EP2835536A3 - Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux - Google Patents

Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux Download PDF

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Publication number
EP2835536A3
EP2835536A3 EP20140176840 EP14176840A EP2835536A3 EP 2835536 A3 EP2835536 A3 EP 2835536A3 EP 20140176840 EP20140176840 EP 20140176840 EP 14176840 A EP14176840 A EP 14176840A EP 2835536 A3 EP2835536 A3 EP 2835536A3
Authority
EP
European Patent Office
Prior art keywords
yielding
vacuum pump
surface roughness
lower gas
special surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20140176840
Other languages
German (de)
English (en)
Other versions
EP2835536A2 (fr
EP2835536B1 (fr
Inventor
Dr. Aleksandr Shirinov
Michael Schweighöfer
Tobias Stoll
Sebastian Oberbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP16171251.8A priority Critical patent/EP3088743B1/fr
Priority to EP16171240.1A priority patent/EP3104014B1/fr
Publication of EP2835536A2 publication Critical patent/EP2835536A2/fr
Publication of EP2835536A3 publication Critical patent/EP2835536A3/fr
Application granted granted Critical
Publication of EP2835536B1 publication Critical patent/EP2835536B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
    • F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/516—Surface roughness

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP14176840.8A 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux Active EP2835536B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP16171251.8A EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP16171240.1A EP3104014B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013108482.6A DE102013108482A1 (de) 2013-08-06 2013-08-06 Vakuumpumpstufe

Related Child Applications (4)

Application Number Title Priority Date Filing Date
EP16171240.1A Division-Into EP3104014B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière
EP16171240.1A Division EP3104014B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière
EP16171251.8A Division EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP16171251.8A Division-Into EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration

Publications (3)

Publication Number Publication Date
EP2835536A2 EP2835536A2 (fr) 2015-02-11
EP2835536A3 true EP2835536A3 (fr) 2015-05-06
EP2835536B1 EP2835536B1 (fr) 2018-11-28

Family

ID=51176220

Family Applications (3)

Application Number Title Priority Date Filing Date
EP16171251.8A Active EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP16171240.1A Active EP3104014B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière
EP14176840.8A Active EP2835536B1 (fr) 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP16171251.8A Active EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP16171240.1A Active EP3104014B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière

Country Status (2)

Country Link
EP (3) EP3088743B1 (fr)
DE (1) DE102013108482A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014109004A1 (de) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Siegbahnstufe
DE102017121777A1 (de) * 2017-09-20 2019-03-21 Lutz Pumpen Gmbh Modifizierte Seitenkanalpumpe sowie Verfahren zum Betrieb einer solchen
EP3867497A4 (fr) 2018-10-15 2022-07-13 The Regents of the University of Michigan Optimisation du pompage de viscosités variables par le biais d'une pompe tesla miniaturisée microtexturée
EP3594498B1 (fr) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Système avec un dispositif de recyclage des gaz

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
JPS63147990A (ja) * 1986-12-09 1988-06-20 Daikin Ind Ltd 複合真空ポンプ
FR2619867A1 (fr) * 1987-08-24 1989-03-03 Pfeiffer Vakuumtechnik Pompe moleculaire polyetages
JPH01267390A (ja) * 1988-04-18 1989-10-25 Daikin Ind Ltd 渦流形真空ポンプ
DE3932228A1 (de) * 1988-09-28 1990-04-05 Hitachi Ltd Turbovakuumpumpe
EP0568069A2 (fr) * 1992-04-29 1993-11-03 Varian Associates, Inc. Pompes à vide turbomoléculaires
GB2298457A (en) * 1994-09-19 1996-09-04 Hitachi Ltd Vacuum pump
EP0805275A2 (fr) * 1996-05-03 1997-11-05 The BOC Group plc Pompes à vide
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
DE202004010821U1 (de) * 2003-07-23 2004-12-23 The Boc Group Plc, Windlesham Vakuumpumpenbauteil
US20050118013A1 (en) * 2003-11-21 2005-06-02 Downham Stephen E. Vacuum pumping arrangement
DE102005008388A1 (de) * 2005-02-24 2006-08-31 Gebr. Becker Gmbh & Co Kg Laufrad und Seitenkanalmaschine mit Laufrad
EP1724469A2 (fr) * 2005-05-12 2006-11-22 Varian, Inc. Pompe turbomoléculaire hybride
JP2009062812A (ja) * 2007-09-04 2009-03-26 Osaka Vacuum Ltd 分子ポンプ
EP2253851A2 (fr) * 2009-05-16 2010-11-24 Pfeiffer Vacuum GmbH Pompe à vide

Family Cites Families (21)

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DE643732C (de) * 1934-05-26 1937-04-15 Siemens Schuckertwerke Akt Ges Selbstansaugende Kreiselpumpe mit Fluessigkeitsabdichtung
DE691098C (de) * 1937-03-19 1940-05-16 Siemens Schuckertwerke Akt Ges Fluegelrad fuer eine Fluegelradpumpe mit Fluessigkeitsabdichtung
DE1428251B2 (de) * 1963-03-09 1970-06-11 Siemens AG, 1000 Berlin u. 8000 München Ringgebläse nach dem Seitenkanalprinzip
US3917431A (en) * 1973-09-18 1975-11-04 Dresser Ind Multi-stage regenerative fluid pump
FR2282548A1 (fr) * 1974-08-08 1976-03-19 Liber Jean Claude Pale perfectionnee pour machine a pales tournant dans un fluide
US4325672A (en) * 1978-12-15 1982-04-20 The Utile Engineering Company Limited Regenerative turbo machine
DE3029507A1 (de) * 1980-08-04 1982-03-04 Röhrnbacher, Emmerich, 7507 Pfinztal Seitenkanalgeblaese
DE3932288A1 (de) 1989-09-28 1991-04-11 Markus Heinermann Gangschaltungskomponente fuer eine fahrradgangschaltung
SU1758246A1 (ru) * 1990-02-15 1992-08-30 Научно-исследовательский институт энергетического машиностроения МГТУ им.Н.Э.Баумана Двухступенчата вихрева машина
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
EP0767308B1 (fr) * 1995-10-06 2000-03-01 Siemens Aktiengesellschaft Compresseur à canal latéral
JP3638818B2 (ja) * 1999-05-20 2005-04-13 愛三工業株式会社 ウエスコ型ポンプ
DE10012666A1 (de) * 2000-03-15 2001-09-20 Fhp Motors Gmbh Pumpe, insbesondere Umwälzpumpe für Haushaltsmaschinen wie Wasch- und/oder Geschirrspülmaschinen
DE10108631B4 (de) * 2001-02-22 2005-06-30 Nash-Elmo Industries Gmbh Vakuumpumpenanlage und Verfahren zur Erzeugung eines Endvakuums
DE10334950A1 (de) 2003-07-31 2004-12-09 Nash_Elmo Industries Gmbh Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters
DE10357546A1 (de) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Seitenkanalpumpstufe
JP4252507B2 (ja) * 2004-07-09 2009-04-08 愛三工業株式会社 燃料ポンプ
DE102007053016A1 (de) * 2007-11-05 2009-05-07 Gardner Denver Deutschland Gmbh Seitenkanalverdichter
DE102009008792A1 (de) * 2009-02-13 2010-08-19 Continental Automotive Gmbh Kraftstoffpumpe und Verfahren zur Fertigung einer Kraftstoffpumpe
DE102009028646A1 (de) * 2009-08-19 2011-02-24 Robert Bosch Gmbh Förderaggregat
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
JPS63147990A (ja) * 1986-12-09 1988-06-20 Daikin Ind Ltd 複合真空ポンプ
FR2619867A1 (fr) * 1987-08-24 1989-03-03 Pfeiffer Vakuumtechnik Pompe moleculaire polyetages
JPH01267390A (ja) * 1988-04-18 1989-10-25 Daikin Ind Ltd 渦流形真空ポンプ
DE3932228A1 (de) * 1988-09-28 1990-04-05 Hitachi Ltd Turbovakuumpumpe
EP0568069A2 (fr) * 1992-04-29 1993-11-03 Varian Associates, Inc. Pompes à vide turbomoléculaires
GB2298457A (en) * 1994-09-19 1996-09-04 Hitachi Ltd Vacuum pump
EP0805275A2 (fr) * 1996-05-03 1997-11-05 The BOC Group plc Pompes à vide
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
DE202004010821U1 (de) * 2003-07-23 2004-12-23 The Boc Group Plc, Windlesham Vakuumpumpenbauteil
US20050118013A1 (en) * 2003-11-21 2005-06-02 Downham Stephen E. Vacuum pumping arrangement
DE102005008388A1 (de) * 2005-02-24 2006-08-31 Gebr. Becker Gmbh & Co Kg Laufrad und Seitenkanalmaschine mit Laufrad
EP1724469A2 (fr) * 2005-05-12 2006-11-22 Varian, Inc. Pompe turbomoléculaire hybride
JP2009062812A (ja) * 2007-09-04 2009-03-26 Osaka Vacuum Ltd 分子ポンプ
EP2253851A2 (fr) * 2009-05-16 2010-11-24 Pfeiffer Vacuum GmbH Pompe à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MARYLAND METRICS: "SURFACE ROUGHNESS TABLES", 1 January 1998 (1998-01-01), XP055155944, Retrieved from the Internet <URL:http://mdmetric.com/pdf/surfruff.pdf> [retrieved on 20141201] *

Also Published As

Publication number Publication date
EP3088743B1 (fr) 2019-12-25
EP2835536A2 (fr) 2015-02-11
DE102013108482A1 (de) 2015-02-12
EP3088743A1 (fr) 2016-11-02
EP2835536B1 (fr) 2018-11-28
EP3104014B1 (fr) 2021-09-29
EP3104014A1 (fr) 2016-12-14

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