EP3104014B1 - Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière - Google Patents

Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière Download PDF

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Publication number
EP3104014B1
EP3104014B1 EP16171240.1A EP16171240A EP3104014B1 EP 3104014 B1 EP3104014 B1 EP 3104014B1 EP 16171240 A EP16171240 A EP 16171240A EP 3104014 B1 EP3104014 B1 EP 3104014B1
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EP
European Patent Office
Prior art keywords
rotor
side channel
channel
section
duct
Prior art date
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Active
Application number
EP16171240.1A
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German (de)
English (en)
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EP3104014A1 (fr
Inventor
Sebastian Oberbeck
Aleksandr Shirinov
Michael Schweighöfer
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Publication of EP3104014A1 publication Critical patent/EP3104014A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
    • F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/516—Surface roughness

Definitions

  • the invention relates to a vacuum pumping stage.
  • the prior art includes vacuum pump stages of screw pumps, which essentially consist of two parts, namely a stator and a rotor rotating in the stator. There are multiple threads on the outside diameter of the rotor and on the inside diameter of the stator.
  • Side channel pumps that is, pumps that have at least one vacuum pump stage in the form of a side channel pump stage, can be used in a multi-stage design in the high pressure range up to atmospheric pressure. These can be combined well with turbo molecular pumps or other molecular pumps, for example.
  • the rotor parts of both pumps can be accommodated on one shaft, so that both form a structural unit.
  • the side channel pump stages usually have an impeller, that is to say a rotor, which has blades rotating in a channel at its edge.
  • the document JP H05 133388 A discloses a side channel pumping stage downstream of a molecular pump.
  • a further embodiment relates to a vacuum pumping stage with an inlet, an outlet and a channel, which has two side walls and a channel bottom, wherein a rotor with a rotor section is immersed in the channel and a pumping action is achieved by the interaction of the rotor section and the channel, and with an between Inlet and outlet arranged interrupter.
  • Vacuum pumps or vacuum pumping stations composed of vacuum pumps are used to generate such vacuum conditions.
  • vacuum pump stages are used according to different operating principles, which are adapted to different pressure ranges in order to compress gas from the desired ultimate vacuum to the atmosphere.
  • Blades circulate in a channel and convey a vortex-like gas flow between the inlet and outlet.
  • the gas flow follows the blades as it rotates and is sent to a so-called scraper or breaker detached and fed to the outlet.
  • Such side channel pump stages are for example in the DE 10 2009 021 642 A1 and the DE 10 2010 019 940 A1 disclosed.
  • the state of the art ( DE 39 32 288 A1 ) a turbo vacuum pump with a side channel pump stage.
  • This side channel pump stage has an inlet oriented in the radial direction.
  • a bevel of the interrupter provided between the inlet and the outlet is arranged on an inner radius of the side channel of the inlet.
  • This prior art vacuum pump can be further improved in terms of avoiding turbulence in the inflowing gas.
  • a side channel compressor which has an inlet, an outlet and a rotor as well as a channel, wherein the rotor with a rotor section is immersed in the channel and a pumping action is achieved by the interaction of the rotor section and the channel.
  • the rotor with the rotor blades arranged on the rotor is immersed in the channel.
  • a breaker is arranged between the inlet and the outlet. The interrupter encloses the rotor on all sides and, as known from practice, abruptly in the vicinity of the Outlet where the side channel ends as well as near the inlet where the side channel begins.
  • the interrupter is designed in such a way that the rotor blades are increasingly enclosed or released again in a uniformly decreasing manner.
  • the respective rotor blade is thus gradually and continuously enclosed by the interrupter, or is continuously released again. This does not result in an abrupt, but rather a continuous and even stripping of the compressed gas components from the respective rotor blades.
  • This measure is implemented at the beginning as well as at the end of the interrupter, that is to say at the inlet and at the outlet. This suppresses the occurrence of disruptive sound components in the interrupter area and reduces gas accumulation at the pressure connection. This leads to an increase in efficiency.
  • This embodiment belonging to the prior art has the disadvantage that the efficiency has not yet been fully exploited.
  • the technical problem on which the invention is based is to provide an improved vacuum pumping stage for side channel pumps which are used in molecular and viscous pressure ranges can be used to increase the performance of the pump.
  • the object according to the invention is achieved by a vacuum pumping stage having the features according to claim 1.
  • This vacuum pumping stage according to the invention has the advantage that the side channel has a considerable improvement in the technical vacuum data of side channel pumps compared to a rectangular side channel, as is part of the prior art. At the same time, the side channel according to the invention is easy to manufacture.
  • the curvature of the side walls is concave. This training achieves the best vacuum technology values.
  • the channel is advantageously designed to be axially symmetrical to a center plane of the rotor.
  • the rotor blades of the rotors are V-shaped in cross section. This shape of the rotor blades has given the best pumping performance with the curved side walls of the canal.
  • the rotor blades advantageously have a protrusion over a blade base.
  • the rotor with the rotor blades is designed in such a way that a protrusion is provided over a blade base of the rotor blades. This means that the material of the rotor blades is not worn down to the blade base, but that there is a protrusion.
  • This protrusion also has a beneficial effect on the pumping capacity of the vacuum pumping stage.
  • the protrusion over the blade base is designed to taper towards the rotor blade center.
  • the protrusion over the blade base to the rotor blade center is designed to taper when viewed in the axial direction. This means that at the axial edges of the blades the blades have been removed up to the blade base and that the protrusion over the blade base is maximally developed towards the middle.
  • a further advantageous embodiment provides that the rotor blades are arranged completely at their height in the side channel. This also results in an optimized pump performance.
  • the blade base of the rotor blades and a boundary surface of the side channel arranged radially in the direction of the shaft are arranged at the same height in the radial direction. This means that the rotor blades are arranged completely in the side channel and develop their full effect there.
  • the boundary surface arranged radially in the direction of the shaft is the surface of the side channel, which is arranged opposite the channel bottom.
  • a blade base radius and a radius of the boundary surface of the side channel arranged radially in the direction of the shaft have the same size R S 1 .
  • a blade base radius and a radius of the boundary surface of the side channel arranged radially in the direction of the shaft advantageously have the same size R S 1 . This also significantly increases the pumping effect.
  • a further advantageous embodiment of the vacuum pump stage provides that the side channel radius R S 3 and the distance d S 1 increase with increasing speed and increasing peripheral speed of the rotor disks. This also has a positive effect on the pump performance.
  • a blade height of the rotor blades is advantageously 60% to 100% of a rotor disk width. This serves to further improve the pump performance.
  • the optimum blade height is advantageously 60% to 100% of the rotor disk width.
  • the optimal side channel radius depends on the circumferential speed of the rotor disk.
  • the side channel radius is between 80% and 120% of the width of the rotor disk.
  • a width d S 1 of the channel bottom is preferably between 20% and 120% of the width of the rotor disk.
  • the blade spacing of the rotor blades is between 50% and 100% of the rotor disk width.
  • the blade spacing is less than or equal to 55% of the rotor disk width with a side channel area that is less than 2.5 times the blade area.
  • a blade spacing of 50% of the rotor disk width is particularly advantageous in the case of side channels with a side channel area that is not greater than 2.5 times the blade area. These are small side channels.
  • the blade spacing is greater than or equal to 85% of the rotor disk width with a side channel area that is greater than 5 times the blade area. These are large side channels.
  • the optimal number of blades thus decreases with increasing side channels, or the optimal distance between the blades increases.
  • the minimum web width is designed as a function of the manufacturing accuracy and the material strength of the rotor disk. This ensures the stability of the rotor disk.
  • Fig. 1 shows a vacuum pump with a housing 1 and three pump units 14, 16, 18.
  • the housing 1 is provided with a gas inlet opening 2 and a gas outlet opening 4.
  • the pump units consist of rotating and stationary gas-conveying components.
  • the rotating components are mounted one behind the other on a shaft 6 in the axial direction.
  • a drive system 8 and bearing elements 10 and 12 belong to the operation of the shaft 6.
  • the stationary components are firmly connected to the housing 1.
  • a pump unit 14 facing the gas inlet opening is designed as a turbo molecular pump.
  • the pump unit 16 following in the direction of gas flow consists of several sub-units 16a, 16b, 16c. These each have one or more molecular pumping stages according to the Gaede design, hereinafter referred to as Gaede stages.
  • the Gaede stages are connected in parallel within the sub-units.
  • the sub-units themselves are connected in series. This means that connecting elements 34a for the subunit 16a, or 34b for the subunit 16b, connect the inlet sides and on the other side the outlet sides of the Gaede stages so that a parallel gas flow is made possible in the individual subunits.
  • the sub-units are connected by connecting elements 36a, 36b and 36c in such a way that the output side of one sub-unit is connected to the input side of the following sub-unit.
  • the pump unit 18 facing the gas outlet opening is a multi-stage side channel pump educated. In the Fig. 1 The pump shown is only shown as an example.
  • the invention relates to all vacuum pumps in which side channel pump stages are provided.
  • grooves are arranged in the surface of thread grooves and / or that grooves are arranged in the surfaces of stators and / or rotors.
  • Figures 2 to 6 show possible structures that are attached uniformly in a surface 41, for example a thread groove of a side channel or also on a rotor.
  • Fig. 2 Figure 4 shows a structure with grooves 40 that have a rounded bottom.
  • the grooves 40 are formed in an arc shape.
  • Fig. 3 shows a trapezoidal structure with a conically tapered cross-section, while Fig. 4 shows a triangular structure with a conically tapered cross-section.
  • Fig. 5 a rectangular structure is shown.
  • Fig. 6 again shows a triangular structure which has an asymmetrical configuration.
  • the depth of the grooves 40 can vary from 1 ⁇ m to 100 ⁇ m.
  • the groove width or the distance between the individual grooves 40 can vary from 1 ⁇ m to 1 mm.
  • the grooves 40 can be along the direction of flow, transverse to the direction of flow and at an angle to the The direction of flow of the gas can be incorporated into the surface 41.
  • the grooves 40 can also be produced in a surface 41 with a grindstone.
  • the grooves 40 have an irregular structure.
  • the rough surface should have a roughness of 0.1 ⁇ m to 100 ⁇ m, preferably of 2 ⁇ m to 100 ⁇ m.
  • standing air forms in the grooves 40, so that the gas friction on the surface 41 is reduced. This effect influences the sliding of gas layers. By influencing these so-called boundary layer forces, the gases slide off the surface of the active pumping surfaces. This increases the speed of the circulation flow and the intensity of the energy exchange between the active pumping surfaces of the rotor and stator. This leads to an increase in compression, a reduction in power consumption and an increase in pumping speed.
  • a thread groove 50 of a screw pump is shown.
  • the thread groove 50 which is arranged, for example, in a stator 51, as well as the adjoining surfaces of the thread groove 50 are coated with a coating 52, which reduces friction and improves the sliding properties of the surface compared to an uncoated surface, for example a metal surface, for example aluminum or stainless steel. This measure also reduces the gas friction on the channel surface, which results in the advantages mentioned above.
  • Fig. 9 shows a vacuum pump 100 with a gas inlet 102 and a gas outlet 103 as well as a housing 101.
  • the housing 101 is made up of four housing parts 120, 121, 122, 123 constructed, which accommodate the components of the vacuum pump 100.
  • Gas entering vacuum pump 100 through gas inlet 102 first reaches a molecular stage 105.
  • This has an inner stator 505, which is provided with an inner thread groove 507, and an outer stator 506, which is provided with an outer thread groove 508.
  • a cylinder 502 with a smooth surface, which is connected to the rotor 500, is provided between the inner stator and the outer stator.
  • the molecular stage 105 is thus designed as a Holweck stage.
  • the Holweck stage shown is constructed symmetrically with a second cylinder 502 'surrounded by stator components and therefore works in two stages.
  • the rotor is connected to a shaft 108 which is rotatably supported in roller bearings 110 and 111.
  • roller bearings 110 and 111 passive and active magnetic bearings can also be used.
  • At least one permanent magnet 113 is arranged on the shaft 108, which magnet interacts with a stationary coil 112 and, together with this, forms a drive 107.
  • the roller bearing 110, the drive 107 and the molecular stage 105 are arranged in the housing parts 120, 121.
  • the shaft 108 passes through the housing part 122, which contains a side channel pump stage 104.
  • the side channel pumping stage 104 is formed by a side channel 401 and an impeller 400, with at least one blade 402 being arranged on the impeller 400, which rotates in the side channel as a result of the rotation of the shaft 108 and thus generates the pumping effect.
  • Gas passes through a transfer channel 124 from the molecular stage 105 into the side channel stage 104 and is expelled through a further transfer channel 125.
  • the gas passes through the transfer channel 125 into a fore-vacuum stage 106.
  • This is also designed as a side channel pump stage, the geometry of the blades 602 arranged on the impeller 600 and rotating in the side channel 601 deviating from the geometry of the blades 402. From this pumping stage 106, the gas is expelled from the vacuum pump 100 through the gas outlet 103.
  • Fig. 10 shows a section through the housing part 122 along the line II of FIG Fig. 9 .
  • the impeller 400 sits on the shaft 108. This has an edge 403 on which blades 402 are arranged evenly distributed along the circumference.
  • the side channel 401 surrounds the impeller, the side channel surrounding the blade area of the impeller in a substantially annular manner in the radial direction.
  • the housing is only tightly adjacent to the impeller over part of the circumference.
  • This section forms an interrupter 404, which separates the intake and discharge sides from one another and at which the gas flow that forms in the side channel and follows the rotation of the impeller is detached from the latter and transferred to the transfer channel 125.
  • the side channel 401 has a channel bottom 420 and two side walls 421, 422.
  • the side walls 421, 422 are curved. That is, they have a concave shape.
  • the blades 402 of the impeller or rotor 400 protrude completely into the side channel 401.
  • a radius R S 1 of a blade base 423 is the same size as the radius R S 1 of a boundary surface 424 of the side channel 401 arranged radially in the direction of the shaft.
  • the curved side surfaces 421, 422 significantly improve the pumping performance of the side channel pumping stage.
  • the web between the blades is advantageously designed to be as small as possible (not shown).
  • the vane volume filled with gas should be as large as possible.
  • Improvements in the vacuum-technical data are also achieved through an optimized setting of the side channel radius R S3 (80% to 120% of the rotor disk width) and the distance between two centers of the side channel semicircles d S 1 (20% to 120% of the rotor disk width).
  • the optimal radius R S 3 and distance d S 1 depend on the circumferential speed of the rotor disk and on the blade size.
  • the dimensions R R 1 , R R 3 , d R 1 , blade height h and blade angle ⁇ are given.
  • the dimension R S 1 is given by the lower blade edge of the rotor disk.
  • Fig. 12 a comparison of side channels with rectangular cross-section and side channels with two side walls with semicircular cross-section and V-shaped rotor blades at 800 Hz and 1000 Hz rotational frequency is shown.
  • the curves 716, 717, 718, 719 represent the course of the compression as a function of the pressure.
  • the lower two curves 718, 719 relate to a rotational frequency of 800 Hz.
  • a side channel with semicircular side walls has a higher compression (curve 718) as a prior art channel with a rectangular cross section (curve 719).
  • the two upper curves 716, 717 relate to a rotational frequency of 1000 Hz.
  • the upper curve 716 represents the compression as a function of the pressure for a side channel with side walls which are semicircular in cross section.
  • Compression due to the design of the side channel according to the invention is significantly increased compared to a side channel with a rectangular cross section (curve 717). It can be seen that the side channels with two side walls that are semicircular in cross section have a significantly better compression.
  • Fig. 13 the dependence of the compression factor on the axial gap is shown. As the legend in Fig. 13 As can be seen above, axial gaps between 0.15 mm and 0.4 mm have been recorded. The compression factor k 0 is greater, the smaller the axial gap.
  • rotor disks of a multistage side channel pump with the same blade size have the same speed, but can have different peripheral speeds depending on the rotor disk diameter R R 1. For this reason, rotor disks with different diameters R R 1 and the same blade size should have side channels with different radii R S 3 and spacings d S 1 .
  • the compression factor is given as a function of the outlet pressure p 2 , rotational frequency f and side channel diameter R S 3 .
  • the compression factor is shown as a function of the outlet pressure p 2 , rotational frequency f, distance d S1 .
  • Fig. 16 shows the impeller 400 with the blades 402.
  • the blades 402 are V-shaped.
  • the blade base In the area of a central plane 425 of the impeller 400, the blade base has a protrusion which tapers from the edges 426, 427 of the blade base to the central plane 425.
  • the impeller 400 rotates in the direction of arrow A.
  • Fig. 17 shows the impeller 400 according to FIG Fig. 16 in side view in the direction of arrow B.
  • the impeller 400 carries the V-shaped blades 402.
  • the blades have a blade base 423.
  • a protrusion 428 protrudes above the blade base 423.
  • An optimal blade height is 60% to 100% of the rotor disk width.
  • An optimal side channel radius depends on the circumferential speed of the rotor disk 400 and can be from 80% to 120% of the rotor disk width.
  • the distance d S 1 also depends on the circumferential speed of the rotor disk and can be from 20% to 120% of the rotor disk width.
  • the optimal number of blades or the optimal distance between the blades does not depend on the speed.
  • the optimal distance between the blades is proportional to the blade size and is also dependent on the side channel size. It is from 50% to 100% of the rotor disk width, the optimal distance between the blades is less than or equal to 55% for small side channels (side channel area not greater than 2.5 times the blade area) and is greater than or equal to 85% for large side channels (side channel area not smaller than 5 times the blade area).
  • the optimum number of blades is therefore smaller as the side channels become larger, or the optimum distance between blades increases.
  • the side channel area A SK and the blade area A Sch can be calculated using equations 4 to 7.
  • A. SK R. S. 3 2 ⁇ ⁇ - ⁇ + d S.
  • the web width of the blades should be as small as possible.
  • the minimum web width is limited by the manufacturing accuracy and the material strength of the rotor disk.
  • FIG. 18 the Figures 18 to 20 show further design options for a side channel.
  • the side channel 401 is overall circular.
  • the side channel 401 does not have a flat side channel bottom, but rather a circular cross section overall.
  • the side channel 401 is also circular. However, the radius of the side channel 401 is smaller than in Fig. 18 shown.
  • the side channel 401 has concave side walls 421, 422.
  • the channel bottom 420 is flat.
  • the side channel cross-sectional diameter is advantageously designed to be constant over the entire circumference of the side channel.
  • the side channel cross-sectional diameter decreases from inlet 124 to outlet 125.
  • the inlet 124 and the outlet 125 are arranged diametrically opposite one another.
  • an arrangement in a side channel pumping stage is also possible, as shown in FIG Fig. 10 has been drawn in dashed lines.
  • An inlet 124 ' is drawn here. With this configuration, it is possible for the cross-sectional diameter of the side channel to decrease from the inlet 124 ′ to the outlet 125. This reduction can take place linearly with the circumferential angle. It can also represent another function of the circumferential angle.
  • a side channel surface with a center line 126 of the side channel is shown as a function of the radius and the angle ⁇ .
  • the reduction in the side channel area can, as in Figure 21a shown, done from above. It can also be done from below, as shown in the illustration Figure 21b shown. However, it can also be done from above and from below, as shown in the illustration Figure 21c shown.
  • the side channel diameter can also be reduced from one or both sides along the side channel from inlet 124 ′ to outlet 125. Inlet 124 'is in Fig. 10 shown.
  • Fig. 22 shows a further embodiment of a side channel 401.
  • the side channel 401 has side walls 421, 422 which are formed in the shape of a segment of a circle.
  • the channel bottom 420 is also not shown planar in this exemplary embodiment, but consists of two circular segments with a radius R S 3 .
  • Fig. 23 shows a further embodiment of an embodiment of the side channel 401.
  • the side channel 401 has curved side surfaces 421, 422 and a channel bottom 420 that is not planar.
  • the curved side surfaces 421, 422 do not correspond to any circular sections.
  • a breaker 404 is in Fig. 10 shown.
  • the breaker is in the side channel pumping stage 104 of the Fig. 9 arranged.
  • the figure description of the Fig. 9 and 10 are fully applicable to the present invention.
  • FIG. 10 shows a prior art breaker 404 having an inlet 701 and an outlet 702.
  • the interrupter 404 as well as the inlet 701 and the outlet 702 are part of a stator 700.
  • the upper illustration in FIG Fig. 24 shows a side view of the interrupter 404.
  • the lower illustration shows a top view of the interrupter 404.
  • a rotor 703 is shown in dashed lines in the upper illustration.
  • the rotor 703 rotates at a rotational speed v.
  • the interrupter 404 belonging to the prior art has an area d 1 in which the interrupter 404 completely surrounds the rotor 703.
  • a side channel 704 ends abruptly in the area of the inlet 701 and in the area of the outlet 702. This leads to disruptive sound components and a gas jam at the pressure port 702.
  • FIG. 8 shows the breaker 404 arranged in the stator 700.
  • An inlet 701 and an outlet 702 for the side channel 704 are arranged in the stator 700.
  • a rotor 703 rotates in the stator at a speed v.
  • the interrupter 404 has an area over a length d 1 in which the rotor 703 is completely enclosed by the interrupter 404.
  • the interrupter In an area over a length d 2 , the interrupter has a bevel 705.
  • the side channel 701 widens continuously to its total width outside the area d 2 .
  • Rotor blades 706 are arranged on rotor 703, only shown schematically.
  • the length d 1 of the interrupter is greater than a blade length.
  • the length d 2 of the bevel 705 is also longer than a blade length.
  • the channel 701 may have a shape as shown in FIG Fig. 11 for channel 401 is shown.
  • the rotor 400 is delimited by a sealing surface 707 of the stator. This sealing surface 707 is arranged in the area of the rotor 400 without blades.
  • the interrupter 404 is shown with the bevel 705.
  • the bevel 705 tapers in the direction of the area d 2 of the interrupter 404, in which the interrupter 404 completely surrounds the rotor 703.
  • An angle ⁇ indicates the opening angle of the bevel 705.
  • An angle ⁇ is a complementary angle to the angle ⁇ , that is, the sum of the angles ⁇ and ⁇ together results in 180 °.
  • the angle ⁇ corresponds to a blade angle of the rotor blades 706 of the rotor 703, as in FIG Fig. 26 shown.
  • a rotor blade 706 is shown in section and the angle of attack ⁇ .
  • the blade height is denoted by D.
  • FIG. 3 illustrates a further exemplary embodiment.
  • the interrupter 404 which is formed in the stator 700, has the bevel 705.
  • An additional bevel 706 is provided in the direction of the side channel 704. This additional bevel, which has a length d 3 , achieves an even higher compression and a higher suction capacity.
  • Fig. 28 the compression of a side channel pumping stage is shown.
  • the curves show, on the one hand, the values for a standard interrupter and, on the other hand, for a form of interrupter according to Fig. 25 . It can be seen that the compression is significant in the case of the interrupter shape according to FIG Fig. 25 is increased.
  • Fig. 29 the pumping speed of a side channel pump stage is shown. It can be clearly seen that according to Fig. 25 The interrupter shape used leads to a higher pumping speed than a prior art interrupter shape.
  • Fig. 30 shows the stator disk 700 with a side channel 704 and an outlet 702.
  • the interrupter 404 adjoins the blades of the rotor, which is also not shown here, with a surface 708 while maintaining a narrow gap (not shown).
  • the interrupter has the bevel 705 which widens in the direction of the channel 704.
  • a sealing surface 707 has a lower level than a surface 709 of the stator 700, which results in the edge or surface 708.
  • the bevel 705 represents, on the one hand, a radial opening of the interrupter 404 and also an axial recess in the sealing surface 707.
  • the stator 700 has a bore 710 for a shaft of the rotor (not shown) to pass through.

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Claims (4)

  1. Étage de pompe à vide, que l'on peut monter dans la direction d'un flux gazeux en aval d'un étage de pompe moléculaire, doté d'une entrée (124), d'une sortie (125), d'un rotor (400) et d'un canal (401) qui comporte deux parois latérales (421, 422) et un fond inférieur (420) de canal,
    - par un segment (402) de rotor, le rotor (400) plongeant dans le canal (401) et par interaction du segment (402) de rotor et du canal (401), un effet de pompage étant obtenu,
    - le rotor (400) présentant la forme d'un disque, qui sur l'ensemble de son extension radiale incluant la zone de l'aube, présente une largeur constante,
    - et doté d'un interrupteur (404), placé entre l'entrée (124) et la sortie (125),
    - deux parois latérales (421, 422) du canal (401) étant conçues de forme incurvée et dans la section transversale, la courbure de chaque paroi latérale (421, 422) étant respectivement conçue en forme de demi-cercle par rapport à une section transversale à travers le canal (401) se situant dans l'axe de rotation,
    - sur lequel un écart entre deux centres de demi-cercles (d s1) de canal latéral par rapport à une section transversale à travers le canal (401) qui se situe dans l'axe de rotation s'élève à de 20 % à 120 % de la largeur (d R1) du disque du rotor,
    - sur lequel un rayon (R s3) de canal latéral du demi-cercle de canal latéral compris entre 80 % et 120 % de la largeur (d R1) du disque du rotor est conçu par rapport à une section transversale à travers le canal (401) qui se situe dans l'axe de rotation, et
    - sur lequel un écart entre des aubes (402) du rotor se situe entre 50 % et 100 % de la largeur (d R1) du disque du rotor.
  2. Étage de pompe à vide selon la revendication 1, caractérisé en ce que la courbure de l'au moins une paroi latérale (421, 422) est conçue de forme concave.
  3. Étage de pompe à vide selon la revendication 1 ou 2, caractérisé en ce que le canal (401) est conçu en symétrie axiale par rapport à un plan médian (425) du rotor (400).
  4. Étage de pompe à vide selon l'une quelconque des revendications 1 à 3, caractérisé en ce que des aubes (402) de rotor des rotors (400) sont conçues avec une section transversale en forme de V.
EP16171240.1A 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière Active EP3104014B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013108482.6A DE102013108482A1 (de) 2013-08-06 2013-08-06 Vakuumpumpstufe
EP14176840.8A EP2835536B1 (fr) 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux

Related Parent Applications (2)

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EP14176840.8A Division EP2835536B1 (fr) 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux
EP14176840.8A Division-Into EP2835536B1 (fr) 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux

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EP3104014A1 EP3104014A1 (fr) 2016-12-14
EP3104014B1 true EP3104014B1 (fr) 2021-09-29

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EP16171251.8A Active EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP14176840.8A Active EP2835536B1 (fr) 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux
EP16171240.1A Active EP3104014B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec une section transversale de canal présentant une courbure particulière

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EP16171251.8A Active EP3088743B1 (fr) 2013-08-06 2014-07-14 Étage de pompe a vide à canal latéral avec un barrage de canal qui présente une rampe du côté de l'aspiration
EP14176840.8A Active EP2835536B1 (fr) 2013-08-06 2014-07-14 Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux

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EP3594498B1 (fr) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Système avec un dispositif de recyclage des gaz

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Also Published As

Publication number Publication date
EP2835536A2 (fr) 2015-02-11
EP3088743A1 (fr) 2016-11-02
DE102013108482A1 (de) 2015-02-12
EP3088743B1 (fr) 2019-12-25
EP2835536B1 (fr) 2018-11-28
EP3104014A1 (fr) 2016-12-14
EP2835536A3 (fr) 2015-05-06

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