EP1443214A1 - Stator einer Turbomolekularpumpe - Google Patents

Stator einer Turbomolekularpumpe Download PDF

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Publication number
EP1443214A1
EP1443214A1 EP04290163A EP04290163A EP1443214A1 EP 1443214 A1 EP1443214 A1 EP 1443214A1 EP 04290163 A EP04290163 A EP 04290163A EP 04290163 A EP04290163 A EP 04290163A EP 1443214 A1 EP1443214 A1 EP 1443214A1
Authority
EP
European Patent Office
Prior art keywords
stator
fins
sectors
sector
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04290163A
Other languages
English (en)
French (fr)
Other versions
EP1443214B1 (de
Inventor
Laurent Maniglier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1443214A1 publication Critical patent/EP1443214A1/de
Application granted granted Critical
Publication of EP1443214B1 publication Critical patent/EP1443214B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to pumps turbomolecular, suitable for pumping gases and creating a vacuum pushed into an empty enclosure.
  • Turbomolecular pumps usually have a stator multistage device with fins engaged between fins of a multi-stage central rotor.
  • a multistage turbomolecular pump rotor includes a axial series of rotor stages each consisting of a crown central from which depart, in a substantially radial direction, rotor fins regularly distributed around the periphery of the central crown.
  • the assembly is rotatably mounted along an axis of rotation, and is driven by motor means.
  • the multistage stator is composed of an axial series of annular stators each forming a stator stage, each stage stator being formed of an annular rim from which depart, in substantially radial direction, inclined fins.
  • stator stage inclined fins come engage between the inclined fins of two rotor stages successive.
  • turbomolecular pumps include means for mounting and dismounting radial elements stator around the rotor.
  • stator After having produced a multi-stage monobloc rotor, we realizes the stator by gradually assembling around the rotor elements or sub-assemblies intended to constitute the stator.
  • a first known pump stator structure turbomolecular is illustrated in figure 1.
  • a rotor monobloc not shown in the figure, we just adapt gradually a plurality of fin stator sectors, on the one hand to form annular stator stages, on the other hand to form the plurality of staggered annular stator stages axially to make the successive stages of the stator.
  • annular spacer 5 is axially engaged, by movement according to arrow 6, the spacer 5 coming to bear on the periphery of the two stator sectors 1 and 3.
  • the spacer 5 has the dimension necessary to separate two successive stator stages according to the spacing of two corresponding successive rotor stages.
  • stator sectors 7 and 8 we position the two in a similar way following stator sectors 7 and 8, then an annular spacer 9, then two stator sectors 10 and 11 and a spacer annular 12, and so on depending on the number of stages of the stator.
  • Figure 2 illustrates a second known pump structure turbomolecular, with different means to solve the problem of the nesting of the stator fins in the fins of the rotor.
  • the rotor 13 has been illustrated, rotatably mounted around its axis of rotation I-I as illustrated by arrow 14, and comprising a series of rotor stages each having inclined fins.
  • rotor stages successive identified by the reference numerals 13a, 13b, 13c, 13d, 13e, 13f, 13g, 13h and 13i.
  • the stator 15 is formed of the assembly of two half-stators 15a and 15b, each half-stator 15a and 15b consisting of a half-shell 16a or 16b in the form of half cylinder from which radially inward stator fins such as fins 17a and 17b, arranged in a series of stator stages overlapping with the fins of the rotor stages 13a-13i.
  • two monoblock half-stators 15a and 15b allows for insertable pumps, intended to be housed directly into a customer's pre-defined housing or system.
  • each half-stator 15a or 15b monobloc is machined in a metal block to constitute the fins 17a or 17b. Because of the configuration and the convergent radial orientation of the fins, protruding from the concave inner face of the peripheral half-shell 16a or 16b, it is not possible to machine fins 17a or 17b whose radial length exceeds a maximum length determined by the possibility of passage of the milling tools of the fins.
  • this known pump structure turbomolecular limits the maximum flow rate of the pump turbomolecular, the flow limit being determined by the radial length of the fins.
  • the problem proposed by the present invention is to design a new turbomolecular pump structure which can be carried out at lower cost, avoiding the assembly of too much large number of parts or the production of complex parts, and which allows for insertable turbomolecular pumps whose flow is greater than that obtained by the structure of the figure 2.
  • Another problem is also to avoid having to make component parts whose dimensions are very precise because it increases the production cost of the pump turbomolecular.
  • stator sectors to fins constitute individual elements which can be easily manufactured by machining metal parts, and the ease of machining makes it possible to produce stators with fins have a radial dimension greater than that which can be achieved in a structure of figure 2.
  • turbomolecular pump structure can be realized with less tight tolerances than the structural parts of the FIG. 1, because the peripheral shell sector achieves by itself, with the retaining means, a multi-stage spacer which individually positions the stator sectors with fins, so there is not a stack of multiple pieces put them one after the other.
  • the sectors of stator with fins include a single row of fins, each constituting a single-stage stator sector.
  • fin stator sectors comprising two or more rows of fins, each constituting a sector multi-stage finned partial stator, insofar as the machining of the fins allows this.
  • the stator sectors with fins can thus include at least one annular row of fins integral with a rim in crown sector shape.
  • the rim can connect the outer ends of the fins, and it's the rim that forms then the peripheral edge of the finned stator sector and which attaches to the concave inner face of the peripheral shell sector corresponding to form the multistage stator sector.
  • the rim connects the inner ends of the fins.
  • this structure achieves better performance efficiency empty, and the realization is facilitated by the fact that the machining of fins is made from outside the rim in the sector of crown, on fins in divergent radial orientations. This are then the outer ends of the fins which form the peripheral edge of the stator sector with fins and which are fixed to the concave inner face of the peripheral hull sector corresponding to form the multistage stator sector.
  • the means of restraint of the stator sectors with fins on the concave inner face of the peripheral shell sector can be of different kinds.
  • the concave inner face of the hull sector peripheral comprises a plurality of annular grooves, and the finned stator sectors each have at least one edge peripheral which is radially embedded in force in one annular grooves in the peripheral hull sector.
  • the edge (s) devices of the finned stator sectors are constituted by the outer ends of the fins of said stator sectors which are radially embedded in force in the grooves corresponding annulars of the peripheral hull sector.
  • stator sectors have a rim which connects the outer ends of the fins
  • edge (s) devices of the finned stator sectors are constituted by the rims themselves which fit into the grooves annulars of the peripheral hull sector.
  • the turbomolecular pump according to the invention comprises a multistage rotor 18, comprising a series rotor stages axially offset from each other and identified by the reference numbers 18a, 18b, 18c, 18d, 18th, 18f, 18g, 18h, 18i and 18d.
  • Each stage of the rotor 18 is formed of a inner crown such as crown 19 from which depart inclined fins such as the fin 18a oriented in substantially radial outward direction.
  • the rotor 18 is rotatably mounted around an axis of rotation I-I as indicated by arrow 20.
  • the stator is formed from the assembly of two sub-assemblies 21 and 22 each forming a multistage stator sector, which are reported radially around the rotor 18 as indicated by the respective arrows 23 and 23a.
  • Each sub-assembly 21 or 22 is formed from the assembly a respective peripheral hull sector 24 or 25 and a axial row of stator sectors with fins 26 or 27.
  • a first axial row of stator sectors to fins 26 formed by the stator sectors with fins 26a, 26b, 26c, 26d, 26e, 26f, 26g, 26h, 26i and 26j aligned parallel to the axis of rotation I-I.
  • a second row axial of finned stator sectors formed by the sectors of stator with fins 27a, 27b, 27c, 27d, 27e, 27f, 27g, 27h, 27i and 27j aligned parallel to the axis of rotation I-I.
  • the sectors stator with fins are of the inner rim type, as see better in Figure 5.
  • the sector stator of fins 26a includes an annular row of fins 126a integral with a rim 226a itself in the form of a sector of crowned. Rim 226a connects the inner ends of the fins of the annular row of fins 126a. The edge device 326a of the finned stator sector 26a is then formed by the outer ends of the row fins fin ring 126a.
  • the invention can also be applied to a second mode of realization of stator sector with fins illustrated in the figure 6.
  • Rim 226a connects the outer ends of the fins of the annular row of fins 126a.
  • the edge device 326a of the finned stator sector 26a is then constituted by the rim 226a itself.
  • each peripheral shell sector 24 or 25 comprises a plurality of annular grooves.
  • annular grooves 24a, 24b, 24c, 24d, 24e, 24f, 24g, 24h, 24i and 24d we can thus distinguish the annular grooves 24a, 24b, 24c, 24d, 24e, 24f, 24g, 24h, 24i and 24d.
  • Each annular groove 24a-24j is arranged and shaped to receive the peripheral edge of one of the stator sectors 26a-26j, and to thereby hold said positions individually stator sectors 26a-26j.
  • peripheral shell sector 25 which receives and retains the finned stator sectors 27a-27j.
  • the hull sectors peripheral such as the peripheral shell sector 25 can if necessary, include holes such as hole 29, to favor the degassing of the space located on the periphery of the sectors peripheral hulls 24 and 25.
  • the stator is made by assembling two half-stators multistage 21 and 22 each consisting of a 180 ° sector.
  • each peripheral shell sector 24 or 25 is a half-cylinder
  • each fin stator sector 26a-26j and 27a-27j is a half ring.
  • stator is a radial assembly of a single stage of multi-stage sectors of stator 21 and 22.
  • each peripheral shell sector 24 or 25 covers the entire length of the stator of the turbomolecular pump.
  • the stator can be an assembly of several stages of multistage stator sectors.
  • a first stator stage as illustrated on the FIG. 3, to which a second coaxial stage of stator with similar structure, possibly with structures different fins and different diameters.
  • the stator is then an assembly of several floors of multi-level sectors of stator.
  • a pump can be produced. insertable turbomolecular, i.e. adapted to be inserted in a housing or customer system such as a vacuum enclosure.
  • the pump is then installed as close as possible to the application and optimizes pumping performance.
  • the sectors of shell 24 and 25 allow the pump elements to be enclosed turbomolecular, to form a possibly held whole by means of temporary assembly, which can be removed during the introduction of the pump into the customer's system.
  • the hull sectors 24 and 25 must preferably fit with little play in the housing or the system of the customer, to ensure between hull sectors 24 and 25 and the housing or customer system a good contact that promotes heat exchanges.
  • the turbomolecular pump structure according to the invention authorizes all possible fin geometries in terms inclination, inside diameter, outside diameter, floor height and thickness.
  • This system also simplifies the stacking of spacers and stators, and to get rid of the chain of ratings of these different elements.
  • this structure improves the heat exchange between the rotor and the environment, via hull areas, promoting thermal contact between the stator fins and hull sectors, then between the hull sectors and the peripheral casing or shell of the pump, and reducing the number of transmission discontinuities thermal thanks to the monobloc character of the hull sectors multistage.
  • This structure makes it possible to offer an insertable version for higher flow rate vacuum pumps.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP04290163A 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe Expired - Lifetime EP1443214B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0301223A FR2850714B1 (fr) 2003-02-03 2003-02-03 Pompe turbomoleculaire a entretoises multietagees de stator
FR0301223 2003-02-03

Publications (2)

Publication Number Publication Date
EP1443214A1 true EP1443214A1 (de) 2004-08-04
EP1443214B1 EP1443214B1 (de) 2010-03-31

Family

ID=32605991

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04290163A Expired - Lifetime EP1443214B1 (de) 2003-02-03 2004-01-21 Stator einer Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US7588417B2 (de)
EP (1) EP1443214B1 (de)
AT (1) ATE462886T1 (de)
DE (1) DE602004026235D1 (de)
FR (1) FR2850714B1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe
US9890795B2 (en) * 2015-05-06 2018-02-13 Asia Vital Components Co., Ltd. Cooling fan structure
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
EP0442556A1 (de) * 1990-02-16 1991-08-21 VARIAN S.p.A. Stator für eine Turbomolekularpumpe
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
EP1249613A1 (de) * 2001-03-15 2002-10-16 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP2003269364A (ja) * 2002-03-12 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
EP0442556A1 (de) * 1990-02-16 1991-08-21 VARIAN S.p.A. Stator für eine Turbomolekularpumpe
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
EP1249613A1 (de) * 2001-03-15 2002-10-16 VARIAN S.p.A. Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring

Also Published As

Publication number Publication date
FR2850714A1 (fr) 2004-08-06
US7588417B2 (en) 2009-09-15
FR2850714B1 (fr) 2005-04-29
US20040156715A1 (en) 2004-08-12
EP1443214B1 (de) 2010-03-31
ATE462886T1 (de) 2010-04-15
DE602004026235D1 (de) 2010-05-12

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