EP2251547B1 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP2251547B1 EP2251547B1 EP10004024.5A EP10004024A EP2251547B1 EP 2251547 B1 EP2251547 B1 EP 2251547B1 EP 10004024 A EP10004024 A EP 10004024A EP 2251547 B1 EP2251547 B1 EP 2251547B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- vane
- blade
- impeller
- side channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
Links
- 238000005086 pumping Methods 0.000 description 27
- 238000013461 design Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
Definitions
- the invention relates to a vacuum pump according to the preamble of the first claim.
- Vacuum pumps with side channel pumping stages are known in the art and are gaining increasing economic importance. When used in a turbomolecular pump, a side channel pumping stage allows the turbomolecular pump to be ejected against higher pressures. Vacuum pumps with Holweck and side channel pumping stage achieve ultimate pressures in the molecular flow range in very compact sizes.
- An example of such a vacuum pump is the DE 19930952 A1 which is equipped in the intake with a parallel working Holweckpump note and in the gas stream subsequently with a plurality of side channel pumping stages.
- the impellers used in these bykanalpumpgen are simple: the blades of the disc-shaped impeller are arranged at the edge and are in the radial direction of the disc from. Between the blades a center bar runs around, which has the full blade height along the entire impeller circumference.
- the vacuum characteristics of the side channel pumping stage in particular the suction capacity and pressure ratio between inlet and outlet, depend on the design of the blades, the channel and the gaps between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.
- JP 2 536571 B2 includes a vacuum pump that includes a side channel pumping stage.
- the design of the impeller of the side channel pumping stage is not optimally designed.
- the prior art ( DE 24 05 890 A1 ) includes a side channel ring compressor having an impeller with arranged on the impeller blades. Also, this side channel ring compressor can be further improved in terms of vacuum characteristics.
- JP H02 9992 A A pump with an impeller on which blades are arranged, which in turn are offset from one another. This pump can also be further improved in terms of their vacuum characteristics.
- the geometry of the blade according to claim 1 is inexpensive to produce. Compared to the prior art mentioned above, an angle between at least one partial blade and the direction of movement of the blade of less than 90 ° results in an improvement in the pressure ratio between the inlet and outlet of the side channel pumping stage in the region of the rough vacuum.
- a central web between adjacent blades at least in sections has a lower height than the blade.
- the improvement in the vacuum characteristics, in particular the pressure ratio, is achieved when at least one partial blade has a rearward-trailing back which extends beyond the center of the edge of the impeller.
- the vacuum pump 1 of the embodiment is shown in FIG Fig. 1 shown in longitudinal section.
- the housing of the vacuum pump provided with a gas inlet 2 and a gas outlet 3 has a plurality of housing parts 20, 21, 22 and 23, in which the components described below are accommodated.
- the gas first passes into the molecular pump stage 4, which is designed here according to Holweck design.
- This comprises an inner stator 405 with an inner thread groove 407 and an outer stator 406 with an outer thread groove 408.
- the thread grooves run helically and cooperate with a rotating cylinder 402 located between inner stator and outer stator in such a way that a pumping action occurs in the molecular flow region.
- the cylinder is mounted on a carrier 400, which in turn is connected to the shaft 8.
- the molecular pumping stage is symmetrical and has a second cylinder 402 'which cooperates with associated stator components. This design results in a parallel conveying mechanism.
- the shaft is rotated by a drive 7 in rotation.
- This drive comprises an electric coil 12 on the stator side and a permanent magnet 13 on the shaft side.
- the shaft is mounted in roller bearings 10 and 11.
- the gas From the molecular pump stage, the gas enters downstream through the first transfer channel 24 into a high-vacuum-side side channel stage 5.
- This has a rotor 500, which is provided with at least one rotor blade. This runs in the side channel 501.
- the gas further compressed in this pumping stage is transferred via the second transfer channel 25 to the side channel pumping stage 6, where it is further compressed and finally discharged via the gas outlet from the vacuum pump.
- Fig. 2 the side channel pumping stage 6 is shown in a section along the line II '.
- the housing part 22, which houses the side channel pumping stage, has an annular side channel 601.
- the ring of this side channel is interrupted by a breaker 604. This separates the intake and discharge side of each other and triggers the guided on the impeller gas flow from this.
- in the Side channel runs around the at least one blade 602, which is arranged at the edge 603 of the impeller 600. It extends at this edge in the radial direction.
- the impeller is rotated by the shaft 8 and gas enters the side channel through the transfer channel 25, it is moved with the blade along the channel. This entrainment of the gas in the circumferential direction ends at the scraper 604. At this, the gas is transferred to the subsequent channel. This then leads to a further pumping stage or to the gas outlet 3.
- FIG. 3 A design of the blade of the impeller, which is not part of the invention is in Fig. 3 shown in a view of the edge.
- the blade 602 has a first partial blade 621 and a second partial blade 622.
- Each of these vanes has a blade backside 625 and 626.
- At least one of these two blades forms an angle 615 of less than 90 ° with the direction of travel 607 of the blade. It is advantageous if both partial blades are inclined at such an angle and together form an open V in the direction of movement. This measure increases the pressure ratio, which can be achieved with the blade.
- a further increase is achieved by the chamfer 616, which are provided on the partial blade rear sides 625 and 626 and on which lie in the plane of the impeller outer edge of the sub-blades.
- a saw blade saws the edge of the impeller and is inclined against the axis of rotation of the impeller, ie the axis of rotation is not in the plane of the saw blade.
- the impeller has in addition to the blade 602 still another blade 612, which is advantageously designed similar. Between the blades 602 and 612, a central web 630 is arranged.
- the design of the Mittelsteges is based Fig. 4 clarified. This shows a section along the line II-II '.
- the central web 630 is disposed between the blades 602 and 612. Its height 631 is at least partially smaller than the blade height 632, so that a continuous space between the blades is formed. This leads to an improved pressure ratio.
- the geometry is in turn easily produced by sawing. During sawing, the saw blade plunges over the center of the edge of the impeller and removes the material of the center bar. If the saw blade is inclined as described above, a geometry results in a sawing process, in which the higher part of the center web is arranged in front of the blade 602 in relation to the direction of movement 607.
- a further development of the shovel shows the top view of the edge of the impeller in Fig. 5 ,
- the blade 602 has two partial blades 651 and 652.
- Each of the sub-blades has a partial bucket rear 653 and 654.
- a chamfer 656 is arranged, which lies on the lying in the plane of the impeller outer edge of the blade part.
- the sub-blades form an angle 615 'of less than 90 ° with the direction of movement 607.
- the sub-blades are offset by an offset 661 in the direction of movement against each other.
- the partial vane backs extend beyond the center 660 of the impeller.
- FIG. 6 is a view of the edge of the rotor of the high-vacuum side side channel pumping stage 5 shown.
- the blade 502 arranged at the edge of the rotor has partial blades 551 and 552 with a partial rear side 513.
- a chamfer is provided at the back part of the bucket.
- FIGS. 3 to 6 shown structures are repeated several times and occur along the circumference of the impeller in an integer multiple.
- the combination of a molecular pumping stage 4 with a high-vacuum side-channel pumping stage, which after a Fig. 6 designed rotor, and with a side channel pumping stage, the impeller with the features FIG. 5 has, results in a cost-effectively manufacturable, compact vacuum pump with improved vacuum characteristics.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Claims (3)
- Pompe à vide (1) comprenant une entrée de gaz (2), une sortie de gaz (3) et un étage de pompe à canal latéral (6) qui comprend une roue mobile (600) entraînée en rotation avec un bord qui présente une aube (602 ; 602') avec une première aube partielle (621 ; 651) et une deuxième aube partielle (622 ; 652), qui est disposée au bord de la roue mobile, un angle (615 ; 615') entre au moins une aube partielle (621 ; 622 ; 651 ; 652) et la direction de déplacement (607) de l'aube étant inférieur à 90°, au moins une aube partielle (621 ; 622 ; 651 ; 652) présentant un côté arrière (653 ; 654) en retard par rapport au sens de rotation, qui s'étend par-dessus le centre (660) du bord de la roue mobile, des première et deuxième aubes partielles (651, 652) étant disposées de manière décalée l'une par rapport à l'autre dans la direction périphérique, caractérisée en ce que la roue mobile présente une deuxième aube (612) et une nervure centrale (630) est disposée entre les aubes (602 ; 602' ; 612) dans la direction de la périphérie de la roue mobile (600), dont la hauteur (631) est au moins en partie inférieure à la hauteur (632) des aubes.
- Pompe à vide selon la revendication 1, caractérisée en ce qu'au moins une aube (602 ; 602' ; 612) présente au niveau de son côté arrière (625, 626 ; 653, 654) un biseau (616 ; 656).
- Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce qu'elle comprend entre l'étage de pompe à canal latéral (6) et l'entrée de gaz (2) un étage de pompe supplémentaire (5) qui contient un rotor (500) avec une aube de rotor (502) qui présente un biseau (516) au niveau d'un côté en retrait par rapport au sens de rotation.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009021620.0A DE102009021620B4 (de) | 2009-05-16 | 2009-05-16 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2251547A2 EP2251547A2 (fr) | 2010-11-17 |
EP2251547A3 EP2251547A3 (fr) | 2014-07-09 |
EP2251547B1 true EP2251547B1 (fr) | 2016-04-06 |
Family
ID=42154827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10004024.5A Not-in-force EP2251547B1 (fr) | 2009-05-16 | 2010-04-16 | Pompe à vide |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2251547B1 (fr) |
JP (1) | JP5680334B2 (fr) |
DE (1) | DE102009021620B4 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011112689B4 (de) * | 2011-09-05 | 2024-03-21 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102011118661A1 (de) * | 2011-11-16 | 2013-05-16 | Pfeiffer Vacuum Gmbh | Reibungsvakuumpumpe |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
DE102012003680A1 (de) | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102014105582A1 (de) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102015113821B4 (de) | 2014-08-27 | 2020-06-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3594498B1 (fr) | 2019-11-06 | 2022-01-05 | Pfeiffer Vacuum Gmbh | Système avec un dispositif de recyclage des gaz |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2405890A1 (de) * | 1974-02-07 | 1975-08-14 | Siemens Ag | Seitenkanal-ringverdichter |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61210294A (ja) * | 1985-03-13 | 1986-09-18 | Nishimura Denki Kk | 送風機 |
JP2536571B2 (ja) * | 1987-12-25 | 1996-09-18 | ダイキン工業株式会社 | 渦流形タ―ボ機械 |
JPH0689758B2 (ja) * | 1988-06-28 | 1994-11-14 | ダイキン工業株式会社 | 渦流形ターボ機械 |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
US5527149A (en) * | 1994-06-03 | 1996-06-18 | Coltec Industries Inc. | Extended range regenerative pump with modified impeller and/or housing |
JPH10196586A (ja) * | 1997-01-06 | 1998-07-31 | Hitachi Ltd | ターボ真空ポンプ |
DE19930952A1 (de) | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE19955955A1 (de) * | 1999-11-19 | 2001-06-13 | Siemens Ag | Seitenkanalmaschine |
JP3800128B2 (ja) | 2001-07-31 | 2006-07-26 | 株式会社デンソー | インペラ及びタービン式燃料ポンプ |
GB0229356D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
JP4524349B2 (ja) | 2003-02-25 | 2010-08-18 | 日立オートモティブシステムズ株式会社 | タービン型燃料ポンプ |
DE102005025132A1 (de) | 2005-06-01 | 2006-12-07 | Robert Bosch Gmbh | Förderaggregat |
-
2009
- 2009-05-16 DE DE102009021620.0A patent/DE102009021620B4/de not_active Expired - Fee Related
-
2010
- 2010-04-16 EP EP10004024.5A patent/EP2251547B1/fr not_active Not-in-force
- 2010-05-12 JP JP2010109856A patent/JP5680334B2/ja active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2405890A1 (de) * | 1974-02-07 | 1975-08-14 | Siemens Ag | Seitenkanal-ringverdichter |
Also Published As
Publication number | Publication date |
---|---|
JP2010265894A (ja) | 2010-11-25 |
DE102009021620A1 (de) | 2010-11-18 |
JP5680334B2 (ja) | 2015-03-04 |
EP2251547A3 (fr) | 2014-07-09 |
EP2251547A2 (fr) | 2010-11-17 |
DE102009021620B4 (de) | 2021-07-29 |
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