EP3051140B1 - Disque de stator pour une pompe à vide - Google Patents

Disque de stator pour une pompe à vide Download PDF

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Publication number
EP3051140B1
EP3051140B1 EP15153125.8A EP15153125A EP3051140B1 EP 3051140 B1 EP3051140 B1 EP 3051140B1 EP 15153125 A EP15153125 A EP 15153125A EP 3051140 B1 EP3051140 B1 EP 3051140B1
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EP
European Patent Office
Prior art keywords
stator
outer ring
blades
accordance
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15153125.8A
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German (de)
English (en)
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EP3051140A1 (fr
Inventor
Marco Antonacci
Sönke Gilbrich
Miriam Schmitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15153125.8A priority Critical patent/EP3051140B1/fr
Priority to CN201610028099.5A priority patent/CN105840525B/zh
Priority to JP2016014138A priority patent/JP6125059B2/ja
Publication of EP3051140A1 publication Critical patent/EP3051140A1/fr
Application granted granted Critical
Publication of EP3051140B1 publication Critical patent/EP3051140B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing

Definitions

  • the present invention relates to a stator disk for a vacuum pump, in particular for a turbomolecular pump. It further relates to a method for producing such a stator disk and a vacuum pump, in particular turbomolecular pump.
  • Vacuum pumps such as turbomolecular pumps are used in various fields of technology to create a vacuum necessary for a particular process.
  • Turbomolecular pumps comprise a stator having a plurality of stator disks following one another in the direction of a rotor axis, and a rotor rotatably mounted relative to the stator about the rotor axis, comprising a rotor shaft and a plurality of rotor disks arranged successively in the axial direction and arranged between the stator disks, arranged on the rotor shaft Stator discs and the rotor discs each have a pump-active structure.
  • stator disks are, in particular, those stator disks which have been punched out of a metal sheet and, in particular, have not been obtained by sawing out of a metal sheet.
  • stator disks Due to the corresponding larger sheet thickness, the previously customary measures for stiffening the stator disks, for example a respective flange, can no longer be realized. If, however, a stator disc is distorted when the stator blades are required to be interlaced, the usual methods for straightening the blades following the cabinets are no longer applicable.
  • the undesirable deformation or unevenness of the stator disc is mainly due to the fact that the stator blades by the Schränkvorgang an internal stress is impressed by torsion, which leads with simultaneous rigid connection of the stator blades via webs to an inner and outer ring to deform these rings.
  • stator disk for a turbomolecular pump with the features of the preamble of claim 1 described, which consists of two half-shells, which are placed in the assembly in the turbomolecular pump in each case from one side to the shaft of the rotor.
  • the stator disc has an outer ring on which it is held in the housing of the turbomolecular pump and an inner ring. Between the rings a plurality of blades is arranged, which are formed by the fact that in the solid material substantially radial slots and slots in the circumferential direction be generated. By creating the slots webs arise at the connection points between the rings on the blades.
  • the radial slots are not continuous, so that a coherent outer ring remains for each of the two half disks forming the stator disk.
  • stator section for a turbomolecular pump which is subdivided into only two halves, is described, in which a respective half of the stator stage has a continuous outer ring or contiguous outer ring section.
  • stator discs are also each divided again into a first and a second disc part.
  • the two partial discs are each provided again with a continuous, contiguous outer support ring portion.
  • the invention has for its object to provide a stator for a vacuum pump, in particular for a turbomolecular pump, and to provide a method for producing such a stator, with which the aforementioned problems are eliminated.
  • the stator disk should remain at least substantially free of internal stresses, even if it is manufactured as a laminated stator disk from a thicker metal sheet.
  • stator with the features of claim 1 and a method having the features of claim 6.
  • Preferred embodiments of the stator according to the invention as well as preferred embodiments of the method according to the invention will become apparent from the dependent claims, the present description and the drawings.
  • the stator disk according to the invention for a vacuum pump in particular for a turbomolecular pump, comprises an inner ring and an outer ring and stator vanes arranged between them, which are each connected via webs to the inner ring and the outer ring.
  • the stator is designed as a laminated stator with staged stator blades and a circumferentially divided into a number of separate circular ring cutouts outer ring.
  • the number of annular cuts corresponds to either the number of stator vanes, i. for each stator blade a circular ring cutout is provided, or a subdivision of the outer ring takes place only on every second stator blade.
  • circular segment is to be understood broadly and generally in the sense of “segment”, i. the segments forming the outer ring do not have to be parts of a circular ring in a geometrically strict sense.
  • a respective stator disk can now also be produced from a thicker sheet metal. This leaves the stator disk even if it is made as a laminated stator from a thicker sheet metal, at least substantially free of internal stresses. Since the outer ring of the stator is divided, either in the number of stator blades corresponding number of separate circular cutouts or segments or only on every other stator blade, the introduced with the cabinets of the stator blades in the blades voltages can then be broken down again. As a result, the stator blades can each turn back to their original shape.
  • the angles between the inner ring and the inner blade edges and the angle between the outer ring and the outer blade edges and thus the torsion of the webs, which connect the blades to the inner and outer ring, remain at least substantially constant at the desired value.
  • the straightening process following the setting process can be limited to the torsion of the blades.
  • the torsion of the bars remains untouched.
  • thicker laminated stator disks can thus be realized. Even with vacuum pumps or turbomolecular pumps with a larger rotor diameter can thus be minimized by the use of thicker and correspondingly stiffer blazed stator discs manufacturing costs.
  • the thickness or sheet thickness of the stator disk is preferably more than 0.5 mm and in particular more than 1.0 mm. Preferably, the thickness is about 1.5mm.
  • the invention also basically comes from thinner sheets manufactured stator discs in question.
  • stator disks according to the invention can also have thicknesses which are more than 1.5 mm.
  • the separate circular ring cutouts of the outer ring are each connected via at least one web to a stator blade.
  • the circumferentially successive circular ring cutouts of the outer ring are preferably separated from each other by radial slots.
  • stator With the usual storage of the stator in a spacer ring of the vacuum pump or turbomolecular pump despite the subdivision of the stator in circular cutouts still a surface connection of the outer rings and thus ensures optimal thermal connection of the stator to the stator.
  • the inventive method for producing a stator for a vacuum pump, in particular for a turbomolecular pump is characterized in that the stator is made of a formed by a sheet body as a laminated stator with an inner ring, an outer ring and arranged between these stator blades, respectively are connected by webs with the inner ring and the outer ring, wherein the outer ring of the stator in the circumferential direction in one of the number of stator blades subdividing the same number of separate annular recesses or only every other stator blade, the stator blades are set and the stator blades are then directed to adjust the desired Schränkwinkel the stator blades and the separated annular portions of the outer ring in their initial position due in which they at least in Essentially again parallel to each other in a common plane.
  • the blade height can also be adjusted to a particular desired value by the setting of the stator blades.
  • stator vanes By eliminating the rigid connection of the stator vanes to the outer ring, the twisted stator vanes can relax after cupping, thus achieving the desired flatness of the stator disk.
  • the individual circular ring sections of the outer ring can turn back to their original shape.
  • the angle between the inner ring and the inner blade edge and the angle between the outer ring and the outer blade edge and thus the torsion of the webs, which connect the stator blades to the inner and outer ring, remain at least substantially constant at the desired value.
  • the subsequent straightening process can be limited to the torsion of the stator blades, whereby the respective desired angles are obtained.
  • the stator disks can thus also be made of relatively thick sheets having a thickness of e.g.
  • stator disks 1 mm or 1.5 mm, so that the manufacturing costs are minimized by the use of blazed stator discs even with vacuum pumps or turbomolecular pumps with larger rotor diameters. Since all elastic deformations can break down immediately after the straightening process, the stator disks are finally free of tension. This eliminates the risk that stresses in the pump can dissipate during operation due to heat and lead to unwanted deformations of the stator disk. In addition, only a straightening tool is needed, which contributes to further minimization of costs.
  • the outer ring of the stator can be divided both before and after the cabinets of the stator blades in the separate circular ring cutouts.
  • the straightening of the stator blades is advantageously carried out while maintaining the twisting of the stator blades caused torsion of the webs.
  • stator blades adjacent to the inner ring edges of the stator blades are each fixed by two particular point-shaped elements of a straightening tool and positioned on the outer ring adjacent edges of the stator blades in particular two punctiform elements of the straightening tool, through which axial pressure the required torsion of the stator blades is brought about.
  • stator blades are preferably slightly overrun when straightening.
  • the stator can be divided in particular by punching, cutting, lasering, milling or sawing in the separate circular ring cutouts.
  • the outer ring of the stator is divided by forming slot-like radial recesses in the circumferentially successive circular cutouts.
  • stator With the usual fixation of a respective stator by spacers resulting from the subdivision of the outer ring virtually no losses in terms of rigidity of the stator against bending.
  • the circumferentially successive circular sections of the stator can be treated or edited after straightening the stator blades, for example by riveting, welding, overmolding with plastic or the like.
  • the segments can also be connected to each other again, but such a reunion is not mandatory.
  • the vacuum pump according to the invention in particular turbomolecular pump, comprises a stator with a plurality of stator disks successive in the direction of a rotor axis and a rotor rotatably mounted about the rotor axis relative to the rotor, comprising a rotor shaft and a plurality of arranged on the rotor shaft, in the axial direction and successive arranged between stator disks rotor disks , wherein the stator disks and the rotor disks each have a pump-active structure and stator disks according to the invention are provided as stator disks.
  • the stator disks may each consist in particular of part-circular parts, wherein they preferably each consist of two semicircular parts.
  • stator discs can take into account the fact that with increasing diameter of the stator of vacuum pumps and turbomolecular pumps in particular at the same pressure, the pressure forces acting on the stator increases sharply, resulting in the result has that for larger pumps thicker material must be used, as was previously the case with smaller pumps. Due to the solution according to the invention unlike previously no relatively expensive stator more need to be used. These can now by laminated stator discs be replaced, whereby the costs are significantly minimized.
  • the laminated stator discs can now have a corresponding thickness, for example, a thickness in the range of 1.5 mm, which can withstand the higher pressure forces in case of unforeseen flooding events.
  • the laminated stator disks are made by first stamping the profile and then setting the individual blades. While in the previous stator disks with a continuous outer ring when cabinet so large residual stresses occurred by elastic deformation in the blades that these were only partially deformed elastically, so that the discs could not be used afterwards, is created by the inventive cutting of the outer ring remedy , By cutting the outer ring between each blade according to the invention, the stresses can be reduced. Although the individual outer ring elements or circular ring cutouts are initially skewed after the setting process, they can subsequently be directed. By the straightening process in question, the desired torsion can be achieved by means of plastic deformation by slightly overbending, which was previously not possible in view of the continuous outer ring.
  • stator disks By cutting the outer ring of the stator disks according to the invention, even thicker sheets can be processed to form stator disks, since they can be oriented by cutting them through. This allows the best possible To find a compromise between deflection and pumping speed, even with larger Statorin trimmessern. This means that even with larger vacuum pumps or larger turbomolecular pumps, the cost advantage of flat stator disks can be used.
  • the vacuum pump 10 shown includes a pump inlet 14 surrounded by an inlet flange 12, and a plurality of pumping stages for delivering the gas present at the pump inlet 14 to an in Fig. 1 not shown pump outlet.
  • the vacuum pump 10 comprises a stator with a static housing 16 and a rotor arranged in the housing 16 with a rotor shaft 20 rotatably mounted about a rotation axis 18.
  • the vacuum pump 10 is designed as a turbomolecular pump and comprises a plurality of pump-effectively connected in series with each other in turbomolecular pumping stages with a plurality of turbomolecular rotor disks 22 connected to the rotor shaft 20 and a plurality of turbomolecular stator disks 24 arranged in the axial direction between the rotor disks 22 and fixed in the housing 16, which are held at a desired axial distance from one another by spacer rings 26.
  • the rotor disks 22 and stator disks 24 provide in a scooping region 28 an axial pumping action directed in the direction of the arrow 30.
  • the vacuum pump 10 also comprises three Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
  • the rotor-side part of the Holweck pump stages comprises a rotor hub 32 connected to the rotor shaft 20 and two cylinder shell-shaped Holweck rotor sleeves 34, 36 fastened to and supported by the rotor hub 32, which are oriented coaxially with the rotor axis 18 and are nested in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 38, 40 are provided, which are also oriented coaxially to the axis of rotation 18 and are nested in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces opposite each other, forming a narrow radial Holweck gap, of a Holweck rotor sleeve 34, 36 and a Holweck stator sleeve 38, 40.
  • one of the pump-active surfaces is smooth, in the present case, the Holweck rotor sleeve 34 and 36, and the opposite pump-active surface of Holweck stator 38, 40 has a structuring with helically around the rotation axis 18 in the axial direction extending grooves on, in which by the rotation of the rotor, the gas is driven and thereby pumped.
  • the rotatable mounting of the rotor shaft 20 is effected by a roller bearing 42 in the region of the pump outlet and a permanent magnet bearing 44 in the region of the pump inlet 14.
  • the permanent magnet bearing 44 comprises a rotor-side bearing half 46 and a stator bearing half 48, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 50, 52, wherein the magnetic rings 50, 52 opposite to form a radial position gap 54.
  • an emergency or fishing camp 56 is provided, which is designed as an unlubricated rolling and idle in normal operation of the vacuum pump without touching and passes only at an excessive radial deflection of the rotor relative to the stator into engagement to a radial stop for to form the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection nut 58 with an outer diameter increasing towards the roller bearing 42 is provided on the rotor shaft 20, which is in sliding contact with a wiper of a plurality of operating medium, such as a lubricant, impregnated absorbent disks 60 containing operating fluid storage stands.
  • a wiper of a plurality of operating medium such as a lubricant, impregnated absorbent disks 60 containing operating fluid storage stands.
  • the resource is transferred by capillary action of the resource storage on the scraper on the rotating injection nut 58 and due to the centrifugal force along the injection nut 58 in the direction of increasing outer diameter of the sprayer 58 to the roller bearing 42 out promoted, where there is, for example, a lubricating Function fulfilled.
  • the vacuum pump includes a drive motor 62 for rotatably driving the rotor whose rotor is formed by the rotor shaft 20.
  • a control unit 64 controls the drive motor 62.
  • the turbomolecular pumping stages provide a pumping action in the direction of the arrow 30 in the scooping region 28.
  • Fig. 2 shows a schematic plan view of a semicircular part of an existing of two such semi-circular parts exemplary embodiment of a stator 24 according to the invention for a vacuum pump.
  • a stator disk 24 can be used for example in a vacuum pump 10 or turbomolecular pump, as in connection with the Fig. 1 has been described.
  • Fig. 3 is the semicircular Stator integrationnteil according to Fig. 2 shown again in a schematic view in the direction of arrow A.
  • the stator disk 24 comprises an inner ring 66 and an outer ring 68 and stator blades 70 arranged between them, which are each connected via inner webs 72 and outer webs 74 to the inner ring 66 and the outer ring 68.
  • the stator disk 24 is made of a basic body formed by a metal sheet as a laminated stator disk with restricted stator blades 70 and an outer ring 68 divided in the circumferential direction into one of the number of stator blades 70 corresponding to a number of separate circular ring cutouts 76.
  • the separate annular recesses 76 of the outer ring 68 are each connected via a single outer web 74 with a respective stator blade 70.
  • the separate annular recesses 76 of the outer ring 68 are each radially aligned with the respective stator blade 70.
  • the circumferentially successive circular cutouts 76 of the outer ring 68 are separated from each other by radial slots 78.
  • the separate annular recesses 76 of the outer ring 68 of the finished stator disc 24 are arranged parallel to each other in a common plane
  • the stator disk 24 is made of a base body formed by a sheet as a laminated stator with an inner ring 66, an outer ring 68 and between these arranged stator blades 70, respectively via inner webs 72 and outer webs 74 are connected to the inner ring 66 and the outer ring 68, respectively.
  • the outer ring 68 of the stator disk 24 is divided in the circumferential direction into a number of separate annular cutouts 76 corresponding to the number of stator blades 70.
  • Stator vanes 70 are constrained and then straightened to set the desired taper angle of stator vanes 70 and return the separated annular recesses 76 of outer race 68 to their initial position where they are at least substantially parallel to each other again in a common plane.
  • the outer ring 68 of the stator disc 24 before or after the cabinets of the stator blades 70 in a number of stator blades 70 corresponding number of separate circular cutouts 76 are divided.
  • the straightening of the stator blades 70 takes place while maintaining the torsion of the webs 72, 74 effected with the cabinets of the stator blades 70.
  • the edges 80 of the stator blades 70 adjacent to the inner ring 66 can each be fixed in particular by two punctiform elements of a straightening tool (not shown) and in particular two point-shaped elements of the straightening tool are positioned on the edges 62 of the stator blades 70 adjacent to the outer ring 68 are, over which by axial pressure, the required torsion of the stator blades 70 is brought about.
  • stator blades 70 can be easily over-tightened in straightening.
  • stator disk 24 can be subdivided into a number of separate circular ring cutouts 76 corresponding to the number of stator blades 70 by punching, cutting, lasering or milling.
  • the subdivision of the outer ring 68 of the stator disc 24 in the circumferentially successive circular cutouts 76 in particular by slotted radial recesses or radial slots 78 take place.
  • the gaps or interruptions between the segments of the outer ring need not be slit-like. Also, no or at least no continuous radial extent of these spaces or interruptions is mandatory. Design and form of the spaces or interruptions are basically arbitrary and in particular to choose depending on the thickness of the sheet used and the dimensions of the stator.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
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Claims (15)

  1. Disque de stator (24) pour une pompe à vide (10), en particulier pour une pompe turbomoléculaire, comportant une bague intérieure (66) et une bague extérieure (68) ainsi que des aubes de stator (70) agencées entre celles-ci et reliées à la bague intérieure (66) et à la bague extérieure (68) par des barrettes respectives (72, 74), dans lequel le disque de stator (24) est réalisé sous forme de disque de stator feuilleté comportant des aubes de stator avoyées (70), et le disque de stator est caractérisé en ce qu'il comprend une bague extérieure (68) qui est subdivisée en direction périphérique en un nombre de portions en anneau circulaire (76), séparées les unes des autres, qui correspond au nombre d'aubes de stator (70), ou bien qui n'est subdivisée qu'au niveau d'une aube de stator (70) sur deux.
  2. Disque de stator selon la revendication 1,
    caractérisé en ce que
    les portions en anneau circulaire (76) de la bague extérieure (68) séparées les unes des autres sont reliées chacune à une aube de stator (70) par au moins une barrette (74).
  3. Disque de stator selon la revendication 1 ou 2,
    caractérisé en ce que
    les portions en anneau circulaire (76) de la bague extérieure (68) séparées les unes des autres sont orientées chacune radialement avec une aube de stator (70).
  4. Disque de stator selon l'une des revendications précédentes,
    caractérisé en ce que
    les portions en anneau circulaire (76) de la bague extérieure (68) qui se suivent en direction périphérique sont séparées les unes des autres par des fentes radiales (78).
  5. Disque de stator selon l'une des revendications précédentes,
    caractérisé en ce que
    les portions en anneau circulaire (76) de la bague extérieure (68) séparées les unes des autres sont agencées parallèlement les unes aux autres dans un plan commun.
  6. Procédé de réalisation d'un disque de stator (24) pour une pompe à vide, en particulier pour une pompe turbomoléculaire, dans lequel le disque de stator (24) est réalisé sous forme de disque de stator feuilleté à partir d'un corps de base formé en tôle comportant une bague intérieure (66), une bague extérieure (68) ainsi que des aubes de stator (70) agencées entre celles-ci, qui sont reliées chacune à la bague intérieure (66) et à la bague extérieure (68) du disque de stator (24) par des barrettes respectives (72, 74), la bague extérieure (68) du disque de stator (24) est subdivisée en direction périphérique en un nombre de portions en anneau circulaire (76), séparées les unes des autres, qui correspond au nombre d'aubes de stator (70), ou bien elle n'est subdivisée qu'au niveau d'une aube de stator (70) sur deux, les aubes de stator (70) sont avoyées et ensuite les aubes de stator (70) sont redressées pour régler l'angle d'avoyage désiré des aubes de stator (70) et pour ramener les portions en anneau circulaire (76) de la bague extérieure (68) séparées les unes des autres jusque dans leur position de départ dans laquelle elles sont de nouveau au moins sensiblement parallèles les unes aux autres dans un plan commun.
  7. Procédé selon la revendication 6,
    caractérisé en ce que
    avant l'avoyage des aubes de stator (70), la bague extérieure (68) du disque de stator (24) est subdivisée en les portions en anneau circulaire (76) séparées les unes des autres.
  8. Procédé selon la revendication 6,
    caractérisé en ce que
    après l'avoyage des aubes de stator (70), la bague extérieure (68) du disque de stator (24) est subdivisée en les portions en anneau circulaire (76) séparées les unes des autres.
  9. Procédé selon l'une des revendications 6 à 8,
    caractérisé en ce que
    le redressage des aubes de stator (70) s'effectue en maintenant la torsion des barrettes (72, 74) provoquée par l'avoyage des aubes de stator (70).
  10. Procédé selon l'une des revendications 6 à 9,
    caractérisé en ce que
    pour le redressage des aubes de stator (70), les arêtes (80) des aubes de stator (70) avoisinant la bague intérieure (66) sont fixées chacune par des éléments d'un outil de redressage, et des éléments respectifs de l'outil de redressage sont positionnés sur les arêtes (82) des aubes de stator (70) avoisinant la bague extérieure (69), par lesquelles la torsion nécessaire des aubes de stator (70) est provoquée par une pression axiale.
  11. Procédé selon la revendication 10,
    caractérisé en ce que
    pour régler l'angle d'avoyage désiré des aubes de stator (70) ainsi que pour ramener les portions en anneau circulaire (76) séparées les unes des autres de la bague extérieure (68) jusque dans leur position de départ, les aubes de stator (70) sont légèrement forcées en rotation lors du redressage.
  12. Procédé selon l'une des revendications 6 à 11,
    caractérisé en ce que
    le disque de stator (24) est subdivisé en les portions en anneau circulaire (76) séparées les unes des autres par poinçonnage, par coupe, par coupe au laser ou par fraisage.
  13. Procédé selon l'une des revendications 6 à 12,
    caractérisé en ce que
    la bague extérieure (68) du disque de stator (24) est subdivisée en les portions en anneau circulaire (76) qui se suivent en direction périphérique par réalisation d'échancrures radiales (78) en forme de fente.
  14. Procédé selon l'une des revendications 6 à 13,
    caractérisé en ce que
    après le redressage des aubes de stator (70), les portions en anneau circulaire (76) du disque de stator (24) qui se suivent en direction périphérique sont stabilisées et/ou sont de nouveau reliées les unes aux autres par rivetage, par soudage, par surmoulage en matière plastique ou similaires.
  15. Pompe à vide (10), en particulier pompe turbomoléculaire, comportant un stator qui comprend plusieurs disques de stator (24) qui se suivent en direction d'un axe de rotor (18) et un rotor monté mobile en rotation autour de l'axe de rotor (18) par rapport au stator, qui comprend un arbre de rotor (20) et plusieurs disques de rotor (22) qui sont agencés sur l'arbre de rotor (20), qui se suivent en direction axiale et qui sont agencés entre les disques de stator (24), les disques de stator (24) et les disques de rotor (22) présentant chacun une structure active en pompage et les disques de stator (24) sont réalisés selon l'une des revendications 1 à 5 et/ou par un procédé selon l'une des revendications 6 à 13.
EP15153125.8A 2015-01-29 2015-01-29 Disque de stator pour une pompe à vide Active EP3051140B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP15153125.8A EP3051140B1 (fr) 2015-01-29 2015-01-29 Disque de stator pour une pompe à vide
CN201610028099.5A CN105840525B (zh) 2015-01-29 2016-01-14 定子盘
JP2016014138A JP6125059B2 (ja) 2015-01-29 2016-01-28 ステーターディスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15153125.8A EP3051140B1 (fr) 2015-01-29 2015-01-29 Disque de stator pour une pompe à vide

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EP3051140A1 EP3051140A1 (fr) 2016-08-03
EP3051140B1 true EP3051140B1 (fr) 2018-01-10

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EP (1) EP3051140B1 (fr)
JP (1) JP6125059B2 (fr)
CN (1) CN105840525B (fr)

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Publication number Priority date Publication date Assignee Title
JPH01237395A (ja) * 1988-03-17 1989-09-21 Daikin Ind Ltd 分子式真空ポンプ
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE102004023961A1 (de) * 2004-05-14 2005-12-01 Leybold Vacuum Gmbh Verfahren zur Herstellung einer Turbomolekularpumpen-Statorstufe
JP4517724B2 (ja) * 2004-05-24 2010-08-04 株式会社島津製作所 ターボ分子ポンプ
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
CN201339608Y (zh) * 2008-12-31 2009-11-04 宁波高新区德斯克瑞科技有限公司 装有变截面转、定子叶片的分子泵
DE102010052660A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP3183571U (ja) * 2013-03-07 2013-05-23 株式会社島津製作所 ターボ分子ポンプ

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Also Published As

Publication number Publication date
CN105840525A (zh) 2016-08-10
EP3051140A1 (fr) 2016-08-03
CN105840525B (zh) 2019-06-21
JP6125059B2 (ja) 2017-05-10
JP2016142268A (ja) 2016-08-08

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