DE602004026235D1 - Stator einer Turbomolekularpumpe - Google Patents

Stator einer Turbomolekularpumpe

Info

Publication number
DE602004026235D1
DE602004026235D1 DE602004026235T DE602004026235T DE602004026235D1 DE 602004026235 D1 DE602004026235 D1 DE 602004026235D1 DE 602004026235 T DE602004026235 T DE 602004026235T DE 602004026235 T DE602004026235 T DE 602004026235T DE 602004026235 D1 DE602004026235 D1 DE 602004026235D1
Authority
DE
Germany
Prior art keywords
stator
blade
turbomolecular pump
internal face
sector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004026235T
Other languages
English (en)
Inventor
Laurent Maniglier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of DE602004026235D1 publication Critical patent/DE602004026235D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE602004026235T 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe Expired - Lifetime DE602004026235D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0301223A FR2850714B1 (fr) 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator

Publications (1)

Publication Number Publication Date
DE602004026235D1 true DE602004026235D1 (de) 2010-05-12

Family

ID=32605991

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004026235T Expired - Lifetime DE602004026235D1 (de) 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US7588417B2 (de)
EP (1) EP1443214B1 (de)
AT (1) ATE462886T1 (de)
DE (1) DE602004026235D1 (de)
FR (1) FR2850714B1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe
US9890795B2 (en) * 2015-05-06 2018-02-13 Asia Vital Components Co., Ltd. Cooling fan structure
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
EP1249613B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
JP2003269364A (ja) * 2002-03-12 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Also Published As

Publication number Publication date
ATE462886T1 (de) 2010-04-15
EP1443214B1 (de) 2010-03-31
FR2850714A1 (fr) 2004-08-06
US7588417B2 (en) 2009-09-15
FR2850714B1 (fr) 2005-04-29
EP1443214A1 (de) 2004-08-04
US20040156715A1 (en) 2004-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition