FR2850714B1 - Pompe turbomoleculaire a entretoises multietagees de stator - Google Patents

Pompe turbomoleculaire a entretoises multietagees de stator

Info

Publication number
FR2850714B1
FR2850714B1 FR0301223A FR0301223A FR2850714B1 FR 2850714 B1 FR2850714 B1 FR 2850714B1 FR 0301223 A FR0301223 A FR 0301223A FR 0301223 A FR0301223 A FR 0301223A FR 2850714 B1 FR2850714 B1 FR 2850714B1
Authority
FR
France
Prior art keywords
stator
multistage
spacers
turbomolecular pump
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0301223A
Other languages
English (en)
Other versions
FR2850714A1 (fr
Inventor
Laurent Maniglier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Priority to FR0301223A priority Critical patent/FR2850714B1/fr
Priority to EP04290163A priority patent/EP1443214B1/fr
Priority to AT04290163T priority patent/ATE462886T1/de
Priority to DE602004026235T priority patent/DE602004026235D1/de
Priority to US10/768,695 priority patent/US7588417B2/en
Publication of FR2850714A1 publication Critical patent/FR2850714A1/fr
Application granted granted Critical
Publication of FR2850714B1 publication Critical patent/FR2850714B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR0301223A 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator Expired - Fee Related FR2850714B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0301223A FR2850714B1 (fr) 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator
EP04290163A EP1443214B1 (fr) 2003-02-03 2004-01-21 Stator d'une pompe turbomoléculaire
AT04290163T ATE462886T1 (de) 2003-02-03 2004-01-21 Stator einer turbomolekularpumpe
DE602004026235T DE602004026235D1 (de) 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe
US10/768,695 US7588417B2 (en) 2003-02-03 2004-02-02 Turbomolecular pump having multistage stator spacers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0301223A FR2850714B1 (fr) 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator

Publications (2)

Publication Number Publication Date
FR2850714A1 FR2850714A1 (fr) 2004-08-06
FR2850714B1 true FR2850714B1 (fr) 2005-04-29

Family

ID=32605991

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0301223A Expired - Fee Related FR2850714B1 (fr) 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator

Country Status (5)

Country Link
US (1) US7588417B2 (fr)
EP (1) EP1443214B1 (fr)
AT (1) ATE462886T1 (fr)
DE (1) DE602004026235D1 (fr)
FR (1) FR2850714B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe
US9890795B2 (en) * 2015-05-06 2018-02-13 Asia Vital Components Co., Ltd. Cooling fan structure
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum Gmbh Stator für eine Turbomolekularvakuumpumpe
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
EP1249613B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
JP2003269364A (ja) * 2002-03-12 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Also Published As

Publication number Publication date
FR2850714A1 (fr) 2004-08-06
US7588417B2 (en) 2009-09-15
EP1443214B1 (fr) 2010-03-31
ATE462886T1 (de) 2010-04-15
US20040156715A1 (en) 2004-08-12
DE602004026235D1 (de) 2010-05-12
EP1443214A1 (fr) 2004-08-04

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Legal Events

Date Code Title Description
CD Change of name or company name
TP Transmission of property

Owner name: ADIXEN VACUUM PRODUCTS, FR

Effective date: 20120709

ST Notification of lapse

Effective date: 20141031