EP1580435B2 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
EP1580435B2
EP1580435B2 EP05003720.9A EP05003720A EP1580435B2 EP 1580435 B2 EP1580435 B2 EP 1580435B2 EP 05003720 A EP05003720 A EP 05003720A EP 1580435 B2 EP1580435 B2 EP 1580435B2
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EP
European Patent Office
Prior art keywords
blades
vacuum side
angle
attack
turbomolecular pump
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EP05003720.9A
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German (de)
French (fr)
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EP1580435B1 (en
EP1580435A2 (en
EP1580435A3 (en
Inventor
Armin Conrad
Peter Fahrenbach
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular pump with a plurality of rotor and stator disks arranged alternately axially one behind the other and provided with blades, the blades having a steeper angle of attack in the direction of the high vacuum side than the blades in the direction of the vacuum side.
  • the invention also relates to a method for producing a rotor or stator disk, provided with blades, of such a turbo-molecular pump.
  • turbo molecular pumps are known, for example by DE 2 035 063 B3 or the DE 27 17 366 B2 .
  • the blades shown there have the shape of a parallelogram in cross section.
  • the angle of attack is 25 ° to 40 ° depending on the axial position of the blades.
  • a turbomolecular pump is known in which the blade differs greatly in cross section from a parallelogram and has approximately the shape of an airfoil.
  • the mean angle of attack is about 45 °.
  • a turbo molecular pump which discloses all the features of the preamble of claim 1 and in which the blades of a first group of blades arranged on the suction side, called suction group A, have an angle of attack of 30 ° to 40 ° and the blades of a second group, called compression group B. , consisting of the remaining blade stages, have an angle of attack of 17 ° to 30 °.
  • the second group, compression group can be divided into two sub-groups, the blades of which have an angle of attack of 25 ° to 30 ° and 17 ° to 25 °, respectively.
  • the Alcatel ATH 1600M model has made flat blades with a pitch angle greater than 19 ° and the Leybold MAG 2000 model blades with a pitch angle greater than 9 °.
  • U.S. 3,644,051 To the state of the art ( U.S. 3,644,051 ) includes a vacuum pump with rotor and stator disks, each with a large number of blades. The angle of incidence of the blades is reduced from the inlet to the outlet of the pump, so that it is between 5 ° and 20 ° towards the outlet end.
  • the active pumping components of a turbomolecular pump consist of the rotor and stator disks with blades, which are alternately arranged axially one behind the other. The interaction of these disks produces the pumping effect in a known manner.
  • the characteristic properties of a turbo molecular pump are compression and pumping speed. Both properties are mainly determined by the following parameters: the circumferential speed of the blade ring of the rotor disks, the number of blades, the angle of attack of the blades and the gradation of the different disks of the entire disk package. Within the gradation, the angle of attack of the blade is reduced from the suction opening to the gas outlet opening.
  • the invention is based on the technical problem of designing a turbomolecular pump in such a way that heat generation and power consumption are reduced and good fore-vacuum compatibility and compression are created.
  • This technical problem is solved by a significant reduction in the angle of the blades in the compression or exhaust stage with a pump diameter of 250 millimeters and 12 or 16 blades, namely the angle of the blades on the vacuum side should be less than 8 ° with a disk height of 3 .0 to 4.5 millimeters.
  • the flatter design of the angle of attack has a number of positive effects: First of all, with the same overlap ratio, the number of blades per disc is reduced despite the small disc height. In addition, the formation of eddies in the high pressure range is avoided, which leads to a reduction in the absorption capacity and the generation of heat. The low disc and blade height leads to a lower impact rate of the molecules and thus to fewer losses and ultimately to a short overall length of the pump. The reduction in the number of teeth leads to a further reduction in compression performance. In addition, a construction of the pump stages that is particularly robust against dust and corrosive gases is possible. This in turn has advantages with regard to the compression forces.
  • the design according to the invention leads to a compact design and to a significant improvement in performance in the exhaust stages and thus in the entire turbo-molecular pump.
  • a further increase in the aforementioned advantages can be achieved if the angle of incidence of the blades on the vacuum side is less than 6 °.
  • the angle of incidence of the blades on the vacuum side can be 5.9 ° to 4.6 °.
  • the reduction in the disk height means that the axial thickness of the blades is less than 5.0 millimeters, in particular also equal to or less than 4.5 millimeters and, in the extreme case, is even reduced to 3.0 to 4.5 millimeters.
  • turbomolecular pumps have had 24 blades with one pump diameter of 250 millimeters is provided.
  • the blades were part of disks that were at least 5 millimeters thick.
  • the new design it is possible to get by with 16 or even 12 blades with the same pump diameter, the disc height being only 3.0 to 4.5 millimeters.
  • the blades can have at least approximately the shape of a parallelogram in cross section.
  • the turbomolecular pump (T) comprises a housing (1) on which, on the one hand, a suction flange (2) is integrally formed and, on the other hand, an ejection flange (3) is attached.
  • a rotor shaft (4) is rotatably mounted on roller bearings (5, 6) in the housing (1).
  • the rotor shaft (4) is set in high-speed rotation by an electric motor drive (7).
  • the rotor disks (8) fastened to the rotor shaft (4) interact with the stator disks (9) inserted in the housing (1).
  • the angle of attack ⁇ is in Fig. 2 for the sake of clearer representation drawn greatly enlarged.
  • the slice thickness (D) is between 3.0 millimeters and 4.5 millimeters.
  • the blade (10) has a cross-section which is at least approximately trapezoidal. So-called high-speed cutting was used for their production, in which the material of the thin disks (8, 9) for producing the blades (10) is removed without pressure.

Abstract

A housing (1) is divided into a high vacuum side (2) and a vacuum side (3). Groups of rotor discs (8) and stator discs (9) are located adjacent to the pump outlet and to an outlet flange (3), each disc having blades. The blades located in the vicinity of the high vacuum side has a steeper angle than the blades at the vacuum side, the blade angle at the vacuum side amounting less than 8 degrees. The blades have an axial thickness of less than 5 millimeters, and have a cross-section that resembles the shape of a parallelogram. An independent claim is also included for a method of manufacturing rotor and stator discs.

Description

Die Erfindung bezieht sich auf eine Turbomolekularpumpe mit einer Mehrzahl von abwechselnd axial hintereinander angeordneten und mit Schaufeln versehenen Rotor- und Statorscheiben, wobei die Schaufeln in Richtung zur Hochvakuumseite einen steileren Anstellwinkel aufweisen als die Schaufeln in Richtung Vakuumseite.The invention relates to a turbomolecular pump with a plurality of rotor and stator disks arranged alternately axially one behind the other and provided with blades, the blades having a steeper angle of attack in the direction of the high vacuum side than the blades in the direction of the vacuum side.

Außerdem bezieht sich die Erfindung auf ein Verfahren zur Herstellung einer mit Schaufeln versehenen Rotor- oder Statorscheibe einer solchen Turbomolekularpumpe.The invention also relates to a method for producing a rotor or stator disk, provided with blades, of such a turbo-molecular pump.

Derartige Turbomolekularpumpen sind bekannt, zum Beispiel durch die DE 2 035 063 B3 oder die DE 27 17 366 B2 . Die dort dargestellten Schaufeln weisen im Querschnitt die Form eines Parallelogramms auf. Der Anstellwinkel beträgt je nach axialer Lage der Schaufeln 25° bis 40°.Such turbo molecular pumps are known, for example by DE 2 035 063 B3 or the DE 27 17 366 B2 . The blades shown there have the shape of a parallelogram in cross section. The angle of attack is 25 ° to 40 ° depending on the axial position of the blades.

Durch die DE 101 03 230 A1 ist eine Turbomolekularpumpe bekannt, bei der die Schaufel im Querschnitt von einem Parallelogramm stark abweicht und in etwa eine Tragflächenform aufweist. Der mittlere Anstellwinkel beträgt etwa 45°.Through the DE 101 03 230 A1 a turbomolecular pump is known in which the blade differs greatly in cross section from a parallelogram and has approximately the shape of an airfoil. The mean angle of attack is about 45 °.

Durch die DE 72 37 362 U1 ist eine Turbomolekularpumpe bekannt, die alle Merkmale des Oberbegriffs des Anspruchs 1 offenbart und bei der die Schaufeln einer ersten, ansaugseitig angeordneten Gruppe von Schaufeln, genannt Sauggruppe A, einen Anstellwinkel von 30° bis 40° und die Schaufeln einer zweiten Gruppe, genannt Kompressionsgruppe B, bestehend aus den restlichen Schaufelstufen einen Anstellwinkel von 17° bis 30° aufweisen. Die zweite Gruppe, Kompressionsgruppe, kann in zwei Untergruppen aufgeteilt sein, deren Schaufeln einen Anstellwinkel von 25° bis 30° beziehungsweise von 17° bis 25° aufweisen.Through the DE 72 37 362 U1 a turbo molecular pump is known which discloses all the features of the preamble of claim 1 and in which the blades of a first group of blades arranged on the suction side, called suction group A, have an angle of attack of 30 ° to 40 ° and the blades of a second group, called compression group B. , consisting of the remaining blade stages, have an angle of attack of 17 ° to 30 °. The second group, compression group, can be divided into two sub-groups, the blades of which have an angle of attack of 25 ° to 30 ° and 17 ° to 25 °, respectively.

Aus der Praxis sind durch das Modell Alcatel ATH 1600M flache Schaufeln mit einem Anstellwinkel größer als 19° und durch das Modell Leybold MAG 2000 Schaufeln mit einem Anstellwinkel größer als 9° bekannt geworden.In practice, the Alcatel ATH 1600M model has made flat blades with a pitch angle greater than 19 ° and the Leybold MAG 2000 model blades with a pitch angle greater than 9 °.

Zum Stand der Technik ( US 3,644,051 ) gehört eine Vakuumpumpe mit Rotor- und Statorscheiben, die jeweils eine Vielzahl von Schaufeln aufweisen. Der Anstellwinkel der Schaufeln wird vom Einlass zum Auslass der Pumpe verkleinert, so dass er zum Auslassende hin zwischen 5° und 20°.To the state of the art ( U.S. 3,644,051 ) includes a vacuum pump with rotor and stator disks, each with a large number of blades. The angle of incidence of the blades is reduced from the inlet to the outlet of the pump, so that it is between 5 ° and 20 ° towards the outlet end.

Die pumpaktiven Bauteile einer Turbomolekularpumpe bestehen aus den mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd axial hintereinander angeordnet sind. Durch das Zusammenwirken dieser Scheiben wird in bekannter Weise der Pumpeffekt erzeugt.The active pumping components of a turbomolecular pump consist of the rotor and stator disks with blades, which are alternately arranged axially one behind the other. The interaction of these disks produces the pumping effect in a known manner.

Die charakteristischen Eigenschaften einer Turbomolekularpumpe sind Kompressions- und Saugvermögen. Beide Eigenschaften werden hauptsächlich durch folgende Parameter bestimmt: Die Umfangsgeschwindigkeit des Schaufelkranzes der Rotorscheiben, die Anzahl der Schaufeln, der Anstellwinkel der Schaufeln und die Abstufung der unterschiedlichen Scheiben des gesamten Scheibenpakets. Innerhalb der Abstufung verkleinern sich die Anstellwinkel der Schaufel von der Ansaugöffnung hin zur Gasaustrittsöffnung.The characteristic properties of a turbo molecular pump are compression and pumping speed. Both properties are mainly determined by the following parameters: the circumferential speed of the blade ring of the rotor disks, the number of blades, the angle of attack of the blades and the gradation of the different disks of the entire disk package. Within the gradation, the angle of attack of the blade is reduced from the suction opening to the gas outlet opening.

In den Kompressionsstufen oder Auspuffstufen wird maßgeblich die Wärme erzeugt, die zum unerwünschten Aufheizen des Rotors führt. Außerdem sind diese Stufen für die Vorvakuumverträglichkeit und der Leistungsaufnahme bei hohen Vorvakuumdrücken der Pumpe von großer Bedeutung. So zeigen die bekannten Ausbildungen eine unbefriedigende Vorvakuumverträglichkeit, eine hohe Leistungsaufnahme und eine starke Erwärmung des Rotors.In the compression stages or exhaust stages, the heat that leads to undesired heating of the rotor is mainly generated. In addition, these stages are of great importance for the fore-vacuum compatibility and the power consumption at high fore-vacuum pressures of the pump. The known designs show an unsatisfactory fore-vacuum tolerance, a high power consumption and a strong heating of the rotor.

Aufgrund dieser Gegebenheiten liegt der Erfindung das technische Problem zugrunde, eine Turbomolekularpumpe so auszubilden, dass Wärmeentwicklung und Leistungsaufnahme vermindert sind und eine gute Vorvakuumverträglichkeit sowie Kompression geschaffen sind.Because of these circumstances, the invention is based on the technical problem of designing a turbomolecular pump in such a way that heat generation and power consumption are reduced and good fore-vacuum compatibility and compression are created.

Dieses technische Problem wird durch eine wesentliche Verkleinerung des Anstellwinkels der Schaufeln in der Kompressions- oder Auspuffstufe bei einem Pumpendurchmesser von 250 Millimetern und 12 oder 16 Schaufeln gelöst, und zwar soll der Anstellwinkel der Schaufeln zur Vakuumseite hin weniger als 8° bei einer Scheibenhöhe von 3,0 bis 4,5 Millimeter betragen.This technical problem is solved by a significant reduction in the angle of the blades in the compression or exhaust stage with a pump diameter of 250 millimeters and 12 or 16 blades, namely the angle of the blades on the vacuum side should be less than 8 ° with a disk height of 3 .0 to 4.5 millimeters.

Die flachere Ausbildung des Anstellwinkels hat eine Reihe von positiven Auswirkungen: Zunächst verringert sich bei gleichem Überdeckungsverhältnis trotz kleiner Scheibenhöhe die Anzahl der Schaufeln pro Scheibe. Außerdem werden Wirbelbildungen im hohen Druckbereich vermieden, wodurch es zu einer Verringerung der Aufnahmeleistung und der Wärmeentwicklung kommt. Die geringe Scheiben- und Schaufelhöhe führt zu einer geringeren Stoßrate der Moleküle und damit zu weniger Verlusten und schließlich zu einer geringen Baulänge der Pumpe. Die Verringerung der Anzahl von Zähnen führt zu einer weiteren Reduzierung der Kompressionsleistung. Zudem ist ein insbesondere gegen Staub und korrosive Gase robuster Aufbau der Pumpstufen möglich. Dies hat wiederum Vorteile in Bezug auf die Kompressionskräfte. Je weniger Schaufeln vorhanden sind, desto geringer sind die axial auf die Schaufeln wirkenden Kompressionskräfte und umso weniger Energie wird für den Antrieb der Turbomolekularpumpe benötigt. Insgesamt führt die erfindungsgemäße Ausbildung zu einer kompakten Bauform und zu einer wesentlichen Leistungsverbesserung in den Auspuffstufen und damit der gesamten Turbomolekularpumpe.The flatter design of the angle of attack has a number of positive effects: First of all, with the same overlap ratio, the number of blades per disc is reduced despite the small disc height. In addition, the formation of eddies in the high pressure range is avoided, which leads to a reduction in the absorption capacity and the generation of heat. The low disc and blade height leads to a lower impact rate of the molecules and thus to fewer losses and ultimately to a short overall length of the pump. The reduction in the number of teeth leads to a further reduction in compression performance. In addition, a construction of the pump stages that is particularly robust against dust and corrosive gases is possible. This in turn has advantages with regard to the compression forces. The fewer blades there are, the lower the compression forces acting axially on the blades and the less energy is required to drive the turbo molecular pump. Overall, the design according to the invention leads to a compact design and to a significant improvement in performance in the exhaust stages and thus in the entire turbo-molecular pump.

Eine weitere Steigerung der vorgenannten Vorteile kann erzielt werden, wenn der Anstellwinkel der Schaufeln zur Vakuumseite hin weniger als 6° beträgt.A further increase in the aforementioned advantages can be achieved if the angle of incidence of the blades on the vacuum side is less than 6 °.

Schließlich sind die Vorteile besonders ausgeprägt, wenn im Extremfall der Anstellwinkel der Schaufeln zur Vakuumseite hin sogar weniger als 5° beträgt.Finally, the advantages are particularly pronounced when, in extreme cases, the angle of incidence of the blades on the vacuum side is even less than 5 °.

Beispielsweise kann bei einer erfindungsgemäßen Turbomolekularpumpe der Anstellwinkel der Schaufeln zur Vakuumseite hin 5,9° bis 4,6° betragen.For example, in a turbomolecular pump according to the invention, the angle of incidence of the blades on the vacuum side can be 5.9 ° to 4.6 °.

Die Verringerung der Scheibenhöhe bedeutet, dass die axiale Dicke der Schaufeln kleiner als 5,0 Millimeter ist, insbesondere auch gleich oder kleiner 4,5 Millimeter und im Extremfall sogar bis auf 3,0 bis 4,5 Millimeter vermindert ist.The reduction in the disk height means that the axial thickness of the blades is less than 5.0 millimeters, in particular also equal to or less than 4.5 millimeters and, in the extreme case, is even reduced to 3.0 to 4.5 millimeters.

Bishe rwurden bei Turbomolekularpumpen beispielsweise 24 Schaufeln bei einem Pumpendurchmesser von 250 Millimetern vorgesehen. Die Schaufeln waren Bestandteil von Scheiben, die wenigstens 5 Millimeter dick waren. Mit der neuen Ausbildung ist es möglich, bei gleichem Pumpendurchmesser mit 16 oder sogar 12 Schaufeln auszukommen, wobei die Scheibenhöhe nur 3,0 bis 4,5 Millimeter beträgt.So far, for example, turbomolecular pumps have had 24 blades with one pump diameter of 250 millimeters is provided. The blades were part of disks that were at least 5 millimeters thick. With the new design, it is possible to get by with 16 or even 12 blades with the same pump diameter, the disc height being only 3.0 to 4.5 millimeters.

Bei der erfindungsgemäßen Turbomolekularpumpe können die Schaufeln im Querschnitt mindestens in etwa die Form eines Parallelogramms haben.In the turbomolecular pump according to the invention, the blades can have at least approximately the shape of a parallelogram in cross section.

Zur Herstellung solcher flachen Winkel beziehungsweise dünner Scheiben und entsprechend noch dünnerer Wanddicken der Schaufeln wird insbesondere vorgeschlagen, als Fertigungsverfahren das so genannte High-Speed-Cutting anzuwenden, bei dem das Material ohne Druck abgetragen wird.To produce such flat angles or thin disks and correspondingly even thinner wall thicknesses of the blades, it is proposed in particular to use so-called high-speed cutting as a production method, in which the material is removed without pressure.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der ein Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung nur beispielhaft dargestellt ist. In der Zeichnung zeigen:

  • Fig. 1 eine Turbomolekularpumpe in schematisierter Darstellung im mittigen Längsschnitt;
  • Fig. 2 einen Schnitt durch eine Schaufel der Turbomolekularpumpe nach Fig. 1.
Further features and advantages of the invention emerge from the accompanying drawing, in which an exemplary embodiment of a device according to the invention is shown only by way of example. In the drawing show:
  • Fig. 1 a turbo-molecular pump in a schematic representation in central longitudinal section;
  • Fig. 2 a section through a blade of the turbo molecular pump Fig. 1 .

In Fig. 1 umfasst die Turbomolekularpumpe (T) ein Gehäuse (1), an dem endseitig einerseits ein Ansaugflansch (2) angeformt und andererseits ein Ausstoßflansch (3) angebracht ist. Im Gehäuse (1) ist eine Rotorwelle (4) auf Wälzlagern (5, 6) drehbeweglich gelagert. Die Rotorwelle (4) wird über einen elektromotorischen Antrieb (7) in hochtourige Drehung versetzt. Hierbei wirken die an der Rotorwelle (4) befestigten Rotorscheiben (8) mit den in dem Gehäuse (1) eingelegten Statorscheiben (9) zusammen.In Fig. 1 the turbomolecular pump (T) comprises a housing (1) on which, on the one hand, a suction flange (2) is integrally formed and, on the other hand, an ejection flange (3) is attached. A rotor shaft (4) is rotatably mounted on roller bearings (5, 6) in the housing (1). The rotor shaft (4) is set in high-speed rotation by an electric motor drive (7). The rotor disks (8) fastened to the rotor shaft (4) interact with the stator disks (9) inserted in the housing (1).

Die Gruppe von Rotorscheiben (8) und Statorscheiben (9), die nahe der Ausstoßseite, dem Ausstoßflansch (3), angeordnet sind, weisen Schaufeln (10) auf, deren Anstellwinkel zwischen 4,6° und 5,9° liegen. Der Anstellwinkel α ist in Fig. 2 der deutlicheren Darstellung wegen stark vergrößert gezeichnet. Die Scheibendicke (D) beträgt dabei zwischen 3,0 Millimeter und 4,5 Millimeter.The group of rotor disks (8) and stator disks (9), which are arranged near the discharge side, the discharge flange (3), have blades (10) with an angle of attack between 4.6 ° and 5.9 °. The angle of attack α is in Fig. 2 for the sake of clearer representation drawn greatly enlarged. The slice thickness (D) is between 3.0 millimeters and 4.5 millimeters.

Die Schaufel (10) hat einen Querschnitt, der mindestens in etwa eine Trapezform aufweist. Zu ihrer Herstellung wurde das so genannte High-Speed-Cutting angewendet, bei dem das Material der dünnen Scheiben (8, 9) zur Herstellung der Schaufeln (10) ohne Druck abgetragen wird.The blade (10) has a cross-section which is at least approximately trapezoidal. So-called high-speed cutting was used for their production, in which the material of the thin disks (8, 9) for producing the blades (10) is removed without pressure.

BezugszahlenReference numbers

11
Gehäusecasing
22
AnsaugflanschSuction flange
33
AusstoßflanschDischarge flange
44th
RotorwelleRotor shaft
55
Wälzlagerroller bearing
66
Wälzlagerroller bearing
77th
Antriebdrive
88th
RotorscheibeRotor disk
99
StatorscheibeStator disc
1010
Schaufelshovel
TT
TurbomolekularpumpeTurbo molecular pump
DD.
ScheibendickeSlice thickness
αα
Anstellwinkel der SchaufelBlade angle of attack

Claims (5)

  1. Turbomolecular pump with a plurality of rotor and stator discs (8, 9) alternately arranged axially one behind the other and provided with blades (10), wherein the blades (10) in the direction of the high vacuum side (2) have a steeper angle of attack α than the blades (10) in the direction of the vacuum side (3), wherein the angle of attack α of the blades (10) in the direction of the vacuum side (3) amounts to less than 8°, and wherein the disc height amounts to 3.0 to 4.5 millimetres,
    characterised in that the turbomolecular pump has a pump diameter of 250 millimetres, and in that there are provided 12 or 16 blades.
  2. Turbomolecular pump according to claim 1, characterised in that the angle of attack α of the blades (10) in the direction of the vacuum side (3) amounts to less than 6°.
  3. Turbomolecular pump according to claim 2, characterised in that the angle of attack α of the blades (10) in the direction of the vacuum side (3) amounts to less than 5°.
  4. Turbomolecular pump according to claim 2, characterised in that the angle of attack α of the blades (10) in the direction of the vacuum side (3) amounts to 5.9° to 4.6°.
  5. Turbomolecular pump according to one of claims 1 to 4, characterised in that in cross-section the blades (10) have at least approximately the shape of a parallelogram.
EP05003720.9A 2004-03-16 2005-02-22 Turbomolecular pump Active EP1580435B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004012713 2004-03-16
DE102004012713A DE102004012713A1 (en) 2004-03-16 2004-03-16 Turbo molecular pump

Publications (4)

Publication Number Publication Date
EP1580435A2 EP1580435A2 (en) 2005-09-28
EP1580435A3 EP1580435A3 (en) 2009-12-30
EP1580435B1 EP1580435B1 (en) 2011-08-31
EP1580435B2 true EP1580435B2 (en) 2020-11-18

Family

ID=34853986

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05003720.9A Active EP1580435B2 (en) 2004-03-16 2005-02-22 Turbomolecular pump

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DE102004012713A1 (en) 2005-10-06
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EP1580435A2 (en) 2005-09-28
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ATE522725T1 (en) 2011-09-15
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