EP1580435A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP1580435A3
EP1580435A3 EP05003720A EP05003720A EP1580435A3 EP 1580435 A3 EP1580435 A3 EP 1580435A3 EP 05003720 A EP05003720 A EP 05003720A EP 05003720 A EP05003720 A EP 05003720A EP 1580435 A3 EP1580435 A3 EP 1580435A3
Authority
EP
European Patent Office
Prior art keywords
vacuum side
blades
less
discs
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05003720A
Other languages
English (en)
French (fr)
Other versions
EP1580435B1 (de
EP1580435A2 (de
EP1580435B2 (de
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34853986&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1580435(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1580435A2 publication Critical patent/EP1580435A2/de
Publication of EP1580435A3 publication Critical patent/EP1580435A3/de
Publication of EP1580435B1 publication Critical patent/EP1580435B1/de
Application granted granted Critical
Publication of EP1580435B2 publication Critical patent/EP1580435B2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Eine Turbomolekularpumpe (T) umfasst eine Mehrzahl von abwechselnd axial hintereinander angeordneten, mit Schaufeln (10) versehenen Rotor- und Statorscheiben (8, 9), wobei die Schaufeln (10) zur Hochvakuumseite (2) hin einen steileren Anstellwinkel α aufweisen als die Schaufeln (10) zur Vakuumseite (3) hin. Um insbesondere den Wirkungsgrad zu erhöhen, wird die Turbomolekularpumpe (T) so ausgebildet, dass der Anstellwinkel α der Schaufeln (10) zurVakuumseite (3) hin weniger als 8°, vorzugsweise weniger als 5°, beträgt. Die Herstellung der Schaufeln (10) erfolgt vorzugsweise durch High-Speed-Cutting.
EP05003720.9A 2004-03-16 2005-02-22 Turbomolekularpumpe Active EP1580435B2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004012713 2004-03-16
DE102004012713A DE102004012713A1 (de) 2004-03-16 2004-03-16 Turbomolekularpumpe

Publications (4)

Publication Number Publication Date
EP1580435A2 EP1580435A2 (de) 2005-09-28
EP1580435A3 true EP1580435A3 (de) 2009-12-30
EP1580435B1 EP1580435B1 (de) 2011-08-31
EP1580435B2 EP1580435B2 (de) 2020-11-18

Family

ID=34853986

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05003720.9A Active EP1580435B2 (de) 2004-03-16 2005-02-22 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US8398362B2 (de)
EP (1) EP1580435B2 (de)
JP (1) JP2005264932A (de)
AT (1) ATE522725T1 (de)
DE (1) DE102004012713A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088327B1 (de) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Stütze für Wälzlager
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
DE4206972A1 (de) * 1991-03-05 1992-09-10 Japan Atomic Energy Res Inst Mehrturbinen-vakuumpumpe
WO2002025116A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit rotorschaufelreihen und statorschaufelreihen

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE757354A (fr) † 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
CH557468A (de) * 1973-04-30 1974-12-31 Bbc Brown Boveri & Cie Turbine axialer bauart.
US3969039A (en) † 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ
JPS61123797A (ja) * 1984-11-19 1986-06-11 Mitsubishi Heavy Ind Ltd 高真空排気装置
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH02201100A (ja) * 1989-01-20 1990-08-09 Ntn Corp ターボ分子ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3898785B2 (ja) * 1996-09-24 2007-03-28 株式会社日立製作所 高低圧一体型蒸気タービン用動翼と高低圧一体型蒸気タービン及びコンバインド発電システム並びに複合発電プラント
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
JP2001132683A (ja) * 1999-10-29 2001-05-18 Applied Materials Inc ターボ分子ポンプ
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
EP1249613B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
JP3978001B2 (ja) * 2001-06-29 2007-09-19 三菱重工業株式会社 ターボ分子ポンプ
US6760971B2 (en) * 2002-07-15 2004-07-13 Pratt & Whitney Canada Corp. Method of making a gas turbine engine diffuser

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7237362U (de) * 1972-10-12 1973-01-11 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
DE4206972A1 (de) * 1991-03-05 1992-09-10 Japan Atomic Energy Res Inst Mehrturbinen-vakuumpumpe
WO2002025116A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit rotorschaufelreihen und statorschaufelreihen

Also Published As

Publication number Publication date
EP1580435B1 (de) 2011-08-31
ATE522725T1 (de) 2011-09-15
EP1580435A2 (de) 2005-09-28
JP2005264932A (ja) 2005-09-29
US8398362B2 (en) 2013-03-19
DE102004012713A1 (de) 2005-10-06
EP1580435B2 (de) 2020-11-18
US20050207884A1 (en) 2005-09-22

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