EP3032106B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3032106B1
EP3032106B1 EP15177253.0A EP15177253A EP3032106B1 EP 3032106 B1 EP3032106 B1 EP 3032106B1 EP 15177253 A EP15177253 A EP 15177253A EP 3032106 B1 EP3032106 B1 EP 3032106B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
pump
vacuum pump
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15177253.0A
Other languages
German (de)
English (en)
Other versions
EP3032106A1 (fr
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102014118083.6A external-priority patent/DE102014118083A1/de
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15177253.0A priority Critical patent/EP3032106B1/fr
Priority to JP2015238692A priority patent/JP6138897B2/ja
Publication of EP3032106A1 publication Critical patent/EP3032106A1/fr
Application granted granted Critical
Publication of EP3032106B1 publication Critical patent/EP3032106B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the present invention relates to a vacuum pump, in particular a turbomolecular pump.
  • An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft on which a plurality of rotor disks are arranged axially offset. Each rotor disk has a plurality of rotor blades arranged distributed in the circumferential direction.
  • the exemplary turbomolecular pump comprises a stator with a plurality of stator disks, each of which comprises a plurality of stator blades arranged distributed in the circumferential direction.
  • the rotor disks and the stator disks are arranged alternately in the axial direction.
  • the exemplary turbomolecular pump has certain vacuum performance values, such as Pumping speed and compression ratio, which are set at a target speed of the rotor.
  • vacuum performance values such as Pumping speed and compression ratio
  • customer requirements regarding vacuum performance values can vary widely. In practice, therefore, many different vacuum pump models are kept available for different requirements, or a vacuum pump is complexly adapted to special requirements or even specifically developed accordingly.
  • WO 2005/033521 A1 a vacuum pump which has a second inlet or a lateral tap in the area of a helical element of a rotor.
  • a vacuum pump according to claim 1 and claim 5, and in particular in that at least one pure rotor area is provided in an axial area of the rotor, into which no lateral tap opens, in which at least two rotor sections follow one another without an intermediate stator section, or at least a pure stator area is provided, in which at least two stator sections follow one another without an intermediate rotor section.
  • an axial distance is provided between the two rotor sections of the pure rotor area or between the two stator sections of the pure stator area.
  • one or more rotor sections and / or stator sections are therefore missing compared to the usual structure of a vacuum pump, in which the rotor and stator sections are arranged alternately in the axial direction.
  • stator or rotor sections are deliberately omitted.
  • the rotor and stator sections are, in particular, so-called rotor or stator disks, each of which has a plurality of rotor or stator blades arranged distributed in the circumferential direction and have a disk shape insofar as they have a height measured in the axial direction, which is smaller and in particular much smaller than their diameter.
  • the rotor and stator sections are in particular stacked one above the other, alternately in the prior art, ie on a stator disk follows a rotor disc and vice versa.
  • turbomolecular pump with alternately arranged rotor and stator sections is assumed, as is known per se in the prior art.
  • This turbomolecular pump has certain vacuum performance values. If there are now demands on the turbomolecular pump which differ from the vacuum performance values of the pump, for example lower, only one or more rotor and / or stator sections are removed or omitted during assembly. As a result, the performance values of the pump that are possible within the framework of the construction of the turbomolecular pump are changed, e.g. reduced. However, this allows the requirements to be met in a very simple manner, while the pump does not have to be changed in construction.
  • stator section in the vacuum pump also fulfills structural tasks in addition to its vacuum function
  • stator section can be replaced by a replacement piece for the structural tasks, such as a spacer, in the pure rotor area.
  • a replacement piece for the structural tasks such as a spacer
  • the invention is An axial distance is therefore provided between the two rotor sections of the pure rotor area.
  • the vacuum pump has at least one side tap.
  • the side tap is different from an inlet and an outlet of the vacuum pump.
  • the invention can be used in a targeted manner in order to individually set the vacuum performance values of pump areas in front of and behind the tap.
  • the achievable pressure in a chamber connected to the side tap in which e.g. a larger amount of residual gas is permitted or desired, can be set specifically.
  • a complex design change of the vacuum pump is not necessary.
  • the lateral tap can be provided in at least one area of the rotor.
  • the lateral tap can be arranged between an inlet and an outlet of the vacuum pump.
  • the pure rotor region can be arranged in the axial direction directly in front of or behind the side tap or close to a side tap.
  • the vacuum pump can also have no side tap.
  • a stator section is arranged in the axial direction between the first rotor section in the pumping direction and the second rotor section in the pumping direction.
  • the rotor sections are each formed by a rotor disk which is produced separately from the rotor shaft and is fastened to the rotor shaft.
  • it can be a disk rotor.
  • a full rotor can be provided, in which the rotor sections are connected in one piece to the rotor shaft.
  • the vacuum pump shown as a turbomolecular pump 10 comprises an inlet 30 surrounded by an inlet flange 31 and a plurality of pump stages for conveying the gas present at the inlet 30 to an outlet.
  • the outlet is in Fig. 1 not shown (see, for example, the outlet 32 of Fig. 2 pump shown).
  • the turbomolecular pump 10 has no lateral tapping.
  • the turbomolecular pump 10 comprises a stator with a static housing 36 and a rotor 12 arranged in the housing 36 with a rotor shaft 14 which is rotatably mounted about an axis of rotation R.
  • the turbomolecular pump 10 comprises a plurality of turbomolecular pump stages, which are connected to one another in series with effective pumping, with a plurality of rotor sections connected to the rotor shaft 14, designed as turbomolecular rotor disks 16, and with a plurality of stator sections arranged in the axial direction between the rotor disks 16 and fixed in the housing 36 and designed as a turbomolecular stator disks 22 by spacer rings 40 in a desired axial distance from each other.
  • the rotor disks 16 and stator disks 22 provide an axial pumping action directed in the pumping direction P in a scoop area.
  • the turbomolecular pump 10 also comprises three Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series with one another.
  • the rotor-side part of the Holweck pump stages comprises two Holweck rotor sleeves 46, 48 fastened to and supported by the rotor shaft 14, which are oriented coaxially to the axis of rotation R and nested one inside the other.
  • two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the axis of rotation R and are nested one inside the other.
  • the pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces opposite one another with the formation of a narrow radial Holweck gap, namely a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52, respectively.
  • one of the pump-active surfaces is smooth, in the present case, for example, that of the Holweck rotor sleeve 46 or 48, the opposite pump-active surface of the respective Holweck stator sleeve 50 or 52 being structured with a helix around the axis of rotation R in the axial direction has extending grooves in which the gas is propelled by the rotation of the rotor 12 and thereby pumped.
  • the rotatable mounting of the rotor shaft 14 is effected by a roller bearing 54 in the area of the outlet and a permanent magnet bearing 56 in the area of the inlet 30.
  • the permanent magnet bearing 56 comprises a rotor-side bearing half 60 and a stator-side bearing half 58, each of which comprises an annular stack of a plurality of permanent magnetic rings stacked on one another in the axial direction, wherein the magnetic rings face each other, forming a radial bearing gap.
  • an emergency or catch bearing 62 is provided, which is designed as an unlubricated roller bearing and runs empty without contact during normal operation of the vacuum pump and only comes into engagement with an radial radial deflection of the rotor 12 with respect to the stator in order to make a radial stop to form for the rotor 12, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection nut 64 with an external diameter increasing towards the roller bearing 54 is provided on the rotor shaft 14, which is connected to one scraper by a plurality of devices, such as a lubricant, impregnated absorbent discs 66 comprising operating fluid storage is in sliding contact.
  • the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating injection nut 64 and, as a result of the centrifugal force along the injection nut 64, is conveyed in the direction of the increasing outer diameter of the injection nut 64 to the roller bearing 54, where it is e.g. fulfills a lubricating function.
  • the turbomolecular pump 10 comprises a drive motor 68 for rotatingly driving the rotor, the rotor of which is formed by the rotor shaft 14.
  • a control unit (not shown) controls the drive motor 68.
  • the turbomolecular group 10 of the Fig. 1 comprises a pure rotor region 28 and a pure stator region 29.
  • two rotor disks 16 follow one another without an interposed stator disk 22.
  • a stator disk 22 is therefore missing between the rotor disks 16.
  • a rotor disk 16 between the stator disks 22 is accordingly missing here.
  • the two rotor disks 16 in the pure rotor area 28 and the two stator disks 22 in the pure stator area 29 are each arranged at an axial distance from one another.
  • a respective stator disk 22 is designed in the form of two half rings which can be placed between the rotor disks 16 from the side, that is to say in the radial direction.
  • the stator disks 22 are placed on the spacer rings 40 and carried by them. Individual stator disks 22 can thereby be removed or omitted particularly easily in order to adapt the turbomolecular pump 10 in terms of its vacuum performance values to specific requirements.
  • FIG. 2 A further turbomolecular pump 10 is shown which, however, has a lateral tap 26.
  • the side tap 26 is provided for connecting an additional vacuum chamber, not shown, in which a vacuum of a different quality is to be set than is the case in a chamber connected to the inlet 30.
  • the lateral tap 26 defines a tap region 34 of the rotor 12, into which the lateral tap 26 opens.
  • No stator disks 22 are arranged in the tapping area 34.
  • a large axial distance is provided between the rotor disks 16, which delimit the tapping area, which essentially corresponds to the axial extent of the tapping area 34.
  • the tapping area 34 is therefore kept free of pump-active elements.
  • a pure rotor area 28 is provided in an axial area of the rotor 12, into which no lateral tapping opens.
  • the pure rotor area 28 here comprises three successive rotor disks 16 without stator disks 22 lying between them.
  • the pure rotor area 28 is arranged directly in front of the tapping area 34 in the pumping direction P.
  • a stator disk 22 is arranged in the pumping direction P between the first rotor disk 16 and the second rotor disk 16.
  • the turbomolecular pump 10 has rotor disks 16 and stator disks 22 arranged alternately in the axial direction.
  • FIG. 3 Another turbomolecular pump 10 is shown with a side tap. However, the side tap is not visible in the view shown.
  • the lateral tap defines a tap area 34, in which no stator disks 22 are arranged.
  • a pure rotor area 28 is provided, in which no stator disks 22 are likewise arranged.
  • a stator disk 22 is arranged between the first pair of rotor disks 16 in the pumping direction.
  • rotor disks 16 and stator disks 22 are provided in the alternating arrangement known per se.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe à vide (10), en particulier pompe turbomoléculaire, comportant au moins rotor (12) pourvu d'un arbre de rotor (14) et d'au moins une portion de rotor (16) disposée sur l'arbre de rotor (14) et comprenant une pluralité d'aubes de rotor (18) disposées en répartition en direction périphérique, et
    au moins un stator associé au rotor (12) et comprenant au moins une portion de stator (22) qui suit la portion de rotor (16) en direction axiale et qui présente une pluralité d'aubes de stator (24) disposées en répartition en direction périphérique,
    dans laquelle
    dans une zone axiale du rotor (12) dans laquelle ne débouche aucune prise latérale (26), il est prévu au moins une zone purement rotorique (28) dans laquelle au moins deux portions de rotor (16) se succèdent sans présence d'une portion de stator (22) interposée,
    caractérisée en ce que
    une distance axiale est prévue entre les deux portions de rotor (16) de la zone pure rotorique (28).
  2. Pompe à vide (10) selon la revendication 1,
    caractérisée en ce que
    il est prévu au moins une zone purement statorique (29) dans laquelle au moins deux portions de stator (22) se succèdent sans présence d'une portion de rotor (16) interposée, et une distance axiale est prévue entre les deux portions de stator (22) de la zone pure statorique (29).
  3. Pompe à vide (10) selon la revendication 1 ou 2,
    caractérisée en ce que
    les portions de rotor (16) sont formées par un disque de rotor respectif réalisé séparément de l'arbre de rotor (14) et fixé à l'arbre de rotor (14).
  4. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la zone purement rotorique (28) est disposée en direction axiale directement en avant ou en arrière d'une prise latérale (26) ou près d'une prise latérale (26).
  5. Pompe à vide (10), en particulier pompe turbomoléculaire, comportant au moins rotor (12) pourvu d'un arbre de rotor (14) et d'au moins une portion de rotor (16) disposée sur l'arbre de rotor (14) et comprenant une pluralité d'aubes de rotor (18) disposées en répartition en direction périphérique, et
    au moins un stator associé au rotor (12) et comprenant au moins une portion de stator (22) qui suit la portion de rotor (16) en direction axiale et qui présente une pluralité d'aubes de stator (24) disposées en répartition en direction périphérique,
    dans laquelle
    dans une zone axiale du rotor (12) dans laquelle ne débouche aucune prise latérale (26), il est prévu au moins une zone purement statorique (29) dans laquelle au moins deux portions de stator (22) se succèdent sans présence d'une portion de rotor (16) interposée,
    caractérisée en ce que
    une distance axiale est prévue entre les deux portions de stator (22) de la zone purement statorique (29).
  6. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    une prise latérale (26) est prévue dans au moins une zone du rotor.
  7. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    une prise latérale (26) est disposée entre une entrée (30) et une sortie (32) de la pompe à vide (10).
  8. Pompe à vide (10) selon l'une au moins des revendications 1 à 5,
    caractérisée en ce que
    la pompe à vide (10) ne présente pas de prise latérale.
  9. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    une portion de stator (22) est disposée en direction axiale entre la première portion de rotor, vue en direction de pompage (P), et la seconde portion de rotor (16), vue en direction de pompage (P).
EP15177253.0A 2014-12-08 2015-07-17 Pompe à vide Active EP3032106B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15177253.0A EP3032106B1 (fr) 2014-12-08 2015-07-17 Pompe à vide
JP2015238692A JP6138897B2 (ja) 2014-12-08 2015-12-07 真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014118083.6A DE102014118083A1 (de) 2014-12-08 2014-12-08 Turbomolekularpumpe
EP15177253.0A EP3032106B1 (fr) 2014-12-08 2015-07-17 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3032106A1 EP3032106A1 (fr) 2016-06-15
EP3032106B1 true EP3032106B1 (fr) 2020-02-12

Family

ID=57003097

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15177253.0A Active EP3032106B1 (fr) 2014-12-08 2015-07-17 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3032106B1 (fr)
JP (1) JP6138897B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4293232A1 (fr) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pompe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (fr) * 1959-12-17
JPH03237295A (ja) * 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
JPH09303288A (ja) * 1996-05-16 1997-11-25 Daikin Ind Ltd ターボ分子ポンプの翼
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102006020081A1 (de) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor- oder Statorscheibe für eine Molekularpumpe
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP6138897B2 (ja) 2017-05-31
EP3032106A1 (fr) 2016-06-15
JP2016109137A (ja) 2016-06-20

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