EP2835536B1 - Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux - Google Patents
Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux Download PDFInfo
- Publication number
- EP2835536B1 EP2835536B1 EP14176840.8A EP14176840A EP2835536B1 EP 2835536 B1 EP2835536 B1 EP 2835536B1 EP 14176840 A EP14176840 A EP 14176840A EP 2835536 B1 EP2835536 B1 EP 2835536B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- side channel
- rotor
- grooves
- channel
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003746 surface roughness Effects 0.000 title 1
- 238000005086 pumping Methods 0.000 claims description 50
- 239000007789 gas Substances 0.000 claims description 43
- 230000009471 action Effects 0.000 claims description 8
- 230000003993 interaction Effects 0.000 claims description 2
- 230000006835 compression Effects 0.000 description 23
- 238000007906 compression Methods 0.000 description 23
- 230000002093 peripheral effect Effects 0.000 description 11
- 230000009467 reduction Effects 0.000 description 7
- 238000007789 sealing Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
- F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/50—Intrinsic material properties or characteristics
- F05D2300/516—Surface roughness
Definitions
- the grooves may be formed as irregular grooves.
- the grooves may be formed, for example, as with a grindstone introduced into the surface grooves.
- the grooves are arranged in the surfaces of the pump-active surfaces.
- the grooves in this case advantageously have a roughness of 0.1 ⁇ m to 100 ⁇ m.
- the invention relates to all vacuum pumps in which side channel pumping stages and / or screw pumps are provided.
- the upper curve 716 represents the compression as a function of pressure for a side channel with semi-circular semicircular side walls. Again, the compression is significantly increased by the design of the side channel compared to a side channel with a rectangular cross-section (curve 717). It can be seen that the side channels with two semi-circular in cross-section side walls have a much better compression.
- Fig. 29 the suction capacity of a side channel pumping stage is shown. It can be seen clearly that the according to Fig. 25 used breaker form leads to a higher suction capacity than a prior art breaker form.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Claims (3)
- Étage de pompe à vide d'une pompe à vis ou d'une pompe à canal latéral, lequel comprend un stator (51) et au moins un rotor, étage de pompe à vide dans lequel au moins une rainure filetée (50) est prévue dans le stator (51) et/ou dans le rotor ou dans lequel au moins un canal est prévu dans le stator (51), le rotor pénétrant dans le canal par une partie de rotor et une action de pompage étant obtenue par coopération de la partie de rotor et du canal,- l'au moins un canal ou l'au moins une rainure filetée (50) comprenant au moins une surface (41) dans laquelle des gorges (40) sont disposées,- et/ou des surfaces (41) actives en pompage de stators et/ou de rotors comprenant des gorges (40),- les gorges (40) présentant une profondeur entre 1 µm et 100 µm,- les gorges (40) présentant une largeur et/ou un espacement des gorges (40) les unes par rapport aux autres entre 1 µm et 1 mm,caractérisé en ce que
les gorges (40) de deux surfaces en regard actives en pompage sont disposées suivant un angle les unes par rapport aux autres. - Étage de pompe à vide selon la revendication 1, caractérisé en ce qu'une surface de fond et/ou au moins une paroi latérale de la rainure filetée comprend/comprennent des gorges (40).
- Étage de pompe à vide selon la revendication 1 ou 2, caractérisé en ce que les gorges (40) dans une surface active en pompage sont disposées le long d'une direction d'écoulement des gaz, transversalement à la direction d'écoulement des gaz et/ou suivant un angle par rapport à la direction d'écoulement des gaz.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16171251.8A EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171240.1A EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013108482.6A DE102013108482A1 (de) | 2013-08-06 | 2013-08-06 | Vakuumpumpstufe |
Related Child Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16171251.8A Division EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171251.8A Division-Into EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171240.1A Division EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
EP16171240.1A Division-Into EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2835536A2 EP2835536A2 (fr) | 2015-02-11 |
EP2835536A3 EP2835536A3 (fr) | 2015-05-06 |
EP2835536B1 true EP2835536B1 (fr) | 2018-11-28 |
Family
ID=51176220
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16171240.1A Active EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
EP16171251.8A Active EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP14176840.8A Active EP2835536B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16171240.1A Active EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
EP16171251.8A Active EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
Country Status (2)
Country | Link |
---|---|
EP (3) | EP3104014B1 (fr) |
DE (1) | DE102013108482A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014109004A1 (de) * | 2014-06-26 | 2015-12-31 | Pfeiffer Vacuum Gmbh | Siegbahnstufe |
DE102017121777A1 (de) * | 2017-09-20 | 2019-03-21 | Lutz Pumpen Gmbh | Modifizierte Seitenkanalpumpe sowie Verfahren zum Betrieb einer solchen |
US11519413B2 (en) | 2018-10-15 | 2022-12-06 | The Regents Of The University Of Michigan | Optimizing pumping of variable viscosities via microtextured miniaturized tesla pump |
EP3594498B1 (fr) | 2019-11-06 | 2022-01-05 | Pfeiffer Vacuum Gmbh | Système avec un dispositif de recyclage des gaz |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE643732C (de) * | 1934-05-26 | 1937-04-15 | Siemens Schuckertwerke Akt Ges | Selbstansaugende Kreiselpumpe mit Fluessigkeitsabdichtung |
DE691098C (de) * | 1937-03-19 | 1940-05-16 | Siemens Schuckertwerke Akt Ges | Fluegelrad fuer eine Fluegelradpumpe mit Fluessigkeitsabdichtung |
DE1428251B2 (de) * | 1963-03-09 | 1970-06-11 | Siemens AG, 1000 Berlin u. 8000 München | Ringgebläse nach dem Seitenkanalprinzip |
US3917431A (en) * | 1973-09-18 | 1975-11-04 | Dresser Ind | Multi-stage regenerative fluid pump |
FR2282548A1 (fr) * | 1974-08-08 | 1976-03-19 | Liber Jean Claude | Pale perfectionnee pour machine a pales tournant dans un fluide |
US4325672A (en) * | 1978-12-15 | 1982-04-20 | The Utile Engineering Company Limited | Regenerative turbo machine |
DE3029507A1 (de) * | 1980-08-04 | 1982-03-04 | Röhrnbacher, Emmerich, 7507 Pfinztal | Seitenkanalgeblaese |
DE3317868A1 (de) | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
JPH07111195B2 (ja) * | 1986-12-09 | 1995-11-29 | ダイキン工業株式会社 | 複合真空ポンプ |
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
JPH01267390A (ja) | 1988-04-18 | 1989-10-25 | Daikin Ind Ltd | 渦流形真空ポンプ |
US5020969A (en) * | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
DE3932288A1 (de) | 1989-09-28 | 1991-04-11 | Markus Heinermann | Gangschaltungskomponente fuer eine fahrradgangschaltung |
SU1758246A1 (ru) * | 1990-02-15 | 1992-08-30 | Научно-исследовательский институт энергетического машиностроения МГТУ им.Н.Э.Баумана | Двухступенчата вихрева машина |
IT1241431B (it) * | 1990-03-09 | 1994-01-17 | Varian Spa | Pompa turbomolecolare perfezionata. |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
JPH0886298A (ja) * | 1994-09-19 | 1996-04-02 | Hitachi Ltd | ドライターボ真空ポンプ |
EP0767308B1 (fr) * | 1995-10-06 | 2000-03-01 | Siemens Aktiengesellschaft | Compresseur à canal latéral |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
JP3638818B2 (ja) * | 1999-05-20 | 2005-04-13 | 愛三工業株式会社 | ウエスコ型ポンプ |
DE10012666A1 (de) * | 2000-03-15 | 2001-09-20 | Fhp Motors Gmbh | Pumpe, insbesondere Umwälzpumpe für Haushaltsmaschinen wie Wasch- und/oder Geschirrspülmaschinen |
DE10108631B4 (de) * | 2001-02-22 | 2005-06-30 | Nash-Elmo Industries Gmbh | Vakuumpumpenanlage und Verfahren zur Erzeugung eines Endvakuums |
DE202004010821U1 (de) * | 2003-07-23 | 2004-12-23 | The Boc Group Plc, Windlesham | Vakuumpumpenbauteil |
DE10334950A1 (de) | 2003-07-31 | 2004-12-09 | Nash_Elmo Industries Gmbh | Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters |
GB0327149D0 (en) * | 2003-11-21 | 2003-12-24 | Boc Group Plc | Vacuum pumping arrangement |
DE10357546A1 (de) * | 2003-12-10 | 2005-07-07 | Pfeiffer Vacuum Gmbh | Seitenkanalpumpstufe |
JP4252507B2 (ja) * | 2004-07-09 | 2009-04-08 | 愛三工業株式会社 | 燃料ポンプ |
DE102005008388A1 (de) * | 2005-02-24 | 2006-08-31 | Gebr. Becker Gmbh & Co Kg | Laufrad und Seitenkanalmaschine mit Laufrad |
US7445422B2 (en) * | 2005-05-12 | 2008-11-04 | Varian, Inc. | Hybrid turbomolecular vacuum pumps |
JP5084403B2 (ja) * | 2007-09-04 | 2012-11-28 | 株式会社大阪真空機器製作所 | 分子ポンプ |
DE102007053016A1 (de) * | 2007-11-05 | 2009-05-07 | Gardner Denver Deutschland Gmbh | Seitenkanalverdichter |
DE102009008792A1 (de) * | 2009-02-13 | 2010-08-19 | Continental Automotive Gmbh | Kraftstoffpumpe und Verfahren zur Fertigung einer Kraftstoffpumpe |
DE102009021642B4 (de) | 2009-05-16 | 2021-07-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102009028646A1 (de) * | 2009-08-19 | 2011-02-24 | Robert Bosch Gmbh | Förderaggregat |
DE102010019940B4 (de) | 2010-05-08 | 2021-09-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
-
2013
- 2013-08-06 DE DE102013108482.6A patent/DE102013108482A1/de not_active Withdrawn
-
2014
- 2014-07-14 EP EP16171240.1A patent/EP3104014B1/fr active Active
- 2014-07-14 EP EP16171251.8A patent/EP3088743B1/fr active Active
- 2014-07-14 EP EP14176840.8A patent/EP2835536B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
EP3088743A1 (fr) | 2016-11-02 |
EP2835536A2 (fr) | 2015-02-11 |
EP3104014B1 (fr) | 2021-09-29 |
EP3104014A1 (fr) | 2016-12-14 |
DE102013108482A1 (de) | 2015-02-12 |
EP2835536A3 (fr) | 2015-05-06 |
EP3088743B1 (fr) | 2019-12-25 |
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