EP4293232A1 - Pompe - Google Patents

Pompe Download PDF

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Publication number
EP4293232A1
EP4293232A1 EP23204203.6A EP23204203A EP4293232A1 EP 4293232 A1 EP4293232 A1 EP 4293232A1 EP 23204203 A EP23204203 A EP 23204203A EP 4293232 A1 EP4293232 A1 EP 4293232A1
Authority
EP
European Patent Office
Prior art keywords
pump
outlet
inlet
plane
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23204203.6A
Other languages
German (de)
English (en)
Inventor
Michael Schill
Jan Hofmann
Niklas Wirth
Peter Vorwerk
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23204203.6A priority Critical patent/EP4293232A1/fr
Publication of EP4293232A1 publication Critical patent/EP4293232A1/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/52—Outlet

Definitions

  • the invention relates to a pump, in particular a turbomolecular pump.
  • turbomolecular pumps include a stator and a rotor that can be driven by an electric motor to rotate about a rotation axis, which are arranged in a housing of the pump.
  • the housing defines one or more inlets and one or more outlets.
  • Pumps are used to move a fluid from the pump inlet to the pump outlet, thereby creating a flow of fluid through a housing of the pump.
  • the fluid can be a gas or a liquid. They are used, for example, to create a vacuum in a recipient connected to the inlet. However, applications are also conceivable in which the inlet pressure of the pump is virtually the same as the outlet pressure.
  • the fluid can thereby also be conveyed through a component fluidly connected to the inlet and/or through a component fluidly connected to the outlet, which is provided by the customer.
  • the customer-side component can be, for example, a chamber of a measuring device or the like.
  • the pressure prevailing at the inlet and/or outlet during operation of the pump can, for example, be in a range between an upper region of a rough vacuum and a middle region of a fine vacuum.
  • the Pump is as compact and cost-effective as possible.
  • the pump should also be powerful and durable.
  • the inlet and outlet of the pump should generally be as accessible as possible so that the pump can be easily connected to components of a customer's body.
  • a pump in particular a turbomolecular pump, comprising a stator with at least one stator element and a rotor which can be driven by a motor to rotate about a rotation axis and has at least one rotor element, which together form a pump stage which is arranged in a pump housing.
  • the axis of rotation defines an axial direction and the pump housing defines a pump inlet and at least one pump outlet.
  • the at least one pump outlet is designed to be laterally offset in relation to the axis of rotation when viewed in the axial direction.
  • the centers of the inlets and outlets are not on top of each other when viewed in the axial direction, but rather next to each other, which simplifies the integration of the pump into some structures.
  • the pump inlet has at least one inlet opening, in particular precisely one inlet opening, which defines an inlet plane and the at least one pump outlet has at least one outlet opening, in particular precisely one outlet opening, which defines an outlet plane.
  • the pump inlet can but also have two or more inlet openings, each of which defines an inlet level, and the at least one pump outlet can have two or more outlet openings, each of which defines an outlet level.
  • the inlet plane and the outlet plane lie in the same plane or in parallel planes. In other words, the inlet port and the outlet port have the same orientation and/or opposite orientations with respect to the axial direction.
  • the inlet plane and the outlet plane enclose an angle of greater than 90° to less than 180°, that is to say the inlet opening and the outlet opening have different orientations with respect to the axial direction.
  • the angle can in particular have a value of greater than or equal to 100° to less than or equal to 170°, in particular greater than or equal to 110° to less than or equal to 160°, in particular greater than or equal to 120° to less than or equal to 150°.
  • the angle between the inlet plane and the outlet plane is defined as the opposite angle that is greater than 90°.
  • a customer component can be connected to the pump particularly easily and in a space-saving manner.
  • a conventional pump is used in such an "over-corner application" in which the pump inlet and the pump outlet are on opposite sides of the pump, the customer must first install a corresponding "diversion” which causes the direction of the fluid flow to be reversed. to be able to connect the component.
  • This can be complex and expensive and takes up additional space.
  • the inlet opening and the outlet opening are arranged on the same side of the pump and laterally offset from one another, such a "diversion" is eliminated.
  • the inlet plane may be perpendicular to the axial direction. Additionally or alternatively, the outlet plane can also be perpendicular to the axial direction. However, the inlet plane and/or the outlet plane can also be oblique to the axial direction.
  • the pump outlet can be arranged above or in the area of a first pump stage on the input side, viewed in a side view of the pump with respect to an inflow direction of a fluid flow.
  • the pump has exactly one pump stage.
  • the at least one pump outlet can include exactly one outlet opening, exactly two outlet openings or more outlet openings, so that several components can be connected to the outlet.
  • the pump can be operated or work in a pressure range between 0.01 mbar (1 Pa) and 100 mbar (10 4 Pa), in particular between 1 mbar (10 2 Pa) and 10 mbar (10 3 Pa). However, in certain applications the pressures prevailing during operation of the pump can also be over 100 mbar (10 4 Pa) or less than 1 mbar (1 Pa).
  • the rotor can comprise fewer than five rotor elements, in particular rotor disks. Additionally or alternatively, the stator can comprise fewer than five stator elements, in particular stator disks. It has proven to be particularly advantageous if the rotor has fewer than five, preferably three, rotor elements and the stator has fewer than five, preferably three, stator elements. For However, other configurations can also be selected for certain applications.
  • the pump can only have air cooling.
  • the pump housing can have cooling elements, e.g. B. have cooling fins and / or cooling pins that extend away from the pump housing.
  • the pump can also have active cooling, which includes, for example, a fan that generates an air flow flowing towards the housing and/or - if present - the cooling elements.
  • Active cooling can also be liquid-based cooling.
  • the pump can have one or more cooling lines and/or channels which are provided around and/or in the pump housing and through which cooling liquid, such as water, flows.
  • the pump can be a single-flow pump, which means that the pump does not have any pump stages that function in parallel.
  • the pump can further comprise at least one side channel, at least one hollow wake stage and/or at least one victory track stage.
  • the pump inlet may have an inlet area and the at least one pump outlet may have an outlet area, wherein the outlet area is greater than or equal to 100%, greater than or equal to 150%, greater than or equal to 200%, greater than or equal to 250%, or greater than or equal to 300% of the inlet area can be.
  • a ratio of inlet area to outlet area can be 1:1, 1:1.5, 1:2, 1:2.5, 1:3 or less.
  • the inlet area may be greater than or equal to 100%, greater than or equal to 150%, greater than or equal to 200%, greater than or equal to 250%, or greater than or equal to 300% of the outlet area.
  • a ratio of Inlet area to outlet area can be 1:1, 1.5:1, 2:1, 2.5:1 or 3:1 larger. This means that the pump can be used particularly variably.
  • the inlet area and the outlet area can be approximately the same size. “Approximately the same size” includes differences in the size of the areas of up to 20%, preferably up to 10%, particularly preferably up to 5%.
  • the at least one pump outlet can be designed as a slot with at least one curved side.
  • a shape of the curved side can be modeled on the shape of the inlet opening.
  • the slot is preferably designed, at least in sections, like a segment of a circle, with the two shorter transverse sides of the slot running parallel to one another and the two long sides of the slot having the same curvature and also running parallel to one another.
  • the pump housing can be designed in one piece.
  • the pump inlet and the at least one pump outlet can be formed in a common flange section of the pump, which significantly simplifies connecting the pump.
  • the pump inlet and the at least one pump outlet can also be formed on separate housing parts of the pump housing, for example on separate flange sections, whereby the pump can be used more variably.
  • Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms the alignment of the vacuum pump according to Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also Fig. 3 ).
  • At the Electronics housing 123 has several connections 127 for accessories.
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection via which flushing gas is supplied to protect the electric motor 125 (see e.g Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 is accommodated in the vacuum pump 111, in front of the gas delivered by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can therefore be operated hanging, so to speak.
  • the vacuum pump 111 can be designed so that it can be put into operation even if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 can be arranged not facing downwards, but facing to the side or facing upwards. In principle, any angle is possible.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening holes 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are in particular larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about a rotation axis 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another and having a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages that are arranged one inside the other in the radial direction and are effectively connected in series. There are other turbomolecular vacuum pumps (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages includes a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 which are fastened to the rotor hub 161 and supported by it, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested within one another when viewed in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, i.e. by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and forms a second Holweck pump stage with this.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175 and with this forms the third Holweck pump stage.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas is used to operate the Drive vacuum pump 111 into the Holweck grooves.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of an operating medium storage.
  • an injection screw may be provided instead of an injection nut. Since different designs are possible, the term “spray tip” is also used in this context.
  • the operating medium storage comprises a plurality of absorbent disks 187 stacked on top of one another, which are soaked with an operating medium for the rolling bearing 181, for example with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid storage via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the rolling bearing 181, where it e.g. fulfills a lubricating function.
  • the rolling bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack made up of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, with the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 on the radial outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • the rotor-side ring magnets 195 are fixed parallel to the rotation axis 151 by a cover element 207 coupled to the carrier section 201.
  • the stator-side ring magnets 197 are fixed parallel to the rotation axis 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnets 197.
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement when there is an excessive radial deflection of the rotor 149 relative to the stator to form a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 comes into engagement is large enough so that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures occurs under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other for transmitting the drive torque.
  • the motor stator 217 is fixed in the housing within the engine compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purging gas and which can be, for example, air or nitrogen, can reach the engine compartment 137 via the sealing gas connection 135.
  • the barrier gas can be used to protect the electric motor 125 from process gas, for example from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing vacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the engine compartment 217 compared to the Holweck pump stages located radially outside.
  • the Fig. 6 shows an exemplary embodiment of a pump 10 according to the invention.
  • the pump 10 can be a turbomolecular pump, but the inventive concept is not limited to this type of pump.
  • the pump 10 includes a pump housing 14, in which a stator and a rotor 149 are arranged, which together form a pump stage 26.
  • the rotor 149 can be driven to rotate about an axis of rotation 151 by means of an (electric) motor 125, the axis of rotation 151 defining an axial direction.
  • a pump inlet 115 and a pump outlet 117 are formed on the pump housing 14.
  • the pump inlet 115 is arranged coaxially with respect to the axial direction.
  • the pump inlet 115 can also be laterally offset when viewed in the axial direction, that is, it can be formed next to the axis of rotation 151.
  • the pump outlet 117 is laterally offset, viewed in the axial direction, next to the pump inlet 115, the pump stage 26 and the axis of rotation 151.
  • the pump outlet 117 is above the pump stage 26 with respect to an inflow direction 24 of a fluid stream 22.
  • the pump outlet 117 can also be in the Area next to the pump stage 26 be arranged, ie seen from the side in the area of the pump stage 26 be arranged (see Fig. 7 ).
  • the pump inlet 115 has an inlet opening 14 and the pump outlet 117 has an outlet opening 16.
  • the inlet opening 14 has an inlet surface 28 and defines an inlet plane 18.
  • the outlet opening 16 has a Outlet surface 30 and defines an outlet plane 20.
  • the inlet surface 28 and the outlet surface 30 are essentially the same size. However, it is also possible for the inlet area 28 to be larger than the outlet area 30, or vice versa.
  • the pump housing 14 includes a base body 44 and an outlet section 46.
  • the base body 44 and the outlet section 46 are formed in one piece, that is to say they form the pump housing 14 of the pump 10.
  • the pump inlet 115 and the pump outlet 117 are correspondingly in one common Housing 14 of the pump 14 is formed, in particular they are formed in a common flange section 36 of the pump 10 (see Fig. 10 ).
  • the base body 44 and the outlet section 46 are separate housing sections of the pump 10.
  • the pump inlet 115 and the pump outlet 117 are formed in separate housing sections of the pump 10, for example in two or more different flange sections that adjoin the base body 44 and/or the outlet section 46 of the pump housing 14.
  • the described configuration of the pump housing 14 also applies to the embodiments described below.
  • the inlet plane 18 and the outlet plane 20 are at the same height as seen in the axial direction, that is, they lie in or form the same plane 18, 20.
  • the inlet plane 18 and the outlet plane 20 are perpendicular to the axial direction.
  • the inlet opening 14 and the outlet opening 16 have the same orientation, that is, they point in the same direction. As a result, the inlet opening 14 and the outlet opening 16 are accessible from the same side of the pump 10.
  • a fluid flow 22 is generated which has an inflow direction 24 when entering the inlet opening 14 and flowing through the pump stage 26 and has an outflow direction 38 when exiting the outlet opening 16.
  • the inflow direction 24 and the outflow direction 38 run in opposite directions (or anti-parallel with respect to one another) and parallel to the axial direction, that is to say the fluid flow 22 undergoes a direction reversal of approximately 180° from the entry into the pump 10 to the exit from the pump 10.
  • a bottom 48 of the base body 44 of the pump housing 14 is axially offset from a bottom 50 of the outlet section 46 of the pump housing 14.
  • an embodiment is also possible in which the two undersides 48 and 50 are aligned.
  • the pump 10 has passive cooling.
  • the passive cooling can be integrated directly into the pump housing 14.
  • the passive cooling and the pump housing 14 can also be designed as separate components.
  • the passive cooling can be attached to the pump housing 14.
  • the passive cooling includes a plurality of cooling fins 52 that extend away from the pump housing 14.
  • the passive cooling can also include a plurality of cooling pins (not shown).
  • the pump 10 can also have active cooling, for example a cooling fan and/or liquid cooling, in particular water cooling.
  • the ones in the Fig. 7 Pump 10 shown differs from that in the Fig. 6 shown pump 10 essentially in that the inlet plane 18 and the outlet plane 20 do not lie in the same plane but are parallel planes. This means that the inlet plane 18 is axially offset from the outlet plane 20.
  • the inlet level 18 lies above or in front of the outlet level 20, viewed in the inflow direction 24.
  • a configuration is also possible in which the inlet level 18 lies below the outlet level 20.
  • the ones in the Fig. 8A Pump 10 shown differs from those in the Fig. 6 and 7 pumps 10 shown essentially in that the inlet opening 14 and the outlet opening 16 do not have the same orientation, that is, the surface normals of the openings 14, 16 do not point in the same direction.
  • the inlet plane 18 and the outlet plane 20 enclose an angle 40 of greater than 90° to less than 180°.
  • the angle 40 is approximately 150°.
  • the angle 40 can also be larger or smaller than 150°.
  • the angle 40 between the inlet plane 18 and the outlet plane 20 is to be understood as the opposite angle that is greater than 90 °.
  • the fluid flow 22 generated during operation of the pump 10 has an outflow direction 38 which is not opposite to the inflow direction 24, and the fluid flow 22 undergoes a change in direction of a total of more than 90° and less than 180°.
  • the inlet plane 18 is perpendicular to the axial direction and the outlet plane 20 is not perpendicular, i.e. oblique to the axial direction.
  • the outlet plane 20 is perpendicular to the axial direction and the inlet plane 18 is not perpendicular to the axial direction.
  • both planes 18, 20 can also be arranged obliquely to the axial direction.
  • the outlet opening 16 lies at least partially, in particular completely, below the inlet opening 14 in relation to the inflow direction 24. However, it is also conceivable that the Outlet opening 16 lies at least in sections, in particular completely, above the inlet opening 14.
  • the ones in the Fig. 9 Pump 10 shown differs from those in the Fig. 6 to 8 shown pumps 10 essentially in that the pump outlet 117 has two outlet openings 16a and 16b.
  • the outlet openings 16a, 16b each have an outlet area that is smaller than the inlet area 28.
  • a ratio of inlet area 28 to outlet area is, for example, approximately 5:1. It goes without saying that the ratio can also be any value, in particular between 1:1 and 10:1 or between 1:1 and 1:10, in particular between 1:1 and 5:1 or between 1:1 and 1:5 , especially between 1:1 and 3:1 or between 1:1 and 1:3.
  • the outlet opening 16a defines a first outlet plane 20a, which lies in the same plane as the inlet plane 18.
  • the outlet opening 16b defines a second outlet plane 20b, which runs parallel to the first outlet plane 20a and the inlet plane 18. All planes 18, 20a, 20b are perpendicular to the axial direction, so that the normals of the inlet opening 14 and the first outlet opening 16a have the same orientation with respect to the axial direction and the normals of the second outlet opening 16b point in the opposite direction.
  • the inlet port 14 and the first outlet port 16a are easily accessible from the inlet side of the pump 10
  • the second outlet port 16b is easily accessible from the side of the pump 10 opposite the inlet port 14.
  • the inlet plane 14, the first outlet plane 20a and/or the second outlet plane 20b are not perpendicular, ie oblique, to the axial direction.
  • the fluid flow 22 generated during operation of the pump 10 has an inflow direction 24 and a first and a second outflow direction 38a, 38b, each of which runs parallel to the axial direction.
  • the inflow direction 24 and the first outflow direction 38a run anti-parallel and the inflow direction 24 and the second outflow direction 38b run parallel to one another.
  • the fluid therefore exits both on the inlet side and on the side of the pump 10 opposite the inlet 115, that is, the fluid flow divides in the pump outlet 117.
  • the first outlet opening 16a and the inlet opening 14 are at the same height with respect to the axial direction. However, it is also conceivable that the first outlet opening 16a and the inlet opening 14 are axially offset from one another.
  • the first outlet opening 16a and the second outlet opening 16b are arranged coaxially, i.e. their centers lie one above the other when viewed in the axial direction.
  • the first outlet opening 16a and the second outlet opening 16b can be designed to be laterally offset from one another when viewed in the axial direction.
  • the openings 16a, 16b can be designed the same or differ in terms of shape and size.
  • the pump outlet 117 has two opposite outlet openings 16a, 16b.
  • the pump outlet 117 can also have more than two, for example three, four, five or more outlet openings 16, each of which defines the same or parallel outlet planes 20 or defines the outlet planes 20 which have an angle 40 of greater than 90 ° to less than 180 ° include.
  • the Fig. 10 shows a top view of an exemplary embodiment of a pump 10 with a flange section 36 in which both the inlet opening 14 and the outlet opening 16 are formed.
  • the flange section 36 is formed in one piece with the pump housing 14.
  • the flange section 36 can also be used as a separate housing component of the pump housing 14 be designed, ie the pump housing 14 can be designed in two or more pieces.
  • the inlet opening 14 has a circular shape and is arranged centrally above the axis of rotation 151.
  • the outlet opening 16 is laterally offset next to the inlet opening 14 and is designed as a slot 32 with two parallel curved sides 34 and two parallel straight sides 42.
  • the curvature of the long sides 34 is modeled on the circular shape of the inlet 117, which makes the pump 10 particularly compact.
  • the ratio of inlet area 28 to outlet area 30 is approximately 3:1. However, the ratio can be adjusted as needed.
  • the shape of the inlet opening 14 is also not to be understood as being limited to a circular shape.
  • it can also have the shape of a rectangle, in particular a square, or an ellipse.
  • the shape of the outlet opening 16 is not limited to the slot shape with two parallel curved sides 34 and two parallel straight sides 42.
  • the shape of the outlet opening 16 is designed to be complementary to the shape of the inlet opening 14.
  • the ratio of inlet to outlet surface 28, 30, the number of outlet openings 16, the orientation of the openings 14, 16 or the inlet and outlet planes 18, 20 with respect to the axial direction, the relative position of the Openings 14, 16 to each other and in relation to the pump stage, the relative position of the undersides 44, 46 to each other, as well as the one-piece or multi-piece design of the pump housing 14 can be combined in any way according to the various embodiments described.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP23204203.6A 2023-10-17 2023-10-17 Pompe Pending EP4293232A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP23204203.6A EP4293232A1 (fr) 2023-10-17 2023-10-17 Pompe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23204203.6A EP4293232A1 (fr) 2023-10-17 2023-10-17 Pompe

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EP4293232A1 true EP4293232A1 (fr) 2023-12-20

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8808870U1 (de) * 1988-07-09 1988-12-01 Grundfos International A/S, Bjerringbro Pumpenaggregat
DE9417422U1 (de) * 1994-10-31 1995-02-09 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Gehäuse
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6106223A (en) * 1997-11-27 2000-08-22 The Boc Group Plc Multistage vacuum pump with interstage inlet
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
DE202013009655U1 (de) * 2013-10-31 2015-02-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3032106A1 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe à vide
EP4108932A1 (fr) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Reciate et pompe à vide élevé

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8808870U1 (de) * 1988-07-09 1988-12-01 Grundfos International A/S, Bjerringbro Pumpenaggregat
DE9417422U1 (de) * 1994-10-31 1995-02-09 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Gehäuse
US6106223A (en) * 1997-11-27 2000-08-22 The Boc Group Plc Multistage vacuum pump with interstage inlet
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
DE202013009655U1 (de) * 2013-10-31 2015-02-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP3032106A1 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe à vide
EP4108932A1 (fr) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Reciate et pompe à vide élevé

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