EP1850011A3 - Rotor or stator disc for a molecular pump - Google Patents

Rotor or stator disc for a molecular pump Download PDF

Info

Publication number
EP1850011A3
EP1850011A3 EP07008041A EP07008041A EP1850011A3 EP 1850011 A3 EP1850011 A3 EP 1850011A3 EP 07008041 A EP07008041 A EP 07008041A EP 07008041 A EP07008041 A EP 07008041A EP 1850011 A3 EP1850011 A3 EP 1850011A3
Authority
EP
European Patent Office
Prior art keywords
rotor
molecular pump
stator disc
index
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07008041A
Other languages
German (de)
French (fr)
Other versions
EP1850011A2 (en
EP1850011B1 (en
Inventor
Andreas Zipp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1850011A2 publication Critical patent/EP1850011A2/en
Publication of EP1850011A3 publication Critical patent/EP1850011A3/en
Application granted granted Critical
Publication of EP1850011B1 publication Critical patent/EP1850011B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Iron Core Of Rotating Electric Machines (AREA)

Abstract

The disk has index plate (2,3) in each of the blade (4,4') arranged at assembly level (10,11), with blade faces bent to the index plate level. The assembly levels of the index plates are axially spaced. The blades are laid part of the blades to the index plates on a common line (6).
EP07008041A 2006-04-29 2007-04-20 Rotor or stator disc for a molecular pump Not-in-force EP1850011B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006020081A DE102006020081A1 (en) 2006-04-29 2006-04-29 Rotor or stator disk for a molecular pump

Publications (3)

Publication Number Publication Date
EP1850011A2 EP1850011A2 (en) 2007-10-31
EP1850011A3 true EP1850011A3 (en) 2007-11-14
EP1850011B1 EP1850011B1 (en) 2010-01-06

Family

ID=38268966

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07008041A Not-in-force EP1850011B1 (en) 2006-04-29 2007-04-20 Rotor or stator disc for a molecular pump

Country Status (3)

Country Link
EP (1) EP1850011B1 (en)
AT (1) ATE454556T1 (en)
DE (2) DE102006020081A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
EP3032106B1 (en) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vacuum pump
JP6706566B2 (en) * 2016-10-20 2020-06-10 エドワーズ株式会社 Vacuum pump, spiral plate provided in vacuum pump, rotating cylinder, and method for manufacturing spiral plate
GB2583938A (en) * 2019-05-14 2020-11-18 Edwards Ltd Vacuum rotor blade

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583826A1 (en) * 1985-06-21 1986-12-26 Etri Sa Fan screw
US6318964B1 (en) * 2000-09-08 2001-11-20 Sheng Shyan Yang Complex cooling fan with increased cooling capacity
DE10052637A1 (en) * 2000-10-24 2002-05-02 Pfeiffer Vacuum Gmbh Disks for a turbomolecular pump
EP1348872A2 (en) * 2002-03-28 2003-10-01 Delta Electronics, Inc. Composite heat-dissipating device
DE202004014463U1 (en) * 2003-09-22 2005-02-03 Yang, Sheng-An, Dashu Hsiang Impeller assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10103230A1 (en) * 2001-01-25 2002-08-01 Leybold Vakuum Gmbh Turbomolecular vacuum pump with rotor and stator blades
US6572336B2 (en) * 2001-09-28 2003-06-03 Sunonwealth Electric Machine Industry Co., Ltd. Impeller structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2583826A1 (en) * 1985-06-21 1986-12-26 Etri Sa Fan screw
US6318964B1 (en) * 2000-09-08 2001-11-20 Sheng Shyan Yang Complex cooling fan with increased cooling capacity
DE10052637A1 (en) * 2000-10-24 2002-05-02 Pfeiffer Vacuum Gmbh Disks for a turbomolecular pump
EP1348872A2 (en) * 2002-03-28 2003-10-01 Delta Electronics, Inc. Composite heat-dissipating device
DE202004014463U1 (en) * 2003-09-22 2005-02-03 Yang, Sheng-An, Dashu Hsiang Impeller assembly

Also Published As

Publication number Publication date
EP1850011A2 (en) 2007-10-31
DE502007002522D1 (en) 2010-02-25
ATE454556T1 (en) 2010-01-15
DE102006020081A1 (en) 2007-10-31
EP1850011B1 (en) 2010-01-06

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