EP2458222B1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

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Publication number
EP2458222B1
EP2458222B1 EP11008602.2A EP11008602A EP2458222B1 EP 2458222 B1 EP2458222 B1 EP 2458222B1 EP 11008602 A EP11008602 A EP 11008602A EP 2458222 B1 EP2458222 B1 EP 2458222B1
Authority
EP
European Patent Office
Prior art keywords
support ring
turbomolecular pump
accordance
disk
vanes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP11008602.2A
Other languages
German (de)
English (en)
Other versions
EP2458222A2 (fr
EP2458222A3 (fr
Inventor
Michael Schweighöfer
Herbert Stammler
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2458222A2 publication Critical patent/EP2458222A2/fr
Publication of EP2458222A3 publication Critical patent/EP2458222A3/fr
Application granted granted Critical
Publication of EP2458222B1 publication Critical patent/EP2458222B1/fr
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Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/40Casings; Connections of working fluid
    • F04D29/52Casings; Connections of working fluid for axial pumps
    • F04D29/54Fluid-guiding means, e.g. diffusers
    • F04D29/541Specially adapted for elastic fluid pumps
    • F04D29/542Bladed diffusers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/60Mounting; Assembling; Disassembling
    • F04D29/64Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of claim 1.
  • turbomolecular pumps have been used in vacuum technology to produce high vacuum and ultrahigh vacuum.
  • the vacuum generation is based in them on a rotor with a plurality along the rotor axis staggered blade rings, between which stator side standing blade rings are arranged.
  • stator blade rings are known in the art.
  • so-called sheet metal stator disks are considered. These are typically made of thin sheet metal by first exposing the blades of the blade ring by punching or cutting and then turning them out of the disk plane in a subsequent forming step.
  • These Blechstatorsayn are inexpensive and are particularly popular in the field of Vorvakuums in which the blades are exposed only by a few degrees from the disk plane.
  • the EP 967 395 A2 shows such a BlechstatorMIC.
  • each stator-side blade ring is arranged around the shaft of the rotor and usually between two rotor-side blade rings, the assemblability of forming the Blechstatorsay one stage of several, usually two, part discs to form.
  • the small thickness of the sheet becomes a disadvantage: where the part discs abut each other, the thin sheets can slide over each other.
  • the blades of the blade ring are then positioned incorrectly and deviate among others in the direction of the rotor axis from its desired position.
  • the gap between the rotor-side and stator-side blade ring is used up. In special operating conditions, for example at high gas loads can lead to a contact between the rotor-side and stator-side components. In the worst case, the failure of the pump is the result.
  • stator disc has two partial disks and that the contacting abutting edges of the partial disks are shaped in such a way that they collide in a crossed manner at least in sections. This can be effected by unscrewing at least a portion of the abutting edge of the disc plane. As a result, an overlapping of the part discs is prevented, the unscrewing can take place in the already necessary forming step in which the blades are rotated out of the disk plane. It is only a processing of the forming tool necessary.
  • Fig. 1 It has a flange 4 which is releasably secured to the flange of a chamber to be evacuated. Through the suction port 6 gas is sucked into the pump and discharged through the outlet 8. In the housing 2 rotor 10 and stator 20 are angordnet, by the interaction of the conveying effect is achieved.
  • the rotor comprises a shaft 12 on which a fore vacuum side rotor disk 14, a central rotor disk 16 and a high vacuum side rotor disk 18 are provided, each of the rotor disks having a blade ring consisting of a plurality of blades.
  • the shaft is rotatably supported on the high vacuum side by a permanent magnet bearing 40 and on the fore vacuum side by a roller bearing 42.
  • a drive 44 translates the rotor into rapid rotation of tens of thousands of revolutions per minute.
  • the stator includes a forward vacuum-side stator disk 24, a middle stator disk 26, and a high-vacuum-side stator disk 28. These are axially spaced apart from each other by spacer rings 30, 32, and 34 with respect to the shaft and are alternately arranged with the rotor disks.
  • the stator discs also have blade rings.
  • the number of rotor and stator disks depends on the desired vacuum parameters, such as suction capacity and pressure ratio between intake opening and outlet.
  • the rotor may be constructed instead of discs also known in the art bell design, also both bearings can be arranged on the vacuum side.
  • the stator disc has an outer support ring 50 and an inner support ring 60.
  • a first support ring portion 52 of the outer support ring is part of the first part disc 140, a second support ring portion 56 is part of the second part disc 142.
  • the support ring 60 has a first inner support ring portion 62 which is part of the first part disc, and a second inner support ring portion 66 which Part of the second part of the disc is.
  • Blades 48 are attached to inner and outer support ring and form a blade ring.
  • the support ring sections 52 and 56 or 62 and 66 abut each other in the assembled state at abutting edges.
  • the abutting edges 54 and 58 and 70 and 72 of the outer support ring portions and the abutting edges 64 and 68 and 74 and 76 of the inner support ring portions are in contact.
  • the area of the support ring sections 52 and 56 is shown.
  • the support ring sections define a disk plane 200.
  • the blades 48 are tilted, the angle of attack 202 between the blade plane and the disk plane depending on the pressure range in which the disk is used.
  • the angle of attack between the high-vacuum side and the fore-vacuum side decreases.
  • the abutting edges 54 and 58 are also inclined towards the disk plane, wherein the tilting is preferably in opposite directions, so that the abutting edges intersect. This cruising turns into one Overlapping effectively prevented by very simple means, since the tilting of the abutting edges can be done in a single operation with the unscrewing of the blades from the disk plane.
  • the 4 and 5 show the side view of a part disc from the direction of the shaft.
  • abutting edges 54 and 70 of the outer support ring portion are inclined against the disk plane 200 while the abutting edges 64 and 74 of the inner support ring portion are in the disk plane. It is advantageous to incline both abutting edges 54 and 70 in the same direction against the disc plane. This makes it possible to make symmetrical both partial discs and at the same time to achieve protection against overlapping.
  • the partial disk shown can be used both as a partial disk 140 and as a partial disk 142, so that the number of different parts in the turbo pump reduces and assembly errors are avoided.
  • Fig. 5 are the abutting edges 72 and 58 of the outer support ring portion in the disk plane 200, while the abutting edges 76 and 68 of the inner support ring portion are inclined in the same direction against the disk plane.
  • both the abutting edges of the inner and outer support ring portions may be inclined against the disk plane, thereby increasing the security against overlap.
  • a recess 80 is incorporated, so that the abutting edges 54 and 56 of two part discs engage each other after assembly. It is advantageous to select the width 204 of the recess only slightly larger than the thickness 206 of the dividing disk, since this causes precise positioning of the dividing disks relative to each other.
  • the recess has chamfers 82, so that the recess widens in the direction of the abutting edge.
  • the chamfers cause a guide of the support ring sections during assembly, whereby a centering takes place.
  • Another development provides to provide recesses on both part discs, which causes a particularly good locking of the support ring sections.
  • the first training is in Fig. 7 in a front view and in Fig. 8 represented in a partial top block.
  • the inner support ring portion 62 ' is designed to be used over its length.
  • the abutting edges 64 'and 74' are inclined in the same direction against the disk plane 200.
  • the vanes 48 of the dividing disc are connected by webs 84, which lie in the disc plane, with the inner support ring portion.
  • the neutral fiber 88 of the utilization that is to say the region of the supporting ring section which lies in the plane of the pane over the entire length of the supporting ring section, lies substantially on the edge of the supporting ring section with which the webs are connected.
  • the second training is in Fig. 9 in a front view and in Fig. 10 represented in a partial top block.
  • the inner support ring portion 62 'over its length, ie designed between the inclined plane to the disk 200 abutting edges 64 "and 74".
  • the blades 48 are in turn connected by webs 84 with the inner support ring portion.
  • the webs are connected to the lying in the disk plane neutral fiber 88, which is not on the edge of the support ring portion but in the interior.
  • Column 86 are formed between edge and neutral fiber, so that the webs come to rest in the disk plane.
  • the use of the inner support ring portion is advantageous over a likewise conceivable use of the outer support ring portion, since complex, adapted to the use of configurations of the spacer ring omitted.
  • FIG. 11a Another embodiment show the Fig. 11 to 13 ,
  • the inner support ring sections 62 '"and 66'" of two part discs can be seen in the plan view.
  • At least the partial disk 62 "' has a bead 100, which is guided as far as the abutting edges 62'" and 74 '.
  • the bead runs according to FIG Fig. 11a not coaxial to the support ring. This is Fig. 11b illustrated by the radii.
  • the radius of the deepest point of the bead has at the abutting edge 64 '''a large radius 104 which is greater than the small radius 102 at the abutting edge 74'''. This choice of radii prevents the edges from sliding over each other. Radially inside and outside the bead lie flat portions 106 and 102, on which the abutting edges of the part discs are superimposed.
  • the bead can have different cross sections.
  • the bead 100 has a substantially triangular cross-section.
  • the bead 100 'in Fig. 12a has a rectangular, the bead 100 "in Fig. 12b a round cross section.
  • the beading can also be seen in a continuing education, shown in Fig. 13a and 13b , Tabs 110 and 112, which bring the beads 100 of the support ring portions 62 '' and 66 '' in engagement with each other when assembled.
  • Fig. 13 achieved in which the tabs are arranged on crossed sections of the bead, so that an effect analogous to Fig. 6a and b results.
  • Fig. 13b is the support ring portion 66 '"shown in dashed lines, the support ring portion 62'" with a solid line. This illustration illustrates the crossed position of the bead sections to each other.
  • Fig. 14 is an expression of this idea shown, in which the support ring portions 62 “" and 66 “” have beads 100 which are arranged at the abutting edges 64 "" and 68 “” radially offset from each other so that they do not overlap.
  • tabs 114 and 116 are arranged, which protrude respectively into the space created by the bead of the opposite support ring portion.
  • the bead may be provided in sections only in the region of the abutting edges. It is advantageous to let it run over the entire length of the support ring portion between the abutting edges, since as a further advantage, a stiffening of the support ring portion is achieved.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (11)

  1. Pompe turbomoléculaire (1) comportant un rotor (10) qui présente une couronne d'aubes, un disque stator (14, 16, 18) qui présente un anneau porteur (50, 60), une couronne d'aubes reliée à celui-ci et deux disques partiels (140, 142), chaque disque partiel comprenant une portion d'anneau porteur (52, 56, 62, 66 ; 62' ; 62" ; 62"', 66'", 62"", 66"") et un bord d'aboutement (54, 58, 64, 68, 70, 72, 74, 76 ; 64', 74' ; 64", 74" ; 64'", 74"') agencé sur celui-ci et les bords d'aboutement des disques partiels se touchent mutuellement,
    caractérisée en ce que
    les bords d'aboutement des disques partiels sont formés de manière à aboutir l'un contre l'autre au moins partiellement en croix, de manière à empêcher un chevauchement des disques partiels.
  2. Pompe turbomoléculaire selon la revendication 1,
    caractérisée en ce que
    les bords d'aboutement des disques partiels sont de forme rectangulaire.
  3. Pompe turbomoléculaire selon la revendication 1 ou 2,
    caractérisée en ce que
    au moins la portion d'anneau porteur d'un disque partiel présente un évidement (80) ouvert vers le bord d'aboutement, qui est en engagement avec la portion d'anneau porteur d'un second disque partiel.
  4. Pompe turbomoléculaire selon la revendication 3,
    caractérisée en ce que
    les portions d'anneau porteur des deux disques partiels présentent des évidements (80) qui sont disposés de manière à s'engager mutuellement.
  5. Pompe turbomoléculaire selon la revendication 3 ou 4,
    caractérisée en ce que
    l'évidement est formé avec auto-centrage, en particulier de manière à s'évaser vers le bord d'aboutement.
  6. Pompe turbomoléculaire selon l'une des revendications précédentes, caractérisée en ce que
    au moins une portion d'anneau porteur (62 ; 62") est disposée radialement à l'intérieur de la couronne d'aubes et est conçue en forme hélicoïdale le long de sa périphérie.
  7. Pompe turbomoléculaire selon la revendication 6,
    caractérisée en ce que
    des aubes (48) prévues dans la couronne d'aubes sont reliées à une fibre neutre (88) de la portion d'anneau porteur (62' ; 62").
  8. Pompe turbomoléculaire selon la revendication 6,
    caractérisée en ce que
    il est prévu des barrettes (84) entre la portion d'anneau porteur (62") et les aubes prévues dans la couronne d'aubes, qui sont reliées à une fibre neutre (88) de la portion d'anneau porteur, et un intervalle (86) est prévu entre la barrette et la portion d'anneau porteur.
  9. Pompe turbomoléculaire selon l'une des revendications 6 à 8, caractérisée en ce que
    la portion d'anneau porteur en forme hélicoïdale coupe plusieurs fois le plan de disque défini par la couronne d'aubes.
  10. Pompe turbomoléculaire selon l'une des revendications 1 à 5,
    caractérisée en ce que
    chaque portion d'anneau porteur (62"', 66"' ; 62"", 66"") comprend une moulure (100 ; 100' ; 100") qui s'étend en direction périphérique.
  11. Pompe turbomoléculaire selon la revendication 10,
    caractérisé en ce que
    les moulures (100) de deux disques partiels présentent une extrémité de moulure à l'un des bords d'aboutement respectifs, et ces extrémités de moulure sont disposées en étant décalées radialement l'une par rapport à l'autre.
EP11008602.2A 2010-11-26 2011-10-27 Pompe turbomoléculaire Active EP2458222B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010052660A DE102010052660A1 (de) 2010-11-26 2010-11-26 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP2458222A2 EP2458222A2 (fr) 2012-05-30
EP2458222A3 EP2458222A3 (fr) 2016-03-09
EP2458222B1 true EP2458222B1 (fr) 2017-09-27

Family

ID=45531123

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11008602.2A Active EP2458222B1 (fr) 2010-11-26 2011-10-27 Pompe turbomoléculaire

Country Status (2)

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EP (1) EP2458222B1 (fr)
DE (1) DE102010052660A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6236806B2 (ja) * 2013-03-07 2017-11-29 株式会社島津製作所 真空ポンプ
JP6241223B2 (ja) * 2013-03-13 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013110251A1 (de) 2013-09-17 2015-03-19 Pfeiffer Vacuum Gmbh Anordnung mit einer Vakuumpumpe sowie Verfahren zur Kompensation eines Magnetfeldes wenigstens eines in einer Vakuumpumpe angeordneten, ein magnetisches Störfeld erzeugenden Bauteiles
DE102013112185B4 (de) 2013-11-06 2022-04-14 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Vakuumpumpe mit wenigstens einer Turbomolekularpumpstufe
DE102013022539B3 (de) 2013-11-06 2022-04-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013114576A1 (de) * 2013-12-19 2015-06-25 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014100207B4 (de) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
EP3916235B1 (fr) * 2020-05-27 2023-04-26 Pfeiffer Vacuum Technology AG Procédé de fabrication d'une pompe à vide

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE102010052660A1 (de) 2012-05-31
EP2458222A2 (fr) 2012-05-30
EP2458222A3 (fr) 2016-03-09

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