EP1580435A2 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
EP1580435A2
EP1580435A2 EP05003720A EP05003720A EP1580435A2 EP 1580435 A2 EP1580435 A2 EP 1580435A2 EP 05003720 A EP05003720 A EP 05003720A EP 05003720 A EP05003720 A EP 05003720A EP 1580435 A2 EP1580435 A2 EP 1580435A2
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EP
European Patent Office
Prior art keywords
blades
turbomolecular pump
vacuum side
angle
attack
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Granted
Application number
EP05003720A
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German (de)
French (fr)
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EP1580435B1 (en
EP1580435B2 (en
EP1580435A3 (en
Inventor
Armin Conrad
Peter Fahrenbach
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the invention relates to a turbomolecular pump having a plurality of alternating axially successively arranged and provided with blades Rotor and stator discs, with the blades towards the High vacuum side have a steeper angle of attack than the blades in Direction vacuum side.
  • the invention relates to a method for producing a Bladed rotor or stator of such a turbomolecular pump.
  • turbomolecular pumps are known, for example by the DE 2 035 063 B3 or DE 27 17 366 B2.
  • the blades shown there have the shape of a parallelogram in cross section. The angle of attack is depending on the axial position of the blades 25 ° to 40 °.
  • DE 101 03 230 A1 discloses a turbomolecular pump in which the blade in cross section deviates strongly from a parallelogram and in has approximately an airfoil shape.
  • the mean angle of attack is about 45 °.
  • a turbomolecular pump is known in which the Blades of a first, suction side arranged group of blades, called suction group A, an angle of attack of 30 ° to 40 ° and the blades a second group, called compression group B, consisting of the remaining blade stages have an angle of 17 ° to 30 °.
  • the second group, compression group can be divided into two subgroups be whose blades have a pitch of 25 ° to 30 ° respectively from 17 ° to 25 °.
  • the pump-active components of a turbomolecular pump consist of the with Blades provided rotor and stator discs, which alternately axially arranged one behind the other. Through the interaction of these discs In a known manner, the pumping effect is generated.
  • the characteristic features of a turbomolecular pump are Compression and absorbency. Both properties are mainly determined by the following parameters: The peripheral speed of the Blade ring of the rotor disks, the number of blades, the angle of attack the blades and the gradation of the different slices of the entire disc package. Within the gradation, the shrink Angle of attack of the blade from the intake opening to the gas outlet opening.
  • the invention is the technical problem underlying, a turbomolecular pump in such a way that heat and power consumption are reduced and a good pre-vacuum compatibility as well as compression are created.
  • This technical problem is due to a substantial reduction of the Angle of attack of the blades in the compression or exhaust stage, and that is the angle of attack of the blades to the vacuum side less than 8 °.
  • the flatter formation of the angle of attack has a number of positive ones Impact: Initially decreases at the same coverage ratio despite small disc height, the number of blades per disc. Furthermore vortex formations are avoided in the high pressure range, which causes it to a reduction in the recording power and heat generation comes.
  • the low disc and blade height leads to a lower burst rate of Molecules and thus to less losses and finally to a low Overall length of the pump.
  • the reduction in the number of teeth leads to a further reduction of the compression power.
  • a further increase of the aforementioned advantages can be achieved if the angle of attack of the blades to the vacuum side is less than 6 °.
  • the benefits are particularly pronounced when in extreme cases the Incident angle of the blades to the vacuum side is even less than 5 °.
  • Incidence angle of the blades to the vacuum side towards 5.9 ° to 4.6 °.
  • the reduction of the disc height means that the axial thickness of the Blades smaller than 5.0 millimeters, in particular equal to or smaller 4.5 millimeters and in extreme cases even reduced to 3.0 to 4.5 millimeters is.
  • the blades in the Have cross-section at least approximately the shape of a parallelogram.
  • the turbomolecular pump (T) comprises a housing (1) on which on the one hand a suction flange (2) formed on the other hand a Exhaust flange (3) is mounted.
  • the housing (1) has a rotor shaft (4) Rolling bearings (5, 6) rotatably mounted.
  • the rotor shaft (4) is connected via a electromotive drive (7) in high-speed rotation. Act here the on the rotor shaft (4) fixed rotor discs (8) with those in the housing (1) inserted stator discs (9) together.
  • the angle of attack is ⁇ drawn in Fig. 2 the clearer representation because of greatly enlarged.
  • the Slice thickness (D) is between 3.0 millimeters and 4.5 millimeters.
  • the blade (10) has a cross-section which is at least approximately a trapezoidal shape having.
  • the blade (10) is removed without pressure.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A housing (1) is divided into a high vacuum side (2) and a vacuum side (3). Groups of rotor discs (8) and stator discs (9) are located adjacent to the pump outlet and to an outlet flange (3), each disc having blades. The blades located in the vicinity of the high vacuum side has a steeper angle than the blades at the vacuum side, the blade angle at the vacuum side amounting less than 8 degrees. The blades have an axial thickness of less than 5 millimeters, and have a cross-section that resembles the shape of a parallelogram. An independent claim is also included for a method of manufacturing rotor and stator discs.

Description

Die Erfindung bezieht sich auf eine Turbomolekularpumpe mit einer Mehrzahl von abwechselnd axial hintereinander angeordneten und mit Schaufeln versehenen Rotor- und Statorscheiben, wobei die Schaufeln in Richtung zur Hochvakuumseite einen steileren Anstellwinkel aufweisen als die Schaufeln in Richtung Vakuumseite.The invention relates to a turbomolecular pump having a plurality of alternating axially successively arranged and provided with blades Rotor and stator discs, with the blades towards the High vacuum side have a steeper angle of attack than the blades in Direction vacuum side.

Außerdem bezieht sich die Erfindung auf ein Verfahren zur Herstellung einer mit Schaufeln versehenen Rotor- oder Statorscheibe einer solchen Turbomolekularpumpe.In addition, the invention relates to a method for producing a Bladed rotor or stator of such a turbomolecular pump.

Derartige Turbomolekularpumpen sind bekannt, zum Beispiel durch die DE 2 035 063 B3 oder die DE 27 17 366 B2. Die dort dargestellten Schaufeln weisen im Querschnitt die Form eines Parallelogramms auf. Der Anstellwinkel beträgt je nach axialer Lage der Schaufeln 25° bis 40°.Such turbomolecular pumps are known, for example by the DE 2 035 063 B3 or DE 27 17 366 B2. The blades shown there have the shape of a parallelogram in cross section. The angle of attack is depending on the axial position of the blades 25 ° to 40 °.

Durch die DE 101 03 230 A1 ist eine Turbomolekularpumpe bekannt, bei der die Schaufel im Querschnitt von einem Parallelogramm stark abweicht und in etwa eine Tragflächenform aufweist. Der mittlere Anstellwinkel beträgt etwa 45°. DE 101 03 230 A1 discloses a turbomolecular pump in which the blade in cross section deviates strongly from a parallelogram and in has approximately an airfoil shape. The mean angle of attack is about 45 °.

Durch die DE 72 37 362 U1 ist eine Turbomolekularpumpe bekannt, bei der die Schaufeln einer ersten, ansaugseitig angeordneten Gruppe von Schaufeln, genannt Sauggruppe A, einen Anstellwinkel von 30° bis 40° und die Schaufeln einer zweiten Gruppe, genannt Kompressionsgruppe B, bestehend aus den restlichen Schaufelstufen einen Anstellwinkel von 17° bis 30° aufweisen. Die zweite Gruppe, Kompressionsgruppe, kann in zwei Untergruppen aufgeteilt sein, deren Schaufeln einen Anstellwinkel von 25° bis 30° beziehungsweise von 17° bis 25° aufweisen.From DE 72 37 362 U1 a turbomolecular pump is known in which the Blades of a first, suction side arranged group of blades, called suction group A, an angle of attack of 30 ° to 40 ° and the blades a second group, called compression group B, consisting of the remaining blade stages have an angle of 17 ° to 30 °. The second group, compression group, can be divided into two subgroups be whose blades have a pitch of 25 ° to 30 ° respectively from 17 ° to 25 °.

Aus der Praxis sind durch das Modell Alcatel ATH 1600M flache Schaufeln mit einem Anstellwinkel größer als 19° und durch das Modell Leybold MAG 2000 Schaufeln mit einem Anstellwinkel größer als 9° bekannt geworden.In practice, by the model Alcatel ATH 1600M flat shovels with an angle of attack greater than 19 ° and by the model Leybold MAG 2000 Shovels with an angle greater than 9 ° become known.

Die pumpaktiven Bauteile einer Turbomolekularpumpe bestehen aus den mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd axial hintereinander angeordnet sind. Durch das Zusammenwirken dieser Scheiben wird in bekannter Weise der Pumpeffekt erzeugt.The pump-active components of a turbomolecular pump consist of the with Blades provided rotor and stator discs, which alternately axially arranged one behind the other. Through the interaction of these discs In a known manner, the pumping effect is generated.

Die charakteristischen Eigenschaften einer Turbomolekularpumpe sind Kompressions- und Saugvermögen. Beide Eigenschaften werden hauptsächlich durch folgende Parameter bestimmt: Die Umfangsgeschwindigkeit des Schaufelkranzes der Rotorscheiben, die Anzahl der Schaufeln, der Anstellwinkel der Schaufeln und die Abstufung der unterschiedlichen Scheiben des gesamten Scheibenpakets. Innerhalb der Abstufung verkleinern sich die Anstellwinkel der Schaufel von der Ansaugöffnung hin zur Gasaustrittsöffnung. The characteristic features of a turbomolecular pump are Compression and absorbency. Both properties are mainly determined by the following parameters: The peripheral speed of the Blade ring of the rotor disks, the number of blades, the angle of attack the blades and the gradation of the different slices of the entire disc package. Within the gradation, the shrink Angle of attack of the blade from the intake opening to the gas outlet opening.

In den Kompressionsstufen oder Auspuffstufen wird maßgeblich die Wärme erzeugt, die zum unerwünschten Aufheizen des Rotors führt. Außerdem sind diese Stufen für die Vorvakuumverträglichkeit und der Leistungsaufnahme bei hohen Vorvakuumdrücken der Pumpe von großer Bedeutung. So zeigen die bekannten Ausbildungen eine unbefriedigende Vorvakuumverträglichkeit, eine hohe Leistungsaufnahme und eine starke Erwärmung des Rotors.In the compression stages or exhaust levels is the heat generated, which leads to unwanted heating of the rotor. Besides, they are These levels for the Vorvakuumverträglichkeit and the power consumption high pre-vacuum pressures of the pump of great importance. So show the known training an unsatisfactory Vorvakuumverträglichkeit, a high power consumption and a strong warming of the rotor.

Aufgrund dieser Gegebenheiten liegt der Erfindung das technische Problem zugrunde, eine Turbomolekularpumpe so auszubilden, dass Wärmeentwicklung und Leistungsaufnahme vermindert sind und eine gute Vorvakuumverträglichkeit sowie Kompression geschaffen sind.Due to these circumstances, the invention is the technical problem underlying, a turbomolecular pump in such a way that heat and power consumption are reduced and a good pre-vacuum compatibility as well as compression are created.

Dieses technische Problem wird durch eine wesentliche Verkleinerung des Anstellwinkels der Schaufeln in der Kompressions- oder Auspuffstufe gelöst, und zwar soll der Anstellwinkel der Schaufeln zur Vakuumseite hin weniger als 8° betragen.This technical problem is due to a substantial reduction of the Angle of attack of the blades in the compression or exhaust stage, and that is the angle of attack of the blades to the vacuum side less than 8 °.

Die flachere Ausbildung des Anstellwinkels hat eine Reihe von positiven Auswirkungen: Zunächst verringert sich bei gleichem Überdeckungsverhältnis trotz kleiner Scheibenhöhe die Anzahl der Schaufeln pro Scheibe. Außerdem werden Wirbelbildungen im hohen Druckbereich vermieden, wodurch es zu einer Verringerung der Aufnahmeleistung und der Wärmeentwicklung kommt. Die geringe Scheiben- und Schaufelhöhe führt zu einer geringeren Stoßrate der Moleküle und damit zu weniger Verlusten und schließlich zu einer geringen Baulänge der Pumpe. Die Verringerung der Anzahl von Zähnen führt zu einer weiteren Reduzierung der Kompressionsleistung. Zudem ist ein insbesondere gegen Staub und korrosive Gase robuster Aufbau der Pumpstufen möglich. Dies hat wiederum Vorteile in Bezug auf die Kompressionskräfte. Je weniger Schaufeln vorhanden sind, desto geringer sind die axial auf die Schaufeln wirkenden Kompressionskräfte und umso weniger Energie wird für den Antrieb der Turbomolekularpumpe benötigt. Insgesamt führt die erfindungsgemäße Ausbildung zu einer kompakten Bauform und zu einer wesentlichen Leistungsverbesserung in den Auspuffstufen und damit der gesamten Turbomolekularpumpe.The flatter formation of the angle of attack has a number of positive ones Impact: Initially decreases at the same coverage ratio despite small disc height, the number of blades per disc. Furthermore vortex formations are avoided in the high pressure range, which causes it to a reduction in the recording power and heat generation comes. The low disc and blade height leads to a lower burst rate of Molecules and thus to less losses and finally to a low Overall length of the pump. The reduction in the number of teeth leads to a further reduction of the compression power. In addition, one is particular Robust construction of the pumping stages possible against dust and corrosive gases. This in turn has advantages in terms of compression forces. The less Shovels are present, the lower are the axially on the blades acting compression forces and the less energy is used for the drive the turbomolecular pump needed. Overall, the inventive leads Training to a compact design and a significant performance improvement in the exhaust stages and thus the entire turbomolecular pump.

Eine weitere Steigerung der vorgenannten Vorteile kann erzielt werden, wenn der Anstellwinkel der Schaufeln zur Vakuumseite hin weniger als 6° beträgt.A further increase of the aforementioned advantages can be achieved if the angle of attack of the blades to the vacuum side is less than 6 °.

Schließlich sind die Vorteile besonders ausgeprägt, wenn im Extremfall der Anstellwinkel der Schaufeln zur Vakuumseite hin sogar weniger als 5° beträgt.Finally, the benefits are particularly pronounced when in extreme cases the Incident angle of the blades to the vacuum side is even less than 5 °.

Beispielsweise kann bei einer erfindungsgemäßen Turbomolekularpumpe der Anstellwinkel der Schaufeln zur Vakuumseite hin 5,9° bis 4,6° betragen.For example, in a turbomolecular pump of the invention Incidence angle of the blades to the vacuum side towards 5.9 ° to 4.6 °.

Die Verringerung der Scheibenhöhe bedeutet, dass die axiale Dicke der Schaufeln kleiner als 5,0 Millimeter ist, insbesondere auch gleich oder kleiner 4,5 Millimeter und im Extremfall sogar bis auf 3,0 bis 4,5 Millimeter vermindert ist.The reduction of the disc height means that the axial thickness of the Blades smaller than 5.0 millimeters, in particular equal to or smaller 4.5 millimeters and in extreme cases even reduced to 3.0 to 4.5 millimeters is.

Bisher wurden bei Turbomolekularpumpen beispielsweise 24 Schaufeln bei einem Pumpendurchmesser von 250 Millimetern vorgesehen. Die Schaufeln waren Bestandteil von Scheiben, die wenigstens 5 Millimeter dick waren. Mit der neuen Ausbildung ist es möglich, bei gleichem Pumpendurchmesser mit 16 oder sogar 12 Schaufeln auszukommen, wobei die Scheibenhöhe nur 3,0 bis 4,5 Millimeter beträgt.So far, for example, 24 blades have been included in turbomolecular pumps a pump diameter of 250 millimeters provided. The shovels were part of discs that were at least 5 millimeters thick. With The new training, it is possible with the same pump diameter with 16 or even 12 blades to get along, with the disk height only 3.0 to 4.5 millimeters.

Bei der erfindungsgemäßen Turbomolekularpumpe können die Schaufeln im Querschnitt mindestens in etwa die Form eines Parallelogramms haben.In the turbomolecular pump according to the invention, the blades in the Have cross-section at least approximately the shape of a parallelogram.

Zur Herstellung solcher flachen Winkel beziehungsweise dünner Scheiben und entsprechend noch dünnerer Wanddicken der Schaufeln wird insbesondere vorgeschlagen, als Fertigungsverfahren das so genannte High-Speed-Cutting anzuwenden, bei dem das Material ohne Druck abgetragen wird.For producing such shallow angle or thin slices and In accordance with even thinner wall thicknesses of the blades is in particular proposed, as a manufacturing process, the so-called high-speed cutting apply, in which the material is removed without pressure.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der ein Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung nur beispielhaft dargestellt ist. In der Zeichnung zeigen:

  • Fig. 1 eine Turbomolekularpumpe in schematisierter Darstellung im mittigen Längsschnitt;
  • Fig. 2 einen Schnitt durch eine Schaufel der Turbomolekularpumpe nach Fig. 1.
    • Further features and advantages of the invention will become apparent from the accompanying drawings, in which an embodiment of a device according to the invention is shown only by way of example. In the drawing show:
  • 1 shows a turbomolecular pump in a schematic representation in the central longitudinal section.
  • 2 shows a section through a blade of the turbomolecular pump according to FIG. 1.

    • In Fig. 1 umfasst die Turbomolekularpumpe (T) ein Gehäuse (1), an dem endseitig einerseits ein Ansaugflansch (2) angeformt und andererseits ein Ausstoßflansch (3) angebracht ist. Im Gehäuse (1) ist eine Rotorwelle (4) auf Wälzlagern (5, 6) drehbeweglich gelagert. Die Rotorwelle (4) wird über einen elektromotorischen Antrieb (7) in hochtourige Drehung versetzt. Hierbei wirken die an der Rotorwelle (4) befestigten Rotorscheiben (8) mit den in dem Gehäuse (1) eingelegten Statorscheiben (9) zusammen.In Fig. 1, the turbomolecular pump (T) comprises a housing (1) on which on the one hand a suction flange (2) formed on the other hand a Exhaust flange (3) is mounted. In the housing (1) has a rotor shaft (4) Rolling bearings (5, 6) rotatably mounted. The rotor shaft (4) is connected via a electromotive drive (7) in high-speed rotation. Act here the on the rotor shaft (4) fixed rotor discs (8) with those in the housing (1) inserted stator discs (9) together.

    Die Gruppe von Rotorscheiben (8) und Statorscheiben (9), die nahe der Ausstoßseite, dem Ausstoßflansch (3), angeordnet sind, weisen Schaufeln (10) auf, deren Anstellwinkel zwischen 4,6° und 5,9° liegen. Der Anstellwinkel α ist in Fig. 2 der deutlicheren Darstellung wegen stark vergrößert gezeichnet. Die Scheibendicke (D) beträgt dabei zwischen 3,0 Millimeter und 4,5 Millimeter.The group of rotor disks (8) and stator disks (9) close to the discharge side, the discharge flange (3) are arranged, have blades (10) on, whose angle of attack between 4.6 ° and 5.9 ° are. The angle of attack is α drawn in Fig. 2 the clearer representation because of greatly enlarged. The Slice thickness (D) is between 3.0 millimeters and 4.5 millimeters.

    Die Schaufel (10) hat einen Querschnitt, der mindestens in etwa eine Trapezform aufweist. Zu ihrer Herstellung wurde das so genannte High-Speed-Cutting angewendet, bei dem das Material der dünnen Scheiben (8, 9) zur Herstellung der Schaufeln (10) ohne Druck abgetragen wird. The blade (10) has a cross-section which is at least approximately a trapezoidal shape having. For their production was the so-called high-speed cutting applied, wherein the material of the thin discs (8, 9) for the production the blades (10) is removed without pressure.

    Bezugszahlenreference numerals

    11
    Gehäusecasing
    22
    Ansaugflanschsuction flange
    33
    AusstoßflanschAusstoßflansch
    44
    Rotorwellerotor shaft
    55
    Wälzlagerroller bearing
    66
    Wälzlagerroller bearing
    77
    Antriebdrive
    88th
    Rotorscheiberotor disc
    99
    Statorscheibestator
    1010
    Schaufelshovel
    TT
    TurbomolekularpumpeTurbo molecular pump
    DD
    Scheibendickeslice thickness
    αα
    Anstellwinkel der SchaufelAngle of attack of the blade

    Claims (9)

    Turbomolekularpumpe mit einer Mehrzahl von abwechselnd axial hintereinander angeordneten, mit Schaufeln (10) versehenen Rotor- und Statorscheiben (8, 9), wobei die Schaufeln (10) zur Hochvakuumseite (2) hin einen steileren Anstellwinkel α aufweisen als die Schaufeln (10) zur Vakuumseite (3) hin, dadurch gekennzeichnet, dass der Anstellwinkel α der Schaufeln (10) zur Vakuumseite (3) hin weniger als 8° beträgt.Turbomolecular pump having a plurality of alternately arranged axially one behind the other, provided with blades (10) rotor and stator discs (8, 9), wherein the blades (10) to the high vacuum side (2) towards a steeper angle α than the blades (10) Vacuum side (3) towards, characterized in that the angle of attack α of the blades (10) to the vacuum side (3) is less than 8 °. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass der Anstellwinkel α der Schaufeln (10) zur Vakuumseite (3) hin weniger als 6° beträgt.Turbomolecular pump according to claim 1, characterized in that the angle of attack α of the blades (10) to the vacuum side (3) is less than 6 °. Turbomolekularpumpe nach Anspruch 2, dadurch gekennzeichnet, dass der Anstellwinkel α der Schaufeln (10) zur Vakuumseite (3) hin weniger als 5° beträgt.Turbomolecular pump according to claim 2, characterized in that the angle of attack α of the blades (10) to the vacuum side (3) is less than 5 °. Turbomolekularpumpe nach Anspruch 2 und 3, dadurch gekennzeichnet, dass der Anstellwinkel α der Schaufeln (10) zur Vakuumseite (3) hin 5,9° bis 4,6° beträgt.Turbomolecular pump according to claim 2 and 3, characterized in that the angle of attack α of the blades (10) to the vacuum side (3) towards 5.9 ° to 4.6 °. Turbomolekularpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die axiale Dicke (D) der Schaufeln (10) kleiner als 5 Millimeter ist.Turbomolecular pump according to one of claims 1 to 4, characterized in that the axial thickness (D) of the blades (10) is less than 5 millimeters. Turbomolekularpumpe nach Anspruch 5, dadurch gekennzeichnet, dass die axiale Dicke (D) der Schaufeln (10) gleich oder kleiner 4,5 Millimeter ist. Turbomolecular pump according to claim 5, characterized in that the axial thickness (D) of the blades (10) is equal to or less than 4.5 millimeters. Turbomolekularpumpe nach Anspruch 6, dadurch gekennzeichnet, dass die axiale Dicke (D) der Schaufeln (10) 3,0 bis 4,5 Millimeter ist.Turbomolecular pump according to claim 6, characterized in that the axial thickness (D) of the blades (10) is 3.0 to 4.5 millimeters. Turbomolekularpumpe nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass die Schaufeln (10) im Querschnitt mindestens in etwa die Form eines Parallelogramms aufweisen.Turbomolecular pump according to one of claims 1 to 7, characterized in that the blades (10) have in cross-section at least approximately the shape of a parallelogram. Verfahren zur Herstellung einer mit Schaufeln (10) versehenen Rotor- oder Statorscheibe (8, 9) einer Turbomolekularpumpe (T) nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass als Fertigungsverfahren das so genannte High-Speed-Cutting angewendet wird, bei dem das Material ohne Druck abgetragen wird.Method for producing a rotor or stator disc (8, 9) of a turbomolecular pump (T) provided with blades (10) according to one of claims 1 to 8, characterized in that the so-called high-speed cutting is used as the production method the material is removed without pressure.
    EP05003720.9A 2004-03-16 2005-02-22 Turbomolecular pump Expired - Lifetime EP1580435B2 (en)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE102004012713A DE102004012713A1 (en) 2004-03-16 2004-03-16 Turbo molecular pump
    DE102004012713 2004-03-16

    Publications (4)

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    EP1580435A2 true EP1580435A2 (en) 2005-09-28
    EP1580435A3 EP1580435A3 (en) 2009-12-30
    EP1580435B1 EP1580435B1 (en) 2011-08-31
    EP1580435B2 EP1580435B2 (en) 2020-11-18

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    EP05003720.9A Expired - Lifetime EP1580435B2 (en) 2004-03-16 2005-02-22 Turbomolecular pump

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    US (1) US8398362B2 (en)
    EP (1) EP1580435B2 (en)
    JP (1) JP2005264932A (en)
    AT (1) ATE522725T1 (en)
    DE (1) DE102004012713A1 (en)

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    US20050207884A1 (en) 2005-09-22
    EP1580435B1 (en) 2011-08-31
    EP1580435B2 (en) 2020-11-18
    DE102004012713A1 (en) 2005-10-06
    US8398362B2 (en) 2013-03-19
    JP2005264932A (en) 2005-09-29
    EP1580435A3 (en) 2009-12-30
    ATE522725T1 (en) 2011-09-15

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