EP1731766B1 - Anneau de stator pour pompe moléculaire - Google Patents

Anneau de stator pour pompe moléculaire Download PDF

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Publication number
EP1731766B1
EP1731766B1 EP06009899A EP06009899A EP1731766B1 EP 1731766 B1 EP1731766 B1 EP 1731766B1 EP 06009899 A EP06009899 A EP 06009899A EP 06009899 A EP06009899 A EP 06009899A EP 1731766 B1 EP1731766 B1 EP 1731766B1
Authority
EP
European Patent Office
Prior art keywords
web
stator
blade
disc
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06009899A
Other languages
German (de)
English (en)
Other versions
EP1731766A2 (fr
EP1731766A3 (fr
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1731766A2 publication Critical patent/EP1731766A2/fr
Publication of EP1731766A3 publication Critical patent/EP1731766A3/fr
Application granted granted Critical
Publication of EP1731766B1 publication Critical patent/EP1731766B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/10—Manufacture by removing material

Definitions

  • the invention relates to a stator disk for use with a turbomolecular pump according to the preamble of the first claim.
  • rotor and stator disks are alternately arranged, with the rotor disks sitting on a high-speed shaft.
  • the stator discs are mounted stationary in a housing. Both types of discs have blades, which in combination with the fast rotation, the pumping action is generated. It is known to make the blades of both types of discs by milling from a solid disc. This is time consuming and expensive, which is why we used stamped discs for the stator disks.
  • Such discs are for example from the German patent application DE-OS 37 22 164 known. Here, first full discs are punched from a sheet.
  • the JP 59 090796 A shows a stator for a turbomolecular pump having radial and tangential slots between the blades with each other and between blades and support rings. It is proposed to cover the outer tangential slots by a specially designed spacer ring.
  • the object of the invention is to avoid these disadvantages of the prior art, in particular to allow nosticgttnstigere production tools and to achieve a higher accuracy of the stator. High degrees of deformation should be avoided.
  • stator which is designed according to the features of the first claim. Furthermore, it is achieved by a manufacturing method having the features of claim four
  • the stator disc according to the invention has an inner ring, an outer ring and blades arranged therebetween. Between the blades and the rings in each case webs are formed in the radial direction, whose depth in the circumferential direction is smaller than the blade depth.
  • a stator disk has less material regions which are to be reshaped and, moreover, have a lower degree of deformation. Therefore, the stresses in the component are significantly reduced and eliminates the Richtaufwand. This results in a higher achievable accuracy of the component dimensions. Because lower forces For forming and fewer steps are needed cheaper tools can be used. The proportion of tool costs to the component costs decreases, the adaptation of the stator to the vacuum technical requirements is thus more economical.
  • stator disk according to the invention in a turbomolecular pump leads to a reduction in the gap within the pump and thus to an improvement in the pumping action.
  • semicircular disks having substantially radial slots are first produced by punching or laser cutting. Subsequently, the material is bent between the radial slots so that it is rotated out of the plane of the disc, so that blades are formed.
  • the method is characterized in that in one of the steps before bending at the ends of the radial slots further slots are generated in the circumferential direction.
  • stator disk according to the characterizing features of subclaims 2 and 3 and adapting the method according to the characterizing features of subclaims 5.
  • the depth of the web in the circumferential direction is limited in the maximum in that the deformation and material tension increases with increasing depth. At a minimum, it is limited by the strength and heat transport. The strength must allow mechanical loads on the web, for example, by a strong pressure gradient across the disc. In addition, the web must have a sufficient cross section, which allows a sufficient heat transfer. It is advantageous to choose the web width in relation to the blade width in the range of one to ten to one to two.
  • Advantages in the manufacturing process can be achieved by turning the blades together out of the window plane in one step. This saves valuable processing time.
  • FIG. 1 shows a turbomolecular pump 10 with a housing 11. This has a flange 12 for connection to a recipient to be evacuated. In the flange is the suction region 13. Further, the turbomolecular pump 10 has a gas outlet 14 from which the compressed gas is discharged.
  • a rotor shaft 15 is rotatably supported by bearings 17 and set by a drive 18 in rapid rotation.
  • the rotor shaft carries a plurality of discs 16, which are each provided with blades. Between the rotor disks fixed stator disks 1 are arranged, which also have blades.
  • the stator discs are held by spacers 19 at an axial distance. Due to the fast rotation and the interaction of the rotor and the stator discs results in the pumping action.
  • the FIG. 2 shows a stator according to the invention, used in the turbomolecular pump 10 1 in a plan view.
  • the stator consists of two half-discs 6 and 7, which are placed in each case from one side around the shaft of the rotor during assembly in the turbomolecular pump.
  • the stator disk has an outer ring 4, on which it is held in the housing of the turbomolecular pump, and an inner ring 3.
  • Between the rings a plurality of blades 2 is arranged.
  • the blades are formed by substantially radial slots 8 and slots in the circumferential direction 9 are generated in the solid material. This can be done by punching or by cutting. By creating the slots 8, 9 webs 5 are formed at the connection points between the rings and the blades.
  • the depth of cut in the circumferential direction is indicated by S, the blade depth by T. In this case, the blade depth T is greater than the depth of cut S.
  • FIG. 3 is a perspective view of a section of the stator 1 is shown, which illustrates the deformation by the exhibition of the blades from the disk plane.
  • the web is the fifth arranged.
  • the depth in the circumferential direction S is smaller than the blade depth T, the amount of material to be deformed is reduced.
  • the web also has a radial extent R on.
  • the deformation area along the circumference is as large as the depth T. Especially with a strong inclination of the blade against the disk plane, there is a very high deformation of the material with the disadvantages described above.
  • the sizes S and R can not be chosen arbitrarily small.
  • the geometrical dimension of the web determines the mechanical load capacity and the maximum possible heat transfer.
  • heat is generated in particular on the rotor due to the compression and friction of the gas to be compressed.
  • Another source of heat is the non-loss drive. This heat is released by the rotor largely by radiation on the stator and must be able to be dissipated via the webs.
  • a ratio S to T of one to ten to one to two proves to be favorable and meaningful. Advantages can be achieved if the web 5 is arranged halfway between the blade edge 20 and 21.
  • firstly semicircular disks are produced with substantially radial slots 8 by punching or laser cutting.
  • the machining takes place in such a way that further slots are produced in the circumferential direction 9 at the ends of the radial slots, so that a web 5 is formed between the blade 2 and at least inner ring 3 or outer ring 4.
  • the material between the radial slots is bent so that it is rotated out of the plane of the disc, so that blades 2 arise.
  • the disc is placed for example between an upper and a lower mold part and pressed both moldings against each other.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (5)

  1. Disque de stator (1) pour pompe turbomoléculaire (10) dans lequel, premièrement, une pluralité d'ailettes (2) dudit disque sont décalées par rapport au plan du disque et, deuxièmement, le disque de stator présente un anneau intérieur (3), un anneau extérieur (4) ainsi que des points de liaison entre les ailettes et les anneaux, les ailettes (2) étant dotées chacune, au niveau des points de liaison, d'une entretoise radiale (5) dont la profondeur S mesurée le long de la circonférence est inférieure à la profondeur T des ailettes et dans lequel, troisièmement, ledit disque est divisé en deux demi-disques (6, 7) semi-circulaires, caractérisé en ce que la profondeur 5 de l'entretoise est inférieure à la moitié et supérieure au dixième de la profondeur T des ailettes.
  2. Disque de stator selon la revendication 1, caractérisé en ce que l'entretoise radiale (5) est agencée à mi-distance entre les bords d'ailettes (20, 21).
  3. Pompe turbomoléculaire (10) équipée d'au moins un disque de stator (1) selon l'une quelconque des revendications précédentes.
  4. Méthode de fabrication d'un disque de stator (1) pour pompe turbomoléculaire (10) dans laquelle on produit d'abord des demi-disques semi-circulaires dotés de fentes (8) sensiblement radiales réalisées par poinçonnage ou découpage au laser, avant de plier le matériau se trouvant entre les fentes radiales de telle sorte que ledit matériau s'écarte du plan du disque en formant des ailettes (2), caractérisée en ce que l'on réalise, au cours de l'une des étapes précédant le pliage, aux extrémités des fentes radiales, d'autres fentes (9) dans le sens circonférentiel, de manière à créer une entretoise entre l'ailette et au moins un disque intérieur ou extérieur, la profondeur S de ladite entretoise étant inférieure à la moitié et supérieure au dixième de la profondeur T de l'ailette.
  5. Méthode selon la revendication 4, caractérisée en ce que toutes les ailettes (2) sont formées en une seule étape, par pliage du matériau et son écartement par rapport au plan du disque.
EP06009899A 2005-06-11 2006-05-13 Anneau de stator pour pompe moléculaire Active EP1731766B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027097A DE102005027097A1 (de) 2005-06-11 2005-06-11 Statorscheibe für Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1731766A2 EP1731766A2 (fr) 2006-12-13
EP1731766A3 EP1731766A3 (fr) 2010-06-23
EP1731766B1 true EP1731766B1 (fr) 2012-03-28

Family

ID=36997487

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06009899A Active EP1731766B1 (fr) 2005-06-11 2006-05-13 Anneau de stator pour pompe moléculaire

Country Status (5)

Country Link
US (1) US20060280595A1 (fr)
EP (1) EP1731766B1 (fr)
JP (1) JP2006348935A (fr)
AT (1) ATE551533T1 (fr)
DE (1) DE102005027097A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB0917317D0 (en) * 2009-10-02 2009-11-18 Bladon Jets Ltd Rotary structures
WO2012081287A1 (fr) * 2010-12-14 2012-06-21 エドワーズ株式会社 Ensemble lame fixe utilisable dans une pompe d'échappement, et pompe d'échappement le comportant
DE102012222230A1 (de) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
JP7049052B2 (ja) * 2016-09-27 2022-04-06 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる固定円板
JP6834612B2 (ja) * 2017-03-07 2021-02-24 株式会社島津製作所 真空ポンプの製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
JPS6319094U (fr) * 1986-07-21 1988-02-08
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
FR2850714B1 (fr) * 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ

Also Published As

Publication number Publication date
DE102005027097A1 (de) 2006-12-14
JP2006348935A (ja) 2006-12-28
ATE551533T1 (de) 2012-04-15
US20060280595A1 (en) 2006-12-14
EP1731766A2 (fr) 2006-12-13
EP1731766A3 (fr) 2010-06-23

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