DE502007002522D1 - Rotor- oder Statorscheibe für eine Molekularpumpe - Google Patents
Rotor- oder Statorscheibe für eine MolekularpumpeInfo
- Publication number
- DE502007002522D1 DE502007002522D1 DE502007002522T DE502007002522T DE502007002522D1 DE 502007002522 D1 DE502007002522 D1 DE 502007002522D1 DE 502007002522 T DE502007002522 T DE 502007002522T DE 502007002522 T DE502007002522 T DE 502007002522T DE 502007002522 D1 DE502007002522 D1 DE 502007002522D1
- Authority
- DE
- Germany
- Prior art keywords
- rotor
- molecular pump
- stator disk
- index
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Iron Core Of Rotating Electric Machines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006020081A DE102006020081A1 (de) | 2006-04-29 | 2006-04-29 | Rotor- oder Statorscheibe für eine Molekularpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
DE502007002522D1 true DE502007002522D1 (de) | 2010-02-25 |
Family
ID=38268966
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102006020081A Withdrawn DE102006020081A1 (de) | 2006-04-29 | 2006-04-29 | Rotor- oder Statorscheibe für eine Molekularpumpe |
DE502007002522T Active DE502007002522D1 (de) | 2006-04-29 | 2007-04-20 | Rotor- oder Statorscheibe für eine Molekularpumpe |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102006020081A Withdrawn DE102006020081A1 (de) | 2006-04-29 | 2006-04-29 | Rotor- oder Statorscheibe für eine Molekularpumpe |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1850011B1 (de) |
AT (1) | ATE454556T1 (de) |
DE (2) | DE102006020081A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007048703A1 (de) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Mehrstufiger Turbomolekularpumpen-Pumpenrotor |
EP3032106B1 (de) * | 2014-12-08 | 2020-02-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP6706566B2 (ja) * | 2016-10-20 | 2020-06-10 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わるらせん状板、回転円筒体、ならびにらせん状板の製造方法 |
GB2583938A (en) * | 2019-05-14 | 2020-11-18 | Edwards Ltd | Vacuum rotor blade |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2583826B1 (fr) * | 1985-06-21 | 1989-07-13 | Etri Sa | Helice de ventilateur |
US6318964B1 (en) * | 2000-09-08 | 2001-11-20 | Sheng Shyan Yang | Complex cooling fan with increased cooling capacity |
DE10052637B4 (de) * | 2000-10-24 | 2021-03-11 | Pfeiffer Vacuum Gmbh | 16.02.2001 Scheiben für eine Turbomolekularpumpe |
DE10103230A1 (de) * | 2001-01-25 | 2002-08-01 | Leybold Vakuum Gmbh | Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln |
US6572336B2 (en) * | 2001-09-28 | 2003-06-03 | Sunonwealth Electric Machine Industry Co., Ltd. | Impeller structure |
TW514353U (en) * | 2002-03-28 | 2002-12-11 | Delta Electronics Inc | Composite heat-dissipating device |
TWI227109B (en) * | 2003-09-22 | 2005-01-21 | Sheng-An Yang | Heat dissipation blade |
-
2006
- 2006-04-29 DE DE102006020081A patent/DE102006020081A1/de not_active Withdrawn
-
2007
- 2007-04-20 DE DE502007002522T patent/DE502007002522D1/de active Active
- 2007-04-20 AT AT07008041T patent/ATE454556T1/de active
- 2007-04-20 EP EP07008041A patent/EP1850011B1/de not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
ATE454556T1 (de) | 2010-01-15 |
DE102006020081A1 (de) | 2007-10-31 |
EP1850011A3 (de) | 2007-11-14 |
EP1850011A2 (de) | 2007-10-31 |
EP1850011B1 (de) | 2010-01-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |