disks 26 arranged in the axial direction between the rotor disks 16 and fixed in the housing 72.
  • the stator disks 26 are held at a desired axial distance from one another by spacer rings 36.
  • the rotor disks 16 and the stator disks 26 provide in the scoop area 50 an axial pumping action directed in the direction of arrow 58, that is, in the pumping direction.
  • the pump channel 10 extends through the turbomolecular pump stages and further through a Holweck pump mechanism arranged downstream of the turbomolecular pump stages.
  • the Holweck pump mechanism comprises three Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping.
  • the rotor-side part of the Holweck pump stages comprises a rotor hub 74 connected to the rotor shaft 12 and two cylinder-jacket-shaped Holweck rotor sleeves 76, 78 which are attached to the rotor hub 74 and carried by the latter, which are oriented coaxially to the axis of rotation 14 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 80, 82 are provided, which are also oriented coaxially to the axis of rotation 14 and are nested in one another in the radial direction.
  • the active pumping surfaces of the Holweck pump stages are each formed by the radial jacket surfaces of a Holweck rotor sleeve 76, 78 and a Holweck stator sleeve 80, 82, which lie opposite one another, forming a narrow radial Holweck gap.
  • One of the active pumping surfaces is smooth - in this case that of the Holweck rotor sleeve 76 or 78 - and the opposite, active pumping surface of the Holweck stator sleeve 80, 82 comprises a Holweck thread with grooves running helically around the axis of rotation 14 in the axial direction in which by the rotation the respective rotor sleeve 76, 78, the gas is advanced and pumped thereby.
  • the grooves essentially form the pump channel for the gas to be pumped.
  • the Holweck pump stages provide a pumping action, in particular due to the Holweck thread, in order to convey the gas conveyed along the pump channel by the turbomolecular pump stages through the Holweck pump stages to the outlet.
  • the rotatable mounting of the rotor shaft 12 is brought about by a roller bearing 84 in the area of the pump outlet and a permanent magnetic bearing 86 in the area of the pump inlet 70.
  • the permanent magnetic bearing 86 comprises a rotor-side bearing half 88 and a stator-side bearing half 90, each of which comprises a ring stack of a plurality of permanent magnetic rings 92, 94 stacked on top of one another in the axial direction.
  • the magnetic rings 92, 94 lie opposite one another, forming a radial bearing gap 96.
  • An emergency or safety bearing 98 is provided within the magnetic bearing 86, which is designed as an unlubricated roller bearing. During normal operation of the vacuum pump, the safety bearing 98 runs empty. It only comes into engagement with an excessive radial deflection of the rotor with respect to the stator in order to form a radial stop for the rotor which prevents a collision of the structures on the rotor side with the structures on the stator side.
  • a conical injection molded nut 100 is provided on the rotor shaft 12 with an outer diameter increasing towards the roller bearing 84.
  • the injection-molded nut 100 is in sliding contact with a stripper of an operating medium store, which several with an operating medium, such as a lubricant, soaked absorbent discs 102.
  • an operating medium such as a lubricant, soaked absorbent discs 102.
  • the operating medium is transferred from the operating medium reservoir via the scraper to the rotating injection nut 100 by capillary action and, as a result of the centrifugal force, is conveyed along the injection nut 100 in the direction of the increasing outer diameter to the roller bearing 84, where it has a lubricating function, for example.
  • a differently designed mounting of the rotor shaft 12 is also possible.
  • a five-axis active magnetic bearing could be provided for the rotor shaft 12.
  • the vacuum pump comprises a drive motor 104 for rotatingly driving the rotor, the rotor of which is formed by the rotor shaft 12.
  • a control unit 106 controls the motor 104.
  • the stator element shown can be used as a Holweck stator sleeve 82 in the vacuum pump of Fig. 1 be used.
  • the stator element has an essentially cylinder jacket-shaped basic shape and comprises three separate stator parts which divide the stator element into three angular sections.
  • the stator element can but also be made in one piece.
  • Each stator part 108, 108 ', 108 "comprises a plurality of web sections 118, 118', 118" on its outside as well as on its inside, which jointly form webs running helically in the direction of the longitudinal axis 116, which are located on the inner and outer circumferential surface of the stator element arranged are, and between which grooves 120 are formed, each running helically in the direction of the longitudinal axis 116.
  • the webs and grooves 120 each form a Holweck thread on the inner and outer circumferential surface of the stator element, which is suitable for a rotor element designed as a Holweck cylinder rotating with respect to the respective circumferential surface (cf. the Holweck rotor sleeves 76, 78 in Fig. 1 ) to form a Holweck pumping stage.
  • the respective rotor element has, in particular, a smooth, pump-active surface.
  • stator element significantly simplifies its manufacture, since the individual stator parts 108, 108 ', 108 ′′ can be manufactured without undercuts and easily formed.
  • the stator element can, however, also be manufactured in one piece, for example by milling out of a solid or hollow cylinder a vacuum-compatible metal or plastic.
  • the preferred flow path 148 of the gas pumped through the Holweck pumping stages is along the grooves 120 and is shown in FIG Fig. 2 marked.
  • an intermediate inlet 122 can be provided which opens into the pump channel 10 (cf. Fig. 3 , 4A and 5 ).
  • At least one pumping mechanism is designed such that a first section of the pump mechanism that is effective for pumping, which is located upstream of the opening of the intermediate inlet 122, has a higher compressibility than a second section that is effective for pumping and / or that the second section that is effective for pumping has a higher pumping speed than the first pumping section.
  • first or second effective pumping section is meant, in particular, that section or area of a pumping mechanism that is located directly in front of or behind the mouth.
  • the opening 134 of the intermediate inlet 122 into the pump channel 10 lies within a Holweck pump stage 124 which has an external stator 126 and an internal rotor 128 cooperating with the stator 126.
  • the stator 126 may be like that with respect to FIG Fig. 2 described stator element and thus have a cylinder jacket-shaped basic shape. How Fig. 3 shows, the intermediate inlet 122 runs in the manner of a channel with a circular cross-section transversely to the longitudinal axis 116 through the stator 126 and opens into the pump channel 10 running through the Holweck pumping stage.
  • the channel forming the intermediate inlet 122 can alternatively also be oval or angular Have cross-section.
  • the stator element 126 which - in relation to the pump channel 10 - lies upstream of the opening 134, forms the first section 136 that is effective for pumping, and the part of the stator 126 that is downstream of the opening 134 forms the second section 138 that is effective for pumping.
  • the stator 126 is thus divided into two parts: the first pumping section 136, which has a higher compressibility than the second pumping section 138, and the second pumping section 136, which has a higher pumping speed.
  • the Holweck threads 140, 142 formed on the respective pumping section 136, 138 differ from one another.
  • the first Holweck thread 140 on the inner circumferential surface of the first pumping section 136 is formed by webs 130 running in the shape of a helix with grooves 132 in between.
  • the second Holweck thread 142 provided on the inner circumferential surface of the second pumping section 138 is formed by webs 130 'running in a helical shape with grooves 132' in between.
  • the first Holweck thread 140 has a narrower and flatter structure than the second Holweck thread 142, which has an open, coarse and steep structure.
  • the respective structure of the first and second Holweck thread 140, 142 is achieved in that the grooves 132 are narrower than the grooves 132 ', that the slope of the webs 130 or the grooves 132 is less than the slope of the webs 130 'or the grooves 132', that the webs 130 are higher than the webs 130 ', that the grooves 132 are deeper than the grooves 132', and / or that the Holweck gap in the first Holweck thread 140 is smaller as the Holweck gap of the second Holweck thread 142.
  • the pitch is meant to be that of a conventional thread pitch.
  • the Holweck gap means the respective distance between the radially inwardly pointing end faces of the grooves 132, 132 ′ to the outer jacket surface of the Holweck rotor sleeve 144.
  • the first pumping section 136 achieves a high compressibility in the pump channel 10 in the area of the opening 134 and the second pumping section 138 achieves a high pumping speed in the area of the opening 134 in the pump channel 10 an undesirable one in a simple and efficient way Flow of the gas flowing in via the intermediate inlet 122 against the pumping direction can be avoided or at least reduced, since the gas is to a certain extent "sucked away" by the second pumping section 138 or the high compressibility brought about by the first pumping section 136 causes the gas to flow counter to the pumping direction prevented.
  • the first pumping section 136 with high compressibility is formed by the part of the Holweck pumping stage 124 located upstream of the mouth 134, while the second pumping section 138 with high pumping speed is formed by the part of the Holweck pumping stage 124 located downstream of the mouth 134 becomes.
  • the Holweck pump stage 124 with the external stator 126 and the internal rotor 128 rotatable about the longitudinal or rotational axis 116 with the Holweck rotor sleeve 144 can be used as a Holweck pump stage in a vacuum pump according to FIG Fig. 1 are used, in particular - with reference to the pump channel 10 - downstream of one or more turbomolecular pump stages and in series with further Holweck pump stages.
  • the vacuum pump can also be designed without an intermediate inlet, cf. the variant according to Figure 4B , when compared to the variant of the Figure 4A no intermediate inlet 122 is provided.
  • at least one pumping mechanism and in particular the radially outer Holweck pumping stage is designed such that a first pumping section of the pumping mechanism, which is upstream of a second pumping section of the pumping mechanism, has a higher compressibility than the second pumping section, and / or that the second pumping section has a higher pumping speed than the first pumping section. This can cause a backflow of gas against the pumping direction can be avoided or at least reduced during pump operation. The overall performance of the vacuum pump can thereby be improved.
  • the opening 134 of the intermediate inlet 122 into the pump channel 10 lies between a first Holweck pump stage 124 'and a second Holweck pump stage 124 ".
  • the two pump stages 124', 124" are arranged in series and nested one inside the other.
  • the pump channel 10 therefore has, as in FIG Fig. 5 is indicated, in the area of the mouth 134 of the intermediate inlet 122 from the first Holweck pump stage 124 'into the second Holweck pump stage 124 "and seen in the pumping direction 146 after the second Holweck pump stage 124" a deflection by 180 degrees.
  • the first Holweck pump stage 124 ' has a cylinder jacket-shaped stator 126', the inner jacket surface of which together with an outer jacket surface of a Holweck rotor sleeve 144 of the rotor 128 forms the actual pumping surface of the pump stage 124 '.
  • a first Holweck thread 140 is provided on the inner surface of the stator 126 ', as Fig. 5 shows.
  • the second Holweck pump stage 124 has a cylinder jacket-shaped stator 126", the outer jacket surface of which together with the inner jacket surface of the Holweck rotor sleeve 144 forms the actual pumping surface of the second Holweck pump step 124 ", with a second Holweck thread 142 on the outer jacket surface of the stator 126 "is provided.
  • the first pumping section is formed by the first Holweck pumping stage 124 'and the second pumping section is formed by the second Holweck pumping stage 124 ".
  • the first pumping section or the first Holweck pumping stage 124' has a higher compression capacity than the second effective pumping section or the second Holweck pumping stage 124 ′′, whose pumping speed is greater.
  • the higher compression capacity or the higher pumping speed can in turn be achieved through differences in the structure of the first and second Holweck threads 140, 142, respectively.
  • the first Holweck thread 140 has a narrower and flatter structure than the second Holweck thread 142, which has an open, coarse and steep structure.
  • the structure of the first or second Holweck thread 140, 142 can be implemented in that the grooves 132 are narrower than the grooves 132 ′, that the slope of the webs 130 or the grooves 132 is less than the slope of the webs 130 'or the grooves 132', that the webs 130 are higher than the webs 130 ', that the grooves 132 are deeper than the grooves 132', and / or that the Holweck gap in the first Holweck thread 140 is smaller than the Holweck gap in the second Holweck thread 142.
  • the first pumping section achieves a high compressibility in the pumping channel 10 in the area of the opening 134 and the second pumping section has a high pumping speed in the area of the opening 134 in the pumping channel 10.
  • an undesired flow of the gas flowing in via the intermediate inlet 122 against the pumping direction can be avoided or at least reduced in a simple and efficient manner, since the second pumping section effectively sucks the gas in the pumping direction, while the first pumping section the inflow of gas against the pumping direction largely prevented.
  • the two nested Holweck pump stages 124 ', 124 "can in a vacuum pump according to FIG Fig. 1 are used, in particular - with reference to the pump channel 10 - downstream of the turbomolecular pump stages.
  • the vacuum pump of the Fig. 6 is like the vacuum pump the Fig. 1 built up.
  • the radially outer Holweck stator sleeve 80 has a circumferential flood channel 152 on its outside 150, which connects a flood channel inlet 154 provided on the pump housing 72 with two flood openings 156.
  • the flood openings 156 run at least essentially in the radial direction through the Holweck stator sleeve 80 and open into the Holweck gap between the Holweck stator sleeve 80 and the Holweck rotor sleeve 76.
  • the flood channel inlet 154 is normally closed during the pump operation.
  • the flood channel inlet 154 is normally only opened after the vacuum pump has been switched off in order to ventilate the pump. By venting the pump, the rotor shaft 12 and the components arranged on it can be brought to a standstill more quickly.
  • the radially outer Holweck pump stage formed by the Holweck stator sleeve 80 and the Holweck rotor sleeve 76 comprises a first effective pumping section, which is upstream of the mouths of the flood openings 156 in relation to the flow direction of the gas to be pumped through the Holweck gap, and a second effective pumping section located downstream of the mouths.
  • the first pumping section has a higher compression capacity and a lower suction capacity than the second pumping section.
  • a gas flow out of the flood openings 156 in the direction of the upstream turbomolecular pump stages is thereby reduced in particular at a point in time when while the rotor shaft 12 is still rotating at a high speed. Damage to the blades of the turbomolecular pump stages by gas flowing in at high speeds can thus be avoided. At lower speeds, on the other hand, the gas flowing in is harmless to the turbomolecular pump stages. With a decreasing speed of rotation, the pumping effect brought about by the first and second pumping effective section decreases, so that with a decreasing speed of rotation more and more gas entering through the flood openings 156 flows to the turbo-molecular pump stages.
  • a variant of a vacuum pump can also have both at least one flood opening 156 and an intermediate inlet 120 in a Holweck gap of a Holweck pumping stage.
  • the transition between the first pumping section and the second pumping section of the Holweck pumping stage is in the area of the mouth of the intermediate inlet or in the area of the mouth of the flood opening.
  • the respective first section effective for pumping has a higher compressive capacity than the respective second section effective for pumping, the pumping speed of which is in turn higher.
  • variants are also conceivable in which only the compressive capacity of the first active pumping section is higher than that of the second active pumping section, or in which only the suction capacity of the second active pumping section is greater than that of the first active pumping section.

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Claims (8)

  1. Pompe à vide, en particulier pompe turbomoléculaire, comprenant au moins un mécanisme de pompage (124, 124', 124") pour pomper du gaz le long d'un canal de pompage (10) qui s'étend depuis une entrée principale (70) jusqu'à une sortie pour le gaz,
    dans laquelle
    le mécanisme de pompage (124, 124', 124") est réalisée de telle sorte qu'une première portion (136) efficace en pompage du mécanisme de pompage (124, 124', 124") qui est prévue en amont par rapport à une seconde portion (138) efficace en pompage du mécanisme de pompage (124, 124', 124") présente une capacité de compression plus élevée que la seconde portion (138) efficace en pompage, et/ou
    le mécanisme de pompage (124, 124', 124") est réalisé de telle sorte que la seconde portion (138) efficace en pompage présente une capacité d'aspiration plus élevée que la première portion (136) efficace en pompage, au moins une entrée intermédiaire (122) et/ou au moins une ouverture de remplissage (156) pour le gaz débouche dans le canal de pompage (10), la première portion (136) efficace en pompage est située en amont de l'embouchure (134) de l'entrée intermédiaire (122) et/ou de l'ouverture de remplissage (156), et
    la seconde portion (138) efficace en pompage est située en aval de l'embouchure (134) de l'entrée intermédiaire (122) et/ou de l'ouverture de remplissage (156), et
    l'embouchure (134) de l'entrée intermédiaire (122) et/ou l'embouchure de l'ouverture de remplissage (156) vers le canal de pompage (10) est située entre deux étages de pompage Holweck (124', 124") disposés en série, en particulier imbriqués l'un dans l'autre, d'un mécanisme de pompage Holweck.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    la première portion efficace en pompage est formée par l'étage de pompage Holweck (124') situé en amont de l'embouchure (134), et
    la seconde portion efficace en pompage est formée par l'étage de pompage Holweck (124") situé en aval de l'embouchure.
  3. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    la première portion (136) efficace en pompage comprend un premier filetage Holweck (140), et
    la seconde portion (138) efficace en pompage comprend un second filetage Holweck (142).
  4. Pompe à vide selon la revendication 3,
    caractérisée en ce que
    le premier filetage Holweck (140) et le second filetage Holweck (142) sont réalisés de telle sorte que le premier filetage Holweck (140) assure une capacité de compression plus élevée par rapport au second filetage Holweck (142).
  5. Pompe à vide selon la revendication 3 ou 4,
    caractérisée en ce que
    le premier filetage Holweck (140) et le second filetage Holweck (142) sont réalisés de telle sorte que le second filetage Holweck (142) assure la capacité d'aspiration plus élevée par rapport au premier filetage Holweck (140).
  6. Pompe à vide selon l'une des revendications 3 à 5,
    caractérisée en ce que
    le filetage Holweck respectif (140, 142) est réalisé sur une surface enveloppe d'un élément de stator (126, 126', 126") ou d'un élément de rotor (128) coopérant avec l'élément de stator (126, 126', 126") de la portion respective efficace en pompage et est formé par des nervures (130, 130') s'étendant en hélice sur la surface enveloppe avec des rainures (132, 132') interposées.
  7. Pompe à vide selon l'une des revendications 3 à 6,
    caractérisée en ce que
    la capacité de compression plus élevée du premier filetage Holweck (140) et/ou la capacité d'aspiration plus élevée du second filetage Holweck (142) est obtenue par le fait que les deux filetages Holweck (140, 142) se distinguent par l'un au moins des paramètres suivants :
    le nombre de rainures (132, 132'), l'angle de pas des rainures (132, 132') ou des nervures (130, 130'), la taille de l'interstice Holweck entre l'élément de stator respectif (126, 126', 126") et l'élément de rotor associé (128), la profondeur des rainures (132, 132'), la hauteur des nervures (130, 130'), la largeur des rainures (132, 132'), la largeur des nervures (130, 130').
  8. Appareil à vide, en particulier appareil détecteur de fuites ou spectromètre de masse, comportant une pompe à vide selon l'une des revendications précédentes intégrée dans l'appareil à vide ou disposée sur l'appareil à vide.
EP15159512.1A 2014-04-17 2015-03-17 Pompe à vide Active EP2933497B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015084159A JP6185957B2 (ja) 2014-04-17 2015-04-16 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014105582.9A DE102014105582A1 (de) 2014-04-17 2014-04-17 Vakuumpumpe

Publications (3)

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EP2933497A2 EP2933497A2 (fr) 2015-10-21
EP2933497A3 EP2933497A3 (fr) 2015-12-02
EP2933497B1 true EP2933497B1 (fr) 2020-10-07

Family

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EP15159512.1A Active EP2933497B1 (fr) 2014-04-17 2015-03-17 Pompe à vide

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EP (1) EP2933497B1 (fr)
JP (1) JP6185957B2 (fr)
DE (1) DE102014105582A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015007985U1 (de) * 2015-11-19 2017-02-21 Leybold Gmbh Vorrichtung zum Speichern kinetischer Energie
EP3670924B1 (fr) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de fabrication d'une telle pompe à vide
EP3845764B1 (fr) * 2021-03-31 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide et système de pompe à vide
EP4273405A1 (fr) * 2023-09-20 2023-11-08 Pfeiffer Vacuum Technology AG Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE102009021620B4 (de) * 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2650544B1 (fr) * 2010-12-10 2020-06-03 Edwards Japan Limited Pompe à vide
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP6185957B2 (ja) 2017-08-23
JP2015206362A (ja) 2015-11-19
EP2933497A2 (fr) 2015-10-21
EP2933497A3 (fr) 2015-12-02
DE102014105582A1 (de) 2015-10-22

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