EP1850011B1 - Rotor or stator disc for a molecular pump - Google Patents

Rotor or stator disc for a molecular pump Download PDF

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Publication number
EP1850011B1
EP1850011B1 EP07008041A EP07008041A EP1850011B1 EP 1850011 B1 EP1850011 B1 EP 1850011B1 EP 07008041 A EP07008041 A EP 07008041A EP 07008041 A EP07008041 A EP 07008041A EP 1850011 B1 EP1850011 B1 EP 1850011B1
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EP
European Patent Office
Prior art keywords
disc
rotor
blades
blade
discs
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EP07008041A
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German (de)
French (fr)
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EP1850011A2 (en
EP1850011A3 (en
Inventor
Andreas Zipp
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP1850011A3 publication Critical patent/EP1850011A3/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a rotor or stator disk for a molecular pump.
  • a common design consists of sheet metal, which is punched during manufacture so that a round disc with radial slots is formed.
  • the radial slots are provided only over an outer part. The part between the slots is bent over, ie exposed out of the window plane, so that blades are formed. This solution is for example in the DE-OS 100 52 637 shown.
  • Both solutions have the great disadvantage that the sheets must be quite thin. As a result, the discs can not be exposed to rapid rotations because the material load on the blade ground would be too high.
  • the second solution has the disadvantage that the sheets must be mutually oriented and fixed. A creation of dead spaces between the sheets can not be excluded, so that the solution in the high vacuum range can not be applied.
  • the blades have large areas with surface normal in the direction of the shaft axis, so that the pumping speed of such a pump is poor.
  • the DE-A-10052637 which is considered to be the closest prior art, discloses a disc rotor disc for a turbomolecular pump.
  • the part discs are formed as sheet metal body.
  • the US-B-6318964 relates to a fan made of a molded plastic. To make the fan visually dense, she proposes to assemble the fan from partial wheels.
  • the object of the invention is therefore to produce a disk for rotor and / or stator of a molecular vacuum pump, which avoids the above-mentioned disadvantages of the prior art and in particular allows more freedom in the choice of the blade geometry.
  • a disk which is constructed from at least a first and a second partial disk, wherein trapezoidal cross-section blades are arranged in an arrangement plane on each partial disk and the arrangement planes are axially spaced, makes it possible to adapt the geometry of the disk much better to the needs.
  • the geometry can be designed in a simple way according to the vacuum technical requirements. In the state of Technique, geometry was a limiting framework. With the disc according to the invention it is therefore possible to significantly improve the pumping action.
  • the development according to claim 4 provides smooth, stepless blade surfaces, resulting from the surfaces of the blades of the dividing discs.
  • the steplessity improves the pumping action and prevents perpendicular to the pumping direction surfaces, from which molecules can be reflected against the pumping direction.
  • the pumping effect can be further improved by the angles of attack of the blades of different part discs are different. Backflow can be reduced.
  • a further improvement results in that at least one dividing disk is optically dense. This reduces backflow since molecules can not pass directly through the disk in the pumping direction.
  • An arrangement of a spacer between the part discs improves the pumping action, as forms in the region of the spacer a calming zone in which molecules can interact with each other and thus takes place a Impulsan protest.
  • the first figure shows a disk 1 according to a first embodiment.
  • two part discs 2 and 3 are arranged on a shaft 7, two part discs 2 and 3 are arranged. Each of these dividing discs has blades 4. For the perspective view shown only a portion of the blades per part of disc was shown. The blades are distributed over the entire circumference of the part discs, so that there is a rotationally symmetrical structure.
  • Both partial discs have a support ring. 9 on which the blades are mounted in an assembly plane. the arrangement levels of both partial discs are axially spaced from each other. Blades and support ring may be integrally formed. The area of the blades, which lies radially inward, ie at the transition to the support ring, is called the blade root.
  • the radially outer region is referred to as a blade head.
  • the outermost region of the blade head with its radially outer surface is referred to as the blade tip 5.
  • the blade tips of the partial disks 2 and 3 lie on a common, imaginary line 6.
  • the blades have a trapezoidal cross section.
  • the advantage of such a geometry lies in the simple and inexpensive production, for example by sawing.
  • the preparation of the disc can be simplified by pins 8 are provided which protrude from the support ring of a dividing disc and immerse in matching, not shown holes of the next part of the disc. This ensures that the part discs are rotated at the correct angle to each other.
  • the second figure shows a composite of two part discs 2 and 3 disc.
  • only one blade 4, 4 ' is shown per partial disk.
  • Figure 2a the outline is shown.
  • pins 8 are arranged, which allow an orientation of the part discs against each other.
  • the blades 4. These blades have blade edges 25 and 26 which extend in the radial direction. Due to the radial design of the edges results in a total blade surface, which is almost continuous, ie, the two blades 4 and 4 'form a blade with a continuous surface.
  • the radial configuration of the edges 25 and 26 can be achieved by using the blades. This requires different angles of attack of the blades on the blade head and blade ground.
  • Figure 2b is a section through the blades 4, 4 'shown on the blade bottom along the line AA.
  • the blade 4 is arranged on the support ring of the dividing disk 2, the blade 4 'on the support ring of the indexing disk 3.
  • Dash-dotted lines are the arrangement levels of the blades 10 and 11.
  • the blades are inclined with an angle of attack ⁇ against these arrangement levels.
  • Figure 2c shows the section BB in the area of the blade head.
  • the angle of attack is ⁇ , where ⁇ > ⁇ . If the blades are designed with a trapezoidal cross-section, the blade edges of the blades of the various partial disks are surfaces that are in contact with each other.
  • the Figure 3 shows a development of a third embodiment.
  • the disc is constructed here of the four part discs 2, 3, 20 and 21.
  • the blades are arranged in array planes 10, 11, 12, and 13 with the planes of the four discs being axially spaced apart.
  • the angles of attack on the blade base and the blade head are the same within a dividing disk, but the blades of the various dividing disks have a different angle of attack.
  • Such a shape is made possible only by the structure of the disc of part discs. This disc has an improved pumping action.

Abstract

The disk has index plate (2,3) in each of the blade (4,4') arranged at assembly level (10,11), with blade faces bent to the index plate level. The assembly levels of the index plates are axially spaced. The blades are laid part of the blades to the index plates on a common line (6).

Description

Die Erfindung betrifft eine Rotor- oder Statorscheibe für eine Molekularpumpe.The invention relates to a rotor or stator disk for a molecular pump.

Mehrere erfolgreiche Typen von Molekularpumpen basieren auf Scheiben, bei denen Schaufeln an einem Tragring angebracht sind, welcher auf einer schnelldrehenden Welle sitzt. Beispielhaft hierfür sind die sogenannten Turbomolekularpumpen, in denen sich Rotor- und Statorscheiben abwechseln. Die Geometrie der Schaufeln hat einen großen Einfluss auf die Leistungsdaten und Lebensdauer der Pumpe.Several successful types of molecular pumps are based on disks in which blades are mounted on a support ring which sits on a high speed shaft. Examples of this are the so-called turbomolecular pumps, in which alternate rotor and stator discs. The geometry of the blades has a major impact on the performance and life of the pump.

Verschiedene Arten von Rotor- oder Statorscheiben sind im Stand der Technik bekannt. Eine gängige Bauart besteht aus Blech, welches bei der Herstellung so gestanzt wird, dass eine runde Scheibe mit radialen Schlitzen entsteht. Die radialen Schlitze sind nur über einen äußeren Teil vorgesehen. Der zwischen den Schlitzen befindliche Teil wird umgebogen, d.h. aus der Scheibenebene herausgestellt, so dass Schaufeln entstehen. Diese Lösung ist beispielsweise in der DE-OS 100 52 637 gezeigt.Various types of rotor or stator disks are known in the art. A common design consists of sheet metal, which is punched during manufacture so that a round disc with radial slots is formed. The radial slots are provided only over an outer part. The part between the slots is bent over, ie exposed out of the window plane, so that blades are formed. This solution is for example in the DE-OS 100 52 637 shown.

Eine angedachte, aber nicht gängig gewordene Bauform nach der DE-AS 1 071 275 nutzt eine Vielzahl von dünnen Blechen, die kreisförmig sind und am äußeren Rand Zähne aufweist. Diese Bleche werden gegeneinander versetzt gestapelt, so dass die Einhüllende eine schaufelartige Form erhält.An intended, but not become common design after the DE-AS 1 071 275 uses a variety of thin sheets, which are circular and have teeth on the outer edge. These sheets are stacked staggered so that the envelope receives a blade-like shape.

Beide Lösungen weisen den großen Nachteil auf, dass die Bleche recht dünn sein müssen. Dadurch können die Scheiben keinen schnellen Drehungen ausgesetzt werden, da die Materialbelastung am Schaufelgrund zu hoch würde. Zudem weist die zweite Lösung den Nachteil auf, dass die Bleche gegeneinander orientiert und fixiert werden müssen. Ein Entstehen von Toträumen zwischen den Blechen ist nicht auszuschließen, so dass die Lösung im Hochvakuumbereich nicht angewendet werden kann. Außerdem besitzen die Schaufeln große Flächen mit Flächennormale in Richtung Wellenachse, so dass das Saugvermögen einer solchen Pumpe schlecht ist.Both solutions have the great disadvantage that the sheets must be quite thin. As a result, the discs can not be exposed to rapid rotations because the material load on the blade ground would be too high. In addition, the second solution has the disadvantage that the sheets must be mutually oriented and fixed. A creation of dead spaces between the sheets can not be excluded, so that the solution in the high vacuum range can not be applied. In addition, the blades have large areas with surface normal in the direction of the shaft axis, so that the pumping speed of such a pump is poor.

Eine weitere gängige Lösung ist, die Scheiben aus Vollmaterial durch Einsägen von zur Scheibenebene schräg gestellten Kanälen herzustellen. Die herstellbaren Geometrien sind durch dieses Werkzeug eingeschränkt. Beispielsweise ist es schwierig, am Schaufelgrund einen steileren Anstellwinkel zu erzeugen, weil dann die Säge mit dem Außenteil der Schaufel in Berührung kommt.Another common solution is to make the discs of solid material by sawing inclined to the disc plane channels. The manufacturable geometries are limited by this tool. For example, it is difficult to create a steeper angle of attack on the blade root, because then the saw comes into contact with the outer part of the blade.

Die DE-A-10052637 , die als nächstliegender Stand der Technik angesehen wird, offenbart eine aus Teilscheiben zusammengesetzte Rotorscheibe für eine Turbomolekularpumpe. Zwecks einer einfachen Herstellbarkeit sind die Teilscheiben als Blechkörper ausgebildet.The DE-A-10052637 , which is considered to be the closest prior art, discloses a disc rotor disc for a turbomolecular pump. For ease of manufacture, the part discs are formed as sheet metal body.

Die US-B-6318964 betrifft ein Lüfterrad aus einem gegossenen Kunststoff. Um das Lüfterrad optisch dicht gestalten zu können, schlägt sie vor, das Lüfterrad aus Teilrädern zusammenzusetzen.The US-B-6318964 relates to a fan made of a molded plastic. To make the fan visually dense, she proposes to assemble the fan from partial wheels.

Aufgabe der Erfindung ist es daher, eine Scheibe für Rotor und/oder Stator einer Molekularvakuumpumpe herzustellen, die die oben genannten Nachteile des Standes der Technik vermeidet und insbesondere mehr Freiheiten bei der Wahl der Schaufelgeometrie erlaubt.The object of the invention is therefore to produce a disk for rotor and / or stator of a molecular vacuum pump, which avoids the above-mentioned disadvantages of the prior art and in particular allows more freedom in the choice of the blade geometry.

Diese Aufgabe wird gelöst durch eine Rotor- oder Statorscheibe mit den Merkmalen des ersten Anspruches.This object is achieved by a rotor or stator with the features of the first claim.

Eine Scheibe, die aus mindestens einer ersten und einer zweiten Teilscheibe aufgebaut ist, wobei auf jeder Teilscheibe Schaufeln mit trapezoidem Querschnitt in einer Anordnungsebene angeordnet sind und die Anordnungsebenen axial beabstandet sind, erlaubt es, die Geometrie der Scheibe viel besser den Notwendigkeiten anzupassen. Die Geometrie kann erstmals auf einfache Weise nach den vakuumtechnischen Anforderungen gestaltet werden. Im Stand der Technik war die Geometrie eine begrenzende Rahmenbedingung. Mit der erfindungsgemäßen Scheibe ist es daher möglich, die Pumpwirkung deutlich zu verbessern.A disk, which is constructed from at least a first and a second partial disk, wherein trapezoidal cross-section blades are arranged in an arrangement plane on each partial disk and the arrangement planes are axially spaced, makes it possible to adapt the geometry of the disk much better to the needs. The geometry can be designed in a simple way according to the vacuum technical requirements. In the state of Technique, geometry was a limiting framework. With the disc according to the invention it is therefore possible to significantly improve the pumping action.

Die Ansprüche 2 bis 10 stellen vorteilhafte Weiterbildungen der Erfindung dar.The claims 2 to 10 represent advantageous developments of the invention.

Die Weiterbildung nach Anspruch 2, nach der die Schaufelspitzen wenigstens eines Teils der Schaufeln der ersten und der zweiten Teilscheibe auf einer gemeinsamen Linie liegen, vermeidet Stufen und Lücken im Bereich des Schaufelkopfes. Dies verbessert die Pumpwirkung.The development according to claim 2, according to which the blade tips of at least part of the blades of the first and the second partial disk lie on a common line, avoids steps and gaps in the region of the blade head. This improves the pumping action.

Die Weiterbildung nach Anspruch 3, bei der wenigstens eine Teilscheibe unterschiedliche Anstellwinkel an Schaufelgrund und Schaufelkopf aufweist, erlaubt es, verwendelte Scheiben herzustellen. Dies erhöht die Pumpwirkung.The development according to claim 3, wherein at least one dividing disc has different angles of attack on the blade base and the blade head, makes it possible to produce discs which have been used. This increases the pumping effect.

Die Weiterbildung nach Anspruch 4 sorgt für glatte, stufenlose Schaufelflächen, die sich aus den Flächen der Schaufeln der Teilscheiben ergeben. Die Stufenlosigkeit verbessert die Pumpwirkung und verhindert senkrecht gegen die Pumprichtung stehende Flächen, von denen Moleküle gegen die Pumprichtung reflektiert werden können.The development according to claim 4 provides smooth, stepless blade surfaces, resulting from the surfaces of the blades of the dividing discs. The steplessity improves the pumping action and prevents perpendicular to the pumping direction surfaces, from which molecules can be reflected against the pumping direction.

Die Pumpwirkung lässt sich weiter verbessern, indem die Anstellwinkel der Schaufeln von verschiedenen Teilscheiben unterschiedlich sind. Rückströmungen können so verringert werden.The pumping effect can be further improved by the angles of attack of the blades of different part discs are different. Backflow can be reduced.

Eine weitere Verbesserung ergibt sich, indem wenigstens eine Teilscheibe optisch dicht ist. Dies vermindert Rückströmungen, da Moleküle nicht direkt in Pumprichtung durch die Scheibe treten können.A further improvement results in that at least one dividing disk is optically dense. This reduces backflow since molecules can not pass directly through the disk in the pumping direction.

Wird auf einer Teilscheibe ein ganzzahliges Vielfaches der Schaufelanzahl einer zweiten Teilscheibe angeordnet, werden die Rückströmungen in den Kanälen zwischen den Schaufeln reduziert. Dies erhöht die Kompression.If an integer multiple of the number of blades of a second dividing disk is arranged on a dividing disk, the backflows in the channels between the blades are reduced. This increases the compression.

Die Weiterbildung nach Anspruch 8 erlaubt eine einfache Herstellung der Teilscheiben mit bereits bekannten Herstellungsverfahren.The development according to claim 8 allows a simple production of part discs with already known manufacturing processes.

Die Weiterbildung nach Anspruch 9 erlaubt es, die Scheibe zu verbessern, da die verschiedenen Teilscheiben unterschiedlichen Temperatur- und mechanischen Bedingungen unterliegen. Die Wahl von verschiedenen Materialien für die verschiedenen Teilscheiben erlaubt es, hierauf zu reagieren.The development according to claim 9 allows to improve the disc, since the different part discs are subject to different temperature and mechanical conditions. The choice of different materials for the different slices allows to react to this.

Eine Anordnung einer Distanzscheibe zwischen den Teilscheiben verbessert die Pumpwirkung, da sich im Bereich der Distanzscheibe eine Beruhigungszone ausbildet, in der Moleküle miteinander wechselwirken können und dadurch ein Impulsangleich stattfindet.An arrangement of a spacer between the part discs improves the pumping action, as forms in the region of the spacer a calming zone in which molecules can interact with each other and thus takes place a Impulsangleich.

Mit Hilfe der Abbildungen soll die Erfindung an Ausführungsbeispielen näher erläutert und die Vorteile derselben vertieft werden. Die Abbildungen zeigen:

Fig. 1:
Perspektivische Darstellung einer gestapelten Scheibe gemäß eines ersten Ausführungsbeispiels.
Fig. 2:
a) Draufsicht auf eine erfindungsgemäße Scheibe, b) Sicht auf die Scheibe in der Scheibenebene nach Schnitt A-A, c) Sich auf die Scheibe in der Scheibenebene nach Schnitt B-B.
Fig. 3:
Abwicklung eines dritten Ausführungsbeispiels einer gestapelten Scheibe.
With the help of the figures, the invention of exemplary embodiments is explained in more detail and the advantages of the same are deepened. The pictures show:
Fig. 1:
Perspective view of a stacked disk according to a first embodiment.
Fig. 2:
a) top view of a disc according to the invention, b) view of the disc in the disc plane according to section AA, c) on the disc in the disc plane according to section BB.
3:
Processing of a third embodiment of a stacked disc.

Die erste Abbildung zeigt eine Scheibe 1 nach einem ersten Ausführungsbeispiel. Auf einer Welle 7 sind zwei Teilscheiben 2 und 3 angeordnet. Jede dieser Teilscheiben weist Schaufeln 4 auf. Für die gezeigte perspektivische Darstellung wurde jeweils nur ein Teil der Schaufeln je Teilscheibe gezeigt. Die Schaufeln sind auf den gesamten Umfang der Teilscheiben verteilt, so dass sich ein rotationssymetrisches Gebilde ergibt. Beide Teilscheiben weisen einen Tragring 9 auf, an dem die Schaufeln in einer Anordnungsebene befestigt sind. die Anordnungsebenen beider Teilscheiben sind axial voneinander beabstandet. Schaufeln und Tragring können einstückig ausgebildet sein. Den Bereich der Schaufeln, der radial innen liegt, also am Übergang zum Tragring, nennt man Schaufelgrund. Der radial außen liegende Bereich wird als Schaufelkopf bezeichnet. Den äußersten Bereich des Schaufelkopfes mit seiner radial außen liegenden Fläche bezeichnet man als Schaufelspitze 5. Nach dem Ausführungsbeispiel liegen die Schaufelspitzen der Teilscheiben 2 und 3 auf einer gemeinsamen, gedachten Linie 6. Die Schaufeln weisen einen trapezoiden Querschnitt auf. Der Vorteil einer solchen Geometrie liegt in der einfachen und kostengünstigen Herstellung, beispielsweise durch Sägen. Die Herstellung der Scheibe lässt sich vereinfachen, indem Stifte 8 vorgesehen werden, die aus dem Tragring der einen Teilscheibe hervor ragen und in passende, nicht gezeigte Löcher der nächsten Teilscheibe eintauchen. Hierdurch wird gewährleistet, dass die Teilscheiben im richtigen Winkel gegeneinander verdreht sind.The first figure shows a disk 1 according to a first embodiment. On a shaft 7, two part discs 2 and 3 are arranged. Each of these dividing discs has blades 4. For the perspective view shown only a portion of the blades per part of disc was shown. The blades are distributed over the entire circumference of the part discs, so that there is a rotationally symmetrical structure. Both partial discs have a support ring. 9 on which the blades are mounted in an assembly plane. the arrangement levels of both partial discs are axially spaced from each other. Blades and support ring may be integrally formed. The area of the blades, which lies radially inward, ie at the transition to the support ring, is called the blade root. The radially outer region is referred to as a blade head. The outermost region of the blade head with its radially outer surface is referred to as the blade tip 5. According to the exemplary embodiment, the blade tips of the partial disks 2 and 3 lie on a common, imaginary line 6. The blades have a trapezoidal cross section. The advantage of such a geometry lies in the simple and inexpensive production, for example by sawing. The preparation of the disc can be simplified by pins 8 are provided which protrude from the support ring of a dividing disc and immerse in matching, not shown holes of the next part of the disc. This ensures that the part discs are rotated at the correct angle to each other.

Die zweite Abbildung zeigt eine aus zwei Teilscheiben 2 und 3 zusammengesetzte Scheibe. Zur klareren Darstellung ist je Teilscheibe nur eine Schaufel 4, 4' gezeigt. In Abbildung 2a ist der Draufblick gezeigt. Auf einem Tragring 9 sind Stifte 8 angeordnet, die eine Orientierung der Teilscheiben gegeneinander erlauben. Vom Tragring erstrecken sich radial nach außen die Schaufeln 4. Diese Schaufeln weisen Schaufelkanten 25 und 26 auf, die sich in radialer Richtung erstrecken. Durch die radiale Gestaltung der Kanten ergibt sich eine Gesamtschaufelfläche, die nahezu stufenlos ist, d.h. die beiden Schaufeln 4 und 4' bilden eine Schaufel mit durchgehender Fläche. Die radiale Gestaltung der Kanten 25 und 26 kann durch eine Verwendelung der Schaufeln erzielt werden. Diese bedingt unterschiedliche Anstellwinkel der Schaufeln an Schaufelkopf und Schaufelgrund. In Abbildung 2b ist ein Schnitt durch die Schaufeln 4, 4' am Schaufelgrund entlang der Linie A-A gezeigt. Die Schaufel 4 ist am Tragring der Teilscheibe 2 angeordnet, die Schaufel 4' am Tragring der Teilscheibe 3. Strichpunktiert eingezeichnet sind die Anordnungsebenen der Schaufeln 10 und 11. Die Schaufeln sind mit einem Anstellwinkel α gegen diese Anordnungsebenen geneigt. Abbildung 2c zeigt den Schnitt B-B im Bereich des Schaufelkopfes. Hier ist der Anstellwinkel β, wobei α > β gilt. Werden die Schaufeln mit trapezoidem Querschnitt gestaltet, sind die Schaufelkanten der Schaufeln der verschiedenen Teilscheiben Flächen, die aufeinandersitzen. Durch die Fliehkräfte, die insbeondere bei der schnellen Drehung von Rotorscheiben entstehen, findet eine Entwendelung statt. Das bedeutet, dass der zunächst flachere Winkel am Schaufelkopf versucht, sich zum steileren Winkel am Schaufelgrund aufzuweiten. Durch das Berühren der Flächen der Schaufelkanten wird dies verhindert, so dass insgesamt eine zusätzliche Versteifung stattfindet.The second figure shows a composite of two part discs 2 and 3 disc. For a clearer illustration, only one blade 4, 4 'is shown per partial disk. In Figure 2a the outline is shown. On a support ring 9 pins 8 are arranged, which allow an orientation of the part discs against each other. From the support ring extending radially outward, the blades 4. These blades have blade edges 25 and 26 which extend in the radial direction. Due to the radial design of the edges results in a total blade surface, which is almost continuous, ie, the two blades 4 and 4 'form a blade with a continuous surface. The radial configuration of the edges 25 and 26 can be achieved by using the blades. This requires different angles of attack of the blades on the blade head and blade ground. In Figure 2b is a section through the blades 4, 4 'shown on the blade bottom along the line AA. The blade 4 is arranged on the support ring of the dividing disk 2, the blade 4 'on the support ring of the indexing disk 3. Dash-dotted lines are the arrangement levels of the blades 10 and 11. The blades are inclined with an angle of attack α against these arrangement levels. Figure 2c shows the section BB in the area of the blade head. Here the angle of attack is β, where α> β. If the blades are designed with a trapezoidal cross-section, the blade edges of the blades of the various partial disks are surfaces that are in contact with each other. Due to the centrifugal forces that arise in particular in the rapid rotation of rotor disks, a Entwendelung instead. This means that the initially flatter angle at the blade head is trying to expand at the steeper angle at the blade root. By touching the surfaces of the blade edges this is prevented, so that an overall additional stiffening takes place.

Die Abbildung 3 zeigt eine Abwicklung eines dritten Ausführungsbeispiels. Die Scheibe ist hier aus den vier Teilscheiben 2, 3, 20 und 21 aufgebaut. Bei jeder Teilscheibe sind die Schaufeln in Anordnungsebenen 10, 11, 12 und 13 angeordnet, wobei die Ebenen der vier Scheiben axial voneinander beabstandet sind. Die Anstellwinkel an Schaufelgrund und Schaufelkopf sind innerhalb einer Teilscheibe gleich, allerdings besitzen die Schaufeln der verschiedenen Teilscheiben einen unterschiedlichen Anstellwinkel. Eine solche Form wird erst durch den Aufbau der Scheibe aus Teilscheiben ermöglicht. Diese Scheibe weist eine verbesserte Pumpwirkung auf.The Figure 3 shows a development of a third embodiment. The disc is constructed here of the four part discs 2, 3, 20 and 21. For each slice, the blades are arranged in array planes 10, 11, 12, and 13 with the planes of the four discs being axially spaced apart. The angles of attack on the blade base and the blade head are the same within a dividing disk, but the blades of the various dividing disks have a different angle of attack. Such a shape is made possible only by the structure of the disc of part discs. This disc has an improved pumping action.

Claims (10)

  1. Disc (1) composed of a plurality of part discs, which are arranged axially in succession and provided with retaining ring and blades, for the rotor or stator of a molecular vacuum pump, characterized in that the disc comprises at least a first (2) and a second (3) part disc each disposed in a respective disposition plane (10, 11) blades (4, 4') having a trapezoidal cross section and blade surfaces inclined relative to the part disc plane and the disposition planes of the part discs are spaced axially apart.
  2. Rotor- or stator disc according to claim 1, characterized in that blade tips (5) of at least a part of the blades (4, 4') of the first (2) and the second (3) part disc lie on a common line (6).
  3. Rotor- or stator disc according to claim 1 or 2, characterized in that the blades (4, 4') of at least one part disc (2, 3, 20, 21) have different setting angles (α, β) at the blade root and blade head.
  4. Rotor- or stator disc according to claim 1 or 2, characterized in that the part discs (2, 3, 20, 21) are arranged axially in succession in such a way that the inclined blade surfaces produce a continuous over-all surface.
  5. Rotor- or stator disc according to one of the preceding claims, characterized in that the setting angles of the blades (4, 4') of different part discs (2, 3, 20, 21) are different.
  6. Rotor- or stator disc according to one of the preceding claims, characterized in that at least one part disc (2, 3, 20, 21) is light-impervious in axial direction.
  7. Rotor- or stator disc according to one of the preceding claims, characterized in that a first part disc has an integral multiple of the blade number of a second part disc.
  8. Rotor- or stator disc according to one of the preceding claims, characterized in that the part discs (2, 3, 20, 21) are milled from solid material.
  9. Rotor- or stator disc according to one of the preceding claims, characterized in that the part discs (2, 3, 20, 21) are made of differing materials.
  10. Rotor- or stator disc according to one of claim 1 or claim 3 or one of claims 5 to 9, characterized in that a spacer disc is disposed between two part discs (2, 3, 20, 21).
EP07008041A 2006-04-29 2007-04-20 Rotor or stator disc for a molecular pump Not-in-force EP1850011B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006020081A DE102006020081A1 (en) 2006-04-29 2006-04-29 Rotor or stator disk for a molecular pump

Publications (3)

Publication Number Publication Date
EP1850011A2 EP1850011A2 (en) 2007-10-31
EP1850011A3 EP1850011A3 (en) 2007-11-14
EP1850011B1 true EP1850011B1 (en) 2010-01-06

Family

ID=38268966

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07008041A Not-in-force EP1850011B1 (en) 2006-04-29 2007-04-20 Rotor or stator disc for a molecular pump

Country Status (3)

Country Link
EP (1) EP1850011B1 (en)
AT (1) ATE454556T1 (en)
DE (2) DE102006020081A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (en) 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
EP3032106B1 (en) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vacuum pump
JP6706566B2 (en) * 2016-10-20 2020-06-10 エドワーズ株式会社 Vacuum pump, spiral plate provided in vacuum pump, rotating cylinder, and method for manufacturing spiral plate
GB2583938A (en) * 2019-05-14 2020-11-18 Edwards Ltd Vacuum rotor blade

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583826B1 (en) * 1985-06-21 1989-07-13 Etri Sa FAN PROPELLER
US6318964B1 (en) * 2000-09-08 2001-11-20 Sheng Shyan Yang Complex cooling fan with increased cooling capacity
DE10052637B4 (en) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 02/16/2001 Discs for a turbo molecular pump
DE10103230A1 (en) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolecular vacuum pump with rotor and stator blades
US6572336B2 (en) * 2001-09-28 2003-06-03 Sunonwealth Electric Machine Industry Co., Ltd. Impeller structure
TW514353U (en) * 2002-03-28 2002-12-11 Delta Electronics Inc Composite heat-dissipating device
TWI227109B (en) * 2003-09-22 2005-01-21 Sheng-An Yang Heat dissipation blade

Also Published As

Publication number Publication date
DE102006020081A1 (en) 2007-10-31
ATE454556T1 (en) 2010-01-15
EP1850011A2 (en) 2007-10-31
DE502007002522D1 (en) 2010-02-25
EP1850011A3 (en) 2007-11-14

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