EP1580435B1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

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Publication number
EP1580435B1
EP1580435B1 EP05003720A EP05003720A EP1580435B1 EP 1580435 B1 EP1580435 B1 EP 1580435B1 EP 05003720 A EP05003720 A EP 05003720A EP 05003720 A EP05003720 A EP 05003720A EP 1580435 B1 EP1580435 B1 EP 1580435B1
Authority
EP
European Patent Office
Prior art keywords
blades
turbomolecular pump
vacuum side
angle
attack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05003720A
Other languages
German (de)
English (en)
Other versions
EP1580435A2 (fr
EP1580435B2 (fr
EP1580435A3 (fr
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1580435A2 publication Critical patent/EP1580435A2/fr
Publication of EP1580435A3 publication Critical patent/EP1580435A3/fr
Publication of EP1580435B1 publication Critical patent/EP1580435B1/fr
Application granted granted Critical
Publication of EP1580435B2 publication Critical patent/EP1580435B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular pump having a plurality of alternately arranged axially one behind the other and provided with blades rotor and stator, wherein the blades in the direction of the high vacuum side have a steeper angle of attack than the blades in the vacuum side.
  • the invention relates to a method for producing a blade-provided rotor or stator of such a turbomolecular pump.
  • turbomolecular pumps are known, for example by the DE 2 035 063 B3 or the DE 27 17 366 B2 ,
  • the blades shown there have the shape of a parallelogram in cross section. The angle of attack is depending on the axial position of the blades 25 ° to 40 °.
  • a turbomolecular pump in which the blade deviates greatly in cross-section from a parallelogram and has approximately an airfoil shape.
  • the average angle of attack is about 45 °.
  • a turbomolecular pump which discloses all the features of the preamble of claim 1 and wherein the blades of a first, suction side arranged group of blades, called suction group A, an angle of attack of 30 ° to 40 ° and the blades of a second group, called compression group B. consisting of the remaining blade stages have an angle of 17 ° to 30 °.
  • the second group, compression group can be divided into two subgroups whose blades have an angle of attack of 25 ° to 30 ° or of 17 ° to 25 °.
  • the pump-active components of a turbomolecular pump consist of the rotor blades and stator disks provided with blades, which are arranged alternately axially one behind the other. Through the interaction of these discs, the pumping effect is generated in a known manner.
  • the characteristic features of a turbomolecular pump are its compression and pumping capacity. Both properties are mainly determined by the following parameters: the peripheral speed of the blade ring of the rotor disks, the number of blades, the angle of attack of the blades and the gradation of the different disks of the entire disk package. Within the gradation, the angle of attack of the blade from the intake opening towards the gas outlet opening decrease.
  • the invention is the technical problem of a turbomolecular pump in such a way that heat generation and power consumption are reduced and good Vorvakuumver joskeit and compression are created.
  • This technical problem is solved by a significant reduction of the angle of attack of the blades in the compression or exhaust stage, and that is the angle of attack of the blades to the vacuum side to be less than 8 °.
  • the flatter formation of the angle of attack has a number of positive effects: First, the number of blades per disc is reduced at the same coverage ratio despite small disc height. In addition, vortex formations are avoided in the high pressure range, resulting in a reduction in the recording power and heat generation. The low disc and blade height leads to a lower collision rate of the molecules and thus to fewer losses and finally to a short overall length of the pump. The reduction in the number of teeth leads to a further reduction of the compression power. In addition, a robust construction of the pumping stages, in particular against dust and corrosive gases, is possible. This in turn has advantages in terms of compression forces.
  • the inventive design leads to a compact design and a significant performance improvement in the exhaust stages and thus the entire turbomolecular pump.
  • a further increase of the aforementioned advantages can be achieved if the angle of attack of the blades to the vacuum side is less than 6 °.
  • the angle of attack of the blades toward the vacuum side may be 5.9 ° to 4.6 °.
  • the reduction of the disc height means that the axial thickness of the blades is less than 5.0 millimeters, in particular equal to or less than 4.5 millimeters and in extreme cases even reduced to 3.0 to 4.5 millimeters.
  • the blades can have at least approximately the shape of a parallelogram in cross-section.
  • the turbomolecular pump (T) comprises a housing (1) on which on the one hand an intake flange (2) is integrally formed and on the other hand a Exhaust flange (3) is mounted.
  • the housing (1) has a rotor shaft (4) on rolling bearings (5, 6) rotatably mounted.
  • the rotor shaft (4) is put into high-speed rotation via an electromotive drive (7).
  • the rotor disks (8) fastened to the rotor shaft (4) interact with the stator disks (9) inserted in the housing (1).
  • the angle of attack ⁇ is in Fig. 2 the clearer representation because of greatly enlarged drawn.
  • the pane thickness (D) is between 3.0 millimeters and 4.5 millimeters.
  • the blade (10) has a cross section which has at least approximately a trapezoidal shape.
  • the so-called high-speed cutting was used, in which the material of the thin discs (8, 9) for the production of the blades (10) is removed without pressure.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe turbomoléculaire dans laquelle une pluralité de disques de rotor (8) et de disques de stator (9) sont axialement juxtaposés en alternance et pourvus de palettes (10), et dans laquelle les palettes (10) situées du côté du vide poussé (2) présentent un angle d'attaque α plus aigu que les palettes (10) situées du côté du vide primaire (3), caractérisée par le fait que l'angle d'attaque α desdites palettes du côté du vide primaire (3) est inférieur à 8 degrés.
  2. Pompe turbomoléculaire selon la revendication 1, caractérisée par le fait que l'angle d'attaque α des palettes (10) situées du côté du vide primaire (3) est inférieur à 6 degrés.
  3. Pompe turbomoléculaire selon la revendication 2, caractérisée par le fait que l'angle d'attaque α des palettes (10) situées du côté du vide primaire (3) est inférieur à 5 degrés.
  4. Pompe turbomoléculaire selon la revendication 2, caractérisée par le fait que l'angle d'attaque α des palettes (10) situées du côté du vide primaire (3) est compris entre 5,9 degrés et 4,6 degrés.
  5. Pompe turbomoléculaire selon l'une quelconque des revendications 1 à 4, caractérisée par le fait que l'épaisseur (D) axiale des palettes (10) est inférieure à 5 millimètres.
  6. Pompe turbomoléculaire selon la revendication 5, caractérisée par le fait que l'épaisseur (D) axiale des palettes (10) est égale ou inférieure à 4,5 millimètres.
  7. Pompe turbomoléculaire selon la revendication 6, caractérisée par le fait que l'épaisseur (D) axiale des palettes (10) est comprise entre 3,0 et 4,5 millimètres.
  8. Pompe turbomoléculaire selon l'une quelconque des revendications 1 à 7, caractérisée par le fait que la forme des palettes (10), en coupe transversale, est au moins approximativement celle d'un parallélogramme.
  9. Procédé de fabrication d'un disque de rotor (8) ou d'un disque de stator (9) pour pompe turbomoléculaire (T) selon l'une quelconque des revendications 1 à 8, caractérisé par l'emploi de la méthode dite "High Speed Cutting" (UGV - usinage à grande vitesse) dans laquelle le matériau est enlevé sans application d'aucune pression.
EP05003720.9A 2004-03-16 2005-02-22 Pompe turbomoléculaire Expired - Lifetime EP1580435B2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004012713 2004-03-16
DE102004012713A DE102004012713A1 (de) 2004-03-16 2004-03-16 Turbomolekularpumpe

Publications (4)

Publication Number Publication Date
EP1580435A2 EP1580435A2 (fr) 2005-09-28
EP1580435A3 EP1580435A3 (fr) 2009-12-30
EP1580435B1 true EP1580435B1 (fr) 2011-08-31
EP1580435B2 EP1580435B2 (fr) 2020-11-18

Family

ID=34853986

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05003720.9A Expired - Lifetime EP1580435B2 (fr) 2004-03-16 2005-02-22 Pompe turbomoléculaire

Country Status (5)

Country Link
US (1) US8398362B2 (fr)
EP (1) EP1580435B2 (fr)
JP (1) JP2005264932A (fr)
AT (1) ATE522725T1 (fr)
DE (1) DE102004012713A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088327B1 (fr) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Support de roulement à rouleaux
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
GB2612781B (en) * 2021-11-10 2024-04-10 Edwards Ltd Turbomolecular pump bladed disc

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE757354A (fr) † 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
CH557468A (de) * 1973-04-30 1974-12-31 Bbc Brown Boveri & Cie Turbine axialer bauart.
US3969039A (en) † 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
JPS61123797A (ja) * 1984-11-19 1986-06-11 Mitsubishi Heavy Ind Ltd 高真空排気装置
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH02201100A (ja) * 1989-01-20 1990-08-09 Ntn Corp ターボ分子ポンプ
JP2865888B2 (ja) * 1991-03-05 1999-03-08 日本原子力研究所 マルチターボ型真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3898785B2 (ja) * 1996-09-24 2007-03-28 株式会社日立製作所 高低圧一体型蒸気タービン用動翼と高低圧一体型蒸気タービン及びコンバインド発電システム並びに複合発電プラント
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP2001132683A (ja) * 1999-10-29 2001-05-18 Applied Materials Inc ターボ分子ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
EP1249613B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
JP3978001B2 (ja) * 2001-06-29 2007-09-19 三菱重工業株式会社 ターボ分子ポンプ
US6760971B2 (en) * 2002-07-15 2004-07-13 Pratt & Whitney Canada Corp. Method of making a gas turbine engine diffuser

Also Published As

Publication number Publication date
US8398362B2 (en) 2013-03-19
DE102004012713A1 (de) 2005-10-06
ATE522725T1 (de) 2011-09-15
US20050207884A1 (en) 2005-09-22
EP1580435A2 (fr) 2005-09-28
EP1580435B2 (fr) 2020-11-18
JP2005264932A (ja) 2005-09-29
EP1580435A3 (fr) 2009-12-30

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