EP2835536A3 - Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux - Google Patents
Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux Download PDFInfo
- Publication number
- EP2835536A3 EP2835536A3 EP20140176840 EP14176840A EP2835536A3 EP 2835536 A3 EP2835536 A3 EP 2835536A3 EP 20140176840 EP20140176840 EP 20140176840 EP 14176840 A EP14176840 A EP 14176840A EP 2835536 A3 EP2835536 A3 EP 2835536A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- yielding
- vacuum pump
- surface roughness
- lower gas
- special surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003746 surface roughness Effects 0.000 title 1
- 238000005086 pumping Methods 0.000 abstract 2
- 230000003993 interaction Effects 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
- F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/50—Intrinsic material properties or characteristics
- F05D2300/516—Surface roughness
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16171251.8A EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171240.1A EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013108482.6A DE102013108482A1 (de) | 2013-08-06 | 2013-08-06 | Vakuumpumpstufe |
Related Child Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16171240.1A Division-Into EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
EP16171240.1A Division EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
EP16171251.8A Division EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171251.8A Division-Into EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2835536A2 EP2835536A2 (fr) | 2015-02-11 |
EP2835536A3 true EP2835536A3 (fr) | 2015-05-06 |
EP2835536B1 EP2835536B1 (fr) | 2018-11-28 |
Family
ID=51176220
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16171251.8A Active EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171240.1A Active EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
EP14176840.8A Active EP2835536B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16171251.8A Active EP3088743B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration |
EP16171240.1A Active EP3104014B1 (fr) | 2013-08-06 | 2014-07-14 | Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière |
Country Status (2)
Country | Link |
---|---|
EP (3) | EP3088743B1 (fr) |
DE (1) | DE102013108482A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014109004A1 (de) * | 2014-06-26 | 2015-12-31 | Pfeiffer Vacuum Gmbh | Siegbahnstufe |
DE102017121777A1 (de) * | 2017-09-20 | 2019-03-21 | Lutz Pumpen Gmbh | Modifizierte Seitenkanalpumpe sowie Verfahren zum Betrieb einer solchen |
EP3867497A4 (fr) | 2018-10-15 | 2022-07-13 | The Regents of the University of Michigan | Optimisation du pompage de viscosités variables par le biais d'une pompe tesla miniaturisée microtexturée |
EP3594498B1 (fr) | 2019-11-06 | 2022-01-05 | Pfeiffer Vacuum Gmbh | Système avec un dispositif de recyclage des gaz |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3317868A1 (de) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
JPS63147990A (ja) * | 1986-12-09 | 1988-06-20 | Daikin Ind Ltd | 複合真空ポンプ |
FR2619867A1 (fr) * | 1987-08-24 | 1989-03-03 | Pfeiffer Vakuumtechnik | Pompe moleculaire polyetages |
JPH01267390A (ja) * | 1988-04-18 | 1989-10-25 | Daikin Ind Ltd | 渦流形真空ポンプ |
DE3932228A1 (de) * | 1988-09-28 | 1990-04-05 | Hitachi Ltd | Turbovakuumpumpe |
EP0568069A2 (fr) * | 1992-04-29 | 1993-11-03 | Varian Associates, Inc. | Pompes à vide turbomoléculaires |
GB2298457A (en) * | 1994-09-19 | 1996-09-04 | Hitachi Ltd | Vacuum pump |
EP0805275A2 (fr) * | 1996-05-03 | 1997-11-05 | The BOC Group plc | Pompes à vide |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
DE202004010821U1 (de) * | 2003-07-23 | 2004-12-23 | The Boc Group Plc, Windlesham | Vakuumpumpenbauteil |
US20050118013A1 (en) * | 2003-11-21 | 2005-06-02 | Downham Stephen E. | Vacuum pumping arrangement |
DE102005008388A1 (de) * | 2005-02-24 | 2006-08-31 | Gebr. Becker Gmbh & Co Kg | Laufrad und Seitenkanalmaschine mit Laufrad |
EP1724469A2 (fr) * | 2005-05-12 | 2006-11-22 | Varian, Inc. | Pompe turbomoléculaire hybride |
JP2009062812A (ja) * | 2007-09-04 | 2009-03-26 | Osaka Vacuum Ltd | 分子ポンプ |
EP2253851A2 (fr) * | 2009-05-16 | 2010-11-24 | Pfeiffer Vacuum GmbH | Pompe à vide |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE643732C (de) * | 1934-05-26 | 1937-04-15 | Siemens Schuckertwerke Akt Ges | Selbstansaugende Kreiselpumpe mit Fluessigkeitsabdichtung |
DE691098C (de) * | 1937-03-19 | 1940-05-16 | Siemens Schuckertwerke Akt Ges | Fluegelrad fuer eine Fluegelradpumpe mit Fluessigkeitsabdichtung |
DE1428251B2 (de) * | 1963-03-09 | 1970-06-11 | Siemens AG, 1000 Berlin u. 8000 München | Ringgebläse nach dem Seitenkanalprinzip |
US3917431A (en) * | 1973-09-18 | 1975-11-04 | Dresser Ind | Multi-stage regenerative fluid pump |
FR2282548A1 (fr) * | 1974-08-08 | 1976-03-19 | Liber Jean Claude | Pale perfectionnee pour machine a pales tournant dans un fluide |
US4325672A (en) * | 1978-12-15 | 1982-04-20 | The Utile Engineering Company Limited | Regenerative turbo machine |
DE3029507A1 (de) * | 1980-08-04 | 1982-03-04 | Röhrnbacher, Emmerich, 7507 Pfinztal | Seitenkanalgeblaese |
DE3932288A1 (de) | 1989-09-28 | 1991-04-11 | Markus Heinermann | Gangschaltungskomponente fuer eine fahrradgangschaltung |
SU1758246A1 (ru) * | 1990-02-15 | 1992-08-30 | Научно-исследовательский институт энергетического машиностроения МГТУ им.Н.Э.Баумана | Двухступенчата вихрева машина |
IT1241431B (it) * | 1990-03-09 | 1994-01-17 | Varian Spa | Pompa turbomolecolare perfezionata. |
EP0767308B1 (fr) * | 1995-10-06 | 2000-03-01 | Siemens Aktiengesellschaft | Compresseur à canal latéral |
JP3638818B2 (ja) * | 1999-05-20 | 2005-04-13 | 愛三工業株式会社 | ウエスコ型ポンプ |
DE10012666A1 (de) * | 2000-03-15 | 2001-09-20 | Fhp Motors Gmbh | Pumpe, insbesondere Umwälzpumpe für Haushaltsmaschinen wie Wasch- und/oder Geschirrspülmaschinen |
DE10108631B4 (de) * | 2001-02-22 | 2005-06-30 | Nash-Elmo Industries Gmbh | Vakuumpumpenanlage und Verfahren zur Erzeugung eines Endvakuums |
DE10334950A1 (de) | 2003-07-31 | 2004-12-09 | Nash_Elmo Industries Gmbh | Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters |
DE10357546A1 (de) * | 2003-12-10 | 2005-07-07 | Pfeiffer Vacuum Gmbh | Seitenkanalpumpstufe |
JP4252507B2 (ja) * | 2004-07-09 | 2009-04-08 | 愛三工業株式会社 | 燃料ポンプ |
DE102007053016A1 (de) * | 2007-11-05 | 2009-05-07 | Gardner Denver Deutschland Gmbh | Seitenkanalverdichter |
DE102009008792A1 (de) * | 2009-02-13 | 2010-08-19 | Continental Automotive Gmbh | Kraftstoffpumpe und Verfahren zur Fertigung einer Kraftstoffpumpe |
DE102009028646A1 (de) * | 2009-08-19 | 2011-02-24 | Robert Bosch Gmbh | Förderaggregat |
DE102010019940B4 (de) | 2010-05-08 | 2021-09-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
-
2013
- 2013-08-06 DE DE102013108482.6A patent/DE102013108482A1/de not_active Withdrawn
-
2014
- 2014-07-14 EP EP16171251.8A patent/EP3088743B1/fr active Active
- 2014-07-14 EP EP16171240.1A patent/EP3104014B1/fr active Active
- 2014-07-14 EP EP14176840.8A patent/EP2835536B1/fr active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3317868A1 (de) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
JPS63147990A (ja) * | 1986-12-09 | 1988-06-20 | Daikin Ind Ltd | 複合真空ポンプ |
FR2619867A1 (fr) * | 1987-08-24 | 1989-03-03 | Pfeiffer Vakuumtechnik | Pompe moleculaire polyetages |
JPH01267390A (ja) * | 1988-04-18 | 1989-10-25 | Daikin Ind Ltd | 渦流形真空ポンプ |
DE3932228A1 (de) * | 1988-09-28 | 1990-04-05 | Hitachi Ltd | Turbovakuumpumpe |
EP0568069A2 (fr) * | 1992-04-29 | 1993-11-03 | Varian Associates, Inc. | Pompes à vide turbomoléculaires |
GB2298457A (en) * | 1994-09-19 | 1996-09-04 | Hitachi Ltd | Vacuum pump |
EP0805275A2 (fr) * | 1996-05-03 | 1997-11-05 | The BOC Group plc | Pompes à vide |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
DE202004010821U1 (de) * | 2003-07-23 | 2004-12-23 | The Boc Group Plc, Windlesham | Vakuumpumpenbauteil |
US20050118013A1 (en) * | 2003-11-21 | 2005-06-02 | Downham Stephen E. | Vacuum pumping arrangement |
DE102005008388A1 (de) * | 2005-02-24 | 2006-08-31 | Gebr. Becker Gmbh & Co Kg | Laufrad und Seitenkanalmaschine mit Laufrad |
EP1724469A2 (fr) * | 2005-05-12 | 2006-11-22 | Varian, Inc. | Pompe turbomoléculaire hybride |
JP2009062812A (ja) * | 2007-09-04 | 2009-03-26 | Osaka Vacuum Ltd | 分子ポンプ |
EP2253851A2 (fr) * | 2009-05-16 | 2010-11-24 | Pfeiffer Vacuum GmbH | Pompe à vide |
Non-Patent Citations (1)
Title |
---|
MARYLAND METRICS: "SURFACE ROUGHNESS TABLES", 1 January 1998 (1998-01-01), XP055155944, Retrieved from the Internet <URL:http://mdmetric.com/pdf/surfruff.pdf> [retrieved on 20141201] * |
Also Published As
Publication number | Publication date |
---|---|
EP3088743B1 (fr) | 2019-12-25 |
EP2835536A2 (fr) | 2015-02-11 |
DE102013108482A1 (de) | 2015-02-12 |
EP3088743A1 (fr) | 2016-11-02 |
EP2835536B1 (fr) | 2018-11-28 |
EP3104014B1 (fr) | 2021-09-29 |
EP3104014A1 (fr) | 2016-12-14 |
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