EP4108931A1 - Pompe à vide moléculaire à puissance d'aspiration améliorée, ainsi que procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée - Google Patents

Pompe à vide moléculaire à puissance d'aspiration améliorée, ainsi que procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée Download PDF

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Publication number
EP4108931A1
EP4108931A1 EP22193499.5A EP22193499A EP4108931A1 EP 4108931 A1 EP4108931 A1 EP 4108931A1 EP 22193499 A EP22193499 A EP 22193499A EP 4108931 A1 EP4108931 A1 EP 4108931A1
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EP
European Patent Office
Prior art keywords
pump
pumping
gas
turbomolecular
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP22193499.5A
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German (de)
English (en)
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EP4108931B1 (fr
Inventor
Jonas HÖLZ
Jan Hofmann
Maximilian Birkenfeld
Peter Vorwerk
Gilbrich Sönke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to EP22193499.5A priority Critical patent/EP4108931B1/fr
Publication of EP4108931A1 publication Critical patent/EP4108931A1/fr
Priority to JP2023072957A priority patent/JP2024035054A/ja
Application granted granted Critical
Publication of EP4108931B1 publication Critical patent/EP4108931B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
    • F04D27/0238—Details or means for fluid reinjection

Definitions

  • the present invention relates to a molecular vacuum pump, also referred to here only as a pump, in particular a turbomolecular vacuum pump, which is specially designed to achieve improved pumping speed, and a method for operating a molecular vacuum pump to achieve improved pumping speed.
  • Molecular vacuum pumps work in the high and ultra-high vacuum range, with the pressure in the high-vacuum range being between 10 -3 and 10 -7 hPa and in the ultra-high vacuum range being less than and 10 -7 hPa.
  • the process gas to be pumped from the pump inlet to the pump outlet tends to flow back from the pump outlet to the pump inlet due to the fact that the pressure at the pump inlet is lower than the pressure at the pump outlet.
  • This backflow tendency is all the greater, the higher the pump inlet pressure, ie the pressure at the pump outlet of the vacuum pump.
  • the pumping speed of a turbomolecular pump is lower than the pumping speed of the turbomolecular pump at lower inlet pressures due to the described tendency to backflow in the area of high inlet pressures.
  • the backflow problem described arises in particular in the case of process gases to be pumped which have a relatively low molar mass. This is due to the fact that heavier process gases can be pumped better than lighter process gases.
  • relatively light process gases such as hydrogen or helium
  • the pressure difference between the pump inlet and the pump outlet or the pressure ratio is lower, given the same admission pressure and otherwise the same boundary conditions, than in the case of heavier process gases, with the result that the problem of backflow with process gases also increases lower molar mass is higher than in the case of process gases with a larger molar mass.
  • the invention is therefore based on the object of reducing the backflow problem described in molecular vacuum pumps such as turbomolecular vacuum pumps and thus ensuring improved pumping speed.
  • the pump stage located closest to the pump inlet is referred to as the first and the pump stage located closest to the pump outlet as the Nth pump stage, with the individual pump stages from the first to the Nth are consecutively numbered with whole numbers in the direction of the pump outlet.
  • turbomolecular pump stage closest to the pump inlet is the first and the turbomolecular pump stage closest to the pump outlet is the Nth pump stage, with the individual turbomolecular pump stages from the first to the Nth in the direction of the pump outlet are consecutively numbered with whole numbers.
  • the tendency of the process gas to flow back from the pump outlet to the pump inlet is reduced, since the molecules of the process gas are separated from the molecules of the entrained gas are entrained in the direction of the pump outlet, hence the term "entrained gas".
  • the molecules of the carrier gas transfer their momentum to the molecules of the process gas, so that the process gas molecules are entrained by the carrier gas molecules in the direction of the pump outlet.
  • the momentum transfer from the carrier gas to the process gas is the higher, the greater the molecular weight of the towing gas is.
  • a gas should be used as the carrier gas that has a greater molar mass than the process gas, which is why, for example, in the case of helium or hydrogen as the process gas, nitrogen and/or argon can be used as the carrier gas.
  • the pressure at the pump inlet is reduced with the same inlet pressure, which means an increase in the pumping speed of the pump.
  • the effective pumping speed of the turbomolecular pump on the high-vacuum side is thus increased by the introduction of a carrier gas into the pump mechanism, since the backflow tendency of the process gas is reduced by the introduction of a carrier gas into the pump mechanism. This effect is all the more noticeable the closer the carrier gas connection is to the pump inlet, since in this case more time is available during which the carrier gas molecules can transfer their momentum to the process gas molecules.
  • the carrier gas connection should not be located too close to the pump inlet, since in this case there is a risk that the carrier gas will flow back in the direction of the pump inlet due to the vacuum at the pump inlet. Accordingly, regardless of the number of pump stages, the carrier gas connection should always be located downstream of the first, preferably downstream of the second, pump stage in order to prevent the carrier gas from flowing back in the direction of the pump inlet.
  • the carrier gas connection should be located downstream of the first pumping stage, preferably downstream of the second pumping stage, in order to prevent the carrier gas from flowing back in the direction of the pump inlet.
  • the carrier gas connection should also be located downstream of the first pumping stage, preferably downstream of the second pumping stage, in order to prevent the carrier gas from flowing back in the direction of the pump inlet.
  • the object on which it is based is also achieved with a method for operating a molecular vacuum pump, in particular a turbomolecular vacuum pump, with the features of claim 5 and in particular in that during the conveyance of process gas from the pump inlet to the pump outlet of the pump and thus, during the normal operating condition of the pump, during which the electric motor of the pump is energized, a quantity of an entrainment gas is introduced into the pump mechanism.
  • a molecular vacuum pump in particular a turbomolecular vacuum pump
  • this can be an operating state during which the molecular vacuum pump is running is continuously operated at at least 75% of its maximum allowable power or at least 75% of its maximum allowable speed. It can preferably be provided that the carrier gas is introduced into the pump mechanism continuously during at least 50% of this time window, i.e. during the time window during which the molecular vacuum pump is continuously operated at at least 75% of its maximum permissible power or at least 75% of its maximum permissible speed will.
  • the entrainment gas may be introduced into the pumping mechanism continuously for at least 60% of the time of this time window, more preferably for at least 70% of the time of this time window, and more preferably for at least 80% of the time of this time window.
  • the carrier gas is not only introduced into the pumping mechanism temporarily for a relatively short period of time; Rather, according to the invention, the carrier gas is introduced into the pump mechanism during most of the time during which process gas is being pumped by the pump, in order to reduce the tendency of the process gas to flow back in favor of improving the pumping speed of the pump.
  • the carrier gas is introduced continuously over a period of at least one hour while the process gas is being conveyed into the pump mechanism, in particular over a period of at least 10 hours and preferably over a period of more than 24 hours.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ). Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 arranged on the electronics housing 123 .
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be admitted.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be conducted into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages which are connected in series with one another and have a plurality of radial rotor disks 155 which are fastened to the rotor shaft 153 and are arranged between the rotor disks 155 and stator disks 157 fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pumping stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Also provided are two cylinder jacket-shaped Holweck stator sleeves 167, 169, which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the inner radial surface of the inner Holweck stator sleeve 169 faces the radial outer surface of the inner Holweck rotor sleeve 165 opposite to form a radial Holweck gap 175 and forms with this the third Holweck pump stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases toward the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are parallel to the axis of rotation 151 in one direction by a with the support section 203 connected mounting ring 209 and a mounting portion 203 connected to the mounting ring 211 fixed.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures is prevented with the stator-side structures.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • turbomolecular pump 111 according to the invention is described.
  • the turbomolecular pump according to the invention 111 according to 6 is largely identical to that previously referred to figs 1 to 5 trained turbomolecular pump 111 is formed, which is why with respect to the basic structure of the turbomolecular pump 111 according to the invention 6 to the above description of the turbomolecular pump 111 according to FIGS figs 1 to 5 can be referred.
  • the turbomolecular pump 111 according to the invention 6 additionally has a towing gas connection 225, the position and function of which will be discussed in more detail below.
  • the turbomolecular pump 111 described above has a flood inlet 133 which opens into the Holweck pump stage of the pump 111 .
  • a flood inlet 133 in series switched turbomolecular pumping stages, in which case the flood inlet 133 is usually located downstream of the pumping mechanism formed by the serially connected turbomolecular pumping stages.
  • the flood inlet 133 can be located, for example, in the region of the seventh pumping stage.
  • the pump 111 can be flooded with air, for example, via such a flood inlet 133 after the pump 111 has been taken out of operation or the power supply to the electric motor 125 has been interrupted.
  • the turbomolecular vacuum pump 111 has a carrier gas connection in addition to or instead of the flood inlet 133 6 is identified purely schematically with the reference number "225".
  • the entraining gas port 225 is a housing opening through which an entraining gas can be introduced into the pumping mechanism formed by the turbomolecular pumping stages.
  • the housing opening 227 of the carrier gas connection 225 can be closed, for example, with a screw cap, not shown here, which can be removed if necessary in order to be able to connect a supply line to the carrier gas connection 225, via which a carrier gas can be supplied to the carrier gas connection 225.
  • a flow control valve (not shown here) can be connected to the housing opening 227 of the towing gas connection 225, the flow cross section of which can be infinitely varied in order to be able to continuously adjust and in particular regulate the quantity of the towing gas supplied to the towing gas connection 225.
  • M ⁇ (N+1)/2 ⁇ .
  • the nomenclature is chosen so that the closest to The turbomolecular pumping stage located at pump inlet 115 is referred to as the first and the turbomolecular pumping stage located closest to the pump outlet 117 is referred to as the Nth pumping stage, with the individual turbomolecular pumping stages being numbered consecutively from the first to the Nth in the direction of the pump outlet 117 with whole numbers.
  • the entraining gas connection thus opens upstream of the sixth turbomolecular pumping stage into the pumping mechanism formed by the turbomolecular pumping stages.
  • the turbomolecular pump has, for example, eight turbomolecular pump stages, then the entrainment gas connection 225 opens upstream of the fifth turbomolecular pump stage into the pump mechanism formed by the turbomolecular pump stages.
  • a towing gas is not only introduced into the pump mechanism via the towing gas connection 225 after the pump has been switched off; Rather, it is provided according to the invention that via the carrier gas connection 225 during the operation of the turbomolecular pump 111 and thus during the delivery of process gas from the pump inlet 115 to the pump outlet 117 entrainment gas is introduced into the pump mechanism. To put it another way, the drag gas is introduced into the pump mechanism while the electric motor 125 is energized.
  • the carrier gas is thus introduced into the pump mechanism via the carrier gas connection 225 during the normal pumping operation of the turbomolecular pump 111 .
  • This normal pump operation can be defined as a time window during which the turbomolecular vacuum pump 111 is continuously operated at at least 75% of its maximum permissible power and/or at least 75% of its maximum permissible speed.
  • the towing gas is introduced into the pump mechanism through the towing gas connection 225 during at least 50% of the time of the time window defined in this way.
  • the carrier gas is continuously introduced into the pump mechanism over a period of at least one hour while process gas is being conveyed, in particular over a period of 10 hours and preferably over a period of more than 24 hours.
  • the entrainment gas introduced via the entrainment gas connection 225 entrains or entrains the process gas conveyed from the pump inlet 115 to the pump outlet 117 and in particular prevents process gas from being able to flow back from the pump outlet 117 to the pump inlet 115 .
  • the pressure at the pump inlet thus drops in the desired manner, so that the pumping speed of the pump increases in the desired manner.
  • turbomolecular vacuum pump 111 in the manner previously described downstream of the turbomolecular pump stages on a Holweck pump stage. However, like the flood inlet 133, this is optional and is used to achieve the invention Drag gas effect not required.
  • the turbomolecular vacuum pump 111 according to the invention can therefore have a Holweck pump stage, but does not have to do so.
  • the top diagram line shows an operating state of the pump in which gases were not introduced into the pump mechanism either via the flood inlet or via the towing gas connection.
  • the middle diagram line relates to an operating state during which nitrogen was introduced into the pump mechanism via the flood inlet in the area of the seventh turbomolecular pump stage during operation of the pump.
  • the bottom diagram line refers to an operating state of the pump during which nitrogen was introduced into the pump mechanism via the entrainment gas connection in the area of the fourth turbomolecular pump stage.
  • the pump was operated in such a way that 1,000 sccm of hydrogen gas were delivered as the process gas from the pump inlet 115 to the pump outlet 117 .
  • the introduction of nitrogen gas through the flood inlet already reduces the pressure at the pump inlet compared to the operating state in which no entrainment gas is introduced into the pump mechanism according to the top diagram line.
  • the pumping speed of the pump is thus already improved by the introduction of nitrogen via the flood inlet;
  • the pump inlet pressure drops further if nitrogen as a carrier gas is not introduced into the pump mechanism via the flood inlet in the area of the seventh turbomolecular pump stage, but via the carrier gas connection in the area of the fourth turbomolecular pump.
  • the pump was operated in such a way that it continuously delivers 1,000 sccm H 2 , with 100 sccm nitrogen being introduced into the pump mechanism via the flood inlet or via the sealing gas connection 225 .
  • a ratio of about 10:1 standard cubic centimeters of process gas per minute: standard cubic centimeters of carrier gas per minute

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP22193499.5A 2022-09-01 2022-09-01 Procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée Active EP4108931B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP22193499.5A EP4108931B1 (fr) 2022-09-01 2022-09-01 Procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée
JP2023072957A JP2024035054A (ja) 2022-09-01 2023-04-27 排気速度が改善された分子真空ポンプ及び改善された排気速度を達成するように分子真空ポンプを運転する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22193499.5A EP4108931B1 (fr) 2022-09-01 2022-09-01 Procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée

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EP4108931A1 true EP4108931A1 (fr) 2022-12-28
EP4108931B1 EP4108931B1 (fr) 2024-06-26

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EP22193499.5A Active EP4108931B1 (fr) 2022-09-01 2022-09-01 Procédé permettant de faire fonctionner une pompe à vide moléculaire pour obtenir une puissance d'aspiration améliorée

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2507430A1 (de) * 1975-02-21 1976-08-26 Franz Josef Dipl Phys Schittke Molekularvakuumpumpe mit hohem kompressionsverhaeltnis fuer leichte molekuele
JPH03233193A (ja) * 1990-02-06 1991-10-17 Japan Atom Energy Res Inst 真空ポンプ
US5092740A (en) * 1988-04-30 1992-03-03 Nippon Ferrofluidics Corporation Composite vacuum pump
EP0974756A2 (fr) * 1998-07-21 2000-01-26 Seiko Seiki Kabushiki Kaisha Pompe à vide et appareil à vide
EP3438460A1 (fr) * 2017-08-04 2019-02-06 Pfeiffer Vacuum Gmbh Pompe à vide

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2507430A1 (de) * 1975-02-21 1976-08-26 Franz Josef Dipl Phys Schittke Molekularvakuumpumpe mit hohem kompressionsverhaeltnis fuer leichte molekuele
US5092740A (en) * 1988-04-30 1992-03-03 Nippon Ferrofluidics Corporation Composite vacuum pump
JPH03233193A (ja) * 1990-02-06 1991-10-17 Japan Atom Energy Res Inst 真空ポンプ
EP0974756A2 (fr) * 1998-07-21 2000-01-26 Seiko Seiki Kabushiki Kaisha Pompe à vide et appareil à vide
EP3438460A1 (fr) * 2017-08-04 2019-02-06 Pfeiffer Vacuum Gmbh Pompe à vide

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EP4108931B1 (fr) 2024-06-26

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