ATE522725T1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
ATE522725T1
ATE522725T1 AT05003720T AT05003720T ATE522725T1 AT E522725 T1 ATE522725 T1 AT E522725T1 AT 05003720 T AT05003720 T AT 05003720T AT 05003720 T AT05003720 T AT 05003720T AT E522725 T1 ATE522725 T1 AT E522725T1
Authority
AT
Austria
Prior art keywords
vacuum side
blades
less
discs
turbomolecular pump
Prior art date
Application number
AT05003720T
Other languages
English (en)
Inventor
Armin Conrad
Peter Fahrenbach
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34853986&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE522725(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE522725T1 publication Critical patent/ATE522725T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
AT05003720T 2004-03-16 2005-02-22 Turbomolekularpumpe ATE522725T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004012713A DE102004012713A1 (de) 2004-03-16 2004-03-16 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
ATE522725T1 true ATE522725T1 (de) 2011-09-15

Family

ID=34853986

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05003720T ATE522725T1 (de) 2004-03-16 2005-02-22 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US8398362B2 (de)
EP (1) EP1580435B2 (de)
JP (1) JP2005264932A (de)
AT (1) ATE522725T1 (de)
DE (1) DE102004012713A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088327B1 (de) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Stütze für Wälzlager
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE757354A (fr) † 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
CH557468A (de) * 1973-04-30 1974-12-31 Bbc Brown Boveri & Cie Turbine axialer bauart.
US3969039A (en) † 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
JPS61123797A (ja) * 1984-11-19 1986-06-11 Mitsubishi Heavy Ind Ltd 高真空排気装置
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH02201100A (ja) * 1989-01-20 1990-08-09 Ntn Corp ターボ分子ポンプ
JP2865888B2 (ja) * 1991-03-05 1999-03-08 日本原子力研究所 マルチターボ型真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3898785B2 (ja) * 1996-09-24 2007-03-28 株式会社日立製作所 高低圧一体型蒸気タービン用動翼と高低圧一体型蒸気タービン及びコンバインド発電システム並びに複合発電プラント
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP2001132683A (ja) * 1999-10-29 2001-05-18 Applied Materials Inc ターボ分子ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
EP1249613B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
JP3978001B2 (ja) * 2001-06-29 2007-09-19 三菱重工業株式会社 ターボ分子ポンプ
US6760971B2 (en) * 2002-07-15 2004-07-13 Pratt & Whitney Canada Corp. Method of making a gas turbine engine diffuser

Also Published As

Publication number Publication date
US20050207884A1 (en) 2005-09-22
EP1580435A2 (de) 2005-09-28
EP1580435B2 (de) 2020-11-18
JP2005264932A (ja) 2005-09-29
EP1580435A3 (de) 2009-12-30
EP1580435B1 (de) 2011-08-31
DE102004012713A1 (de) 2005-10-06
US8398362B2 (en) 2013-03-19

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