EP1850011A2 - Disque de rotor ou de stator pour une pompe moléculaire - Google Patents

Disque de rotor ou de stator pour une pompe moléculaire Download PDF

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Publication number
EP1850011A2
EP1850011A2 EP07008041A EP07008041A EP1850011A2 EP 1850011 A2 EP1850011 A2 EP 1850011A2 EP 07008041 A EP07008041 A EP 07008041A EP 07008041 A EP07008041 A EP 07008041A EP 1850011 A2 EP1850011 A2 EP 1850011A2
Authority
EP
European Patent Office
Prior art keywords
rotor
blades
stator
disc
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07008041A
Other languages
German (de)
English (en)
Other versions
EP1850011B1 (fr
EP1850011A3 (fr
Inventor
Andreas Zipp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1850011A2 publication Critical patent/EP1850011A2/fr
Publication of EP1850011A3 publication Critical patent/EP1850011A3/fr
Application granted granted Critical
Publication of EP1850011B1 publication Critical patent/EP1850011B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a rotor or stator disk for a molecular pump.
  • a common design consists of sheet metal, which is punched during manufacture so that a round disc with radial slots is formed.
  • the radial slots are provided only over an outer part. The part between the slots is bent over, ie exposed out of the window plane, so that blades are formed. This solution is for example in the DE-OS 100 52 637 shown.
  • Both solutions have the great disadvantage that the sheets must be quite thin. As a result, the discs can not be exposed to rapid rotations because the material load on the blade ground would be too high.
  • the second solution has the disadvantage that the sheets must be mutually oriented and fixed. There is a build up of dead spaces between the sheets can not be excluded, so that the solution in the high vacuum range can not be applied.
  • the blades have large areas with surface normal in the direction of the shaft axis, so that the pumping speed of such a pump is poor.
  • the object of the invention is therefore to produce a disk for rotor and / or stator of a molecular vacuum pump, which avoids the above-mentioned disadvantages of the prior art and in particular allows more freedom in the choice of the blade geometry.
  • a disk which is constructed from at least a first and a second partial disk, wherein blades are arranged in an arrangement plane on each partial disk and the arrangement levels are axially spaced, allows the geometry of the disk to be adapted much better to the needs.
  • the geometry can be designed in a simple way according to the vacuum technical requirements. In the prior art, geometry was a limiting constraint. With the disc according to the invention it is therefore possible to significantly improve the pumping action.
  • the development according to claim 4 provides smooth, stepless blade surfaces, resulting from the surfaces of the blades of the dividing discs.
  • the steplessity improves the pumping action and prevents perpendicular to the pumping direction surfaces, from which molecules can be reflected against the pumping direction.
  • the pumping effect can be further improved by the angles of attack of the blades of different part discs are different. Backflow can be reduced.
  • a further improvement results in that at least one dividing disk is optically dense. This reduces backflow since molecules can not pass directly through the disk in the pumping direction.
  • An arrangement of a spacer between the part discs improves the pumping action, as forms in the region of the spacer a calming zone in which molecules can interact with each other and thus takes place a Impulsan protest.
  • the first figure shows a disk 1 according to a first embodiment.
  • two part discs 2 and 3 are arranged on a shaft 7, two part discs 2 and 3 are arranged. Each of these dividing discs has blades 4. For the perspective view shown only a portion of the blades per part of disc was shown. The blades are distributed over the entire circumference of the part discs, so that there is a rotationally symmetrical structure.
  • Both partial discs have a support ring. 9 on which the blades are mounted in an assembly plane. the arrangement levels of both partial discs are axially spaced from each other. Blades and support ring may be integrally formed. The area of the blades, which lies radially inward, ie at the transition to the support ring, is called the blade root.
  • the radially outer region is referred to as a blade head.
  • the outermost region of the blade head with its radially outer surface is referred to as the blade tip 5.
  • the blade tips of the partial disks 2 and 3 lie on a common, imaginary line 6.
  • the blades have a trapzoidal cross section.
  • the advantage of such a geometry lies in the simple and inexpensive production, for example by sawing.
  • the preparation of the disc can be simplified by pins 8 are provided which protrude from the support ring of a dividing disc and immerse in matching, not shown holes of the next part of the disc. This ensures that the part discs are rotated at the correct angle to each other.
  • the second figure shows a composite of two part discs 2 and 3 disc.
  • Figure 2a shows the top view.
  • pins 8 are arranged, which allow an orientation of the part discs against each other.
  • the blades 4 have blade edges 25 and 26 which extend in the radial direction. Due to the radial design of the edges results in a total blade surface, which is almost infinite, ie, the two blades 4 and 4 'form a blade with a continuous surface.
  • the radial configuration of the edges 25 and 26 can be achieved by using the blades. This requires different angles of attack of the blades on the blade head and blade ground.
  • FIG 2b a section through the blades 4, 4 'is shown on the blade ground along the line AA.
  • the blade 4 is arranged on the support ring of the dividing disk 2, the blade 4 'on the support ring of the indexing disk 3.
  • Dash-dotted lines are the arrangement levels of the blades 10 and 11.
  • the blades are inclined with an angle of attack ⁇ against these arrangement levels.
  • Figure 2c shows the section BB in the area of the blade head.
  • the angle of attack is ⁇ , where ⁇ > ⁇ . If the blades are designed with a trapzoidem cross-section, the blade edges of the blades of the various part discs are surfaces that are on top of each other.
  • Figure 3 shows a development of a third embodiment.
  • the disc is constructed here of the four part discs 2, 3, 20 and 21.
  • the blades are arranged in array planes 10, 11, 12, and 13 with the planes of the four discs being axially spaced apart.
  • the angles of attack on the blade base and the blade head are the same within a dividing disk, but the blades of the various dividing disks have a different angle of attack.
  • Such a shape is made possible only by the structure of the disc of part discs. This disc has an improved pumping action.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Iron Core Of Rotating Electric Machines (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
EP07008041A 2006-04-29 2007-04-20 Disque de rotor ou de stator pour une pompe moléculaire Not-in-force EP1850011B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006020081A DE102006020081A1 (de) 2006-04-29 2006-04-29 Rotor- oder Statorscheibe für eine Molekularpumpe

Publications (3)

Publication Number Publication Date
EP1850011A2 true EP1850011A2 (fr) 2007-10-31
EP1850011A3 EP1850011A3 (fr) 2007-11-14
EP1850011B1 EP1850011B1 (fr) 2010-01-06

Family

ID=38268966

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07008041A Not-in-force EP1850011B1 (fr) 2006-04-29 2007-04-20 Disque de rotor ou de stator pour une pompe moléculaire

Country Status (3)

Country Link
EP (1) EP1850011B1 (fr)
AT (1) ATE454556T1 (fr)
DE (2) DE102006020081A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
EP3032106A1 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe à vide
CN109844322A (zh) * 2016-10-20 2019-06-04 埃地沃兹日本有限公司 真空泵及真空泵中具备的螺旋状板、旋转圆筒体、以及螺旋状板的制造方法
WO2020229820A1 (fr) * 2019-05-14 2020-11-19 Edwards Limited Pales de rotor ou de stator pour pompe à vide

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583826A1 (fr) * 1985-06-21 1986-12-26 Etri Sa Helice de ventilateur
US6318964B1 (en) * 2000-09-08 2001-11-20 Sheng Shyan Yang Complex cooling fan with increased cooling capacity
DE10052637A1 (de) * 2000-10-24 2002-05-02 Pfeiffer Vacuum Gmbh Scheiben für eine Turbomolekularpumpe
EP1348872A2 (fr) * 2002-03-28 2003-10-01 Delta Electronics, Inc. Dispositif composite dissipateur de chaleur
DE202004014463U1 (de) * 2003-09-22 2005-02-03 Yang, Sheng-An, Dashu Hsiang Gebläserad-Baugruppe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10103230A1 (de) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln
US6572336B2 (en) * 2001-09-28 2003-06-03 Sunonwealth Electric Machine Industry Co., Ltd. Impeller structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583826A1 (fr) * 1985-06-21 1986-12-26 Etri Sa Helice de ventilateur
US6318964B1 (en) * 2000-09-08 2001-11-20 Sheng Shyan Yang Complex cooling fan with increased cooling capacity
DE10052637A1 (de) * 2000-10-24 2002-05-02 Pfeiffer Vacuum Gmbh Scheiben für eine Turbomolekularpumpe
EP1348872A2 (fr) * 2002-03-28 2003-10-01 Delta Electronics, Inc. Dispositif composite dissipateur de chaleur
DE202004014463U1 (de) * 2003-09-22 2005-02-03 Yang, Sheng-An, Dashu Hsiang Gebläserad-Baugruppe

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
US8562293B2 (en) 2007-10-11 2013-10-22 Oerlikon Leybold Vacuum Gmbh Multi-stage pump rotor for a turbomolecular pump
EP3032106A1 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe à vide
JP2016109137A (ja) * 2014-12-08 2016-06-20 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
CN109844322A (zh) * 2016-10-20 2019-06-04 埃地沃兹日本有限公司 真空泵及真空泵中具备的螺旋状板、旋转圆筒体、以及螺旋状板的制造方法
EP3530951A4 (fr) * 2016-10-20 2020-06-03 Edwards Japan Limited Pompe à vide, plaque en spirale disposée dans une pompe à vide, corps cylindrique rotatif, et procédé de fabrication de plaque en spirale
US10801507B2 (en) 2016-10-20 2020-10-13 Edwards Japan Limited Vacuum pump, spiral plate provided in vacuum pump, rotating cylinder and method for manufacturing spiral plate
CN109844322B (zh) * 2016-10-20 2021-10-22 埃地沃兹日本有限公司 真空泵及真空泵中具备的螺旋状板、旋转圆筒体、以及螺旋状板的制造方法
WO2020229820A1 (fr) * 2019-05-14 2020-11-19 Edwards Limited Pales de rotor ou de stator pour pompe à vide

Also Published As

Publication number Publication date
DE102006020081A1 (de) 2007-10-31
EP1850011B1 (fr) 2010-01-06
DE502007002522D1 (de) 2010-02-25
ATE454556T1 (de) 2010-01-15
EP1850011A3 (fr) 2007-11-14

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