EP1580435B2 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

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Publication number
EP1580435B2
EP1580435B2 EP05003720.9A EP05003720A EP1580435B2 EP 1580435 B2 EP1580435 B2 EP 1580435B2 EP 05003720 A EP05003720 A EP 05003720A EP 1580435 B2 EP1580435 B2 EP 1580435B2
Authority
EP
European Patent Office
Prior art keywords
blades
vacuum side
angle
attack
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05003720.9A
Other languages
German (de)
English (en)
Other versions
EP1580435B1 (fr
EP1580435A2 (fr
EP1580435A3 (fr
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1580435A2 publication Critical patent/EP1580435A2/fr
Publication of EP1580435A3 publication Critical patent/EP1580435A3/fr
Publication of EP1580435B1 publication Critical patent/EP1580435B1/fr
Application granted granted Critical
Publication of EP1580435B2 publication Critical patent/EP1580435B2/fr
Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular pump with a plurality of rotor and stator disks arranged alternately axially one behind the other and provided with blades, the blades having a steeper angle of attack in the direction of the high vacuum side than the blades in the direction of the vacuum side.
  • the invention also relates to a method for producing a rotor or stator disk, provided with blades, of such a turbo-molecular pump.
  • turbo molecular pumps are known, for example by DE 2 035 063 B3 or the DE 27 17 366 B2 .
  • the blades shown there have the shape of a parallelogram in cross section.
  • the angle of attack is 25 ° to 40 ° depending on the axial position of the blades.
  • a turbomolecular pump is known in which the blade differs greatly in cross section from a parallelogram and has approximately the shape of an airfoil.
  • the mean angle of attack is about 45 °.
  • a turbo molecular pump which discloses all the features of the preamble of claim 1 and in which the blades of a first group of blades arranged on the suction side, called suction group A, have an angle of attack of 30 ° to 40 ° and the blades of a second group, called compression group B. , consisting of the remaining blade stages, have an angle of attack of 17 ° to 30 °.
  • the second group, compression group can be divided into two sub-groups, the blades of which have an angle of attack of 25 ° to 30 ° and 17 ° to 25 °, respectively.
  • the Alcatel ATH 1600M model has made flat blades with a pitch angle greater than 19 ° and the Leybold MAG 2000 model blades with a pitch angle greater than 9 °.
  • U.S. 3,644,051 To the state of the art ( U.S. 3,644,051 ) includes a vacuum pump with rotor and stator disks, each with a large number of blades. The angle of incidence of the blades is reduced from the inlet to the outlet of the pump, so that it is between 5 ° and 20 ° towards the outlet end.
  • the active pumping components of a turbomolecular pump consist of the rotor and stator disks with blades, which are alternately arranged axially one behind the other. The interaction of these disks produces the pumping effect in a known manner.
  • the characteristic properties of a turbo molecular pump are compression and pumping speed. Both properties are mainly determined by the following parameters: the circumferential speed of the blade ring of the rotor disks, the number of blades, the angle of attack of the blades and the gradation of the different disks of the entire disk package. Within the gradation, the angle of attack of the blade is reduced from the suction opening to the gas outlet opening.
  • the invention is based on the technical problem of designing a turbomolecular pump in such a way that heat generation and power consumption are reduced and good fore-vacuum compatibility and compression are created.
  • This technical problem is solved by a significant reduction in the angle of the blades in the compression or exhaust stage with a pump diameter of 250 millimeters and 12 or 16 blades, namely the angle of the blades on the vacuum side should be less than 8 ° with a disk height of 3 .0 to 4.5 millimeters.
  • the flatter design of the angle of attack has a number of positive effects: First of all, with the same overlap ratio, the number of blades per disc is reduced despite the small disc height. In addition, the formation of eddies in the high pressure range is avoided, which leads to a reduction in the absorption capacity and the generation of heat. The low disc and blade height leads to a lower impact rate of the molecules and thus to fewer losses and ultimately to a short overall length of the pump. The reduction in the number of teeth leads to a further reduction in compression performance. In addition, a construction of the pump stages that is particularly robust against dust and corrosive gases is possible. This in turn has advantages with regard to the compression forces.
  • the design according to the invention leads to a compact design and to a significant improvement in performance in the exhaust stages and thus in the entire turbo-molecular pump.
  • a further increase in the aforementioned advantages can be achieved if the angle of incidence of the blades on the vacuum side is less than 6 °.
  • the angle of incidence of the blades on the vacuum side can be 5.9 ° to 4.6 °.
  • the reduction in the disk height means that the axial thickness of the blades is less than 5.0 millimeters, in particular also equal to or less than 4.5 millimeters and, in the extreme case, is even reduced to 3.0 to 4.5 millimeters.
  • turbomolecular pumps have had 24 blades with one pump diameter of 250 millimeters is provided.
  • the blades were part of disks that were at least 5 millimeters thick.
  • the new design it is possible to get by with 16 or even 12 blades with the same pump diameter, the disc height being only 3.0 to 4.5 millimeters.
  • the blades can have at least approximately the shape of a parallelogram in cross section.
  • the turbomolecular pump (T) comprises a housing (1) on which, on the one hand, a suction flange (2) is integrally formed and, on the other hand, an ejection flange (3) is attached.
  • a rotor shaft (4) is rotatably mounted on roller bearings (5, 6) in the housing (1).
  • the rotor shaft (4) is set in high-speed rotation by an electric motor drive (7).
  • the rotor disks (8) fastened to the rotor shaft (4) interact with the stator disks (9) inserted in the housing (1).
  • the angle of attack ⁇ is in Fig. 2 for the sake of clearer representation drawn greatly enlarged.
  • the slice thickness (D) is between 3.0 millimeters and 4.5 millimeters.
  • the blade (10) has a cross-section which is at least approximately trapezoidal. So-called high-speed cutting was used for their production, in which the material of the thin disks (8, 9) for producing the blades (10) is removed without pressure.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (5)

  1. Pompe turbomoléculaire avec une pluralité de disques de rotor et de stator (8, 9) pourvus de pales (10), agencés en alternance axialement les uns derrière les autres, dans laquelle les pales (10) présentent vers le côté vide élevé (2) un angle d'attaque α plus raide que les pales (10) vers le côté vide (3), dans laquelle l'angle d'attaque α des pales (10) vers le côté vide (3) est inférieur à 8°, et dans laquelle la hauteur des disques est comprise entre 3,0 et 4,5 millimètres,
    caractérisée en ce que pour la pompe turbomoléculaire un diamètre de pompe de 250 millimètres est prévu, et que 12 ou 16 pales sont prévues.
  2. Pompe turbomoléculaire selon la revendication 1, caractérisée en ce que l'angle d'attaque α des pales (10) vers le côté vide (3) s'élève à moins de 6°.
  3. Pompe turbomoléculaire selon la revendication 2, caractérisée en ce que l'angle d'attaque α des pales (10) vers le côté vide (3) s'élève à moins de 5°.
  4. Pompe turbomoléculaire selon la revendication 2, caractérisée en ce que l'angle d'attaque α des pales (10) vers le côté vide (3) est compris entre 5,9° et 4,6°.
  5. Pompe turbomoléculaire selon l'une des revendications 1 à 4, caractérisée en ce que les pales (10) présentent en section transversale au moins à peu près la forme d'un parallélogramme.
EP05003720.9A 2004-03-16 2005-02-22 Pompe turbomoléculaire Expired - Lifetime EP1580435B2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004012713 2004-03-16
DE102004012713A DE102004012713A1 (de) 2004-03-16 2004-03-16 Turbomolekularpumpe

Publications (4)

Publication Number Publication Date
EP1580435A2 EP1580435A2 (fr) 2005-09-28
EP1580435A3 EP1580435A3 (fr) 2009-12-30
EP1580435B1 EP1580435B1 (fr) 2011-08-31
EP1580435B2 true EP1580435B2 (fr) 2020-11-18

Family

ID=34853986

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05003720.9A Expired - Lifetime EP1580435B2 (fr) 2004-03-16 2005-02-22 Pompe turbomoléculaire

Country Status (5)

Country Link
US (1) US8398362B2 (fr)
EP (1) EP1580435B2 (fr)
JP (1) JP2005264932A (fr)
AT (1) ATE522725T1 (fr)
DE (1) DE102004012713A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088327B1 (fr) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Support de roulement à rouleaux
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
GB2612781B (en) * 2021-11-10 2024-04-10 Edwards Ltd Turbomolecular pump bladed disc

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) † 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US3969039A (en) † 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
CH557468A (de) * 1973-04-30 1974-12-31 Bbc Brown Boveri & Cie Turbine axialer bauart.
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
JPS61123797A (ja) * 1984-11-19 1986-06-11 Mitsubishi Heavy Ind Ltd 高真空排気装置
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH02201100A (ja) * 1989-01-20 1990-08-09 Ntn Corp ターボ分子ポンプ
JP2865888B2 (ja) * 1991-03-05 1999-03-08 日本原子力研究所 マルチターボ型真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3898785B2 (ja) * 1996-09-24 2007-03-28 株式会社日立製作所 高低圧一体型蒸気タービン用動翼と高低圧一体型蒸気タービン及びコンバインド発電システム並びに複合発電プラント
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP2001132683A (ja) * 1999-10-29 2001-05-18 Applied Materials Inc ターボ分子ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
EP1249613B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
JP3978001B2 (ja) * 2001-06-29 2007-09-19 三菱重工業株式会社 ターボ分子ポンプ
US6760971B2 (en) * 2002-07-15 2004-07-13 Pratt & Whitney Canada Corp. Method of making a gas turbine engine diffuser

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) † 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US3969039A (en) † 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHANDRAN M AND KRISHNA MURTHI M V: "A Markov chain model for a turbomolecular pump - theory and experiments", VACUUM, vol. 48, no. 11, 1997, pages 899 - 911 †

Also Published As

Publication number Publication date
EP1580435B1 (fr) 2011-08-31
US8398362B2 (en) 2013-03-19
DE102004012713A1 (de) 2005-10-06
ATE522725T1 (de) 2011-09-15
US20050207884A1 (en) 2005-09-22
EP1580435A2 (fr) 2005-09-28
JP2005264932A (ja) 2005-09-29
EP1580435A3 (fr) 2009-12-30

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